CN219391202U

CN219391202U - Pressure sensing probe and pressure sensing system

Info

Publication number: CN219391202U
Application number: CN202320369182.4U
Authority: CN
Inventors: 刘科海; 赵灌中; 姚佳; 尚俊峰; 杨方友; 郑跃滨; 陈镔; 刘开辉; 王恩哥
Original assignee: Yang Sheng Tang Co Ltd; Songshan Lake Materials Laboratory
Current assignee: Yang Sheng Tang Co Ltd; Songshan Lake Materials Laboratory
Priority date: 2023-03-02
Filing date: 2023-03-02
Publication date: 2023-07-21
Anticipated expiration: 2033-03-02

Abstract

The utility model relates to a pressure sensing probe and a pressure sensing system. The pressure sensing probe comprises a main body and a membrane body assembly. Wherein the main body is provided with an air cavity. The membrane body assembly comprises a support ring and a graphene membrane, wherein the support ring is provided with a through hole; the graphene membrane is arranged on the connecting surface of the supporting ring, the graphene membrane covers the through hole, and the membrane body assembly is hermetically arranged on the opening of the air cavityA place; the diameter-thickness ratio of the graphene membrane ranges from 1.0X10 ⁶ ‑9.9×10 ⁶ The width of the part of the graphene membrane, which is abutted against the supporting ring, is larger than 3mm. The diameter-thickness ratio of the pressure sensing probe reaches 10 ⁶ On the order of magnitude, the sensitivity can reach high sensitivity of 200 μm/Pa when pressure detection is carried out. And the detectable pressure coverage ranges from 1.25mPa to 100Pa, and the pressure coverage is wider. When the pressure sensing probe detects, the graphene membrane is not easy to separate from the support ring, so that the reliability of the pressure sensing probe is ensured.

Description

Pressure sensing probe and pressure sensing system

Technical Field

The utility model relates to the technical field of pressure sensing, in particular to a pressure sensing probe and a pressure sensing system.

Background

In the case of air pressure or sound pressure detection, a person to be detected typically uses a non-contact pressure sensing system. Wherein, the core component of the pressure sensing system is a pressure sensing probe. The pressure sensing probe detects pressure through the change of the sensing diaphragm therein.

However, current pressure sensing systems have low sensitivity and narrow dynamic range.

Disclosure of Invention

Based on this, it is necessary to provide a pressure sensing probe and a pressure sensing system for the problems of low sensitivity and narrow dynamic range of the pressure sensing system.

A pressure sensing probe, comprising:

a main body; setting an air cavity; and

The membrane body assembly comprises a support ring and a graphene membrane, wherein the support ring is provided with a through hole; the graphene membrane is arranged on the connecting surface of the supporting ring, the graphene membrane covers the through hole, and the membrane body assembly is arranged at the opening of the air cavity in a sealing way; the diameter-thickness ratio of the graphene membrane ranges from 1.0X10 ⁶ -9.9×10 ⁶ The width of the part, which is abutted against the support ring, of the graphene membrane is larger than 3mm;

the cover body is provided with a detection opening, the cover body is connected with the main body, the cover body is positioned on one side, far away from the air cavity, of the membrane body assembly, and the detection opening is arranged corresponding to the through hole.

In one embodiment, the graphene membrane comprises a suspension portion and a connection portion, the suspension portion is covered at the through hole, and the connection portion is connected with at least part of the support ring.

In one embodiment, the graphene membrane is a reduced graphene oxide membrane or a CVD graphene membrane;

and/or the diameter of the graphene membrane covered at the through hole is 7mm-50mm;

and/or the material of the supporting ring is copper, silicon, glass, iron, ceramic or plastic;

and/or the connecting surface is provided with a plasma treatment layer.

In one embodiment, the cover body includes a body portion and a handle portion, the handle portion is disposed on the body portion, and the body portion is provided with the detection port.

In one embodiment, the device further comprises a pressing piece, wherein the pressing piece is detachably arranged on the main body, and the pressing piece is arranged between the membrane body assembly and the cover body.

In one embodiment, the compressing piece comprises a compressing part and a limiting part; the main body is provided with a limiting groove, the limiting part can move relative to the limiting groove, and the pressing part is used for propping against the membrane body assembly.

In one embodiment, the system further comprises a pressure supplementing assembly, wherein the pressure supplementing assembly is provided with an air passage; the pressure supplementing assembly is connected with the main body, and the air channel is communicated with the air cavity.

In one embodiment, the device further comprises a seal disposed between the membrane module and the main body.

A pressure sensing system comprises the pressure sensing probe.

In one embodiment, the device further comprises a laser displacement meter or a graphene optical fiber FP cavity-demodulation system, wherein the laser displacement meter and the graphene optical fiber FP cavity-demodulation system are used for detecting the displacement distance of the graphene membrane.

In the pressure sensing probe, the diameter-thickness ratio of the graphene membrane is in the range of 1.0X10 ⁶ -9.9×10 ⁶ Up to 10 ⁶ The order of magnitude can reach high sensitivity of 200 mu m/Pa when the pressure probe is used for pressure detection, the detectable pressure coverage range is from 1.25mPa to 100Pa, and the pressure coverage range is wider. And because the width of the part of graphite alkene diaphragm and supporting ring butt is greater than 3mm, consequently when above-mentioned pressure sensing probe detects, graphite alkene diaphragm is difficult for separating with the supporting ring, ensures pressure sensing probe's reliability.

The pressure sensing system manufactured by the pressure sensing probe can detect air pressure and sound pressure according to actual conditions, and has high detection sensitivity and a large detection range.

Drawings

Fig. 1 is a schematic structural diagram of a pressure sensing probe according to an embodiment of the present utility model.

Fig. 2 is an exploded view of fig. 1.

Fig. 3 is an exploded view of a pressure sensing probe according to another embodiment of the present utility model.

Fig. 4 is a schematic structural diagram of a pressure sensing system according to an embodiment of the present utility model.

Fig. 5 is a schematic structural diagram of a pressure sensing system according to another embodiment of the present utility model.

Reference numerals: 001. a pressure sensing probe;

100. a main body; 101. an air cavity; 101a, a first section; 101b, a second section; 102. an opening; 103. an air port; 104. a limit groove; 110. an abutting portion; 120. a first connection structure;

200. a cover body; 201. a detection port; 210. a body portion; 220. a handle portion; 230. a second connection structure;

300. a membrane assembly; 310. a support ring; 311. a through hole; 320. a graphene membrane; 321. a suspending part; 322. a connection part;

400. a seal;

500. a pressing member; 510. a pressing part; 520. a limit part;

600. A pressure supplementing assembly; 601. an airway;

700. a diaphragm type graphene optical fiber FP cavity-demodulation system; 710. an optical system; 711. a light source member; 712. a circulator; 713. an optical fiber; 714. a demodulation device; 715. an attenuator; 716. a flange; 720. a gas system; 721. a gas supply member; 722. a steady flow member; 723. a pressure reducing valve; 724. a flow meter; 725. a three-way valve; 730. a sound source member; 740. and a controller.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Referring to fig. 1-3, one embodiment of the present utility model provides a pressure sensing probe 001, which includes a main body 100 and a membrane module 300.

Wherein the main body 100 is provided with an air chamber 101. The air chamber 101 may be filled with a gas. The membrane body assembly 300 includes a support ring 310 and a graphene membrane 320. The supporting ring 310 is provided with a through hole 311, i.e. the hollow part of the ring body of the supporting ring 310 is the through hole 311. The graphene membrane 320 is disposed on the connection surface of the support ring 310. The graphene membrane 320 covers the through hole 311. The membrane module 300 is hermetically disposed at the opening 102 of the air cavity 101. When the pressure sensing probe 001 detects the air pressure, the air pressure to be detected acts on the graphene membrane 320 covered at the through hole 311, and the graphene membrane 320 is displaced due to the difference between the air pressure in the air cavity 101 and the air pressure to be detected. The displacement of the graphene film 320 is detected to measure the value of the air pressure to be detected. It should be added that "there is a difference between the air pressure in the air chamber 101 and the air pressure to be detected", which may include the following two cases. In the first case, the gas in the air chamber 101 is a gas with a known air pressure, and the gas outside the air chamber 101 is a gas with a gas pressure to be detected. In the second case, the gas in the air cavity 101 may be the gas with the pressure to be detected, and the gas outside the air cavity 101 is the gas with the known pressure. The known gas pressure may be a standard gas.

It should be noted that, the "membrane body assembly 300 is sealed and disposed in the opening 102 of the air cavity 101", which includes that the graphene membrane 320 faces the cavity bottom of the air cavity 101, that is, the graphene membrane 320 is disposed between the support ring 310 and the cavity bottom of the air cavity 101; it is also comprised that the side of the support ring 310 facing away from the graphene membrane 320 is facing towards the cavity bottom of the air cavity 101, i.e. the support ring 310 is arranged between the graphene membrane 320 and the cavity bottom of the air cavity 101. The user can change the installation mode of the membrane module 300 according to the actual situation.

Specifically, the diameter-to-thickness ratio of the graphene sheets 320 ranges from 1.0X10 ⁶ -9.9×10 ⁶ . Since the diameter-thickness ratio of the graphene sheets 320 reaches 10 ⁶ In order of magnitude, therefore, when the graphene membrane 320 is used for pressure detection, if a displacement detection instrument with an accuracy of 0.25 μm is used, the sensitivity can reach a high sensitivity of 200 μm/Pa. That is, a pressure of 1Pa may cause the displacement amount of the middle of the graphene sheet 320 to reach 200 μm. It will be appreciated that the pressure sensing probe 001 may achieve higher sensitivity if coupled with a higher accuracy displacement sensing instrument. The pressure sensing probe 001 can be matched with the precision of a displacement detection instrument to realize the detection of a lower pressure difference value.

The width D1 of the portion of the graphene sheet 320 abutting against the support ring 310 is greater than 3mm. It can be understood that the aforementioned "width D1 of the portion where the graphene membrane 320 abuts against the support ring 310" refers to the distance between the graphene membrane 320 and the edge of the graphene membrane 320 along the through hole 311 in the ring width direction of the support ring 310 where the graphene membrane 320 abuts against the ring body of the support ring 310. When the graphene membrane 320 receives a larger pressure difference, the graphene membrane 320 is not easy to separate from the support ring 310 because the width D1 of the portion where the graphene membrane 320 abuts against the support ring 310 is larger, that is, the graphene membrane 320 can still cover the through hole 311 under the action of the higher pressure difference and can be displaced to a larger distance, so that the reliability of the pressure sensing probe 001 is ensured and the highest value of the detection range is increased. It can be appreciated that the width D1 of the portion of the graphene membrane 320 abutting against the support ring 310 is less than or equal to the ring body width D2 of the support ring 310.

For example, in some embodiments, the diameter of the graphene film 320 covering the through hole 311 is 28mm, the width D1 of the portion of the graphene film 320 abutting against the support ring 310 is 3mm, and the maximum displacement of the graphene film 320 is 7mm. For another example, the diameter of the graphene film 320 covering the through hole 311 is 40mm, the width D1 of the portion where the graphene film 320 abuts against the support ring 310 is 3mm, and the maximum displacement of the graphene film 320 is 10mm.

The membrane module 300 is combined with a displacement detecting instrument with a minimum detection precision of 0.25 μm, and the detection pressure difference of the pressure sensing probe 001 is about 1.25mPa at the minimum. If the displacement detecting instrument can detect the deformation of the thin film with 1nm, the minimum detectable air pressure difference of the graphene membrane 320 is about 5 μpa. That is, the pressure difference between both sides of the graphene sheet 320 is 5 μpa.

It will be appreciated that in a specific embodiment, the diameter of the graphene film 320 covered at the through hole 311 is 28mm, the width D1 of the portion where the graphene film 320 abuts against the support ring 310 is 3mm, and the maximum displacement of the graphene film 320 is 7mm. In combination with a displacement detecting instrument with a minimum detection accuracy of 0.25 μm, the pressure value range detectable by the pressure sensing probe 001 is about 1.25mPa-100Pa. In another specific embodiment, the diameter of the graphene membrane 320 covered at the through hole 311 is 40mm, the width of the portion where the graphene membrane 320 is abutted against the support ring 310 is 3mm, and the maximum displacement of the graphene membrane 320 is 10mm. In combination with a displacement detecting instrument with a minimum detection accuracy of 0.25 μm, the pressure value range detectable by the pressure sensing probe 001 is about 1.25mPa-100Pa.

The sensitivity of the graphene membrane 320 can reach 200 mu m/Pa, and the wide-range pressure detection of 1.25mPa-100Pa can be realized by matching with a displacement detection instrument with current precision. Whereas the highest achievable sensitivity of the prior art pressure sensing probe 001 is only 1 μm/Pa. That is, the pressure sensor probe 001 described in the present application can achieve a sensitivity improvement of approximately 200 times, and can detect extremely minute air pressure. Therefore, the pressure sensing probe 001 has the advantages of high sensitivity and wide pressure detection range, and particularly has a good detection effect for detecting micro air pressure.

The pressure sensor probe 001 can detect not only the air pressure but also the sound pressure. When the side of the graphene film 320 facing away from the air cavity 101 is subjected to sound pressure, the graphene film 320 may be displaced under the effect of the sound pressure. At present, when the pressure sensing probe 001 detects sound pressure, the sensitivity is 200 mu m/Pa, and the detectable sound pressure range reaches 5 mu Pa-50Pa. It is understood that the sound pressure audible to the human ear ranges from 20 muPa to 20Pa. Therefore, when the pressure sensing probe 001 is used for detecting the sound pressure, the sound pressure which cannot be distinguished by the human ear can be detected, the sound pressure which can be heard by the human ear can be covered, the sound pressure detection range is wider, and the sensitivity is higher.

In some embodiments, graphene membrane 320 may be reduced graphene oxide. The reduced graphene oxide can better realize the range of diameter-thickness ratio of 1.0x10 ⁶ -9.9×10 ⁶ . In other embodiments, graphene membrane 320 may be a CVD graphene membrane (chemical vapor deposited graphene membrane).

As shown in fig. 2-3, the graphene membrane 320 may include a suspending portion 321 and a connecting portion 322. The suspension portion 321 and the connection portion 322 are integrally formed, for example, both may be formed by a suspension coating process. The suspension 321 is covered at the through hole 311. The connection portion 322 is connected with at least a portion of the support ring 310. It can be understood that the connection portion 322 is the aforementioned portion where the graphene film 320 abuts against the support ring 310. That is, the width of the connecting portion 322 is shown as D1 in fig. 2. The width D1 of the connecting portion 322 is 3mm or more. Since the connection portion 322 is connected with the support ring 310 by van der waals force when the graphene film 320 is suspended at the through hole 311 of the support ring 310. Therefore, when the width D1 of the connection portion 322 is greater than or equal to 3mm, the connection portion 322 is not easily separated from the support ring 310 when the air pressure difference between the two sides of the graphene film 320 is large, so as to ensure the reliability of the pressure sensing probe 001.

In some embodiments, overhang 321 conforms to the thickness of connection 322. It should be noted that, during the suspension coating process, there may be a difference in thickness between the suspension 321 and the connection 322 on the nm scale.

The graphene membrane 320 has high sensitivity and high reliability, and is not easy to separate from the support ring 310 in the detection process.

In some embodiments, the support ring 310 is made of copper, silicon, glass, iron, ceramic, or plastic. By adopting the support ring 310 made of the material, the graphene membrane 320 and the support ring 310 can be well connected, and the graphene membrane 320 can be ensured to be suspended at the through hole 311 of the support ring 310.

In some embodiments, the interface may be provided with a plasma treatment layer. Through setting up the plasma treatment layer, can make the surface of connection face more easily be connected with graphite alkene diaphragm 320, and then ensure when the atmospheric pressure difference of graphite alkene diaphragm 320 both sides is great, graphite alkene diaphragm 320 is difficult for separating with the connection face to guarantee the reliability of pressure sensing probe 001.

It will be appreciated that in some embodiments, the plasma treatment layer may be provided on opposite sides of the support ring 310. Such an arrangement may facilitate that a worker does not need to identify the side of the connection surface when making the membrane module 300, and speed up the suspension of the graphene membrane 320 on the corresponding surface of the support ring 310.

In some embodiments, the width D2 of the ring body of the support ring 310 may be 3mm or more. Such an arrangement may ensure that the width D1 of the portion of the graphene membrane 320 abutting the support ring 310 is greater than 3mm.

In some embodiments, the thickness of the support ring 310 may be 1mm-3mm. The supporting ring 310 within the thickness range has good supporting effect, is not easy to deform, and cannot be too thick and heavy to cause the size of the pressure sensing probe 001 to be larger, so that the miniaturization of the device is realized.

When the graphene membrane 320 is connected with the support ring 310, the graphene membrane 320 can be integrally transferred onto the support ring 310, and the graphene membrane 320 and the support ring 310 can be well connected due to van der Waals acting force between the two.

In the embodiment shown in fig. 1-3, the diameter of the graphene membrane 320 is the same as the outer diameter of the support ring 310. That is, the connection portion 322 is completely overlapped and connected with the ring body of the support ring 310. Such an arrangement may increase the connection portion between the graphene sheets 320 and the support ring 310 as much as possible. In addition, the above arrangement can also reduce the difficulty in transferring the graphene film 320 to the support ring 310, and reduce the alignment accuracy of the suspension 321 and the through hole 311. It is understood that in other embodiments, the diameter of the graphene membrane 320 may be smaller than the diameter of the support ring 310.

The membrane module 300 can be well connected with the main body 100, the assembly process of the membrane module 300 is simple, the sensitivity of the graphene membrane 320 is high, and the pressure detection range is wide.

In some embodiments, the material of the main body 100 may be plastic, metal, silicon, glass, ceramic, etc., and may be selected according to practical situations. The depth of the air cavity 101 arranged on the main body 100 can be adjusted according to actual conditions, so that the graphene membrane 320 can not touch the cavity bottom of the air cavity 101 in the detection process. For example, in some embodiments, the depth of the air cavity 101 may be 1-5cm.

In some embodiments, the inner wall of the air cavity 101 of the body 100 is provided with an abutment 110. The abutment portion 110 may abut against the membrane module 300. That is, the ring structure of the graphene membrane 320 or the support ring 310 may abut against the abutment 110. The abutting portion 110 can be used for limiting the membrane body assembly 300, ensuring the position of the membrane body assembly 300 and ensuring sufficient space for the displacement of the graphene membrane 320 in the air cavity 101.

In some embodiments, the abutment 110 may be circumferentially disposed along the inner wall of the air cavity 101 of the body 100. The contact area between the abutting portion 110 and the membrane body assembly 300 is larger in such a setting manner, so that the membrane body assembly 300 is in sealing connection with the abutting portion 110, and the sealing connection between the membrane body assembly 300 and the main body 100 is realized.

In some of these embodiments, the air cavity 101 may include a first section 101a and a second section 101b that are in communication, where the first section 101a and the second section 101b are disposed along the direction from the opening 102 of the air cavity 101 to the cavity bottom. Wherein the diameter of the first section 101a may be larger than the diameter of the second section 101 b. The junction between the side wall of the first section 101a and the side wall of the second section 101b forms a step structure, which is the abutting portion 110. The membrane module 300 is disposed in the first section 101a, and the membrane module 300 is connected with the step structure in a sealing manner. The above-mentioned setting can reduce the degree of difficulty of installing membrane body subassembly 300, and can make each time assemble pressure sensing probe 001, and membrane body subassembly 300 all set up in corresponding position to reduce because membrane body subassembly 300 mounted position skew leads to its in the use, graphite alkene diaphragm 320 offsets with the chamber bottom of air cavity 101 and leads to the testing result to appear the deviation.

In some embodiments, the width of the abutment 110 may be less than the ring body width of the support ring 310 in the radial direction of the air cavity 101. The arrangement mode can ensure that the abutting part 110 is connected with the membrane body assembly 300, and meanwhile, the detectable part of the graphene membrane 320 is increased, so that the volume of the main body 100 can be reduced under the condition that the graphene membrane 320 is normally detected, and the cost can be reduced.

In some embodiments, the diameter of the second section 101b of the air cavity 101 may be the same as the diameter of the through hole 311 of the support ring 310. The diameter of the first section 101a of the air cavity 101 may be slightly larger than the outer diameter of the ring body of the support ring 310. Such an arrangement may facilitate better installation of the membrane body assembly 300 while reducing the probability of damaging the graphene membrane sheets 320 during installation.

The main body 100 may be preferably connected to the membrane module 300. The graphene membrane 320 or the support ring 310 may abut against the abutment 110 to ensure a sealing effect between the graphene membrane 320 and the abutment 110 while limiting the position of the two.

In some embodiments, the pressure sensing probe 001 may further include a cover 200. The cover 200 is provided with a detection port 201. The probe port 201 is provided corresponding to the through hole 311. The cover 200 is connected to the main body 100. The cover 200 is located on the side of the membrane module 300 remote from the air chamber 101. The cover 200 may be provided to facilitate securing the membrane module 300 at the opening 102 of the air cavity 101 when the pressure sensing probe 001 is assembled. In the pressure detection, the outside air acts on the other side of the membrane module 300 through the gas in the gas chamber 101 on the one side of the membrane module 300 through the detection port 201. There is a pressure difference between two sides of the graphene membrane 320, and the graphene membrane 320 moves under the action of the pressure difference, so that external air pressure is detected.

It will be appreciated that in some other embodiments, the pressure sensing probe 001 may secure the membrane body assembly 300 to the opening 102 of the air cavity 101 by other fasteners, such as compression snaps and the like.

When the pressure sensing probe 001 is assembled, the cover 200 can tightly press the membrane module 300 against the abutting part 110 in the air cavity 101, so as to reduce the condition that a gap exists between the abutting part 110 and the membrane module 300 to cause air leakage of the air cavity 101.

In some embodiments, the probe port 201 may have a diameter slightly larger than the diameter of the through hole 311. By the arrangement mode, when the suspended portion 321 of the graphene membrane 320 generates smaller deflection relative to the cover body 200, the suspended portion 321 can still be ensured to be exposed to the outside of the cover body 200 through the detection port 201, so that the detection result is accurate.

In some embodiments, the cover 200 may be detachably coupled with the main body 100. The above arrangement can facilitate the replacement of the membrane module 300 by a user, so as to replace the graphene membrane 320 with different measuring ranges or replace the damaged membrane module 300. Compared with the mode of fixedly connecting the cover body 200 with the main body 100, the cover body 200 and the main body 100 can be reused in the mode, and replacement cost is reduced.

In some embodiments, the body 100 may be provided with a first connection structure 120 and the cover 200 may be provided with a second connection structure 230. The first connection structure 120 mates with the second connection structure 230. The detachable connection of the main body 100 and the cover 200 is achieved by providing the first connection structure 120 and the second connection structure 230.

In the embodiment shown in fig. 1 and 2, the first connection structure 120 and the second connection structure 230 may be correspondingly disposed screw structures. That is, an internal thread structure may be provided at the opening 102 of the air chamber 101 of the main body 100. The outer wall of the cover 200 may be provided with an external screw structure. The internal thread structure is matched with the external thread structure. Specifically, the outer wall of the cover 200 is provided with an external thread structure, and the inner wall of the first section 101a of the main body 100 is provided with the aforementioned internal thread structure. When the cover 200 is closed relative to the main body 100, at least a portion of the cover 200 is accommodated in the first section 101a, and the membrane module 300 is disposed between the cover 200 and the abutment portion 110. The membrane module 300 is hermetically disposed with the main body 100.

It will be appreciated that in some other embodiments, the first connection structure 120 may be a clip slot and the second connection structure 230 may be a clip. The snap may cooperate with the snap groove to achieve a detachable connection of the cover 200 with respect to the main body 100.

In addition to the above connection method, the cover 200 and the main body 100 may be connected by other connection methods, and may be adjusted according to actual situations.

As shown in fig. 1 and 2, in some embodiments, the cover 200 includes a main body 210 and a handle 220, the handle 220 is disposed on the main body 210, and the main body 210 is provided with the detection port 201. Wherein the body portion 210 may be detachably coupled with the main body 100. The outer wall of the main body 100 is provided with the aforementioned first connection structure 120. By providing the handle portion 220, the body portion 210 can be easily attached to or detached from the main body 100 or adjusted during the attachment and detachment process.

In the embodiment shown in fig. 1-3, the handle portion 220 may be a cylindrical protrusion, and the handle portion 220 extends along the covering direction of the cover 200 and protrudes from the side of the cover 200 away from the diaphragm assembly. It will be appreciated that in other embodiments, the handle portion 220 may be a recessed structure that can accommodate a tool to facilitate rotation of the cover 200 by a user.

In some embodiments, the number of handle portions 220 may be more than two. Such an arrangement may facilitate easier grasping of the handle portion 220 by a user when assembling the pressure sensing probe 001. And the plurality of handle portions 220 can disperse the acting force of a user on the single handle portion 220 during assembly, so that the local excessive stress at the handle portion 220 is reduced to cause local extrusion of the membrane body assembly 300.

When the cover 200 is used to fix the membrane module 300, the handle 220 can be used to rotate the main body 100 to make the main body 100 cling to the membrane module 300, and the first connection structure 120 and the second connection structure 230 can ensure that the cover 200 cannot move relative to the main body 100, so as to ensure the installation effect of the membrane module.

In some embodiments, the pressure sensing probe 001 can further include a hold down 500. The pressing member 500 is detachably disposed to the main body 100. The pressing member 500 is disposed between the membrane module 300 and the cover 200. The pressing member 500 can better fix the membrane module 300, reduce the movement of the membrane module 300 relative to the main body 100, and further ensure the sealing effect between the opening 102 of the air cavity 101 and the support ring 310.

As shown in fig. 2 and 3, in some embodiments, the pressing member 500 may include a pressing portion 510 and a limiting portion 520. The body 100 is provided with a limit groove 104. The limiting portion 520 is movable relative to the limiting slot 104. The pressing portion 510 is used to press against the membrane module 300. The pressing member 500 abuts against the membrane module 300 through the pressing portion 510, thereby realizing a tighter abutment of the membrane module 300 against the main body 100. When the cover 200 rotates relative to the main body 100, the pressing member 500 does not rotate relative to the main body 100 due to the limiting portion 520, so that the membrane module 300 is prevented from moving relative to the main body 100.

In some embodiments, the pinch portion 510 may be an annular pinch portion 510. The width of the pressing portion 510 may be less than or equal to the width of the ring structure of the support ring 310. The width of the pressing portion 510 may be less than or equal to the width of the cover 200. The limit groove 104 may extend in a direction from the opening 102 of the air chamber 101 to the bottom of the air chamber 101. When the cover 200 rotates relative to the main body 100 to realize disassembly and assembly, the pressing portion 510 cannot rotate relative to the main body 100 due to the cooperation of the limiting portion 520 and the limiting slot 104, so that the membrane module 300 cannot rotate relative to the cover 200 when the cover 200 rotates relative to the main body 100. Such an arrangement can reduce breakage of the graphene membrane 320 due to movement of the membrane module 300 relative to the main body 100.

Further, in some embodiments, in the embodiments shown in fig. 2 and 3, the number of the limiting portions 520 is two, and the limiting portions are respectively disposed on two opposite sides of the pressing portion 510. The limiting groove 104 extends along the direction from the opening 102 of the air cavity 101 to the cavity bottom of the air cavity 101 and extends to an abutting portion 110 arranged on the side wall of the air cavity 101. It will be appreciated that in some other embodiments, the number of the limiting portions 520 may be one.

In some embodiments, the pressure sensing probe 001 may also include a seal 400. The seal 400 may be disposed between the membrane module 300 and the main body 100. The sealing member 400 can increase the sealing effect between the membrane module 300 and the main body 100, and less gas leaks from the connection between the membrane module 300 and the main body 100, so that the test result is deviated.

In some embodiments, seal 400 may be a seal ring. The seal ring may abut against the abutment 110. In some embodiments, the abutment 110 may be provided with a mounting groove (not shown) for receiving the seal ring. The sealing ring may be partially protruded from the mounting groove. In other embodiments, the sealing ring may directly abut against the abutment 110, thereby achieving a sealed connection between the membrane module 300 and the main body 100.

As shown in fig. 1-2, the pressure sensing probe 001 includes a main body 100, a membrane module 300, a cover 200, a pressing member 500, and a sealing member 400. Wherein the diameter-thickness ratio of the graphene membrane 320 ranges from 1.0X10 ⁶ -9.9×10 ⁶ . The diameter of the graphene film sheet 320 covering the through holes 311 may be 7mm-50mm. The width of the portion of the graphene membrane 320 that abuts against the support ring 310 is greater than 3mm. The dimensions of the body 100, the cover 200, the pressing member 500, and the sealing member 400 may be adjusted according to the dimensions of the graphene sheets 320 and the support ring 310.

For example, in a specific embodiment, the diameter of the graphene film 320 covering the through hole 311 is 40mm, the width of the portion of the graphene film 320 abutting against the support ring 310 is 17.5mm, and the total diameter of the graphene film 320 is 75mm. The outer diameter of the support ring 310 is 75mm and the diameter of the through hole 311 is 40mm. The inner diameter of the first section 101a in the air cavity 101 may be 78mm, and the inner diameter of the second section 101b in the air cavity 101 may be 40mm as the diameter of the through hole 311. The outer diameter of the pressing member 500 may be 75mm as the outer diameter of the support ring 310, and the inner diameter of the pressing member 500 may be slightly larger than the diameter of the through hole 311, i.e., larger than 40mm. The inner diameter of the cover 200 may be slightly larger than the diameter of the through hole 311, i.e., larger than 40mm. The inner diameter of the cover 200 may be the same as the inner diameter of the pressing member 500.

It should be noted that, according to the process level and the product requirement, the diameter of the graphene film 320 covering the through hole 311 may be correspondingly changed to be greater than 50mm or less than 7mm. The dimensions of the main body 100, the cover 200, the pressing member 500, and the sealing member 400 may be adjusted accordingly according to actual conditions.

As shown in fig. 3, in some embodiments, the pressure sensing probe 001 may also include a pressure compensating assembly 600. The pressure compensating assembly 600 has an air passage 601. The pressure compensating assembly is connected to the main body 100 and the air passage 601 communicates with the air chamber 101. Because the sealing state between the membrane module 300 and the main body 100 is poor in the actual assembly process, there may be a case where there is air leakage between the membrane module 300 and the main body 100. By providing a pressure compensating assembly, the air within the air cavity 101 can be replenished. That is, if there is an air leakage of Q (unit: cfm) between the membrane module 300 and the main body 100. When the pressure sensing probe 001 detects negative pressure, the pressure compensating assembly 600 can input the air quantity of Q into the air cavity 101 to ensure that the air pressure difference at two sides of the graphene diaphragm 320 is the actual air pressure difference, so as to ensure accurate detection data, or when the pressure sensing probe 001 detects positive pressure, the pressure compensating assembly can output the air quantity of Q into the air cavity 101 to ensure that the air pressure difference at two sides of the graphene diaphragm 320 is the actual air pressure difference, so as to ensure accurate detection data.

In some embodiments, the pressure make-up assembly 600 may include a pressure generating device, a flow controller, and an air line. Wherein, the pressure generating device can generate positive pressure or negative pressure, and the flow controller can control the flow in the air pipe. The air tube may be connected to the body 100 and the air channel 601 communicates with the air chamber 101. The air tube may be connected to the side wall or the bottom wall of the main body 100 according to actual circumstances. The air quantity fed in or discharged out can be accurately controlled through the flow controller, so that pressure compensation is achieved, the air pressure difference at two sides of the graphene diaphragm 320 is guaranteed to be the actual air pressure difference, and detection data are guaranteed to be accurate.

In some embodiments, the pressure generating device may include a positive pressure generating device and a negative pressure generating device. The positive pressure generating device can be a gas cylinder or an air compressor. The negative pressure generating device may be an air pump or a vacuum pump.

An embodiment of the utility model provides a pressure sensing system comprising the pressure sensing probe 001 of any of the embodiments described above. The pressure sensing system may also include a displacement detection instrument. The displacement detection instrument may detect a displacement distance of the graphene membrane 320.

In some embodiments, the displacement detecting instrument may select a laser displacement meter (not shown in the figure) or a diaphragm type graphene optical fiber FP cavity-demodulation system 700, and may be adjusted according to practical situations.

The laser displacement meter may include at least a laser and a laser displacement meter demodulator. The laser may emit laser light to the diaphragm 200, and the laser displacement meter demodulator may receive and demodulate the laser light scattered and reflected by the surface of the diaphragm 200 to calculate the distance between the diaphragm 200 and the laser displacement meter demodulator, thereby obtaining the displacement of the diaphragm.

The diaphragm type graphene optical fiber FP cavity-demodulation system 700 refers to that the graphene diaphragm 320 and the end surface of the optical fiber 713 form an FP cavity (Fabry-perot cavity), and the displacement generated by the influence of the air pressure on the graphene diaphragm 320 is obtained by demodulating the spectrum or the light intensity in the FP cavity.

In an embodiment where a laser displacement meter is selected, when the pressure sensing system is used to test the air pressure, the pressure sensing system may be placed at the detection point and the laser displacement meter may be aligned with the middle of the graphene membrane 320. In a specific test procedure, as shown in the second case, the gas in the air cavity 101 may be the gas with the pressure to be detected, and the gas outside the air cavity 101 is the gas with the known pressure. If the moving direction of the graphene membrane 320 is the cavity bottom direction away from the air cavity 101, the air pressure to be detected is positive pressure. If the moving direction of the graphene membrane 320 is the cavity bottom direction close to the air cavity 101, the air pressure to be detected is negative pressure. The positive pressure refers to a pressure higher than atmospheric pressure. The negative pressure refers to a pressure less than atmospheric pressure. In another specific test procedure, as shown in the first case, the gas in the air chamber 101 is a gas with a known air pressure, and the gas outside the air chamber 101 is a gas with a gas pressure to be detected. If the moving direction of the graphene membrane 320 is the cavity bottom direction close to the air cavity 101, the air pressure to be detected is positive pressure. If the moving direction of the graphene membrane 320 is the cavity bottom direction away from the air cavity 101, the air pressure to be detected is negative pressure. The pressure value in the environment to be measured can be specifically calculated by combining the displacement value of the graphene diaphragm 320 measured by the laser displacement meter with a corresponding displacement-air pressure value conversion formula.

When the pressure sensing system of the laser displacement meter is selected by the displacement detection instrument to detect sound pressure, the detection mode is the same. The difference with the method for detecting the air pressure is that: when calculating the sound pressure value, the displacement value of the graphene diaphragm 320 is calculated in combination with the corresponding displacement-sound pressure value conversion formula.

In an embodiment of selecting the diaphragm type graphene optical fiber FP cavity-demodulation system 700, when the pressure sensing system tests the air pressure, the pressure sensing system can be placed at a detection point, and the graphene diaphragm 320 and the end face of the optical fiber 713 form an FP cavity. Light is input into the FP cavity and light output from the FP cavity is received through the diaphragm type graphene optical fiber FP cavity-demodulation system 700, the spectrum or the light intensity of the light output from the FP cavity is demodulated to obtain a displacement value generated by the influence of the air pressure on the graphene diaphragm 320, and finally the corresponding displacement-air pressure value conversion formula is combined to calculate to obtain the air pressure value. The determination of positive or negative pressure may be consistent with the determination of the embodiment described above in which a laser displacement meter is selected.

In particular, referring to fig. 4, in some embodiments, a patch-type graphene fiber FP cavity-demodulation system 700 may include an optical system 710. The optical system 710 includes a light source 711, a circulator 712, an optical fiber 713, and a demodulation device 714. The light source 711 may be an ASE light source or a DFB light source. Wherein, the ASE light source can emit narrow-band light, and the DFB light source can emit wide-band light. In some embodiments, an attenuator 715 may be disposed between the light source 711 and the circulator 712 to attenuate the light energy generated by the light source 711, so as to avoid damaging the graphene film 320 due to excessive light energy. The circulator 712 has three light ports, one connected to the light source member 711 or the attenuator 715, one connected to the pressure sensing probe 001, and one connected to the demodulation device 714. The flange 716 can connect the optical fibers 713 at two sides of the hollow fiber, so that an FP cavity is formed between the end surface of the optical fiber 713 and the graphene membrane 320. Light entering the circulator 712 from the light source 711 can enter the FP cavity through the optical fiber 713, and after a series of reflections, the light reenters the circulator 712 and enters the demodulation device 714. Demodulation device 714 may be selected from a PD demodulation device (for ASE light sources) or an FBGA spectrometer (for DFB light sources). The PD demodulation device can detect the light intensity change, and the FBGA spectrometer can detect the wavelength drift of light with a certain wavelength. After being emitted by the light source 711, the light enters the circulator 712, and then enters the FP cavity through the optical fiber 713. When the graphene membrane 320 is displaced, the cavity length of the FP cavity is changed, so that the intensity of light entering the circulator 712 from the FP cavity and connected to the demodulation device 714 is changed, or the wavelength of the light is shifted, and the displacement distance of the graphene membrane 320 can be obtained by reversely calculating and obtaining the cavity length change of the FP cavity by detecting the light parameter change through the demodulation device 714. That is, the ASE light source can emit light with a single wavelength, and if the cavity length of the FP cavity changes after the light passes through the FP cavity, the intensity of the light reflected by the FP cavity will change, the PD demodulation device can detect the light intensity change, and the cavity length change of the FP cavity can be calculated through the light intensity change. The ASE light source can emit a series of light rays with various wavelengths, after the light rays pass through the FP cavity, if the cavity length of the FP cavity changes, when the light rays with a certain single wavelength are tracked by the FBGA spectrometer, the wavelength of the light rays can drift, and the cavity length change of the FP cavity can be calculated through the wavelength drift amount.

In some embodiments, the patch-type graphene fiber FP cavity-demodulation system 700 further comprises a gas system 720. The gas system 720 may include a gas supply 721 and a flow stabilizer 722. The gas supply member 721 may be a gas cylinder, and the gas cylinder may be a nitrogen gas cylinder. In some embodiments, gas system 720 may further include pressure relief valve 723, flow meter 724, and three-way valve 725. Wherein the gas supply member 721, the pressure reducing valve 723, the flow meter 724, the three-way valve 725, and the flow stabilizer 722 are connected in this order. The pressure reducing valve 723 and the flow meter 724 can control the gas supply amount of the gas supply element 721. An opening of the three-way valve 725 may be vented to atmosphere to facilitate control of the gas entering the flow stabilizer 722 to avoid damaging the graphene membrane 320 due to excessive gas flow. The steady flow member 722 may be any one of a quartz tube, a sub-strong tube or a steel tube, and other steady flow members 722 may be selected. Gas may enter the gas cavity 101 through the flow stabilizer 722. The air pressure in the air cavity 101 can be adjusted through the air system 720, so that the air pressure on two sides of the graphene membrane 320 can be changed, and the detection result is more accurate.

Referring to fig. 5, when the pressure sensing system is used to detect the sound pressure, the diaphragm-type graphene optical fiber FP cavity-demodulation system 700 may include only the optical system 710. Among them, the light source 711 in the optical system 710 may select an ASE light source, and the demodulation device 714 may select a PD demodulation device. Such an arrangement may have a more sensitive detection effect. The sound source member 730 may directly act on the graphene membrane 320. In some of these embodiments, the sound source member 730 may be coupled to the controller 740 such that the controller 740 may vary the size of the sound source. The sound source member 730 may be a sound emitting element such as a horn. Controller 740 may be coupled to demodulation device 714. The controller 740 may select a computer. In addition, when the diaphragm type graphene optical fiber FP cavity-demodulation system 700 is used for detecting sound pressure, the difference from the method for detecting air pressure is that: in calculating the sound pressure value, the displacement value of the graphene film 320 is calculated in combination with the corresponding displacement-sound pressure value conversion formula. When the pressure sensing system is used for testing air pressure or sound pressure, the testing method is simple, the sensitivity is high, and the pressure value range is wider.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. A pressure sensing probe, comprising:

a main body; setting an air cavity; and

2. The pressure sensing probe of claim 1, wherein the graphene membrane comprises a overhanging portion and a connecting portion, the overhanging portion is covered at the through hole, and the connecting portion is connected with at least part of the support ring.

3. The pressure sensing probe of claim 1, wherein the graphene membrane is a reduced graphene oxide membrane or a CVD graphene membrane;

and/or the connecting surface is provided with a plasma treatment layer.

4. The pressure sensing probe of claim 1, wherein the cover comprises a body portion and a handle portion, the handle portion being disposed on the body portion, the body portion opening the probe opening.

5. The pressure sensing probe of claim 1, further comprising a hold-down member detachably disposed in the body, the hold-down member disposed between the membrane module and the cover.

6. The pressure sensing probe of claim 5, wherein the hold-down member includes a hold-down portion and a limit portion; the main body is provided with a limiting groove, the limiting part can move relative to the limiting groove, and the pressing part is used for propping against the membrane body assembly.

7. The pressure sensing probe of claim 1, further comprising a pressure supplementing assembly having an airway; the pressure supplementing assembly is connected with the main body, and the air channel is communicated with the air cavity.

8. The pressure sensing probe of claim 1, further comprising a seal disposed between the membrane body assembly and the main body.

9. A pressure sensing system comprising a pressure sensing probe according to any one of claims 1 to 8.

10. The pressure sensing system of claim 9, further comprising a laser displacement meter or a graphene fiber FP cavity-demodulation system, wherein the laser displacement meter and the graphene fiber FP cavity-demodulation system are each configured to detect a displacement distance of the graphene membrane.