CN112475523A

CN112475523A - Vacuum welding furnace capable of realizing rapid welding of semiconductor products

Info

Publication number: CN112475523A
Application number: CN202011568379.8A
Authority: CN
Inventors: 马玉水
Original assignee: Shandong Liansheng Electronic Equipment Co ltd
Current assignee: Shandong Liansheng Electronic Equipment Co ltd
Priority date: 2020-12-26
Filing date: 2020-12-26
Publication date: 2021-03-12
Anticipated expiration: 2040-12-26
Also published as: CN112475523B

Abstract

The invention discloses a vacuum welding furnace capable of realizing rapid welding of semiconductor products, comprising a base, a furnace body, a welding system, a vacuum system, a nitrogen system, and a water cooling system; A furnace bottom plate that can seal the bottom of the furnace, a furnace cover that can seal the top of the furnace, an opening and closing device for the furnace cover, and a sealing device; The hook cylinder, the two locking cylinders arranged at the right end of the bottom surface of the furnace floor; the welding system includes a bracket, a bottom reflection plate, a main graphite heating plate, a graphite boat, a graphite boat support frame, a four-edge graphite heating belt, and a four-edge reflection belt ,electrode. The vacuum welding furnace of the invention has the characteristics of rapid heating and cooling, fast welding speed, reliable vacuum performance, low cooling cost and easy maintenance.

Description

Vacuum welding furnace capable of realizing rapid welding of semiconductor products

Technical Field

The invention relates to semiconductor welding equipment, and belongs to the technical field of vacuum welding.

Background

Under the rapid development environment of modern integrated circuits and electronic technologies, semiconductor products are more and more widely applied, and with the improvement of the fine requirements on the quality of semiconductor products, especially semiconductor metal packaging devices and semiconductor ceramic packaging devices, the traditional reflow soldering process, the soldering quality and the void ratio can not meet the quality requirements of the semiconductor products.

At present, the traditional vacuum reflow oven heats the circuit board by utilizing the hot air generated by filaments in the heating box and the hot air circulation mode, the heating tube heats the air of the heating box in the heating box, and then the fan conveys the hot air into the oven cavity of the reflow oven. In order to make the air outlet of the heating box uniform, the air outlet of the heating box is provided with a metal rectifying plate, and the rectifying plate is provided with a plurality of uniformly distributed small holes for guiding the hot air. The welding process of the circuit board on the conveying belt is that the circuit board heats the solder paste on the circuit board under the action of hot air, the soldering flux promotes the solder paste to melt, and finally the temperature of the circuit board is reduced under the action of the cooling fan, the solder paste is solidified, and the welding process is completed. In the welding mode of hot air heating, the heating of the circuit board is transferred and heated from the surface to the inner surface, so that the tin paste on the circuit board is easy to generate bubbles in the heating process, the phenomenon of false soldering due to cold soldering occurs in the welding process, the product quality is seriously influenced, and according to incomplete statistics, the defective products generated in the mode of bubbles account for about 50 percent of all the defective products. Secondly, because the efficiency of heat transfer by hot air is low, especially the heat absorption capacity of the flexible circuit board provided with the tool fixture is very large, the circuit board is not heated sufficiently due to the low-efficiency heating mode, the local temperature is higher, and the like, so that poor welding phenomena such as circuit board deformation and the like occur, and the product quality is seriously influenced; thirdly, the rectifying plate does not generate heat, the surface temperature does not reach the gasification temperature required by the soldering flux, so that the soldering flux is easy to adhere and condense on the rectifying plate, and the maintenance and the cleaning are quite difficult. On the other hand, the cavity door of the vacuum reflow oven has a complex structure, the weight is more than 20KG, and if the vacuum reflow oven is manually opened and closed, a common female operator is difficult to independently complete, and automatic integration cannot be realized. Most of the temperature control modes of the vacuum reflow oven adopt the integration of temperature sensing element inserted temperature control and heating plate, and the heating plate is inconvenient to disassemble and customize. The vacuum reflow soldering apparatus has several problems: 1. the hot air reflow furnace is used as a heating device, so that the problems of poor welding such as cold solder and circuit board deformation caused by poor welding due to the fact that the heating speed is low, the highest heating temperature is low, and the circuit board is heated unevenly to generate bubbles in solder paste; 2. the surface temperature of the rectifying plate is low, so that the adhesion and condensation of soldering flux are easily caused, and the maintenance and cleaning are difficult; 3. the infrared welding technology adopted in the prior art has the problems that although the heat source is convenient to control, the photosensitive points are shielded, the heating effect is influenced by the different qualities of elements and PCBs, the temperature difference is large and the like; 4. the screw thread of the cavity cover is easy to cause secondary pollution after long-term use, the granularity is reduced, and the common screw-thread door lock device is made of thin material, is easy to deform due to external impact and cannot be used, and has poor durability; 5. in the prior art, the temperature control mode adopts a heating plate insertion type, and the disassembly is inconvenient. 6. In the welding process of the furnace body made of metal, due to frequent cooling and heating, the bottom of the furnace body and the side wall of the furnace body are required to be thicker, otherwise small cracks which are not easy to find are easy to appear between the bottom of the furnace body and the side wall of the furnace body, and the welding quality is affected.

The patent with publication number CN11175964A discloses an adopt automatic vacuum reflow soldering equipment of contact accuse temperature, including the heating chamber, with the chamber lid that the heating chamber becomes sealed chamber, install at the inside a plurality of infrared radiation pipe of heating chamber, be located hot plate, contact accuse temperature mechanism of infrared radiation pipe top, with the evacuation mechanism and the cooling body of heating chamber intercommunication, heating chamber and chamber lid all adopt the quartz glass material, chamber lid one end is articulated to be installed on the heating chamber, and the other end is through automatic opening and shutting hook locking device and heating chamber detachable seal installation for isolated inside and outside air, guarantee that the vacuum state in the heating chamber is not influenced. And a convex sealing strip is arranged on the upper surface of the heating chamber. The heating chamber is internally provided with a heating cavity, and the heating cavity is internally provided with a plurality of infrared radiation tubes. The technology has the prominent defects that: the heating chamber is arranged on the tail support of the air cylinder and is fixedly arranged on the upper surface of the bottom plate with a large volume, the heating chamber and the chamber cover are made of quartz glass, and the heating chamber and the chamber cover are slow in cooling speed due to large specific heat when cooling is needed, so that the cooling speed during welding is delayed, and the welding time is prolonged. When cooling, the cooling gas nozzle needs to be filled with nitrogen for cooling, and the cooling cost is high by adopting the cooling gas; because the infrared radiation tube is adopted, the corrosion resistance is poor, and after cooling, the reducing gas nozzle is filled with formic acid to reduce the gas in the heating chamber; although the surface of the heating plate is coated with an optical coating which is beneficial to heat radiation, the heat distribution is still difficult to ensure uniformity during the whole heating process.

For a small reflow soldering furnace in the prior art, the whole reflow soldering process is generally realized in a cavity space. Each soldering operation requires heating from room temperature to soldering temperature and then cooling from soldering temperature to room temperature. When welding is performed for many times, temperature cold and hot impact needs to be performed for many times. Firstly, frequent heating and cooling causes a great deal of energy loss; secondly, the temperature stress on the reflow soldering equipment can cause fatigue damage; moreover, the heating and cooling takes a lot of time, reducing the welding efficiency. For the large and medium-sized reflow soldering furnaces in the prior art, multi-zone soldering is generally adopted and is divided into a preheating zone, a heat preservation zone, a welding zone and a cooling zone, and assembly line operation is adopted in the soldering process. However, the heating zone and the cooling zone are in communication, and the hot and cold air may interfere or mix with each other, which may adversely affect whether a hot or cold environment is desired. This also affects the heating and cooling temperature fields and causes a certain energy loss. Therefore, for the vacuum reflow soldering furnace with the existing structure, as the infrared radiation tube is mostly adopted for heat transfer, the convection heat transfer is not strong or the convection heat transfer is not available, and the defects of slow radiation heating heat transfer and low efficiency exist. Moreover, the structures are difficult to perform reflow soldering under vacuum or protective atmosphere, because the loading and the taking out of the welded piece in the pipeline welding cannot ensure that the welding equipment forms a vacuum environment and a protective atmosphere environment. In this case, it is necessary to develop a reflow soldering furnace which can realize vacuum or a protective atmosphere by a structural arrangement by using another heating method.

Disclosure of Invention

The invention aims to provide a vacuum welding furnace capable of realizing rapid welding of semiconductor products, aiming at the defects of the prior art, and the vacuum welding furnace has the characteristics of rapid temperature rise and reduction, rapid welding speed, reliable vacuum performance, low cooling cost and easiness in maintenance.

The technical scheme adopted by the invention is as follows.

A vacuum welding furnace capable of realizing rapid welding of semiconductor products comprises a base, a furnace body, a welding system, a vacuum system, a nitrogen system and a water cooling system.

The furnace body comprises a furnace hearth with a cross section in a shape of Chinese character kou, a furnace bottom plate capable of sealing the bottom of the furnace hearth, a furnace cover capable of sealing the top of the furnace hearth, a furnace cover opening and closing device and a sealing device; the left end of the furnace cover is hinged with the top of the left side surface of the hearth through a first hinge longitudinal shaft, and a junction of the furnace cover and the hearth is provided with an upper sealing strip in a shape like a Chinese character 'kou'; the left end of the furnace bottom plate is hinged with the bottom of the left side surface of the hearth through a second hinge longitudinal shaft, and a junction of the furnace bottom plate and the hearth is provided with a lower sealing strip in a shape like a Chinese character 'kou'; the hearth, the furnace bottom plate and the furnace cover are all made of metal materials; the furnace bottom plate is arranged on the base.

The furnace cover opening and closing device comprises an uncovering cylinder arranged on the left side of the hearth, a hook cylinder arranged in the middle of the right end of the top surface of the furnace cover, and two locking cylinders arranged at the right end of the bottom surface of the furnace bottom plate; the surfaces of the output shaft of the uncovering cylinder, the output shaft of the hook cylinder and the output shaft of the locking cylinder are all perpendicular to the first hinge longitudinal axis; the left end of the top surface of the furnace cover is provided with an ear plate, and the top end of the uncovering cylinder is hinged with the ear plate through a third hinge longitudinal shaft.

Two upper hook devices are symmetrically arranged at the right end of the furnace cover along the hook cylinder, each upper hook device comprises a fourth hinge longitudinal shaft and an upper rotating plate sleeved on the fourth hinge longitudinal shaft, and a hook with a left opening is arranged at the bottom of the upper rotating plate; the top ends of the two upper rotating plates are connected through a vertical pushing rod; the top vertical rod is hinged with the upper end of the hook cylinder.

The right end of the furnace bottom plate is provided with a fifth hinged longitudinal shaft; two lower hook devices are symmetrically arranged at the right end of the furnace cover along the hook cylinder; each lower hook device comprises a fifth hinged longitudinal shaft and two lower rotating plates sleeved on the fifth hinged longitudinal shaft, and the top of each lower rotating plate is provided with a hanging rod; the bottom end of each lower rotating plate is hinged with a locking cylinder; when the furnace cover is attached to the hearth, the rotation of the two upper rotating plates is controlled by the cover opening cylinder, and the rotation of the two lower rotating plates is controlled by the two locking cylinders, so that the hanging rods of the lower rotating plates can enter the hooks of the upper rotating plates above the lower rotating plates.

The welding system comprises a support, a bottom reflecting disc, a main graphite heating disc, a graphite boat supporting frame, four-edge graphite heating belts, four-edge reflecting belts and electrodes; a main graphite heating plate, a graphite boat supporting frame and a graphite boat are arranged on the bracket from bottom to top; the bottom reflecting disc is arranged below the main graphite heating disc, and the top surface of the bottom reflecting disc is not in contact with the bottom surface of the main graphite heating disc and the bottom surface of the graphite boat supporting frame; each edge reflection band is respectively arranged on one inner side wall of the hearth, and each edge graphite heating band is respectively arranged on the inner side of one edge reflection band.

The bottom reflecting disc is arranged on the furnace bottom plate; the bracket is arranged on the bottom reflecting disc; the main graphite heating plate and each edge graphite heating belt are connected with electrodes arranged on the hearth; the graphite boat is provided with a plurality of graphite boat heat dissipation holes.

The vacuum system comprises a vacuum-pumping pipe arranged on the hearth, and the vacuum-pumping pipe is connected with a vacuum-pumping device arranged outside the hearth.

The nitrogen system comprises a nitrogen inlet and outlet pipe arranged on the hearth, and the nitrogen inlet and outlet pipe is connected with a nitrogen pumping device arranged outside the hearth.

The water system comprises a plurality of hearth cooling channels respectively arranged on each side wall of the hearth, a plurality of furnace cover cooling channels arranged on the furnace cover, a plurality of furnace bottom plate cooling channels arranged on the furnace bottom plate, a coil pipe groove arranged on the bottom surface of the graphite boat and a coil pipe arranged on the coil pipe groove; the bottom surface of each coil pipe groove is contacted with the graphite boat support frame; the coil pipe penetrates through the hearth and is connected with a cooling liquid pumping device and a cooling liquid box which are arranged outside the hearth; the inlets and outlets of the hearth cooling channels, the furnace cover cooling channels and the furnace bottom plate cooling channels are respectively connected with a cooling liquid pumping device and a cooling liquid box which are arranged outside the furnace body through pipelines.

As an optimal technical scheme, the top of each lower rotating plate is provided with a hanging rod movable groove, the hanging rod movable groove is provided with a hanging rod, and the hanging rod can move up and down in the hanging rod movable groove.

As the preferred technical scheme, the lower rotary plate comprises a lower toothed plate and an upper toothed plate which are fixedly connected; the top end of the upper toothed plate is provided with a hanging rod mounting rack, the hanging rod mounting rack comprises a bottom surface plate and two vertical plates, and the two vertical plates are symmetrically arranged along the upper rotating plate closest to the bottom surface plate; each vertical plate is provided with a hanging rod movable groove, and two ends of each hanging rod are respectively positioned in the hanging rod movable grooves of the two vertical plates.

As a preferred technical scheme, the edge reflection band comprises an edge reflection band body made of metal, and an edge reflection band coating is arranged on the inner side surface of the edge reflection band body; the bottom reflecting disc comprises a bottom reflecting disc body made of metal, and a bottom reflecting disc coating is arranged on the inner side surface of the bottom reflecting disc body.

As a preferred technical solution, the edge reflection band coating is an edge reflection band coating made of silver; the bottom reflecting plate coating is made of silver.

As preferred technical scheme, the top surface of furnace body is equipped with the sealing strip mounting groove of going up that is used for installing the sealing strip, and the bottom surface of furnace body is equipped with the sealing strip mounting groove of going down that is used for installing the sealing strip.

As a preferred technical scheme, the support comprises a central support and a plurality of edge supports, a central through hole is formed in the center of the main graphite heating plate, steps for placing the main graphite heating plate are arranged on the central support and the edge supports, and the central support penetrates through the central through hole of the main graphite heating plate; the top ends of the edge support and the center support are connected with the graphite boat support frame.

As preferred technical scheme, main graphite heating plate includes the graphite tape of three connector lug, and the graphite tape is coiled the setting around central through-hole.

As a preferred technical scheme, a welding tool is placed on the graphite boat, and a to-be-welded part is placed in the welding tool; the welding tool is made of graphite; the hearth, the furnace cover and the furnace bottom plate are made of aluminum.

As a preferred technical scheme, the lower end of the hook cylinder is hinged with the furnace cover through a seventh hinge longitudinal shaft; the bottom end of the uncovering cylinder is hinged with the base through an eighth hinge longitudinal shaft; the bottom end of each lower rotating plate is hinged with the right end of a locking cylinder through a ninth hinge longitudinal shaft. Four corners of the furnace bottom plate are arranged on the base through four heat insulation columns.

The invention has the beneficial effects that: the opening and closing device comprises an uncovering cylinder arranged on the left side of the hearth, a hook cylinder arranged in the middle of the right end of the top surface of the furnace cover and two locking cylinders arranged at the right end of the bottom surface of the furnace bottom plate, the uncovering cylinder, the hook cylinder and the two locking cylinders are mutually matched, a hanging rod movable groove is arranged at the top of the lower rotating plate, and when a hook of the upper rotating plate is hung, the hanging rod is hung and placed reliably and has a good sealing effect. The hearth, the furnace bottom plate and the furnace cover of the furnace body are made of split metal, and the pressure born by the furnace body is large. The hearth, the furnace bottom plate and the furnace cover are all provided with cooling liquid channels, and the hearth, the furnace bottom plate and the furnace cover are heated and cooled rapidly; the furnace, the furnace bottom plate and the furnace cover are connected through the opening and closing device, after the furnace, the furnace bottom plate and the furnace cover are used for a period of time, the effectiveness of sealing can be realized only by replacing the upper sealing strip and the lower sealing strip, and the problem that in case that in the prior art, when the furnace and the furnace bottom plate are integrally cast, the welding part between the furnace and the furnace bottom plate is difficult to repair in case of gas leakage possibly occurring under the pressure change of long-term use is solved. Set up two locking cylinders and along couple cylinder symmetric distribution, the sealed effectual and small that account for and open and the device usefulness in right side of furnace. The bottom of the main graphite heating plate is used for radiation heating, the periphery of the graphite boat is provided with the edge graphite heating belt for radiation heating, the bottom reflecting plate is used for reflection, the edge reflecting belt is used for reflection, the heating speed is high, the corrosion resistance is good, the deformation is small, and the heating is uniform. Once heating is finished, cooling liquid is directly adopted for cooling the main graphite heating plate, and because the hearth, the furnace bottom plate and the furnace cover are made of metal, heat dissipation is fast, the welding time period is short, the welding speed is high, and the welding effect is good.

Drawings

FIG. 1 is a schematic perspective view of a vacuum welding furnace according to the present invention. Fig. 2 is a partially enlarged view of a portion a of fig. 1. Fig. 3 is a partially enlarged view of a portion B of fig. 1. Fig. 4 is a partially enlarged view of a portion C of fig. 3. Fig. 5 is a partially enlarged view of a portion D of fig. 3. Fig. 6 is a left side view of the vacuum welding furnace shown in fig. 1. Fig. 7 is a rear view of the vacuum welding furnace shown in fig. 1. Fig. 8 is a plan view of the vacuum welding furnace shown in fig. 1. Fig. 9 is a front view of the vacuum welding furnace shown in fig. 1. Fig. 10 is a partially enlarged view of a portion E of fig. 9. FIG. 11 is a sectional view of the vacuum welding furnace shown in FIG. 8 taken along the line F-F'. Fig. 12 is a sectional view of the vacuum welding furnace shown in fig. 8 taken along line G-G'. Fig. 13 is a partially enlarged view of a portion H of fig. 11. Fig. 14 is a partially enlarged view of a portion I of fig. 11. Fig. 15 is a partially enlarged view of a portion K of fig. 12. Fig. 16 is a partially enlarged view of a portion L of fig. 12. FIG. 17 is a sectional view of the vacuum welding furnace shown in FIG. 12 taken along the line J-J'. Fig. 18 is a schematic view of the main graphite hot plate of the vacuum welding furnace of fig. 1 mounted on a bottom reflector plate. Fig. 19 is a partially enlarged view of a portion M of fig. 17. Fig. 20 is a schematic view of the structure of the vacuum welding furnace of fig. 1 in which the graphite heating tape at the four edges is attached. Fig. 21 is a schematic view of the main graphite heating disk of the vacuum welding furnace of fig. 1. Figure 22 is a perspective view of the coil mounted on a graphite boat. Fig. 23 is a bottom view of the structure shown in fig. 22. Fig. 24 is a plan view of a graphite boat of the vacuum welding furnace shown in fig. 1. Fig. 25 is a left side view of the graphite boat of the vacuum welding furnace shown in fig. 1. Fig. 26 is a perspective view of a furnace chamber of the vacuum welding furnace of fig. 1. Fig. 27 is a perspective view schematically showing a furnace body of the vacuum welding furnace shown in fig. 1. Fig. 28 is a partially enlarged view of a portion O of fig. 27. Fig. 29 is a bottom view of the furnace body shown in fig. 27. Fig. 30 is a state view of the furnace body shown in fig. 27 with the furnace lid opened.

Wherein: a base-1; a furnace body-2; a hearth-21; a furnace floor-22; a furnace cover-23; a first longitudinal axis of articulation-24; an upper sealing strip-25; a lower sealing strip-26; a second longitudinal axis of articulation-27; an opening and closing device-3; a cylinder-31 for opening the cover; a hook cylinder-32; a locking cylinder-33; an ear plate-34; a third hinge longitudinal axis-35; an upper hook device-36; a fourth longitudinal axis of articulation-37; an upper rotating plate-38; top longitudinal rod-310; lower hook means-311; lower hook means-311; a fifth longitudinal axis of articulation-312; a lower rotating plate-313; a hanging rod-314; a hanging rod movable groove-315; a seventh longitudinal axis of articulation-316; an eighth longitudinal axis of articulation-317; a ninth articulating longitudinal axis-318; a lower toothed plate-319; an upper toothed plate-320; a hanging rod mounting rack-321; a vertical plate-322; a bottom panel-323; a support-41; edge support-411; a central support-412; a bottom reflector dish-42; main graphite heating disk-43; a central through-hole-431; graphite boat-44; a graphite boat heat dissipation hole-441; coil groove-442; a graphite boat support frame-45; an edge graphite heating belt-46; edge reflection band-47; -48 an electrode; vacuum tube-5; a nitrogen inlet and outlet pipe-6; a heat insulation column-7; a hearth cooling channel-71; furnace cover cooling channel-72, furnace bottom plate cooling channel-73; -74 of coiled tubing; welding tooling-8; a cooling liquid pipe inlet and outlet hole-9.

Detailed Description

The invention is further illustrated by the following figures and examples.

Example 1. As shown in fig. 1-30, a vacuum welding furnace capable of rapidly welding semiconductor products comprises a base 1, a furnace body 2, a welding system, a vacuum system, a nitrogen system, and a water cooling system.

The furnace body 2 comprises a hearth 21 with a cross section shaped like a Chinese character 'kou', a furnace bottom plate 22 capable of sealing the bottom of the hearth 21, a furnace cover 23 capable of sealing the top of the hearth 21, a furnace cover opening and closing device 3 and a sealing device; the left end of the furnace cover 23 is hinged with the top of the left side surface of the hearth 21 through a first hinge longitudinal shaft 24, and a junction part of the furnace cover 23 and the hearth 21 is provided with an upper sealing strip 25 in a shape like a Chinese character 'kou'; the left end of the furnace bottom plate 22 is hinged with the bottom of the left side surface of the hearth 21 through a second hinge longitudinal shaft 27, and a lower sealing strip 26 in a shape like a Chinese character 'kou' is arranged at the joint part of the furnace bottom plate 22 and the hearth 21; the hearth 21, the furnace bottom plate 22 and the furnace cover 23 are all made of metal materials; the furnace floor 22 is provided on the susceptor 1. The furnace cover opening and closing device 3 comprises an uncovering cylinder 31 arranged on the left side of the hearth 21, a hook cylinder 32 arranged in the middle of the right end of the top surface of the furnace cover 23, and two locking cylinders 33 arranged on the right end of the bottom surface of the furnace bottom plate 22; the surfaces of the output shaft of the uncovering cylinder 31, the output shaft of the hook cylinder 32 and the output shaft of the locking cylinder 33 are all perpendicular to the first hinge longitudinal shaft 24; the left end of the top surface of the furnace cover 23 is provided with an ear plate 34, and the top end of the cover-opening cylinder 31 is hinged with the ear plate 34 through a third hinge longitudinal axis 35.

Two upper hook devices 36 are symmetrically arranged at the right end of the furnace cover 23 along the hook cylinder 32, each upper hook device 36 comprises a fourth hinge longitudinal shaft 37 and an upper rotating plate 38 sleeved on the fourth hinge longitudinal shaft 37, and a hook 39 with a leftward opening is arranged at the bottom of the upper rotating plate 38; the top ends of the two upper rotating plates 38 are connected through a top vertical rod 310; the top vertical rod 310 is hinged with the upper end of the hook cylinder 32. The right end of the furnace floor 22 is provided with a fifth articulated longitudinal shaft 312; two lower hook devices 311 are symmetrically arranged at the right end of the furnace cover 23 along the hook cylinder 32; each lower hook device 311 comprises a fifth hinging longitudinal shaft 312 and two lower rotating plates 313 sleeved on the fifth hinging longitudinal shaft 312, and the top of each lower rotating plate 313 is provided with a hanging rod 314; the bottom end of each lower rotating plate 313 is hinged with a locking cylinder 33; when the furnace cover 23 is jointed with the furnace 21, the two upper rotating plates 38 are controlled to rotate by the cover opening air cylinder 31, and the two lower rotating plates 313 are controlled to rotate by the two locking air cylinders 33, so that the hanging rods 314 of the lower rotating plates 313 can enter the hooks 39 of the upper rotating plates 38 above the lower rotating plates.

The welding system comprises a support 41, a bottom reflecting disc 42, a main graphite heating disc 43, a graphite boat 44, a graphite boat supporting frame 45, a four-edge graphite heating belt 46, a four-edge reflecting belt 47 and an electrode 48; a main graphite heating plate 43, a graphite boat supporting frame 45 and a graphite boat 44 are arranged on the bracket 41 from bottom to top; the bottom reflecting disc 42 is arranged below the main graphite heating disc 43, and the top surface of the bottom reflecting disc 42 is not in contact with the bottom surface of the main graphite heating disc 43 and the top surface of the main graphite heating disc 43 is not in contact with the bottom surface of the graphite boat supporting frame 45; the edge reflection bands 47 are respectively installed on an inner side wall of the furnace 21, and the edge graphite heating bands 46 are respectively installed on the inner side of one edge reflection band 47. The bottom reflecting plate 42 is arranged on the furnace bottom plate 22; the bracket 41 is mounted on the bottom reflecting plate 42; the main graphite heating plate 43 and each edge graphite heating belt 46 are connected with an electrode 48 arranged on the hearth 21; the graphite boat 44 is provided with a plurality of graphite boat heat dissipation holes 441. The vacuum system comprises a vacuum-pumping pipe 5 arranged on the hearth 21, and the vacuum-pumping pipe 5 is connected with a vacuum-pumping device arranged outside the furnace body 2.

The nitrogen system comprises a nitrogen inlet and outlet pipe 6 arranged on the hearth 21, and the nitrogen inlet and outlet pipe 6 is connected with a nitrogen pumping device arranged outside the furnace body 2. The water system comprises a plurality of hearth cooling channels 71 respectively arranged on each side wall of the hearth 21, a plurality of furnace cover cooling channels 72 arranged on the furnace cover 23, a plurality of furnace bottom plate cooling channels 73 arranged on the furnace bottom plate 22, a coil groove 442 arranged on the bottom surface of the graphite boat 44 and a coil 74 arranged on the coil groove 442; the bottom surface of each coil groove 442 is in contact with the graphite boat support frame 45; the coil pipe 74 penetrates through the hearth 21 and is connected with a cooling liquid pumping device and a cooling liquid box which are arranged outside the furnace body 2; inlets and outlets of the hearth cooling channels 71, the furnace cover cooling channels 72 and the furnace bottom plate cooling channels 73 are respectively connected with a cooling liquid pumping device and a cooling liquid box which are arranged outside the furnace body 2 through pipelines. Each hearth cooling channel 71, each furnace cover cooling channel 72 and each furnace bottom plate cooling channel 73 are spiral pipelines; and a water hammer eliminator is arranged on a pipeline between each hearth cooling channel 71, each furnace cover cooling channel 72, each furnace bottom plate cooling channel 73 and a cooling liquid pumping device arranged outside the furnace body. The top of each lower rotating plate 313 is provided with a hanging rod movable groove 315, the hanging rod movable groove 315 is provided with a hanging rod 314, and the hanging rod 314 can move up and down in the hanging rod movable groove 315.

As shown in fig. 9-10, lower rotary plate 313 includes fixedly coupled lower tooth plate 319, upper tooth plate 320; the top end of the upper toothed plate 320 is provided with a hanging rod mounting rack 321, the hanging rod mounting rack 321 comprises a bottom surface plate 323 and two vertical plates 322, and the two vertical plates 322 are symmetrically arranged along the upper rotating plate closest to the two vertical plates; each vertical plate 322 is provided with a hanging rod movable groove 315, and two ends of the hanging rod 314 are respectively positioned in the hanging rod movable grooves 315 of the two vertical plates 322. The edge reflection band 47 includes an edge reflection band body made of metal, and an edge reflection band coating is provided on an inner side surface of the edge reflection band body; the bottom reflector plate 42 comprises a bottom reflector plate body made of metal with a bottom reflector plate coating on the inside surface of the bottom reflector plate body. The edge reflection band coating is made of silver; the bottom reflecting plate coating is made of silver.

The top surface of the furnace body 2 is provided with an upper sealing strip mounting groove for mounting an upper sealing strip 25, and the bottom surface of the furnace body 2 is provided with a lower sealing strip mounting groove for mounting a lower sealing strip 26. The bracket 41 comprises a central bracket 412 and a plurality of edge brackets 411, a central through hole 431 is formed in the center of the main graphite heating plate 43, steps for placing the main graphite heating plate 43 are formed in the central bracket 412 and the edge brackets 411, and the central bracket 412 penetrates through the central through hole 431 of the main graphite heating plate 43; the top ends of the edge bracket 411 and the center bracket 412 are connected with the graphite boat support frame 45. The main graphite heating disk 43 comprises three connector graphite strips which are arranged in a spiral around a central through hole 431. The thickness of the furnace cover is 80mm, the thickness of the hearth and the furnace bottom is 350mm, the highest heating temperature is 500 ℃, and the highest heating speed can reach 220 ℃/min; under the condition of not using nitrogen gas for cooling, the cooling speed can reach 120 ℃/min. The graphite is electrically heated, isostatic high-purity graphite with excellent heat conductivity is selected, the temperature uniformity among points can be ensured, and the temperature difference among samples is less than +/-1.5 ℃. The PID parameters of temperature control are self-checked, the heating rate can be adjusted, the temperature control precision is +/-0.1 ℃, and the temperature fluctuation degree of each point is +/-1.0 ℃. The bottom surface of the graphite tape is parallel to the ground.

A welding tool 8 is placed on the graphite boat 44, and a to-be-welded part is placed in the welding tool 8; the welding tool 8 is made of graphite; the hearth 21, the furnace cover 23 and the furnace bottom plate 22 are made of aluminum. The main graphite heating plate 43, the graphite boat 44, the graphite boat support frame 45, the edge graphite heating belt 46 and the like adopt an anti-corrosion graphite heat conduction material, and the surface is sprayed with Teflon to resist corrosion of strong acid and strong base. The whole machine is subjected to anticorrosion spraying treatment, and the normal work of the instrument in an acid environment is ensured.

The lower end of the hook cylinder 32 is hinged with the furnace cover 23 through a seventh hinge longitudinal shaft 316; the bottom end of the uncovering cylinder 31 is hinged with the base 1 through an eighth hinge longitudinal shaft 317; the bottom end of each lower rotating plate 313 is hinged to the right end of a locking cylinder 33 by a ninth hinge longitudinal axis 318. Four corners of the furnace floor 22 are mounted on the base 1 by four heat insulating columns 7. A cooling liquid pipe inlet and outlet hole 9 is formed in the hearth 21, and the coil pipe penetrates through the cooling liquid pipe inlet and outlet hole 9.

Claims

1. a vacuum welding furnace capable of realizing rapid welding of semiconductor products, comprising a base, a furnace body, a welding system, a vacuum system, a nitrogen system, and a water cooling system, characterized in that:

The furnace body includes a furnace chamber with a cross section of a "mouth" shape, a furnace bottom plate that can seal the bottom of the furnace chamber, a furnace cover that can seal the top of the furnace chamber, a furnace lid opening and closing device, and a sealing device; the left end of the furnace lid and the left side of the furnace chamber are The top of the furnace is hinged through the first hinged longitudinal axis, and the joint part of the furnace cover and the furnace is provided with a "mouth"-shaped upper sealing strip; the left end of the furnace bottom plate and the bottom of the left side of the furnace are hinged through the second hinged longitudinal axis, The joint part of the furnace bottom plate and the furnace hearth is provided with a "mouth"-shaped lower sealing strip; the furnace hearth, the furnace bottom plate and the furnace cover are all made of metal materials; the furnace bottom plate is arranged on the base;

The furnace cover opening and closing device includes a cover opening cylinder arranged on the left side of the furnace, a hooking cylinder arranged in the middle of the right end of the top surface of the furnace cover, and two locking cylinders arranged at the right end of the bottom surface of the furnace floor; the cover opening cylinder The surface of the output shaft, the output shaft of the hook cylinder, and the output shaft of the locking cylinder are all perpendicular to the first hinged longitudinal axis; the left end of the top surface of the furnace cover is provided with a lug plate, and the top of the opening cylinder and the lug plate pass through the third joint. hinged longitudinal axis hinged;

The right end of the furnace cover is symmetrically provided with two upper hook devices along the hook cylinder. Hook; the top ends of the two upper turning plates are connected by the top longitudinal rod; the top longitudinal rod is hinged with the upper end of the hook cylinder;

The right end of the furnace bottom plate is provided with a fifth hinged longitudinal axis; the right end of the furnace cover is symmetrically provided with two lower hook devices along the hook cylinder; The top of each lower turning plate is provided with a hanging rod; the bottom end of each lower turning plate is hinged with a locking cylinder; The locking cylinder controls the rotation of the two lower turning plates, so that the hanging rod of each lower turning plate can enter the hook of the upper turning plate above it;

The welding system includes a bracket, a bottom reflection plate, a main graphite heating plate, a graphite boat, a graphite boat support frame, a four-edge graphite heating strip, a four-edge reflection strip, and electrodes; Graphite boat support frame, graphite boat; the bottom reflection plate is arranged below the main graphite heating plate, between the top surface of the bottom reflection plate and the bottom surface of the main graphite heating plate, the top surface of the main graphite heating plate and the bottom surface of the graphite boat support frame There is no contact between them; each edge reflection band is respectively installed on an inner side wall of the furnace, and each edge graphite heating band is respectively installed on the inner side of an edge reflection band;

The bottom reflecting plate is installed on the bottom plate of the furnace; the bracket is installed on the bottom reflecting plate; the main graphite heating plate and each edge graphite heating belt are connected with the electrodes arranged on the furnace; the graphite boat is provided with a number of graphite boat cooling holes;

The vacuum system includes an evacuation tube arranged on the furnace, and the evacuation tube is connected with a vacuum device arranged outside the furnace;

The nitrogen system includes a nitrogen inlet and outlet pipe arranged on the furnace, and the nitrogen inlet and outlet pipes are connected with a nitrogen pumping device arranged outside the furnace;

The water system includes several furnace cooling channels respectively arranged on each side wall of the furnace, several furnace cover cooling channels arranged on the furnace cover, several furnace bottom cooling channels arranged on the furnace bottom plate, and several furnace bottom cooling channels arranged on the bottom surface of the graphite ship. The bottom surface of each coil groove is in contact with the graphite ship support frame; the coil passes through the furnace and is connected to the cooling liquid pumping device and the cooling liquid set outside the furnace. The inlet and outlet of each furnace cooling channel, furnace cover cooling channel and furnace bottom cooling channel are respectively connected with the cooling liquid pumping device and the cooling liquid tank arranged outside the furnace through pipelines.

2. A vacuum welding furnace capable of realizing rapid welding of semiconductor products as claimed in claim 1, wherein the top of each lower turning plate is provided with a hanging rod movable groove, the hanging rod movable groove is provided with a hanging rod, and the hanging rod It can move up and down in the movable slot of the hanging rod.

3. A vacuum welding furnace capable of realizing rapid welding of semiconductor products as claimed in claim 2, characterized in that: the lower rotating plate comprises a fixedly connected lower tooth plate and an upper tooth plate; the top of the upper tooth plate is provided with a hanging rod Mounting frame, the hanging rod mounting frame includes a bottom panel and two vertical plates, and the two vertical plates are arranged symmetrically along the upper turning plate closest to it; each vertical plate is provided with a hanging rod movable slot, and the two ends of the hanging rod are located on the two vertical plates respectively. in the movable slot of the hanging rod.

4. A vacuum welding furnace capable of realizing rapid welding of semiconductor products as claimed in claim 1, wherein the edge reflection strip comprises an edge reflection strip body made of metal, and the inner side of the edge reflection strip body is provided with The edge reflection strip is coated; the bottom reflection disc includes a bottom reflection disc body made of metal, and a bottom reflection disc coating is arranged on the inner side of the bottom reflection disc body.

5. A vacuum welding furnace as claimed in claim 4, characterized in that: the edge reflection band coating is an edge reflection band coating made of silver; the bottom reflection disc coating is a bottom reflection plate coating made of silver Reflective disc coating.

6. A vacuum welding furnace capable of realizing rapid welding of semiconductor products according to claim 1, wherein the top surface of the furnace body is provided with an upper sealing strip installation groove for installing the upper sealing strip, and the bottom surface of the furnace body is provided with an upper sealing strip installation groove. There is a lower sealing strip installation groove for installing the lower sealing strip.

7. A vacuum welding furnace capable of realizing rapid welding of semiconductor products as claimed in claim 6, wherein the support comprises a center support and several edge supports, and a center through hole is provided in the center of the main graphite heating plate, and the center The bracket and the edge bracket are provided with steps for placing the main graphite heating plate, and the center bracket passes through the central through hole of the main graphite heating plate; the tops of the edge bracket and the center bracket are connected with the graphite ship support frame.

8 . The vacuum welding furnace capable of realizing rapid welding of semiconductor products according to claim 7 , wherein the main graphite heating plate comprises three graphite ribbons with terminals, and the graphite ribbons are spirally arranged around the central through hole. 9 .

9. A vacuum welding furnace capable of realizing rapid welding of semiconductor products as claimed in claim 1, characterized in that: a welding tool is placed on the graphite ship, and the parts to be welded are placed in the welding tool; the welding tool is made of graphite; The furnace hearth, furnace cover and furnace bottom plate are made of aluminum.

10. A vacuum welding furnace capable of realizing rapid welding of semiconductor products as claimed in claim 1, characterized in that: the lower end of the hooking cylinder is hinged with the furnace cover through the seventh hinged longitudinal axis; the bottom end of the opening cylinder is connected to the base It is hinged through the eighth hinged longitudinal axis; the bottom end of each lower turning plate is hinged with the right end of a locking cylinder through the ninth hinged longitudinal axis; the four corners of the furnace bottom plate are mounted on the base through four thermal insulation columns.