CN203613251U - Pollution-free heating pipe device of vertical vacuum ion coating machine - Google Patents
Pollution-free heating pipe device of vertical vacuum ion coating machine Download PDFInfo
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- CN203613251U CN203613251U CN201320775061.6U CN201320775061U CN203613251U CN 203613251 U CN203613251 U CN 203613251U CN 201320775061 U CN201320775061 U CN 201320775061U CN 203613251 U CN203613251 U CN 203613251U
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Abstract
The utility model discloses a pollution-free heating pipe device of a vertical vacuum ion coating machine, which comprises a heating pipe component, a corrugated pipe component, a corrugated pipe supporting seat component and a lifting mechanism, wherein the heating pipe component comprises a heating pipe; the upper end of the heating pipe is an insulating lead leading-out end; a heating pipe flange is welded at the slightly lower part of the heating pipe; the heating pipe flange is downwards connected with the corrugated pipe component; the corrugated pipe component is downwards connected with the corrugated pipe supporting seat component; the corrugated pipe supporting seat component is downwards communicated with the inside of a furnace through the heating pipe outlet/inlet formed in a furnace body top plate; the heating pipe penetrates through the hollow cavities of the corrugated pipe component and the corrugated pipe supporting seat component, stretches into the heating pipe outlet/inlet in the furnace body top plate to enter the furnace, and is connected with the lifting mechanism through the heating pipe flange. The heating pipe is not in a coating chamber during coating, so that no residual coating layer is adhered to the heating pipe, and the problem of secondary pollution caused by the heating pipe is solved; the pollution-free heating pipe device is simple and compact in structure, eliminates the operation of heating pipe cleaning, improves the quality of a coating layer and working efficiency, and lowers the production cost.
Description
Technical field
The utility model relates to vertical vacuum ion film coating machine, relates in particular to a kind of pollution-free heating tube device of vertical vacuum ion film coating machine.
Background technology
One of vaccum ion coater main application is to be coated with decorating film, mostly ion plating decorating film is to adopt magnesium-yttrium-transition metal target, as Ti, Zr, with Cr etc., produce metallic plasma by cathode arc or magnetron sputtering, with nitrogen, the reaction such as acetylene and oxygen synthesizing nitride, carbide, nitrogen carbide and oxide compound etc., to obtain simulating golden colour, rose golden, black, coffee-like, brown, silvery white, the blue decorating film that waits, not only wear-resistant but also corrosion-resistant, the current wrist-watch part that is widely used in, mobile phone shell, ornaments, golf club, defend sanitary equipment, handware, art metal furniture, hotel's utensil, stainless steel plaque etc., be coated with variety of colors decorating film thereon, play colourful effect.
At present, along with improving constantly of people's living standard, the high-end decorating film of ion plating is required also more and more higher, for high gear wrist-watch, ornaments and mobile phone shell etc., decorating film quality except color require various and bright-coloured, also requirement has high luminance brightness.But the rete that obtains special high brightness exists larger difficulty, this is because in coating process flow process, and a lot of influence factors can cause coating surface to send out dim, thereby reduce its luminance brightness.
Verified through production practice: the surface gloss of plating piece, the cleanliness factor that plating piece cleans, technology that plated film adopts (as electric arc ion-plating deposition technology inevitably makes to exist on rete a large amount of machine rational defects----plating material metallic particles), target quality is bad (as impurity, the plating material particle that not fine and close grade causes splashes), coating chamber gas leakage or water mixing, plating piece after cleaning is hung with transportation contaminated (as dust fall again at dress, saliva), plating piece enters secondary pollution after stove (as the floating dust in stove, furnace wall, on furnace interior part and hanger, the explosion of residual rete is splashed etc.), all to cause coating surface to send out the influence factor of Mongolian.After taking appropriate measures, above-mentioned influence factor can obtain some improvement, for example improve quality of finish to improve plating piece surface gloss, strengthening cleaning measure improves plating piece cleanliness factor Jin few arc deposited time of Liang Minus and mainly takes the magnetron sputtering deposition plated film Yi Minus macrobead of arc deposited less, improve the few environment dust fall of the clean environment Minus in workshop, infuse the residual coating on cleaning furnace wall, the end and stove Inner parts and hanger, from and the few stove internal contamination of Minus.
But, the residual coating depositing on heating tube in coating chamber is the most unmanageable, because heating tube before plated film and coating process sometime section need energising heating, the tube wall of heating tube is in higher temperatures state, even in the time of the spaced apart fire door clearing furnace of plated film, the remaining temperature of heating tube is still higher, so that be difficult to set about to clear up residual coating on it, in addition, some heating tubes are contained in from fire door and are difficult to clean at a distance, and the quantity of heating tube is more, also inconvenience usually disassembles to stove and clears up outward; Often residual coating is more long-pending thicker, these residual coating that are attached on heating tube adhere to not firm, coating is also more loose, in coating process, act on and be easy to explosion fragmentation because expanding with heat and contract with cold, they are splashed to plating space, chamber and become cluster shape debris particle to be attached on workpiece surface, cause coating to send out Mongolian, cause secondary pollution in stove.Various cause dim reason in the residual rete explosion of heating tube fragment become the most scabrous problem.Therefore, be coated with the coating equipment of high-end decorating film with ion plating, solve residual coating on its heating tube and cause the problem of secondary pollution in stove to become the key that improves coating product luminance brightness.At present, there is all adopting the technology of rotating semi arch cover baffle plate on every heating tube, although can block and deposit coating non-heat-up time on heat-generating pipe, but, coating still can be deposited on the outside surface of semi arch cover, in coating process, still cannot avoid residual coating fragment on it to splash, so still can not thoroughly solve the secondary pollution problem of heating tube system, and install after semi arch cover baffle plate, around available space is very limited for heating tube, and semi arch cover baffle plate can be because being subject to thermogenesis distortion so that occurring stuck phenomenon.
Utility model content
The purpose of this utility model be to provide a kind of simple and compact for structure, can solve secondary pollution problem due to heating tube, reliable, time saving and energy saving, efficiency is high, can reduce product fraction defective, the pollution-free heating tube device of the vertical vacuum ion film coating machine that reduces costs.
The purpose of this utility model realizes by following technical measures: a kind of pollution-free heating tube device of vertical vacuum ion film coating machine, it is characterized in that: comprise heating tube assembly, bellows component, corrugated tube supporting holder assembly and hoisting appliance, described heating tube assembly comprises heating tube, its upper end is the wire terminals of tape insulation, be welded with slightly on the lower heating tube flange, described heating tube flange connects bellows component downwards, described bellows component connects corrugated tube supporting holder assembly downwards, corrugated tube supporting holder assembly is communicated with in stove by the heating tube gangway of opening on body of heater top board downwards again, described heating tube is through the hollow cavity of bellows component and corrugated tube supporting holder assembly, the heating tube gangway putting on body of heater top board enters in stove, described heating tube connects described hoisting appliance by heating tube flange, described hoisting appliance drives heating tube flange, drive heating tube declines, make heating tube enter coating chamber and heat the operation of bleeding, drive again heating tube to rise away from coating chamber to carry out plated film operation under vacuum state.
The utility model, when heating tube is positioned at coating chamber, heats the operation of bleeding, then promotes heating tube to coating chamber by hoisting appliance, carries out plated film operation.In coating process, because heating tube is not in coating chamber, therefore on heating tube, can not adhere to residual coating, solve the secondary pollution problem due to heating tube; In addition, the utility model is simple and compact for structure, has saved the work of cleaning heating tube, time saving and energy saving, and has improved quality of coating and working efficiency, has reduced product fraction defective, has reduced production cost.
Heating tube assembly described in the utility model also comprises that heating tube termination water-cooling cover and Water Exit chew, under the convex shoulder of described heating tube flange boxing on heating tube, on the space between upper surface and the heating tube of heating tube flange, cover welding there is any discrepancy water coolant cover that water chews, absorb by the water coolant in water-cooling cover the heat that heating tube is uploaded, thereby the electrical isolation that guarantees heating tube leading-out end guarantees that the vacuum-sealing of heating tube flange is not impaired simultaneously.
As a kind of embodiment of the present utility model, described bellows component comprises corrugated tube, corrugated tube upper flange and corrugated tube lower flange, described corrugated tube and corrugated tube upper flange and the welding of corrugated tube lower flange are connected, the mouth of pipe size of the intermediate throughholes of the upper and lower flange of described corrugated tube and corrugated tube adapts, and the upper and lower port of described corrugated tube is positioned at the periphery of the upper and lower flange intermediate throughholes of described corrugated tube; Described heating tube flange and corrugated tube upper flange are realized vacuum by sealing-ring and are sealed and are connected, and heating tube flange and corrugated tube upper flange is common and hoisting appliance is connected, and described corrugated tube lower flange is connected with corrugated tube supporting base flange.
As a kind of optimal way of the present utility model, the compression ratio of described corrugated tube is 8:1, and described corrugated tube heatproof is at least 600 degree.Corrugated tube pulls open (length) and ensures enough length, make the space of its expansion that promotes be enough to hold heating tube and maintain vacuum, and corrugated tube can tolerate the radiation of heating tube waste heat.
As a kind of embodiment of the present utility model, described corrugated tube supporting holder assembly is made up of corrugated tube bearing flange, heating tube gangway sleeve pipe, outer water jacket and heating tube copper dust washer, sleeve pipe lower end, heating tube gangway is stretched in the perforate of body of heater top board, be welded and fixed with body of heater top board, heating tube gangway sleeve pipe upper port and corrugated header flange are soldered, outer water jacket is enclosed within heating tube gangway sleeve pipe periphery, itself and corrugated header flange and the welding of body of heater top board are connected, form annular water cooling chamber, described outer water jacket is provided with entery and delivery port, Cooling Water turnover; Described corrugated tube supporting base flange is fixedly connected with described corrugated tube lower flange, realizes vacuum-sealing between the two by sealing-ring; The radiant heat that the water coolant flowing through in described water cooling chamber absorbs heating tube damages to prevent described vacuum-sealing, described heating tube copper dust washer kink, outside heating tube, and is placed in the upper surface of corrugated tube supporting base flange and the annular groove of corrugated tube lower flange lower surface to stop that the filth on heating rod falls in stove.
Heating tube assembly described in the utility model, bellows component and corrugated tube supporting holder assembly are tightly connected, be communicated with into vacuum space from the following bellows component of heating tube flange with the hollow cavity of corrugated tube supporting holder assembly, heating tube enters in stove through heating tube gangway by this vacuum space, is become the vacuum tunnel of heating tube up-and-down movement by the flexible variable inner chamber of length causing of this corrugated tube.
The utility model is in order to realize single heating tube lifting object, can be that single heating tube is equipped with a hoisting appliance, as a kind of embodiment of the present utility model, described hoisting appliance comprises lifting arm and cylinder, the piston rod of described cylinder protrudes upward, described lifting arm arranged transversely, its one end is connected with the edge of described heating tube flange, and the other end is connected with described piston rod; The cylinder body of described cylinder is supported on the end face of coating chamber.
As a kind of improvement of the present utility model, described hoisting appliance also comprises guiding mechanism, described guiding mechanism is mainly made up of guide pillar seat, guide pillar, linear bearings, linear axis bearing and cylinder retaining plate, described cylinder retaining plate is horizontally disposed with, one end of described cylinder retaining plate is connected on the end face of described coating chamber, and the other end is connected on the cylinder body of cylinder to realize support cylinder; Described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on the upper surface of described cylinder retaining plate, described guide pillar seat is arranged in the perforate of lifting arm, the upper end of described guide pillar be fixed in guide pillar seat and be passed down through linear bearings after stretch out cylinder retaining plate.Guiding mechanism of the present utility model can guarantee the steady lifting of lifting arm, does not vibrate, is not shifted, not deflection.
The utility model is in order to realize multiple heating tubes lifting simultaneously object, can only be equipped with a hoisting appliance, as another kind of mode of the present utility model, described hoisting appliance comprises lifter plate, cylinder and cylinder cowl, described cylinder is arranged on the end face of described coating chamber, the piston rod of described cylinder protrudes upward, described cylinder cowl covers on described cylinder, described piston rod is connected with the end face of described cylinder cowl, described lifter plate is placed on the bottom of cylinder, the lower port of described cylinder cowl is fixed on described lifter plate, on described lifter plate, have several open holess that stretch out for heating tube, heating tube flange on each heating tube is connected with the aperture lower periphery of described open holes.
As a kind of improvement of the present utility model, described hoisting appliance also comprises guiding mechanism, described guiding mechanism is mainly made up of guide pillar top board, guide pillar, linear bearings, linear axis bearing and guide pillar base, the lower end of described guide pillar is fixed on by guide pillar base on the end face of coating chamber, described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on described lifter plate, described guide pillar is upward through linear bearings and is connected with guide pillar top board.In heating tube lifting process, guide pillar slides in linear bearings, can guarantee the steady lifting of lifter plate, does not vibrate, is not shifted, not deflection.
Compared with prior art, the utlity model has following significant effect:
(1) the utility model, when heating tube is positioned at coating chamber, heats the operation of bleeding, then promotes heating tube to coating chamber by hoisting appliance, carries out plated film operation.In coating process, because heating tube is not in coating chamber, therefore on heating tube, can not adhere to residual coating, solve the secondary pollution problem due to heating tube.
(2) corrugated tube of the present utility model pulls open and guarantees to have sufficient length, make the space of its expansion that promotes maintain vacuum, and corrugated tube can tolerate the radiation of heat-generating pipe waste heat.Special ripple pipe has the property point that thermotolerance is high, magnification ratio is large, fatigability is good, makes the utility model novel structure, succinct, reliable, and equipment is compacter, and manufacturing process is more simplified.
(3) due to the secondary pollution problem having solved due to heating tube, improve quality of coating, reduced product fraction defective.
(4) guiding mechanism of the present utility model has guaranteed the steady lifting of heating tube, makes this device reliable.
(5) water-cooling cover can absorb the heat that heating tube is uploaded, and guarantees the electrical isolation of heating tube leading-out end, guarantees that heating tube is in vacuum-sealing environment simultaneously; Water jacket can absorb the radiant heat of heating tube, guarantees that sealing-ring is cooling not damaged.
(6) dust washer of the present utility model can stop that the filth on heating tube falls to entering coating chamber, has further improved coating quality.
(7) work of the present utility model simple and compact for structure, to have saved residual coating on cleaning heating tube, time saving and energy saving, improve working efficiency, reduce production cost.
Accompanying drawing explanation
Below in conjunction with the drawings and specific embodiments, the utility model is described in further detail.
Fig. 1 is the sectional structure chart (heating tube drops to extreme lower position) of the utility model embodiment 1;
Fig. 2 is the sectional structure chart (heating tube drops to extreme lower position) of the utility model embodiment 2;
Fig. 3 is the local enlarged diagram of A in Fig. 2.
Embodiment
As shown in Figure 1, be the pollution-free heating tube device of a kind of vertical vacuum ion film coating machine of the utility model, comprise heating tube assembly, bellows component, corrugated tube supporting holder assembly and hoisting appliance.Heating tube assembly is chewed 11 and is formed by special heating tube 10, heating tube flange 12, heating tube termination water-cooling cover 9, Water Exit.Special heating tube 10 upper ends are wire terminals, leading-out end is provided with isolating joint, the position of the heating wire in heating tube 10 from lead away from, in the time that heating tube 10 drops to extreme lower position, heating wire is positioned at slightly below place of body of heater top board 21, and body of heater top board 21 is positioned at the upper end of the body of heater coaming plate 22 of coating chamber 24.Heating tube flange 12 is pasting anchor ring boxing under the convex shoulder of heating tube 10 upper ends and is being connected and fixed, on the space between upper surface and the heating tube 10 of heating tube flange 12, there is any discrepancy that water is chewed 11 water coolant cover 9 for cover welding, be configured for the annular water cooling chamber 26 of flow of cooling water, entery and delivery port 11 communicates with water cooling chamber 26, the heat that water-cooling cover inner cold water and heating tube are uploaded carries out heat exchange, absorb the heat that heating tube is uploaded, the electrical isolation that guarantees heating tube leading-out end guarantees that the vacuum-sealing 13 on heating tube flange does not damage simultaneously.
Bellows component is made up of corrugated tube 15, corrugated tube upper flange 14, corrugated tube lower flange 16.The mouth of pipe size of the intermediate throughholes of corrugated tube upper flange 14 and corrugated tube lower flange 16 and corrugated tube 15 adapts, and the port of corrugated tube is positioned at the periphery of corrugated tube flange intermediate throughholes, and three's welding is connected.
Corrugated tube supporting holder assembly is made up of corrugated tube bearing flange 18, heating tube gangway sleeve pipe 19, outer water jacket 20 and heating tube copper dust washer 23.Sleeve pipe 19 lower ends, heating tube gangway are stretched in the perforate of 21 body of heater top boards, are welded and fixed with body of heater top board 21.Heating tube gangway sleeve pipe 19 upper port and corrugated header flange 18 are soldered, the outer water jacket 20 of tubular is enclosed within gangway sleeve pipe 19 peripheries, the upper end of outer water jacket 20 and 18 welding of corrugated header flange are connected, its lower end and 21 welding of body of heater top board are connected, and three and heating tube gangway sleeve pipe 19 outer walls surround annular water cooling chamber 25.There is any discrepancy that water coolant is chewed (not shown) for outer water jacket 20, and this entery and delivery port passes to water cooling chamber 25 radiant heat that absorbs heating tube mutually, protects the vacuum-sealing 13 on corrugated tube supporting base flange not damage simultaneously.
Heating tube assembly, bellows component and corrugated tube supporting base are tightly connected, be communicated with into vacuum space from the following bellows component of heating tube flange 18 with corrugated tube supporting base inner chamber, heating tube 10 enters in stove through body of heater top board 21 by it, becomes the vacuum tunnel of heating tube up-and-down movement.
The present embodiment is applied to single heating tube lifting, for single heating tube is equipped with a hoisting appliance, hoisting appliance comprises lifting arm 8 and cylinder 1, the cylinder body air inlet/outlet of cylinder 1 connects external compressed gas source (not shown in FIG.), promote cylinder body inner carrier (not shown in FIG.) by pressurized air and move up and down, move up and down thereby promote piston rod 3.The piston rod 3 of cylinder 1 protrudes upward, lifting arm 8 arranged transverselys, and edge and the corrugated tube upper flange of its one end and heating tube flange 12 are connected by screw, and the upper end of the other end and piston rod 3 is fastenedly connected by double nut; The cylinder body of cylinder 1 is supported on the end face of coating chamber.Hoisting appliance also comprises guiding mechanism, in the present embodiment, guiding mechanism is mainly made up of guide pillar seat 7, guide pillar 6, linear bearings 5, linear axis bearing 4 and cylinder retaining plate 2, cylinder retaining plate 2 is horizontally disposed with, one end of cylinder retaining plate 2 is connected by screw on the body of heater top board of coating chamber, and the other end is connected on the cylinder body of cylinder 1 to realize support cylinder, specifically on cylinder retaining plate, offers through hole, the cylinder body of cylinder is fixed on through hole periphery, and piston rod stretches out from through hole; Linear bearings 5 is arranged in linear axis bearing 4, and linear axis bearing is fixed on the upper surface of cylinder retaining plate 2, guide pillar seat 7 is arranged in the perforate of lifting arm 8, the upper end of guide pillar 6 be fixed on guide pillar seat 7 and be passed down through linear bearings 5 after stretch out cylinder retaining plate 2, wherein linear bearings 5 with guide pillar 6 for being slidably matched.Guide pillar seat 7 is made up of web plate and the cylindrical shell of being located on web plate lower surface, and the upper end of guide pillar 6 is inserted and is fixed in cylindrical shell, and web plate is positioned at the top of lifting arm 8 perforates, is fixed by screws in the hole of perforate along upper.
Working process of the present utility model is as follows: single heating tube is in dropping to extreme lower position state, now in stove, (in coating chamber) carries out plated film operational procedure, first vacuumize, reach after specified vacuum degree, heating tube energising heating, the furnace temperature of being heated in stove rises, this is conducive to get rid of the assorted G&W vapour of stove internal adsorption, when furnace temperature rises to preset temperature, and be incubated to the specified time, completing heating bleeds after discontinuous running, heat-generating pipe power-off stops heating, in stove, bleed on one side, furnace temperature gradually declines, the remaining temperature of heating tube also declines, be extended down to after the specified time, promote heating tube to stove, in stove, start plated film operation.The process that promotes heating tube is: start lifting switch, entered in cylinder from the lifting air nozzle of cylinder by peripheral hardware pressure gas source, promote cylinder body inner carrier up, piston rod rises slowly, drive lifting arm rises, guide pillar seat on lifting arm drags guide pillar and rises, and guide pillar is arranged on linear bearings on cylinder retaining plate and location and the restriction of linear axis bearing, and lifting arm also drags be connected heating tube and corrugated tube rising thereon simultaneously; Be that lifting arm is mentioned corrugated tube upper flange by the heating tube flange lifting heating tube being connected with it simultaneously, so original compressed corrugated tube pulls open.Here select special corrugated tube, its compression ratio reaches 8 to 1, more than material heatproof reaches 600 degree, outside heating tube rises to body of heater top board completely.Corrugated tube pulls open (length) and ensures enough height, can maintain risen space in vacuum state, and corrugated tube can tolerate the radiation of heat-generating pipe waste heat.Special ripple pipe has the property point that thermotolerance is high, magnification ratio is large, fatigability is good, makes the utility model novel structure, succinct, reliable, and equipment is compacter, and manufacturing process is more simplified.
Embodiment 2
As shown in Figure 2,3, the difference of the present embodiment and embodiment 1 is: the present embodiment is applied to the lifting simultaneously of multiple heating tubes, only be equipped with a hoisting appliance, hoisting appliance comprises lifter plate 2-6, cylinder 2-2 and cylinder cowl, and cylinder cowl is made up of support tube 2-5 and the support tube flange 2-4 of the upper port that is positioned at support tube 2-5.The body of heater top board 2-12 that cylinder 2-2 is arranged on coating chamber by cylinder firm banking 2-1 is upper, and the piston rod 2-3 of cylinder 2-2 protrudes upward.It is upper that cylinder cowl covers on cylinder 2-2, and the support tube flange 2-4 end face of piston rod 2-3 and cylinder cowl is fixedly connected.Lifter plate 2-6 is placed on the bottom of cylinder 2-2, and it is upper that the lower port of support tube 2-5 is fixed on lifter plate 2-6, has several open holess that stretch out for heating tube on lifter plate 2-6, and the heating tube flange 12 on each heating tube is connected with the aperture lower periphery of open holes.
In the present embodiment, guiding mechanism is mainly made up of guide pillar top board 2-11, guide pillar 2-7, linear bearings 2-9, linear axis bearing 2-8 and guide pillar base 2-10, the lower end of guide pillar 2-7 is fixed on by guide pillar base 2-10 on the body of heater top board of coating chamber, linear bearings 2-9 is arranged in linear axis bearing 2-8, and it is upper that linear axis bearing 2-8 is fixed on lifter plate 2-6, and guide pillar 2-7 is upward through linear bearings 2-9 and is connected with guide pillar top board 2-11.
Working process of the present utility model is as follows: branched heating tube drops to extreme lower position and (in Fig. 2, only draws a heating tube, other heating tube states are identical with it), in stove, carry out plated film operational procedure identical with embodiment 1, first vacuumize, each heating tube energising heating, completes heating and bleeds after discontinuous running subsequently, each heat-generating pipe power-off stops heating, when temperature more than heating tube dropped to after the specified time, promote each heating tube to body of heater top board, in stove, start plated film operation.Promote the operational process of each heating tube: start lifting switch, entered in cylinder from the lifting air nozzle of cylinder by peripheral hardware pressure gas source, promote cylinder body inner carrier up, piston rod rises slowly, drives support tube flange---support tube---lifter plate to rise, and the each heating tube flange being connected in immediately on lifter plate promotes simultaneously, and drag each heating tube and also rise, and mention corrugated tube upper flange, so original compressed corrugated tube pulls open (length), make the space of promote expansion maintain vacuum.Lifter plate is slidably connected through linear bearings and guide pillar by the linear axis bearing being connected again, lifter plate move up and down location and the restriction of---linear bearings---linear axis bearing that is subject to guide pillar, guarantee the steady lifting of lifter plate, do not vibrate, be not shifted, not deflection, also guaranteed lifter plate drag the heating tube that is connected thereon and corrugated tube lifting steadily, bias not.
Embodiment of the present utility model is not limited to this; according to foregoing of the present utility model; according to ordinary skill knowledge and the customary means of this area; do not departing under the above-mentioned basic fundamental thought of the utility model prerequisite; the utility model can also be made modification, replacement or the change of other various ways, within all dropping on the utility model rights protection scope.
Claims (10)
1. the pollution-free heating tube device of a vertical vacuum ion film coating machine, it is characterized in that: comprise heating tube assembly, bellows component, corrugated tube supporting holder assembly and hoisting appliance, described heating tube assembly comprises heating tube, its upper end is the wire terminals of tape insulation, be welded with slightly on the lower heating tube flange, described heating tube flange connects bellows component downwards, described bellows component connects corrugated tube supporting holder assembly downwards, corrugated tube supporting holder assembly is communicated with in stove by the heating tube gangway of opening on body of heater top board downwards again, described heating tube is through the hollow cavity of bellows component and corrugated tube supporting holder assembly, the heating tube gangway putting on body of heater top board enters in stove, described heating tube connects described hoisting appliance by heating tube flange, described hoisting appliance drives heating tube flange, drive heating tube declines, make heating tube enter coating chamber and heat the operation of bleeding, drive again heating tube to rise away from coating chamber to carry out plated film operation under vacuum state.
2. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 1; it is characterized in that: described heating tube assembly also comprises that heating tube termination water-cooling cover and Water Exit chew; under the convex shoulder of described heating tube flange boxing on heating tube; on the space between upper surface and the heating tube of heating tube flange; cover welding there is any discrepancy water coolant cover that water chews; absorb by the water coolant in water-cooling cover the heat that heating tube is uploaded; thereby guarantee the electrical isolation of heating tube leading-out end, protect the vacuum-sealing of heating tube flange not impaired simultaneously.
3. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 2, it is characterized in that: described bellows component comprises corrugated tube, corrugated tube upper flange and corrugated tube lower flange, described corrugated tube and corrugated tube upper flange and the welding of corrugated tube lower flange are connected, the mouth of pipe size of the intermediate throughholes of the upper and lower flange of described corrugated tube and corrugated tube adapts, and the upper and lower port of described corrugated tube is positioned at the periphery of the upper and lower flange intermediate throughholes of described corrugated tube; Described heating tube flange and corrugated tube upper flange are realized vacuum by sealing-ring and are sealed and are connected, and heating tube flange and corrugated tube upper flange is common and hoisting appliance is connected, and described corrugated tube lower flange is connected with corrugated tube supporting base flange.
4. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 3, is characterized in that: the compression ratio of described corrugated tube is 8:1, described corrugated tube heatproof is at least 600 degree.
5. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 4, it is characterized in that: described corrugated tube supporting holder assembly is by corrugated tube bearing flange, heating tube gangway sleeve pipe, outer water jacket and heating tube copper dust washer composition, sleeve pipe lower end, heating tube gangway is stretched in the perforate of body of heater top board, be welded and fixed with body of heater top board, heating tube gangway sleeve pipe upper port and corrugated header flange are soldered, outer water jacket is enclosed within heating tube gangway sleeve pipe periphery, itself and corrugated header flange and the welding of body of heater top board are connected, form annular water cooling chamber, described outer water jacket be provided with into, water outlet, Cooling Water turnover, described corrugated tube supporting base flange is fixedly connected with described corrugated tube lower flange, realizes vacuum-sealing between the two by sealing-ring, the radiant heat that the water coolant flowing through in described water cooling chamber absorbs heating tube damages to prevent described vacuum-sealing, described heating tube copper dust washer kink, outside heating tube, and is placed in the upper surface of corrugated tube supporting base flange and the annular groove of corrugated tube lower flange lower surface to stop that the filth on heating rod falls in stove.
6. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 1, it is characterized in that: described heating tube assembly, bellows component and corrugated tube supporting holder assembly are tightly connected, be communicated with into vacuum space from the following bellows component of heating tube flange with the hollow cavity of corrugated tube supporting holder assembly, heating tube enters in stove through heating tube gangway by this vacuum space, is become the vacuum tunnel of heating tube up-and-down movement by the flexible variable inner chamber of length causing of this corrugated tube.
7. according to the pollution-free heating tube device of the vertical vacuum ion film coating machine described in claim 1 or 2 or 3 or 4 or 5 or 6, it is characterized in that: described hoisting appliance comprises lifting arm and cylinder, the piston rod of described cylinder protrudes upward, described lifting arm arranged transversely, its one end is connected with the edge of described heating tube flange, and the other end is connected with described piston rod; The cylinder body of described cylinder is supported on the end face of coating chamber.
8. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 7, it is characterized in that: described hoisting appliance also comprises guiding mechanism, described guiding mechanism is mainly made up of guide pillar seat, guide pillar, linear bearings, linear axis bearing and cylinder retaining plate, described cylinder retaining plate is horizontally disposed with, one end of described cylinder retaining plate is connected on the end face of described coating chamber, and the other end is connected on the cylinder body of cylinder to realize support cylinder; Described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on the upper surface of described cylinder retaining plate, described guide pillar seat is arranged in the perforate of lifting arm, the upper end of described guide pillar be fixed in guide pillar seat and be passed down through linear bearings after stretch out cylinder retaining plate.
9. according to the pollution-free heating tube device of the vertical vacuum ion film coating machine described in claim 1 or 2 or 3 or 4 or 5 or 6, it is characterized in that: described hoisting appliance comprises lifter plate, cylinder and cylinder cowl, described cylinder is arranged on the end face of described coating chamber, the piston rod of described cylinder protrudes upward, described cylinder cowl covers on described cylinder, described piston rod is connected with the end face of described cylinder cowl, described lifter plate is placed on the bottom of cylinder, the lower port of described cylinder cowl is fixed on described lifter plate, on described lifter plate, have several open holess that stretch out for heating tube, heating tube flange on each heating tube is connected with the aperture lower periphery of described open holes.
10. the pollution-free heating tube device of vertical vacuum ion film coating machine according to claim 9, it is characterized in that: described hoisting appliance also comprises guiding mechanism, described guiding mechanism is mainly made up of guide pillar top board, guide pillar, linear bearings, linear axis bearing and guide pillar base, the lower end of described guide pillar is fixed on by guide pillar base on the end face of coating chamber, described linear bearings is arranged in linear axis bearing, and linear axis bearing is fixed on described lifter plate, described guide pillar is upward through linear bearings and is connected with guide pillar top board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320775061.6U CN203613251U (en) | 2013-11-29 | 2013-11-29 | Pollution-free heating pipe device of vertical vacuum ion coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201320775061.6U CN203613251U (en) | 2013-11-29 | 2013-11-29 | Pollution-free heating pipe device of vertical vacuum ion coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN203613251U true CN203613251U (en) | 2014-05-28 |
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| CN201320775061.6U Withdrawn - After Issue CN203613251U (en) | 2013-11-29 | 2013-11-29 | Pollution-free heating pipe device of vertical vacuum ion coating machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103695845A (en) * | 2013-11-29 | 2014-04-02 | 东莞市汇成真空科技有限公司 | Pollution-free heating tube device of vertical vacuum ion film plating machine |
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2013
- 2013-11-29 CN CN201320775061.6U patent/CN203613251U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103695845A (en) * | 2013-11-29 | 2014-04-02 | 东莞市汇成真空科技有限公司 | Pollution-free heating tube device of vertical vacuum ion film plating machine |
| CN103695845B (en) * | 2013-11-29 | 2015-12-09 | 东莞市汇成真空科技有限公司 | A kind of pollution-free heating tube device of vertical vacuum ion film coating machine |
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| C25 | Abandonment of patent right or utility model to avoid double patenting |