CN210341042U

CN210341042U - Split type gas dispersible tablet and ion source system

Info

Publication number: CN210341042U
Application number: CN201921223573.5U
Authority: CN
Inventors: 赵向仁; 黄坤; 袁怀刚
Original assignee: Weihai Shigaoguang Electronics Co ltd
Current assignee: Weihai Shigaoguang Electronics Co ltd
Priority date: 2019-07-31
Filing date: 2019-07-31
Publication date: 2020-04-17
Anticipated expiration: 2029-07-31

Abstract

The utility model discloses a split type gas dispersible tablet and ion source system, gas dispersible tablet includes the base member and the magnetic conductive plate of split type design, the plane of base member and magnetic conductive plate all is circular, be equipped with the circular shape storage tank on the base member, magnetic conductive plate fixed mounting is in the storage tank on the base member. The utility model discloses carry out split type setting with substrate and magnetic conductive plate among the gas dispersion piece, the conical surface structure of magnetic conductive plate can reduce the magnetic conductive plate and consume, and the cost is practiced thrift to the magnetic conductive plate part in the middle of only needing to be changed during the exchange, has guaranteed the rete quality.

Description

Split type gas dispersible tablet and ion source system

Technical Field

The utility model relates to an optics coating film technical field especially relates to a split type gas dispersible tablet and ion source system.

Background

The vacuum evaporation method is a vacuum coating technique belonging to physical vapor deposition. Vacuum coating is an important aspect in the field of vacuum application, and provides a new process for preparing a film for scientific research and practical production by using a physical or chemical method based on a vacuum technology and absorbing a series of new technologies such as electron beams, molecular beams, ion beams, plasma beams, radio frequency, magnetic control and the like. Briefly, a method of evaporating or sputtering a metal, an alloy or a compound in a vacuum to solidify and deposit the metal, the alloy or the compound on an object to be coated (referred to as a substrate, a substrate or a base) is called vacuum coating. The evaporation material is placed in a crucible, and the crucible is heated to convert the material in the crucible from solid state to gaseous atom, atomic group or molecule, and then the gaseous atom, atomic group or molecule is condensed on the surface of a substrate to be coated to form a film.

Referring to fig. 1, an ion source system is an auxiliary system of a vacuum coating apparatus, and mainly functions to increase the deposition rate of molecules of a coating material, thereby increasing the film density, and the working principle is as follows: under the vacuum environment, the emitted electrons are used to ionize the working gas filled in the vacuum chamber under the interaction of an electric field (a cathode filament and a discharge anode) and a magnetic field, and ions are emitted under the action of the electric field and the magnetic field.

Referring to fig. 2 and fig. 3, a schematic structural diagram of a gas dispersible tablet 100 'in the prior art is shown, which is an integrated structure and includes a base 10' and a magnetic conductive plate 20 'located on the base, where the surface of the magnetic conductive plate 20' is a planar structure, and the following problems may occur in the use process of the gas dispersible tablet: loss caused by ion bombardment reduces the ion emission angle, the beam current reduces the molecular movement energy of the film, and the film density reduces and the quality reduces. The integrated gas dispersible tablet has high replacement cost and complex replacement method.

Therefore, there is a need for a split type gas dispersible tablet and ion source system.

SUMMERY OF THE UTILITY MODEL

In view of the above, the present invention provides a split type gas dispersing tablet and an ion source system.

In order to achieve the above object, an embodiment of the present invention provides the following technical solutions:

the split type gas dispersible tablet comprises a base body and magnetic conductive pieces which are designed in a split mode, the planes of the base body and the magnetic conductive pieces are circular, a circular accommodating groove is formed in the base body, and the magnetic conductive pieces are fixedly installed in the accommodating groove in the base body.

As a further improvement of the present invention, the magnetic conductive sheet includes a magnetic conductive sheet main body portion and a magnetic conductive sheet tapered portion located on the magnetic conductive sheet main body portion.

As a further improvement, the outer diameter of the magnetic conductive sheet main body part is equal to the inner diameter of the storage tank, and the thickness of the magnetic conductive sheet main body part is greater than the depth of the storage tank.

As a further improvement of the utility model, the included angle between the conical surface of the conical part of the magnetic conductive sheet and the bottom surface is 5-25 degrees.

As a further improvement of the utility model, the included angle between the conical surface of the conical part of the magnetic conductive sheet and the bottom surface is 15-18 degrees.

As a further improvement, the bottom of the storage tank is provided with a through hole running through the base body, and the inner diameter of the through hole is smaller than the inner diameter of the storage tank.

As a further improvement, a plurality of air outlets running through the base body are arranged on the base body along the outer side of the containing groove.

As a further improvement of the utility model, a plurality of fixing holes which run through the base body are arranged on the outer edge of the base body.

The utility model discloses another embodiment provides a technical scheme as follows:

an ion source system comprises an electric field generating unit, a magnetic field generating unit and gas dispersible tablets, wherein the electric field generating unit and the magnetic field generating unit are positioned in a vacuum cavity, and the gas dispersible tablets are split type gas dispersible tablets.

The utility model has the advantages that:

the utility model discloses carry out split type setting with substrate and magnetic conductive plate among the gas dispersion piece, the conical surface structure of magnetic conductive plate can reduce the magnetic conductive plate and consume, and the cost is practiced thrift to the magnetic conductive plate part in the middle of only needing to be changed during the exchange, has guaranteed the rete quality.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments described in the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

FIG. 1 is a schematic diagram of a prior art ion source system;

figure 2 is a schematic side view of a prior art gas dispersible tablet;

figure 3 is a schematic front view of a prior art gas dispersible tablet;

fig. 4 is a schematic diagram of a three-dimensional explosion structure of a gas dispersible tablet according to an embodiment of the present invention;

FIG. 5 is a schematic diagram of a side-view exploded structure of a gas dispersible tablet according to an embodiment of the present invention;

FIG. 6 is a schematic diagram of a side view of the gas dispersible tablet according to an embodiment of the present invention;

FIG. 7 is a schematic front view of a substrate according to an embodiment of the present invention;

FIG. 8 is a schematic cross-sectional view of a substrate according to an embodiment of the present invention;

fig. 9 is a schematic front view of the magnetic conductive plate according to an embodiment of the present invention;

fig. 10 is a schematic cross-sectional view of the magnetic conductive plate according to an embodiment of the present invention.

Detailed Description

In order to make the technical solutions in the present invention better understood, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts shall belong to the protection scope of the present invention.

Referring to fig. 4 to 6, in an embodiment of the present invention, a split type gas dispersible tablet 100 is disclosed, which includes a base 10 and a magnetic conductive sheet 20 designed in a split type, the planes of the base 10 and the magnetic conductive sheet 20 are both circular, and the material is stainless steel, such as sus304 material in this embodiment.

Referring to fig. 4 to 6 in combination with fig. 7 and 8, the substrate 10 in this embodiment is provided with a circular accommodating groove 11, and the magnetic conductive sheet 20 is fixedly installed in the accommodating groove 11 of the substrate. The bottom of the accommodating groove 11 is provided with a through hole 111 penetrating through the base body, and the inner diameter of the through hole 111 is smaller than that of the accommodating groove 11.

In addition, a plurality of air outlet holes 12 penetrating through the base body are formed in the outer side of the containing groove on the base body 10, and a plurality of fixing holes 13 penetrating through the base body are formed in the outer edge of the base body 10.

Referring to fig. 4 to 6 in combination with fig. 9 and 10, the magnetic conductive plate 20 in the present embodiment includes a magnetic conductive plate main portion 21 and a magnetic conductive plate tapered portion 22 located on the magnetic conductive plate main portion.

The outer diameter of the magnetic conductive sheet main body portion 21 is equal to the inner diameter of the accommodating groove 11, and the thickness of the magnetic conductive sheet main body portion 21 is larger than the depth of the accommodating groove 11.

Further, the included angle between the conical surface of the conical part of the magnetic conductive sheet and the bottom surface is 5-25 degrees, and preferably, the included angle between the conical surface of the conical part of the magnetic conductive sheet and the bottom surface is 15-18 degrees.

Specifically, in this embodiment, the outer diameter of the base 10 is 72mm, the thickness thereof is 3mm, the inner diameter of the receiving groove 11 on the base is 20mm, and the depth thereof is 1 mm.

The internal diameter of venthole 12 is 3mm, and the quantity is 16, is 360 degrees evenly distributed in the outside of storage tank 11 of circumference.

The fixing holes 13 have an inner diameter of 4.5mm and are 4 in number for fixed assembly with an external permanent magnet.

The outer diameter of the main body part 21 of the magnetic conductive sheet is 20mm, and the included angle between the conical surface of the conical part 22 of the magnetic conductive sheet and the bottom surface is 16.7 degrees.

Of course, in other embodiments, the sizes and angles of the substrate and the magnetic conductive sheet may be designed according to the needs, and are not described herein again for example.

Correspondingly, the utility model also discloses an ion source system, including electric field production unit and the magnetic field production unit that is arranged in the vacuum cavity and be used for the gaseous dispersion piece of dispersed working gas, gaseous dispersion piece is the split type gaseous dispersion piece in above-mentioned embodiment.

According to the technical scheme provided by the utility model, the utility model discloses following beneficial effect has:

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The split type gas dispersible tablet is characterized by comprising a base body and magnetic conductive sheets which are designed in a split type, wherein the planes of the base body and the magnetic conductive sheets are both circular, a circular accommodating groove is formed in the base body, and the magnetic conductive sheets are fixedly arranged in the accommodating groove in the base body.

2. The split gas dispersible tablet of claim 1, wherein the magnetic conductive sheet comprises a main magnetic conductive sheet portion and a conical magnetic conductive sheet portion located on the main magnetic conductive sheet portion.

3. The split gas dispersible tablet of claim 2, wherein the outer diameter of the magnetic conductive tablet main body part is equal to the inner diameter of the containing groove, and the thickness of the magnetic conductive tablet main body part is greater than the depth of the containing groove.

4. The split gas dispersible tablet of claim 2, wherein the included angle between the conical surface of the conical part of the magnetic conductive sheet and the bottom surface is 5 ° to 25 °.

5. The split gas dispersible tablet of claim 2, wherein the included angle between the conical surface of the conical part of the magnetic conductive sheet and the bottom surface is 15-18 °.

6. The split gas dispersible tablet of claim 1, wherein the bottom of the containing groove is provided with a through hole penetrating through the substrate, and the inner diameter of the through hole is smaller than that of the containing groove.

7. The split gas dispersible tablet of claim 1, wherein the base body is provided with a plurality of air outlets penetrating through the base body along the outer side of the containing groove.

8. The dispersible split tablet of claim 1, wherein the outer edge of the base has a plurality of fixing holes penetrating the base.

9. An ion source system, comprising an electric field generating unit and a magnetic field generating unit in a vacuum chamber, and a gas dispersible tablet for dispersing a working gas, wherein the gas dispersible tablet is the split type gas dispersible tablet of any one of claims 1 to 8.