CN214291274U - Vacuum welding furnace body capable of realizing rapid welding of semiconductor products - Google Patents

Abstract

The utility model discloses a vacuum welding furnace body capable of realizing the rapid welding of semiconductor products, which comprises a furnace hearth with a cross section in a shape of Chinese character kou, a furnace bottom plate capable of sealing the bottom of the furnace hearth, a furnace cover capable of sealing the top of the furnace hearth, a furnace cover opening and closing device and a sealing device; the left end of the furnace cover is hinged with the top of the left side surface of the hearth through a first hinge longitudinal shaft, and a junction of the furnace cover and the hearth is provided with an upper sealing strip in a shape like a Chinese character 'kou'; the left end of the furnace bottom plate is hinged with the bottom of the left side surface of the hearth through a second hinge longitudinal shaft, and a junction of the furnace bottom plate and the hearth is provided with a lower sealing strip in a shape like a Chinese character 'kou'; the hearth, the furnace bottom plate and the furnace cover are all made of metal materials; the opening and closing device comprises an uncovering cylinder arranged on the left side of the hearth, a hook cylinder arranged in the middle of the right end of the top surface of the furnace cover, and two locking cylinders arranged at the right end of the bottom surface of the furnace bottom plate. The vacuum welding furnace body of the utility model has the characteristics of reliable vacuum performance and easy maintenance.

Description

Vacuum welding furnace body capable of realizing rapid welding of semiconductor products

Technical Field

The utility model relates to a semiconductor welding equipment belongs to vacuum welding technical field.

Background

Under the rapid development environment of modern integrated circuits and electronic technologies, semiconductor products are more and more widely applied, and with the improvement of the fine requirements on the quality of semiconductor products, especially semiconductor metal packaging devices and semiconductor ceramic packaging devices, the traditional reflow soldering process, the soldering quality and the void ratio can not meet the quality requirements of the semiconductor products.

At present, the traditional vacuum reflow oven heats the circuit board by utilizing the hot air generated by filaments in the heating box and the hot air circulation mode, the heating tube heats the air of the heating box in the heating box, and then the fan conveys the hot air into the oven cavity of the reflow oven. In order to make the air outlet of the heating box uniform, the air outlet of the heating box is provided with a metal rectifying plate, and the rectifying plate is provided with a plurality of uniformly distributed small holes for guiding the hot air. The welding process of the circuit board on the conveying belt is that the circuit board heats the solder paste on the circuit board under the action of hot air, the soldering flux promotes the solder paste to melt, and finally the temperature of the circuit board is reduced under the action of the cooling fan, the solder paste is solidified, and the welding process is completed. In the welding mode of hot air heating, the heating of the circuit board is transferred and heated from the surface to the inner surface, so that the tin paste on the circuit board is easy to generate bubbles in the heating process, the phenomenon of false soldering due to cold soldering occurs in the welding process, the product quality is seriously influenced, and according to incomplete statistics, the defective products generated in the mode of bubbles account for about 50 percent of all the defective products. Secondly, because the efficiency of heat transfer by hot air is low, especially the heat absorption capacity of the flexible circuit board provided with the tool fixture is very large, the circuit board is not heated sufficiently due to the low-efficiency heating mode, the local temperature is higher, and the like, so that poor welding phenomena such as circuit board deformation and the like occur, and the product quality is seriously influenced; thirdly, the rectifying plate does not generate heat, the surface temperature does not reach the gasification temperature required by the soldering flux, so that the soldering flux is easy to adhere and condense on the rectifying plate, and the maintenance and the cleaning are quite difficult. On the other hand, the cavity door of the vacuum reflow oven has a complex structure, the weight is more than 20KG, and if the vacuum reflow oven is manually opened and closed, a common female operator is difficult to independently complete, and automatic integration cannot be realized. Most of the temperature control modes of the vacuum reflow oven adopt the integration of temperature sensing element inserted temperature control and heating plate, and the heating plate is inconvenient to disassemble and customize. The vacuum reflow soldering apparatus has several problems: 1. the hot air reflow furnace is used as a heating device, so that the problems of poor welding such as cold solder and circuit board deformation caused by poor welding due to the fact that the heating speed is low, the highest heating temperature is low, and the circuit board is heated unevenly to generate bubbles in solder paste; 2. the surface temperature of the rectifying plate is low, so that the adhesion and condensation of soldering flux are easily caused, and the maintenance and cleaning are difficult; 3. the infrared welding technology adopted in the prior art has the problems that although the heat source is convenient to control, the photosensitive points are shielded, the heating effect is influenced by the different qualities of elements and PCBs, the temperature difference is large and the like; 4. the screw thread of the cavity cover is easy to cause secondary pollution after long-term use, the granularity is reduced, and the common screw-thread door lock device is made of thin material, is easy to deform due to external impact and cannot be used, and has poor durability; 5. in the prior art, the temperature control mode adopts a heating plate insertion type, and the disassembly is inconvenient. 6. In the welding process of the furnace body made of metal, due to frequent cooling and heating, the bottom of the furnace body and the side wall of the furnace body are required to be thicker, otherwise small cracks which are not easy to find are easy to appear between the bottom of the furnace body and the side wall of the furnace body, and the welding quality is affected.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a can realize semiconductor product rapid weld's vacuum welding stove furnace body to prior art not enough, its characteristics that have the vacuum performance reliable, easily maintain.

The utility model adopts the technical proposal as follows.

The utility model provides a can realize semiconductor product rapid weld's vacuum welding stove furnace body which characterized in that: the furnace body comprises a furnace hearth with a cross section in a shape of Chinese character kou, a furnace bottom plate capable of sealing the bottom of the furnace hearth, a furnace cover capable of sealing the top of the furnace hearth and a furnace cover opening and closing device; the left end of the furnace cover is hinged with the top of the left side surface of the hearth through a first hinge longitudinal shaft, and a junction of the furnace cover and the hearth is provided with an upper sealing strip in a shape like a Chinese character 'kou'; the left end of the furnace bottom plate is hinged with the bottom of the left side surface of the hearth through a second hinge longitudinal shaft, and a junction of the furnace bottom plate and the hearth is provided with a lower sealing strip in a shape like a Chinese character 'kou'; the hearth, the furnace bottom plate and the furnace cover are all made of metal materials.

The furnace cover opening and closing device comprises an uncovering cylinder arranged on the left side of the hearth, a hook cylinder arranged in the middle of the right end of the top surface of the furnace cover, and two locking cylinders arranged at the right end of the bottom surface of the furnace bottom plate; the surfaces of the output shaft of the uncovering cylinder, the output shaft of the hook cylinder and the output shaft of the locking cylinder are all perpendicular to the first hinge longitudinal axis; the left end of the top surface of the furnace cover is provided with an ear plate, and the top end of the uncovering cylinder is hinged with the ear plate through a third hinge longitudinal shaft.

Two upper hook devices are symmetrically arranged at the right end of the furnace cover along the hook cylinder, each upper hook device comprises a fourth hinge longitudinal shaft and an upper rotating plate sleeved on the fourth hinge longitudinal shaft, and a hook with a left opening is arranged at the bottom of the upper rotating plate; the top ends of the two upper rotating plates are connected through a vertical pushing rod; the top vertical rod is hinged with the upper end of the hook cylinder.

The right end of the furnace bottom plate is provided with a fifth hinged longitudinal shaft; two lower hook devices are symmetrically arranged at the right end of the furnace cover along the hook cylinder; each lower hook device comprises two lower rotating plates sleeved on the fifth hinge longitudinal shaft, and a hanging rod is arranged at the top of each lower rotating plate; the bottom end of each lower rotating plate is hinged with a locking cylinder; when the furnace cover is attached to the hearth, the rotation of the two upper rotating plates is controlled by the cover opening cylinder, and the rotation of the two lower rotating plates is controlled by the two locking cylinders, so that the hanging rods of the lower rotating plates can enter the hooks of the upper rotating plates above the lower rotating plates.

Two cooling liquid pipe inlet and outlet holes are arranged on the hearth and are connected with a cooling liquid pumping device arranged outside the hearth; the hearth is provided with a nitrogen inlet and outlet pipe which is connected with a nitrogen pumping device arranged outside the furnace body.

The hearth is provided with a vacuum-pumping pipe which is connected with a vacuum-pumping device arranged outside the furnace body.

Each side wall of the hearth is provided with a plurality of hearth cooling channels; a plurality of furnace cover cooling channels are arranged on the furnace cover; a plurality of furnace bottom plate cooling channels are arranged on the furnace bottom plate; the inlets and outlets of the hearth cooling channels, the furnace cover cooling channels and the furnace bottom plate cooling channels are respectively connected with a cooling liquid pumping device and a cooling liquid box which are arranged outside the furnace body through pipelines.

As an optimal technical scheme, the top of each lower rotating plate is provided with a hanging rod movable groove, the hanging rod movable groove is provided with a hanging rod, and the hanging rod can move up and down in the hanging rod movable groove.

As the preferred technical scheme, the lower rotary plate comprises a lower toothed plate and an upper toothed plate which are fixedly connected; the top end of the upper toothed plate is provided with a hanging rod mounting rack, the hanging rod mounting rack comprises a bottom surface plate and two vertical plates, and the two vertical plates are symmetrically arranged along the upper rotating plate closest to the bottom surface plate; each vertical plate is provided with a hanging rod movable groove, and two ends of each hanging rod are respectively positioned in the hanging rod movable grooves of the two vertical plates.

As a preferred technical scheme, the bottom end of each lower toothed plate is hinged with the right end of a locking cylinder through a sixth hinge longitudinal shaft; the lower end of the hook cylinder is hinged with the furnace cover through a seventh hinge longitudinal shaft.

As a preferred technical scheme, the hearth, the furnace cover and the furnace bottom plate are made of aluminum.

As the preferred technical scheme, the first hinged longitudinal shaft is arranged at the left end of the hearth through a first hinged longitudinal shaft supporting frame; the two locking cylinders are connected to the bottom surface of the furnace bottom plate through the tightening cylinder support.

As preferred technical scheme, the top surface of furnace body is equipped with the sealing strip mounting groove of going up that is used for installing the sealing strip, and the bottom surface of furnace body is equipped with the sealing strip mounting groove of going down that is used for installing the sealing strip.

The utility model has the advantages that: the opening and closing device comprises an uncovering cylinder arranged on the left side of the hearth, a hook cylinder arranged in the middle of the right end of the top surface of the furnace cover and two locking cylinders arranged at the right end of the bottom surface of the furnace bottom plate, the uncovering cylinder, the hook cylinder and the two locking cylinders are mutually matched, a hanging rod movable groove is arranged at the top of the lower rotating plate, and when a hook of the upper rotating plate is hung, the hanging rod is hung and placed reliably and has a good sealing effect. The hearth, the furnace bottom plate and the furnace cover of the furnace body are made of split metal, and the pressure born by the furnace body is large. The hearth, the furnace bottom plate and the furnace cover are all provided with cooling liquid channels, and the hearth, the furnace bottom plate and the furnace cover are heated and cooled rapidly; the furnace, the furnace bottom plate and the furnace cover are connected through the opening and closing device, after the furnace, the furnace bottom plate and the furnace cover are used for a period of time, the effectiveness of sealing can be realized only by replacing the upper sealing strip and the lower sealing strip, and the problem that in case that in the prior art, when the furnace and the furnace bottom plate are integrally cast, the welding part between the furnace and the furnace bottom plate is difficult to repair in case of gas leakage possibly occurring under the pressure change of long-term use is solved. Set up two locking cylinders and along couple cylinder symmetric distribution, the sealed effectual and small that account for and open and the device usefulness in right side of furnace.

Drawings

FIG. 1 is a schematic view of the three-dimensional structure of the vacuum welding furnace body of the utility model for rapidly welding semiconductor products.

Fig. 2 is a partially enlarged view of a portion a of fig. 1.

Fig. 3 is a partially enlarged view of a portion B of fig. 1.

Fig. 4 is a partially enlarged view of a portion C of fig. 1.

Fig. 5 is a partially enlarged view of a portion D of fig. 4.

Fig. 6 is a partially enlarged view of a portion E of fig. 4.

Fig. 7 is a top view of the vacuum welding furnace body of fig. 1 for achieving rapid welding of semiconductor products.

Fig. 8 is a left side view of the vacuum welding furnace body of fig. 1 for achieving rapid welding of semiconductor products.

Fig. 9 is a right side view of the vacuum welding furnace body of fig. 1 for achieving rapid welding of semiconductor products.

Fig. 10 is a partially enlarged view of a portion F of fig. 9.

Fig. 11 is a schematic view showing the furnace cover of the vacuum welding furnace body for performing rapid welding of semiconductor products shown in fig. 1 when the furnace cover is opened.

Fig. 12 is a partially enlarged view of a portion G of fig. 11.

Fig. 13 is a partially enlarged view of a portion H of fig. 11.

Fig. 14 is a partially enlarged view of a portion I of fig. 11.

Wherein: a first articulated longitudinal axis support frame-1;

a hearth-21; a furnace floor-22; a furnace cover-23; a first longitudinal axis of articulation-24; an upper sealing strip-25; a lower sealing strip-26; a second longitudinal axis of articulation-27;

a cylinder-31 for opening the cover; a hook cylinder-32; a locking cylinder-33; an ear plate-34; a third hinge longitudinal axis-35; an upper hook device-36; a fourth longitudinal axis of articulation-37; an upper rotating plate-38; a hook-39; top longitudinal rod-310; lower hook means-311; a fifth longitudinal axis of articulation-312; a lower rotating plate-313; a hanging rod-314; hanging rod movable hole-315; a hanging rod mounting rack-316; a bottom panel-317; a riser-318; a lower toothed plate-319; an upper toothed plate-320; sixth longitudinal axis of articulation-321; a seventh longitudinal axis of articulation-322;

a nitrogen inlet and outlet pipe-4;

a cooling liquid pipe inlet and outlet hole-5;

a contracted cylinder support-6;

a vacuum pumping pipe-7;

a hearth cooling channel-81; a furnace lid cooling channel-82; furnace floor cooling channels-83.

Detailed Description

The present embodiment will be further described with reference to the drawings and examples.

Example 1. As shown in fig. 1-14, a vacuum welding furnace body for realizing rapid welding of semiconductor products, the furnace body comprises a hearth 21 with a cross section in a shape of Chinese character kou, a furnace bottom plate 22 capable of sealing the bottom of the hearth 21, a furnace cover 23 capable of sealing the top of the hearth 21, and a furnace cover opening and closing device; the left end of the furnace cover 23 is hinged with the top of the left side surface of the hearth 21 through a first hinge longitudinal shaft 24, and a junction part of the furnace cover 23 and the hearth 21 is provided with an upper sealing strip 25 in a shape like a Chinese character 'kou'; the left end of the furnace bottom plate 22 is hinged with the bottom of the left side surface of the hearth 21 through a second hinge longitudinal shaft 27, and a lower sealing strip 26 in a shape like a Chinese character 'kou' is arranged at the joint part of the furnace bottom plate 22 and the hearth 21; the hearth 21, the furnace bottom plate 22 and the furnace cover 23 are all made of metal materials.

The furnace cover opening and closing device comprises an uncovering cylinder 31 arranged on the left side of the hearth 21, a hook cylinder 32 arranged in the middle of the right end of the top surface of the furnace cover 23, and two locking cylinders 33 arranged on the right end of the bottom surface of the furnace bottom plate 22; the surfaces of the output shaft of the uncovering cylinder 31, the output shaft of the hook cylinder 32 and the output shaft of the locking cylinder 33 are all perpendicular to the first hinge longitudinal shaft 24; the left end of the top surface of the furnace cover 23 is provided with an ear plate 34, and the top end of the cover-opening cylinder 31 is hinged with the ear plate 34 through a third hinge longitudinal axis 35.

Two upper hook devices 36 are symmetrically arranged at the right end of the furnace cover 23 along the hook cylinder 32, each upper hook device 36 comprises a fourth hinge longitudinal shaft 37 and an upper rotating plate 38 sleeved on the fourth hinge longitudinal shaft 37, and a hook 39 with a leftward opening is arranged at the bottom of the upper rotating plate 38; the top ends of the two upper rotating plates 38 are connected through a top vertical rod 310; the top vertical rod 310 is hinged with the upper end of the hook cylinder 32.

The right end of the furnace floor 22 is provided with a fifth articulated longitudinal shaft 312; two lower hook devices 311 are symmetrically arranged at the right end of the furnace cover 23 along the hook cylinder 32; each lower hook device 311 comprises two lower rotating plates 313 sleeved on the fifth hinge longitudinal shaft 312, and a hanging rod 314 is arranged at the top of each lower rotating plate 313; the bottom end of each lower rotating plate 313 is hinged with a locking cylinder 33; when the furnace cover 23 is jointed with the furnace 21, the two upper rotating plates 38 are controlled to rotate by the cover opening air cylinder 31, and the two lower rotating plates 313 are controlled to rotate by the two locking air cylinders 33, so that the hanging rods 314 of the lower rotating plates 313 can enter the hooks 39 of the upper rotating plates 38 above the lower rotating plates.

Two cooling liquid pipe inlet and outlet holes 5 are arranged on the hearth 21, and the cooling liquid pipe inlet and outlet holes 5 are connected with a cooling liquid pumping device arranged outside the furnace body; the hearth 21 is provided with a nitrogen inlet and outlet pipe 4, and the nitrogen inlet and outlet pipe 4 is connected with a nitrogen pumping device arranged outside the furnace body.

The hearth 21 is provided with a vacuum tube 7, and the vacuum tube 7 is connected with a vacuum device arranged outside the furnace body.

A plurality of hearth cooling channels 81 are arranged on each side wall of the hearth 21; a plurality of furnace cover cooling channels 82 are arranged on the furnace cover 23; a plurality of furnace bottom plate cooling channels 83 are arranged on the furnace bottom plate 22; inlets and outlets of the hearth cooling channels 81, the furnace cover cooling channels 82 and the furnace bottom plate cooling channels 83 are respectively connected with a cooling liquid pumping device and a cooling liquid box which are arranged outside the furnace body through pipelines.

The top of each lower rotating plate 313 is provided with a hanging rod movable hole 315, the hanging rod movable hole 315 is provided with a hanging rod 314, and the hanging rod 314 can move up and down in the hanging rod movable hole 315.

The lower rotating plate 313 comprises a lower toothed plate 319 and an upper toothed plate 320 which are fixedly connected; the top end of the upper toothed plate 320 is provided with a hanging rod mounting rack 316, the hanging rod mounting rack 316 comprises a bottom panel 317 and two vertical panels 318, and the two vertical panels 318 are symmetrically arranged along the upper rotary panel 38 closest to the bottom panel 317; each vertical plate 318 is provided with a hanging rod movable hole 315, and two ends of the hanging rod 314 are respectively positioned in the hanging rod movable holes 315 of the two vertical plates 318.

The bottom end of each lower toothed plate 319 is hinged with the right end of a locking cylinder 33 through a sixth hinge longitudinal axis 321; the lower end of the hook cylinder 32 is hinged to the furnace cover 23 via a seventh hinge longitudinal axis 322.

The hearth 21, the furnace cover 23 and the furnace bottom plate 22 are made of aluminum.

The first hinged longitudinal shaft 24 is arranged at the left end of the hearth 21 through the first hinged longitudinal shaft 24 and the support frame 1; two locking cylinders 33 are connected to the bottom surface of the furnace floor 22 by tightening the cylinder support 6.

The top surface of the furnace body is provided with an upper sealing strip mounting groove for mounting an upper sealing strip 25, and the bottom surface of the furnace body is provided with a lower sealing strip mounting groove for mounting a lower sealing strip 26.

The above-mentioned embodiments are only for understanding the present invention, and are not intended to limit the technical solutions of the present invention, and those skilled in the relevant art can make various changes or modifications based on the technical solutions described in the claims, and all equivalent changes or modifications should be covered by the scope of the claims of the present invention. The parts of the present invention not described in detail are the known techniques of those skilled in the art.

Claims (7)

1. The utility model provides a can realize semiconductor product rapid weld's vacuum welding stove furnace body which characterized in that: the furnace body comprises a hearth (21) with a cross section shaped like a Chinese character 'kou', a furnace bottom plate (22) capable of sealing the bottom of the hearth (21), a furnace cover (23) capable of sealing the top of the hearth (21) and a furnace cover opening and closing device; the left end of the furnace cover (23) is hinged with the top of the left side surface of the hearth (21) through a first hinge longitudinal shaft (24), and a square-shaped upper sealing strip (25) is arranged at the joint part of the furnace cover (23) and the hearth (21); the left end of the furnace bottom plate (22) is hinged with the bottom of the left side surface of the hearth (21) through a second hinge longitudinal shaft (27), and a lower sealing strip (26) in a shape like a Chinese character 'kou' is arranged at the joint part of the furnace bottom plate (22) and the hearth (21); the hearth (21), the furnace bottom plate (22) and the furnace cover (23) are all made of metal materials;

the furnace cover opening and closing device comprises an uncovering cylinder (31) arranged on the left side of the hearth (21), a hook cylinder (32) arranged in the middle of the right end of the top surface of the furnace cover (23), and two locking cylinders (33) arranged at the right end of the bottom surface of the furnace bottom plate (22); the surfaces of the output shaft of the uncovering cylinder (31), the output shaft of the hook cylinder (32) and the output shaft of the locking cylinder (33) are all perpendicular to the first hinge longitudinal shaft (24); the left end of the top surface of the furnace cover (23) is provided with an ear plate (34), and the top end of the uncovering cylinder (31) is hinged with the ear plate (34) through a third hinge longitudinal shaft (35);

two upper hook devices (36) are symmetrically arranged at the right end of the furnace cover (23) along a hook cylinder (32), each upper hook device (36) comprises a fourth hinge longitudinal shaft (37) and an upper rotating plate (38) sleeved on the fourth hinge longitudinal shaft (37), and a hook (39) with a left opening is arranged at the bottom of the upper rotating plate (38); the top ends of the two upper rotating plates (38) are connected through a top longitudinal rod (310); the top longitudinal rod (310) is hinged with the upper end of the hook cylinder (32);

the right end of the furnace bottom plate (22) is provided with a fifth hinged longitudinal shaft (312); two lower hook devices (311) are symmetrically arranged at the right end of the furnace cover (23) along the hook cylinder (32); each lower hook device (311) comprises two lower rotating plates (313) sleeved on the fifth hinge longitudinal shaft (312), and the top of each lower rotating plate (313) is provided with a hanging rod (314); the bottom end of each lower rotating plate (313) is hinged with a locking cylinder (33); when the furnace cover (23) is attached to the hearth (21), the two upper rotating plates (38) are controlled to rotate by the cover opening air cylinder (31), and the two lower rotating plates (313) are controlled to rotate by the two locking air cylinders (33), so that the hanging rods (314) of the lower rotating plates (313) can enter the hooks (39) of the upper rotating plates (38) above the lower rotating plates;

two cooling liquid pipe inlet and outlet holes (5) are formed in the hearth (21), and the cooling liquid pipe inlet and outlet holes (5) are connected with a cooling liquid pumping device arranged outside the furnace body; a nitrogen inlet and outlet pipe (4) is arranged on the hearth (21), and the nitrogen inlet and outlet pipe (4) is connected with a nitrogen pumping device arranged outside the furnace body;

a vacuumizing pipe (7) is arranged on the hearth (21), and the vacuumizing pipe (7) is connected with a vacuumizing device arranged outside the furnace body;

a plurality of hearth cooling channels (81) are arranged on each side wall of the hearth (21); a plurality of furnace cover cooling channels (82) are arranged on the furnace cover (23); a plurality of furnace bottom plate cooling channels (83) are arranged on the furnace bottom plate (22); inlets and outlets of the hearth cooling channels (81), the furnace cover cooling channels (82) and the furnace bottom plate cooling channels (83) are respectively connected with a cooling liquid pumping device and a cooling liquid box which are arranged outside the furnace body through pipelines.

2. The vacuum welding furnace body capable of realizing the rapid welding of the semiconductor products as claimed in claim 1, characterized in that: the top of each lower rotating plate (313) is provided with a hanging rod movable hole (315), the hanging rod movable hole (315) is provided with a hanging rod (314), and the hanging rod (314) can move up and down in the hanging rod movable hole (315).

3. The vacuum welding furnace body capable of realizing the rapid welding of the semiconductor product according to claim 2, characterized in that: the lower rotating plate (313) comprises a lower toothed plate (319) and an upper toothed plate (320) which are fixedly connected; the top end of the upper toothed plate (320) is provided with a hanging rod mounting rack (316), the hanging rod mounting rack (316) comprises a bottom panel (317) and two vertical plates (318), and the two vertical plates (318) are symmetrically arranged along the upper rotating plate (38) closest to the bottom panel; hanging rod movable holes (315) are formed in the vertical plates (318), and two ends of the hanging rod (314) are respectively located in the hanging rod movable holes (315) of the two vertical plates (318).

4. The vacuum welding furnace body capable of realizing the rapid welding of the semiconductor product according to claim 3, characterized in that: the bottom end of each lower toothed plate (319) is hinged with the right end of a locking cylinder (33) through a sixth hinge longitudinal shaft (321); the lower end of the hook cylinder (32) is hinged with the furnace cover (23) through a seventh hinge longitudinal shaft (322).

5. The vacuum welding furnace body capable of realizing the rapid welding of the semiconductor products as claimed in claim 1, characterized in that: the hearth (21), the furnace cover (23) and the furnace bottom plate (22) are made of aluminum.

6. The vacuum welding furnace body capable of realizing the rapid welding of the semiconductor products as claimed in claim 1, characterized in that: the first hinged longitudinal shaft (24) is arranged at the left end of the hearth (21) through the first hinged longitudinal shaft (24) support frame (1); the two locking cylinders (33) are connected on the bottom surface of the furnace bottom plate (22) through a tightening cylinder bracket (6).

7. The vacuum welding furnace body capable of realizing the rapid welding of the semiconductor products as claimed in claim 1, characterized in that: the top surface of the furnace body is provided with an upper sealing strip mounting groove for mounting an upper sealing strip (25), and the bottom surface of the furnace body is provided with a lower sealing strip mounting groove for mounting a lower sealing strip (26).

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