CN212533106U - Spray type cooling sputtering cathode magnetic bar device - Google Patents
Spray type cooling sputtering cathode magnetic bar device Download PDFInfo
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- CN212533106U CN212533106U CN202021837701.8U CN202021837701U CN212533106U CN 212533106 U CN212533106 U CN 212533106U CN 202021837701 U CN202021837701 U CN 202021837701U CN 212533106 U CN212533106 U CN 212533106U
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Abstract
The utility model belongs to the technical field of the film preparation technique and specifically relates to a fountain cooling sputtering cathode bar magnet device, including target pipe, magnet and coolant liquid pipeline, wherein magnet is arranged in the inside of target pipe, the coolant liquid pipeline has coolant liquid import, coolant liquid export and coolant liquid and sprays the mouth, the coolant liquid import with the coolant liquid export is linked together, the coolant liquid sprays the mouth and sets up just orientation on the coolant liquid pipeline the target pipe is in order to constitute the fountain cooling. The utility model has the advantages that: 1) the sputtering target can be used in sputtering cathodes working at various angles, and target cracking caused by bubbles in the target tube or the fact that the target tube is not filled with cooling liquid is avoided; 2) the local magnetic field intensity of the magnetic bar can be conveniently adjusted through an external magnet back connecting rod; 3) the magnet of bar magnet is kept apart with the coolant liquid completely, avoids the coolant liquid to the harmful effects of magnet, guarantees the performance of bar magnet.
Description
Technical Field
The utility model belongs to the technical field of the film preparation technique and specifically relates to a fountain cooling sputtering cathode bar magnet device.
Background
With the wider application of the magnetron sputtering cathode in the field of vacuum coating, the working modes of the sputtering cathode are diversified, such as upward sputtering, downward sputtering, inclined sputtering and the like; such as dc sputtering, intermediate frequency sputtering, rf sputtering, etc. The excessive heat generated by the magnetron sputtering cathode during operation can adversely affect the coating process and the sputtering cathode, so that a cooling mechanism needs to be arranged in the magnetron sputtering cathode to ensure the stable operation of the magnetron sputtering cathode.
For the traditional magnetic rod, the immersion cooling scheme is adopted at present. The main mode is that the inner tube or the outer tube of the cooling liquid of the magnetic bar is used for filling the cooling liquid in the whole target tube, and the heat generated by the target tube during the operation of the sputtering cathode is taken away by the flowing of the liquid. However, the arrangement of the sputtering surface of the existing sputtering cathode and the magnetic bar structure often causes that some residual spaces inside the target tube are not filled with the cooling liquid, so that the target tube in a local area can not be effectively cooled; this situation develops further and the target tube is heated unevenly with the heat build-up, resulting in cracking.
Disclosure of Invention
The utility model aims at providing a spray cooling sputtering cathode bar magnet device according to the not enough of above-mentioned prior art, adopting spray cooling scheme, realizing the cooling of sputtering cathode target pipe.
The utility model discloses the purpose is realized accomplishing by following technical scheme:
the utility model provides a fountain cooling sputtering cathode bar magnet device which characterized in that: the device includes target pipe, magnet and coolant liquid pipeline, wherein magnet is arranged in the inside of target pipe, the coolant liquid pipeline has coolant liquid import, coolant liquid export and coolant liquid and sprays the mouth, the coolant liquid import with the coolant liquid export is linked together, the coolant liquid sprays the mouth and sets up on the coolant liquid pipeline and orientation the target pipe is in order to constitute the fountain cooling.
The cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.
The periphery of the magnet is sealed by arranging a magnet shell, so that the magnet is isolated from the cooling liquid in the cooling liquid pipeline.
The cooling liquid pipeline is provided with at least one cooling liquid inlet and at least two cooling liquid outlets arranged in an array mode, the cooling liquid inlet is located in the middle of the cooling liquid pipeline, the cooling liquid outlets are respectively symmetrically arranged on the periphery of the magnet shell, and therefore the cooling liquid pipeline is internally provided with cooling liquid inlet to the cooling liquid outlets which are uniformly and symmetrically divided into cooling liquid flow paths.
The cooling liquid flow paths are independent and are arranged in a zigzag shape along the length arrangement direction of the cooling liquid pipeline.
The cooling liquid pipeline is connected with the magnet shell.
The cooling liquid pipeline and the magnet can adopt a screw connection structure or a hoop clamping structure.
The cooling liquid pipeline can adopt a multi-section connecting structure and also can adopt an integrated structure.
The bottom of the magnet is provided with a height-adjustable magnetic field adjusting rod, and the magnetic field adjusting rod supports the magnet and adjusts the magnetic field of the magnet through height adjustment of the magnet.
The magnetic field adjusting rod can adjust the local magnetic field intensity of the magnet in the magnet shell through externally plugging or removing the gasket, and can also adjust the local magnetic field intensity through a simple screw rod mode.
The magnetic field adjusting rod penetrates through the magnet shell to support the magnet and is independently arranged with the cooling liquid pipeline.
The magnetic field adjusting rods are uniformly arranged at intervals along the length arrangement direction of the magnets.
The cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.
The utility model has the advantages that: 1) the sputtering target can be used in sputtering cathodes working at various angles, and target cracking caused by bubbles in the target tube or the fact that the target tube is not filled with cooling liquid is avoided; 2) the local magnetic field intensity of the magnetic bar can be conveniently adjusted through an external magnet back connecting rod; 3) the magnet of bar magnet is kept apart with the coolant liquid completely, avoids the coolant liquid to the harmful effects of magnet, guarantees the performance of bar magnet.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is a schematic diagram of the transverse cross-section structure of the present invention;
FIG. 3 is a schematic view of the flow path of the cooling liquid in the present invention;
FIG. 4 is an enlarged view of a portion of FIG. 2;
fig. 5 is a schematic view of the longitudinal section structure of the present invention.
Detailed Description
The features of the present invention and other related features are described in further detail below by way of example in conjunction with the accompanying drawings to facilitate understanding by those skilled in the art:
as shown in fig. 1-5, the symbols 1-11 in the figures are respectively represented as: the cooling liquid spraying device comprises a cooling liquid pipeline 1, a magnet shell 2, a cooling liquid inlet flange 3, a cooling liquid spraying port 4, a magnet 5, an external magnetic field adjusting device 6, a cooling liquid inlet channel 7, a cooling liquid return flange 8, a magnetic field adjusting rod 9, an adjusting gasket 10 and a sealing cover 11.
Example (b): in this embodiment, the spray-type cooling sputtering cathode magnetic rod device shown in fig. 1 is applied to a magnetron sputtering cathode sputtering film-forming process.
As shown in fig. 1, the main body of the spray-type cooled sputtering cathode magnetic rod device in the present embodiment includes a target tube, a coolant pipeline 1 and a magnet 5, wherein the coolant pipeline 1 and the magnet 5 are respectively disposed in the target tube.
The magnet shell 2 is arranged on the periphery of the magnet 5, and the magnet shell 2 is wrapped around the periphery of the magnet 5, so that the space where the magnet 5 is located is completely sealed and isolated from the cooling liquid, the magnet 5 is protected, and the reduction of the service performance of the magnet 5 caused by the fact that the magnet is soaked in the cooling liquid is avoided.
The coolant line 1 is fixedly connected to the periphery of the magnet housing 2, and is arranged throughout along the length arrangement direction of the magnet 5. The one end intermediate position of coolant liquid pipeline 1 is provided with coolant liquid inlet flange 3, and this coolant liquid inlet flange 3 sets up the coolant liquid import position at coolant liquid pipeline 1, and coolant liquid accessible coolant liquid inlet flange 3 gets into coolant liquid inlet channel 7 of coolant liquid pipeline 1 to further get into coolant liquid and return liquid flange 8. The cooling liquid return channel formed by the cooling liquid return flange 8 is provided with cooling liquid spraying ports 4 which are arranged in an array mode, cooling liquid can spray the inner wall of the target pipe through the cooling liquid spraying ports 4, and therefore the target pipe is cooled, and a cooling liquid flowing loop can be formed by arranging a cooling liquid outlet. The cooling liquid inlet channel 7 is communicated with the cooling liquid inlet flange 3 and is matched with the two cooling liquid return flanges 8 in the cooling liquid pipeline 1 to form two uniform and symmetrical cooling liquid flow paths.
Specifically, as shown in fig. 3, two coolant flow paths in the coolant pipeline 1 are arranged in a reverse turn manner, that is, along the direction of the arrow in fig. 3, the coolant enters the inside of the coolant pipeline 1 from the coolant inlet flange 3, passes through the coolant inlet channel 7, reaches the other end of the coolant pipeline 1 from one end of the coolant pipeline 1, then turns back, is divided into two by the return channels on both sides, and then turns back to reach the position of the coolant return flange 8.
As shown in fig. 5, the cooling liquid spraying ports 4 arranged in an array manner are formed in the backflow channel, and the cooling liquid spraying ports 4 are uniformly arranged at intervals along the length arrangement direction of the magnet 5, so that the heating range of the target tube during working is ensured to be covered, and the spraying cooling effect is ensured. The cooling liquid enters the target pipe through a cooling liquid spraying port 4; by utilizing the pressure of the cooling liquid during the supply, the cooling liquid is sprayed to the inner wall of the target tube so as to take away the heat generated by the sputtering cathode magnetic bar device during the work. Thus, even if the local area inside the target tube is not filled with cooling liquid or has bubbles, the spray cooling still can provide excellent cooling effect, and the target material is prevented from cracking.
As shown in fig. 2 and 4, the magnet 5 can be adjusted in height by an external magnetic field adjusting device 6 provided at the back of the coolant pipe 1 without detaching the integrated magnetic rod device, thereby adjusting a local magnetic field, for example, a local magnetic field intensity. Specifically, the bottom of the magnet 5 supports a magnetic field adjusting rod 9, and the magnetic field adjusting rods 9 are uniformly arranged at intervals along the length direction of the magnet 5. One end of each magnetic field adjusting rod 9 is in contact with the magnet 5, the other end of each magnetic field adjusting rod extends out of the cooling liquid pipeline 1, a plurality of adjusting gaskets 10 can be arranged at the bottom of each magnetic field adjusting rod 9, the height of each magnetic field adjusting rod 9 can be changed by increasing and decreasing the number of the adjusting gaskets 10 or the thickness of the gasket body, and therefore the height of the magnet 5 correspondingly supported by the magnetic field adjusting rods 9 is changed, the front-back position relation of the local area of the magnet 5 is achieved, and the magnetic field adjustment of the magnet 5 is achieved.
In the embodiment, in specific implementation: in order to ensure the integral sealing of the magnetic rod device and protect the magnetic field adjusting rod 9, a sealing cover 11 is fixedly installed at the bottom of the magnetic field adjusting rod 9, the sealing cover 11 is of a detachable connecting structure, and can be conveniently detached when the magnetic field adjusting rod 9 is used for magnetic field adjustment, and can be installed back after the magnetic field adjustment is completed.
The magnetic field adjusting rod 9 can adjust the local magnetic field strength of the magnet 5 inside the magnet housing 2 by externally plugging or removing the adjusting shim 10, and can also adjust the height of the magnet 5 by simply lifting or lowering the screw rod, that is, rotating and lifting or lowering the magnetic field adjusting rod 9 by a screw structure.
As shown in fig. 2, the magnetic field adjusting bars 9 are arranged at regular intervals along the length direction of the magnets 5. At this time, the number and the spacing distance of the magnetic field adjusting rods 9 determine the range and the precision of the local adjustment of the magnetic field, and the design can be carried out according to the actual process requirements; that is, the magnetic field adjustment bars 9 are provided in a large number and at a short relative distance from each other, so that the local magnetic field adjustment range can be relatively precise.
Can adopt screw connection structure between coolant liquid pipeline 1 and magnet 5, also can adopt staple bolt chucking structure, the ann tears the convenience open to subsequent maintenance is maintained.
The cooling liquid pipeline 1 can adopt a multi-section connecting structure, namely, the cooling liquid pipeline is formed by splicing a plurality of sections of pipelines, and also can adopt an integrated structure. The cooling liquid pipeline with the multi-section connecting structure can ensure the use function and is convenient to process.
Although the conception and the embodiments of the present invention have been described in detail with reference to the drawings, those skilled in the art will recognize that various changes and modifications can be made therein without departing from the scope of the appended claims, and therefore, the description thereof is not repeated herein.
Claims (10)
1. The utility model provides a fountain cooling sputtering cathode bar magnet device which characterized in that: the device includes target pipe, magnet and coolant liquid pipeline, wherein magnet is arranged in the inside of target pipe, the coolant liquid pipeline has coolant liquid import, coolant liquid export and coolant liquid and sprays the mouth, the coolant liquid import with the coolant liquid export is linked together, the coolant liquid sprays the mouth and sets up on the coolant liquid pipeline and orientation the target pipe is in order to constitute the fountain cooling.
2. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.
3. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the periphery of the magnet is sealed by arranging a magnet shell, so that the magnet is isolated from the cooling liquid in the cooling liquid pipeline.
4. The spray cooled sputtering cathode magnetic bar device according to claim 3, wherein: the cooling liquid pipeline is provided with at least one cooling liquid inlet and at least two cooling liquid outlets arranged in an array mode, the cooling liquid inlet is located in the middle of the cooling liquid pipeline, the cooling liquid outlets are respectively symmetrically arranged on the periphery of the magnet shell, and therefore the cooling liquid pipeline is internally provided with cooling liquid inlet to the cooling liquid outlets which are uniformly and symmetrically divided into cooling liquid flow paths.
5. The spray cooled sputtering cathode magnetic bar device according to claim 4, wherein: the cooling liquid flow paths are independent and are arranged in a zigzag shape along the length arrangement direction of the cooling liquid pipeline.
6. The spray cooled sputtering cathode magnetic bar device according to claim 3, wherein: the cooling liquid pipeline is connected with the magnet shell.
7. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the bottom of the magnet is provided with a height-adjustable magnetic field adjusting rod, and the magnetic field adjusting rod supports the magnet and adjusts the magnetic field of the magnet through height adjustment of the magnet.
8. The spray cooled sputtering cathode magnetic bar device according to claim 7, wherein: the magnetic field adjusting rod penetrates through the magnet shell to support the magnet and is independently arranged with the cooling liquid pipeline.
9. The spray cooled sputtering cathode magnetic rod device according to claim 7 or 8, wherein: the magnetic field adjusting rods are uniformly arranged at intervals along the length arrangement direction of the magnets.
10. The spray cooled sputtering cathode magnetic bar device according to claim 1, wherein: the cooling liquid pipeline is compared with the length arrangement direction full length setting of magnet, just the cooling liquid sprays the mouth and is in the interval array arranges on the cooling liquid pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021837701.8U CN212533106U (en) | 2020-08-28 | 2020-08-28 | Spray type cooling sputtering cathode magnetic bar device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021837701.8U CN212533106U (en) | 2020-08-28 | 2020-08-28 | Spray type cooling sputtering cathode magnetic bar device |
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| CN212533106U true CN212533106U (en) | 2021-02-12 |
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| CN202021837701.8U Active CN212533106U (en) | 2020-08-28 | 2020-08-28 | Spray type cooling sputtering cathode magnetic bar device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111876741A (en) * | 2020-08-28 | 2020-11-03 | 光驰科技(上海)有限公司 | Spray type cooling sputtering cathode magnetic bar device |
| CN115491646A (en) * | 2022-09-20 | 2022-12-20 | 中核四0四有限公司 | Sputtering target for coating inner wall of pipe, sputtering structure and coating method thereof |
-
2020
- 2020-08-28 CN CN202021837701.8U patent/CN212533106U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111876741A (en) * | 2020-08-28 | 2020-11-03 | 光驰科技(上海)有限公司 | Spray type cooling sputtering cathode magnetic bar device |
| CN115491646A (en) * | 2022-09-20 | 2022-12-20 | 中核四0四有限公司 | Sputtering target for coating inner wall of pipe, sputtering structure and coating method thereof |
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