CN210464772U - Differential pressure detection integrated block - Google Patents
Differential pressure detection integrated block Download PDFInfo
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- CN210464772U CN210464772U CN201921651984.4U CN201921651984U CN210464772U CN 210464772 U CN210464772 U CN 210464772U CN 201921651984 U CN201921651984 U CN 201921651984U CN 210464772 U CN210464772 U CN 210464772U
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- air guide
- gasket
- lower electrode
- upper electrode
- differential pressure
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Abstract
The utility model provides a pressure differential detection integrated package belongs to pressure differential sensor technical field, include: an upper electrode; the lower electrode is parallel to the upper electrode and is arranged at intervals; the air guide gasket is of an integrated structure, is connected between the upper electrode and the lower electrode and is respectively connected with the upper electrode and the lower electrode in a fixed mode to form an integrated structure; the utility model discloses a pressure differential detection integrated package adopts the air guide packing ring of adding a body structure between last lower electrode, then fixes upper and lower electrode and air guide packing ring for a whole to can reduce the assembly accumulation error that pressure differential sensor among the prior art adopted multiunit roll adjustment accessory to produce.
Description
Technical Field
The utility model relates to a pressure differential sensor technical field, concretely relates to integrated package is surveyed to pressure differential.
Background
A differential pressure sensor is a sensor for measuring a difference between two pressures, and generally includes a plurality of internal components such as an upper electrode, a lower electrode, a distance adjusting component, and a fixing component, as well as an external temperature system and a detection system.
In the assembly of the differential pressure sensor, the distance (d value) between an upper electrode and a lower electrode is easy to change due to the change of temperature and assembly factors; generally, in order to reduce the influence of the variation, a plurality of distance adjusting fittings (such as gaskets and gaskets) are required to relieve the pressure stress in the differential pressure sensor, a set of high-precision heating thermal bulb is arranged outside the differential pressure sensor, and the influence of the temperature on the detection precision is reduced by controlling the ambient temperature.
However, inside the differential pressure sensor, due to the accumulated embedding of the plurality of distance adjusting fittings, an accumulated error will be generated, so that the differential pressure detection accuracy of the sensor is affected, and the complexity of the manufacturing process is increased.
SUMMERY OF THE UTILITY MODEL
Therefore, the to-be-solved technical problem of the utility model lies in overcoming the differential pressure sensor among the prior art, owing to need alleviate compressive stress through a plurality of roll adjustment accessories, leads to the differential pressure detection precision of sensor to receive the defect of influence easily to a differential pressure detection integrated package is provided.
The utility model also provides a manufacturing method of above-mentioned pressure differential detection integrated package.
In order to solve the technical problem, the utility model provides a pressure differential detection integrated package, include:
an upper electrode;
the lower electrode is parallel to the upper electrode and is arranged at intervals;
the air guide gasket is of an integrated structure, is connected between the upper electrode and the lower electrode, and is respectively connected with the upper electrode and the lower electrode in a fixed mode to form an integrated structure.
Preferably, the air guide gasket is annular, and an air guide channel for communicating the annular inner ring and the annular outer ring is arranged on the air guide gasket.
Preferably, the air guide passage is provided on one side of the air guide gasket.
Preferably, the air guide channel is provided with a plurality of radial communicating channels which are uniformly arranged along the circumferential direction.
Preferably, the air guide passage further includes a circumferential communication passage provided along a circumferential direction of the air guide gasket and communicating with the plurality of radial communication passages.
Preferably, the air guide gasket is a zero expansion material.
Preferably, the air guide gasket is one of a metal composite material, an oxide composite material, zero-expansion glass or microcrystalline glass.
Preferably, the air guide gasket is fixedly connected with the upper electrode and the lower electrode in an adhesion or welding mode.
The utility model also provides a manufacturing method of differential pressure detection integrated package, including following step:
manufacturing an air guide gasket, selecting the thickness of the gasket according to the setting distance between the upper electrode and the lower electrode, and then arranging an air guide channel which can be communicated with the inner side and the outer side on the gasket;
and assembling an integrated block, overlapping the upper electrode, the air guide gasket and the lower electrode in sequence, and connecting the upper electrode, the air guide gasket and the lower electrode into a whole through fixed connection.
The utility model discloses technical scheme has following advantage:
1. the utility model provides a pressure differential detection integrated package adopts the air guide packing ring of adding a body structure between last lower electrode, then fixes upper and lower electrode and air guide packing ring for a whole to can reduce the assembly accumulation error that pressure differential sensor among the prior art adopted the multiunit roll adjustment accessory to produce.
2. The utility model provides a pressure differential detection integrated package, the air guide channel on the air guide packing ring can make differential pressure sensor when the evacuation, is located the air of air guide packing ring inner circle, and the quick efficient of this air guide channel of accessible discharges to avoid gas to be absorbed in the inside at annular air guide packing ring, thereby can improve exhaust efficiency and the exhaust effect of sensor when ultrahigh vacuum exhausts.
3. The utility model provides a pressure difference detection integrated block, the air guide gasket adopts zero expansion material, and is respectively connected with the upper electrode and the lower electrode into an integrated block through a fixed connection mode, and the integrated structure can avoid the change of the distance between the electrodes caused by the different external temperatures or the change of the assembly factors; according to the sensor manufactured by the integrated block, an external heating bag is not needed, so that the influence of a heating circuit on a detection circuit can be avoided, the detection precision and stability of the detector can be improved due to the introduction of the integrated block, the cost is saved, and the assembly process is reduced.
4. The utility model provides a manufacturing approach of pressure difference detection integrated package, can simplify the assembly process of differential pressure sensor to this reduces the error that the assembly produced; the differential pressure detection integrated block manufactured by the method can greatly reduce the influence of temperature on the measurement signal, so that the configuration of a heat preservation system of the traditional differential pressure sensor can be omitted, the cost is reduced, the influence of a heating circuit on a detection circuit is avoided, and the detection signal precision is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a front view of a differential pressure detecting manifold.
Fig. 2 is a schematic perspective view of the air guide gasket.
Fig. 3 is a schematic perspective view of the pressure difference detection manifold.
Description of reference numerals:
1. an upper electrode; 2. a lower electrode; 3. an air guide gasket; 4. an air guide channel; 5. a radial communication channel; 6. a circumferential communication channel.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
Example 1
The present embodiment provides a specific implementation of a differential pressure detection integrated block, as shown in fig. 1, including: the sensor comprises an upper electrode 1, an air guide gasket 3 and a lower electrode 2, wherein the upper electrode 1, the air guide gasket 3 and the lower electrode 2 are sequentially overlapped, two opposite surfaces of the upper electrode 1 and the lower electrode 2 are arranged in parallel, the interval between the two surfaces is kept through the air guide gasket 3, the distance of the interval is determined through the thickness of the air guide gasket 3, and the interval is set according to the actual requirement of a differential pressure sensor. The air guide gasket 3 of this embodiment is an organic whole structure, compares in the multiunit adjustable fitting of prior art, and the pressure differential of this embodiment surveys the integrated package, can reduce the assembly accumulation error that a plurality of adjustable fittings produced.
As shown in fig. 2, the air guide gasket 3 is of an annular structure, the air guide channel 4 for communicating the annular inner ring and the annular outer ring is arranged on the air guide gasket 3, and air in the inner ring of the air guide gasket 3 can be quickly and efficiently discharged through the air guide channel 4 when the differential pressure sensor is vacuumized, so that the air is prevented from being trapped inside the annular air guide gasket 3, and the exhaust efficiency and the exhaust effect of the sensor during ultrahigh vacuum exhaust can be improved. In order to reduce the manufacturing process steps and difficulty of the air guide gasket 3, the air guide channel 4 is only arranged on one side of the air guide gasket 3. Specifically, the air guide channel 4 is provided with a plurality of radial communicating channels 5 uniformly arranged along the circumferential direction, and further provided with a circumferential communicating channel 6 arranged along the circumferential direction of the air guide gasket 3 and communicating with the plurality of radial communicating channels 5, wherein the circumferential communicating channel 6 is not only used for communicating the plurality of radial communicating channels 5, but also used for guiding out air trapped in a contact part between the air guide gasket 3 and the electrode, so that the sensor is more thoroughly vacuumized. The specification of the air guide gasket 3 is determined according to the actual situation, and specifically, the thickness of the air guide gasket 3 can be 50-350 micrometers, the depth of the air guide channel 4 can be 10-100 micrometers, and the width of the air guide channel 4 can be 0.1-1 millimeter.
In terms of material selection, the air guide gasket 3 is made of one of the existing zero-expansion materials, such as a metal composite material, an oxide composite material, zero-expansion glass or microcrystalline glass.
In the connection mode, the air guide gasket 3 and the upper electrode 1 and the lower electrode 2 can be connected and fixed into a whole through bonding, welding or other modes.
As shown in fig. 3, the pressure difference detection integrated block is cylindrical as a whole, and the gas guide gasket 3 is connected between the upper electrode 1 and the lower electrode 2 and is fixedly connected with the upper electrode 1 and the lower electrode 2 to form an integral structure.
Example 2
The embodiment provides a manufacturing method of a differential pressure detection integrated block, which comprises the following steps:
the first step is as follows: selecting a gasket, selecting a proper gasket with proper thickness for keeping the distance between the upper electrode 1 and the lower electrode 2 according to the distance between the upper electrode 1 and the lower electrode 2, wherein the material of the gasket is the zero-expansion material described in the embodiment 1.
The second step is that: the gasket is provided with an air guide channel 4 which can be communicated with the inner side and the outer side, and specifically, the air guide channel 4 described in embodiment 1 can be arranged on one side of the gasket by adopting methods such as laser, electron beam, chemical corrosion or electrochemical corrosion. In addition, as an alternative embodiment, the air guide channel 4 may be arranged in other conventional ways in the prior art.
The third step: and assembling an integrated block, overlapping the upper electrode 1, the gas guide gasket 3 and the lower electrode 2 in sequence, and connecting the upper electrode 1, the gas guide gasket 3 and the lower electrode 2 into a whole in a fixed mode.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (8)
1. A differential pressure sensing manifold, comprising:
an upper electrode (1);
the lower electrode (2) is parallel to the upper electrode (1) and is arranged at intervals;
the air guide gasket (3) is of an integral structure, is connected between the upper electrode (1) and the lower electrode (2), and is respectively connected with the upper electrode (1) and the lower electrode (2) in a fixed mode to form an integral structure.
2. The differential pressure detection manifold block as recited in claim 1, characterized in that the air guide gasket (3) is annular, and an air guide channel (4) for communicating the annular inner ring and the annular outer ring is arranged on the air guide gasket (3).
3. Differential pressure detection manifold according to claim 2, characterized in that the air guide channel (4) is arranged on one side of the air guide gasket (3).
4. A pressure differential detection manifold as claimed in claim 3, characterized in that the gas conducting channel (4) has a plurality of radial communication channels (5) arranged uniformly in the circumferential direction.
5. The differential pressure detection manifold according to claim 4, characterized in that the air guide channel (4) further has a circumferential communication channel (6) provided along the circumferential direction of the air guide gasket (3) to communicate with the plurality of radial communication channels (5).
6. Differential pressure detection manifold according to claim 1, characterized in that the air guiding gasket (3) is a zero expansion material.
7. The pressure difference detection manifold block as claimed in claim 6, characterized in that the gas guiding gasket (3) is one of a metal composite, an oxide composite, zero expansion glass or glass ceramics.
8. The pressure difference detection manifold block as claimed in claim 1, characterized in that the gas guide gasket (3) is fixedly connected with the upper electrode (1) and the lower electrode (2) by means of bonding or welding.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921651984.4U CN210464772U (en) | 2019-09-29 | 2019-09-29 | Differential pressure detection integrated block |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921651984.4U CN210464772U (en) | 2019-09-29 | 2019-09-29 | Differential pressure detection integrated block |
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| Publication Number | Publication Date |
|---|---|
| CN210464772U true CN210464772U (en) | 2020-05-05 |
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| CN201921651984.4U Active CN210464772U (en) | 2019-09-29 | 2019-09-29 | Differential pressure detection integrated block |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567636A (en) * | 2019-09-29 | 2019-12-13 | 川北真空科技(北京)有限公司 | Differential pressure detection integrated block and manufacturing method thereof |
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2019
- 2019-09-29 CN CN201921651984.4U patent/CN210464772U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110567636A (en) * | 2019-09-29 | 2019-12-13 | 川北真空科技(北京)有限公司 | Differential pressure detection integrated block and manufacturing method thereof |
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