CN110567636A - Differential pressure detection integrated block and manufacturing method thereof - Google Patents
Differential pressure detection integrated block and manufacturing method thereof Download PDFInfo
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- CN110567636A CN110567636A CN201910933036.8A CN201910933036A CN110567636A CN 110567636 A CN110567636 A CN 110567636A CN 201910933036 A CN201910933036 A CN 201910933036A CN 110567636 A CN110567636 A CN 110567636A
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- air guide
- gasket
- differential pressure
- upper electrode
- lower electrode
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- 238000001514 detection method Methods 0.000 title claims abstract description 34
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 238000004891 communication Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 239000011521 glass Substances 0.000 claims description 5
- 239000002131 composite material Substances 0.000 claims description 3
- 239000002905 metal composite material Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 239000002241 glass-ceramic Substances 0.000 claims 1
- 238000009825 accumulation Methods 0.000 abstract description 3
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000006056 electrooxidation reaction Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/06—Devices or apparatus for measuring differences of two or more fluid pressure values using electric or magnetic pressure-sensitive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention provides a differential pressure detection integrated block and a manufacturing method thereof, belonging to the technical field of differential pressure sensors, wherein the differential pressure detection integrated block comprises: an upper electrode; the lower electrode is parallel to the upper electrode and is arranged at intervals; the air guide gasket is of an integrated structure, is connected between the upper electrode and the lower electrode and is respectively connected with the upper electrode and the lower electrode in a fixed mode to form an integrated structure; according to the differential pressure detection integrated block, the air guide gasket of an integrated structure is added between the upper electrode and the lower electrode, and then the upper electrode, the lower electrode and the air guide gasket are fixed into a whole, so that the assembly accumulation error generated by the adoption of multiple groups of distance adjusting accessories of a differential pressure sensor in the prior art can be reduced.
Description
Technical Field
The invention relates to the technical field of differential pressure sensors, in particular to a differential pressure detection integrated block and a manufacturing method thereof.
Background
A differential pressure sensor is a sensor for measuring a difference between two pressures, and generally includes a plurality of internal components such as an upper electrode, a lower electrode, a distance adjusting component, and a fixing component, as well as an external temperature system and a detection system.
In the assembly of the differential pressure sensor, the distance (d value) between an upper electrode and a lower electrode is easy to change due to the change of temperature and assembly factors; generally, in order to reduce the influence of the variation, a plurality of distance adjusting fittings (such as gaskets and gaskets) are required to relieve the pressure stress in the differential pressure sensor, a set of high-precision heating thermal bulb is arranged outside the differential pressure sensor, and the influence of the temperature on the detection precision is reduced by controlling the ambient temperature.
However, inside the differential pressure sensor, due to the accumulated embedding of the plurality of distance adjusting fittings, an accumulated error will be generated, so that the differential pressure detection accuracy of the sensor is affected, and the complexity of the manufacturing process is increased.
Disclosure of Invention
Therefore, the technical problem to be solved by the present invention is to overcome the defect that the differential pressure detection accuracy of the differential pressure sensor is easily affected due to the fact that the pressure stress needs to be relieved by a plurality of distance adjusting fittings in the differential pressure sensor in the prior art, so as to provide a differential pressure detection integrated block.
the invention also provides a manufacturing method of the differential pressure detection integrated block.
In order to solve the above technical problems, the present invention provides a differential pressure detecting manifold block, comprising:
An upper electrode;
The lower electrode is parallel to the upper electrode and is arranged at intervals;
The air guide gasket is of an integrated structure, is connected between the upper electrode and the lower electrode, and is respectively connected with the upper electrode and the lower electrode in a fixed mode to form an integrated structure.
Preferably, the air guide gasket is annular, and an air guide channel for communicating the annular inner ring and the annular outer ring is arranged on the air guide gasket.
Preferably, the air guide passage is provided on one side of the air guide gasket.
preferably, the air guide channel is provided with a plurality of radial communicating channels which are uniformly arranged along the circumferential direction.
Preferably, the air guide passage further includes a circumferential communication passage provided along a circumferential direction of the air guide gasket and communicating with the plurality of radial communication passages.
preferably, the air guide gasket is a zero expansion material.
Preferably, the air guide gasket is one of a metal composite material, an oxide composite material, zero-expansion glass or microcrystalline glass.
Preferably, the air guide gasket is fixedly connected with the upper electrode and the lower electrode in an adhesion or welding mode.
The invention also provides a manufacturing method of the differential pressure detection integrated block, which comprises the following steps:
Manufacturing an air guide gasket, selecting the thickness of the gasket according to the setting distance between the upper electrode and the lower electrode, and then arranging an air guide channel which can be communicated with the inner side and the outer side on the gasket;
And assembling an integrated block, overlapping the upper electrode, the air guide gasket and the lower electrode in sequence, and connecting the upper electrode, the air guide gasket and the lower electrode into a whole through fixed connection.
The technical scheme of the invention has the following advantages:
1. according to the differential pressure detection integrated block provided by the invention, the air guide gasket of an integrated structure is added between the upper electrode and the lower electrode, and then the upper electrode, the lower electrode and the air guide gasket are fixed into a whole, so that the assembly accumulation error generated by adopting multiple groups of distance adjusting accessories in the differential pressure sensor in the prior art can be reduced.
2. According to the pressure difference detection integrated block, the air guide channel on the air guide gasket can enable air positioned in the inner ring of the air guide gasket to be quickly and efficiently discharged through the air guide channel when the pressure difference sensor is vacuumized, so that the air is prevented from being trapped in the annular air guide gasket, and the exhaust efficiency and the exhaust effect of the sensor during ultrahigh vacuum exhaust can be improved.
3. According to the differential pressure detection integrated block provided by the invention, the air guide gasket is made of zero-expansion material and is respectively connected with the upper electrode and the lower electrode in a fixed connection mode to form the integrated block, and the integrated structure can avoid the change of the distance between the electrodes caused by different external temperatures or the change of assembly factors; according to the sensor manufactured by the integrated block, an external heating bag is not needed, so that the influence of a heating circuit on a detection circuit can be avoided, the detection precision and stability of the detector can be improved due to the introduction of the integrated block, the cost is saved, and the assembly process is reduced.
4. The manufacturing method of the differential pressure detection integrated block can simplify the assembly process of the differential pressure sensor, thereby reducing the error generated by assembly; the differential pressure detection integrated block manufactured by the method can greatly reduce the influence of temperature on the measurement signal, so that the configuration of a heat preservation system of the traditional differential pressure sensor can be omitted, the cost is reduced, the influence of a heating circuit on a detection circuit is avoided, and the detection signal precision is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.
Fig. 1 is a front view of a differential pressure detecting manifold.
Fig. 2 is a schematic perspective view of the air guide gasket.
Fig. 3 is a schematic perspective view of the pressure difference detection manifold.
Description of reference numerals:
1. an upper electrode; 2. a lower electrode; 3. an air guide gasket; 4. an air guide channel; 5. a radial communication channel; 6. a circumferential communication channel.
Detailed Description
the technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
Example 1
The present embodiment provides a specific implementation of a differential pressure detection integrated block, as shown in fig. 1, including: the sensor comprises an upper electrode 1, an air guide gasket 3 and a lower electrode 2, wherein the upper electrode 1, the air guide gasket 3 and the lower electrode 2 are sequentially overlapped, two opposite surfaces of the upper electrode 1 and the lower electrode 2 are arranged in parallel, the interval between the two surfaces is kept through the air guide gasket 3, the distance of the interval is determined through the thickness of the air guide gasket 3, and the interval is set according to the actual requirement of a differential pressure sensor. The air guide gasket 3 of this embodiment is an organic whole structure, compares in the multiunit adjustable fitting of prior art, and the pressure differential of this embodiment surveys the integrated package, can reduce the assembly accumulation error that a plurality of adjustable fittings produced.
As shown in fig. 2, the air guide gasket 3 is of an annular structure, the air guide channel 4 for communicating the annular inner ring and the annular outer ring is arranged on the air guide gasket 3, and air in the inner ring of the air guide gasket 3 can be quickly and efficiently discharged through the air guide channel 4 when the differential pressure sensor is vacuumized, so that the air is prevented from being trapped inside the annular air guide gasket 3, and the exhaust efficiency and the exhaust effect of the sensor during ultrahigh vacuum exhaust can be improved. In order to reduce the manufacturing process steps and difficulty of the air guide gasket 3, the air guide channel 4 is only arranged on one side of the air guide gasket 3. Specifically, the air guide channel 4 is provided with a plurality of radial communicating channels 5 uniformly arranged along the circumferential direction, and further provided with a circumferential communicating channel 6 arranged along the circumferential direction of the air guide gasket 3 and communicating with the plurality of radial communicating channels 5, wherein the circumferential communicating channel 6 is not only used for communicating the plurality of radial communicating channels 5, but also used for guiding out air trapped in a contact part between the air guide gasket 3 and the electrode, so that the sensor is more thoroughly vacuumized. The specification of the air guide gasket 3 is determined according to the actual situation, and specifically, the thickness of the air guide gasket 3 can be 50-350 micrometers, the depth of the air guide channel 4 can be 10-100 micrometers, and the width of the air guide channel 4 can be 0.1-1 millimeter.
In terms of material selection, the air guide gasket 3 is made of one of the existing zero-expansion materials, such as a metal composite material, an oxide composite material, zero-expansion glass or microcrystalline glass.
In the connection mode, the air guide gasket 3 and the upper electrode 1 and the lower electrode 2 can be connected and fixed into a whole through bonding, welding or other modes.
As shown in fig. 3, the pressure difference detection integrated block is cylindrical as a whole, and the gas guide gasket 3 is connected between the upper electrode 1 and the lower electrode 2 and is fixedly connected with the upper electrode 1 and the lower electrode 2 to form an integral structure.
Example 2
the embodiment provides a manufacturing method of a differential pressure detection integrated block, which comprises the following steps:
The first step is as follows: selecting a gasket, selecting a proper gasket with proper thickness for keeping the distance between the upper electrode 1 and the lower electrode 2 according to the distance between the upper electrode 1 and the lower electrode 2, wherein the material of the gasket is the zero-expansion material described in the embodiment 1.
The second step is that: the gasket is provided with an air guide channel 4 which can be communicated with the inner side and the outer side, and specifically, the air guide channel 4 described in embodiment 1 can be arranged on one side of the gasket by adopting methods such as laser, electron beam, chemical corrosion or electrochemical corrosion. In addition, as an alternative embodiment, the air guide channel 4 may be arranged in other conventional ways in the prior art.
The third step: and assembling an integrated block, overlapping the upper electrode 1, the gas guide gasket 3 and the lower electrode 2 in sequence, and connecting the upper electrode 1, the gas guide gasket 3 and the lower electrode 2 into a whole in a fixed mode.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications therefrom are within the scope of the invention.
Claims (9)
1. A differential pressure sensing manifold, comprising:
an upper electrode (1);
The lower electrode (2) is parallel to the upper electrode (1) and is arranged at intervals;
The air guide gasket (3) is of an integral structure, is connected between the upper electrode (1) and the lower electrode (2), and is respectively connected with the upper electrode (1) and the lower electrode (2) in a fixed mode to form an integral structure.
2. The differential pressure detection manifold block as recited in claim 1, characterized in that the air guide gasket (3) is annular, and an air guide channel (4) for communicating the annular inner ring and the annular outer ring is arranged on the air guide gasket (3).
3. differential pressure detection manifold according to claim 2, characterized in that the air guide channel (4) is arranged on one side of the air guide gasket (3).
4. A pressure differential detection manifold as claimed in claim 3, characterized in that the gas conducting channel (4) has a plurality of radial communication channels (5) arranged uniformly in the circumferential direction.
5. the differential pressure detection manifold according to claim 4, characterized in that the air guide channel (4) further has a circumferential communication channel (6) provided along the circumferential direction of the air guide gasket (3) to communicate with the plurality of radial communication channels (5).
6. Differential pressure detection manifold according to claim 1, characterized in that the air guiding gasket (3) is a zero expansion material.
7. the pressure difference detection manifold block as claimed in claim 6, characterized in that the gas guiding gasket (3) is one of a metal composite, an oxide composite, zero expansion glass or glass ceramics.
8. The pressure difference detection manifold block as claimed in claim 1, characterized in that the gas guide gasket (3) is fixedly connected with the upper electrode (1) and the lower electrode (2) by means of bonding or welding.
9. The manufacturing method of the differential pressure detection integrated block is characterized by comprising the following steps:
manufacturing an air guide gasket (3), selecting the thickness of the gasket according to the arrangement distance between the upper electrode (1) and the lower electrode (2), and then arranging an air guide channel (4) which can be communicated with the inner side and the outer side on the gasket;
And assembling the integrated block, namely sequentially superposing the upper electrode (1), the air guide gasket (3) and the lower electrode (2), and connecting the upper electrode (1), the air guide gasket (3) and the lower electrode (2) into a whole through fixed connection.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910933036.8A CN110567636A (en) | 2019-09-29 | 2019-09-29 | Differential pressure detection integrated block and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910933036.8A CN110567636A (en) | 2019-09-29 | 2019-09-29 | Differential pressure detection integrated block and manufacturing method thereof |
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| Publication Number | Publication Date |
|---|---|
| CN110567636A true CN110567636A (en) | 2019-12-13 |
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| CN201910933036.8A Pending CN110567636A (en) | 2019-09-29 | 2019-09-29 | Differential pressure detection integrated block and manufacturing method thereof |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987003088A1 (en) * | 1985-11-19 | 1987-05-21 | Kavlico Corporation | Dual diaphragm differential pressure transducer |
| CN101529558A (en) * | 2006-10-16 | 2009-09-09 | 朗姆研究公司 | Upper electrode backing member with particle reducing features |
| CN102346084A (en) * | 2010-07-29 | 2012-02-08 | 福建上润精密仪器有限公司 | Suspension structure of differential capacitance membrane box |
| CN102530839A (en) * | 2012-01-04 | 2012-07-04 | 无锡智超医疗器械有限公司 | Manufacturing method of capacitive micro-electromechanical ultrasonic sensor with bent focusing |
| WO2016192361A1 (en) * | 2015-05-29 | 2016-12-08 | 歌尔声学股份有限公司 | Quasi differential capacitive mems pressure sensor and manufacturing method thereof |
| CN208579860U (en) * | 2018-07-18 | 2019-03-05 | 上海贤日测控科技有限公司 | A kind of differential capacitive pressure sensor structure |
| CN210464772U (en) * | 2019-09-29 | 2020-05-05 | 川北真空科技(北京)有限公司 | Differential pressure detection integrated block |
-
2019
- 2019-09-29 CN CN201910933036.8A patent/CN110567636A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1987003088A1 (en) * | 1985-11-19 | 1987-05-21 | Kavlico Corporation | Dual diaphragm differential pressure transducer |
| CN101529558A (en) * | 2006-10-16 | 2009-09-09 | 朗姆研究公司 | Upper electrode backing member with particle reducing features |
| CN102346084A (en) * | 2010-07-29 | 2012-02-08 | 福建上润精密仪器有限公司 | Suspension structure of differential capacitance membrane box |
| CN102530839A (en) * | 2012-01-04 | 2012-07-04 | 无锡智超医疗器械有限公司 | Manufacturing method of capacitive micro-electromechanical ultrasonic sensor with bent focusing |
| WO2016192361A1 (en) * | 2015-05-29 | 2016-12-08 | 歌尔声学股份有限公司 | Quasi differential capacitive mems pressure sensor and manufacturing method thereof |
| CN208579860U (en) * | 2018-07-18 | 2019-03-05 | 上海贤日测控科技有限公司 | A kind of differential capacitive pressure sensor structure |
| CN210464772U (en) * | 2019-09-29 | 2020-05-05 | 川北真空科技(北京)有限公司 | Differential pressure detection integrated block |
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