CN210287585U - High-yield 1600-piece five-pipe low-pressure diffusion equipment - Google Patents
High-yield 1600-piece five-pipe low-pressure diffusion equipment Download PDFInfo
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- CN210287585U CN210287585U CN201921046956.XU CN201921046956U CN210287585U CN 210287585 U CN210287585 U CN 210287585U CN 201921046956 U CN201921046956 U CN 201921046956U CN 210287585 U CN210287585 U CN 210287585U
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Abstract
The utility model discloses a five tub low pressure diffusion equipment of high productivity 1600, which comprises a main engine, the front of host computer articulates through the hinge has the host computer door, the left side of host computer is provided with the air supply cabinet to the right side of host computer is provided with the sealing furnace, the right side of sealing furnace is provided with the low pressure sealing door to the inside of sealing furnace is provided with the technology pipe, the middle part of low pressure sealing door and the right-hand member that is located the technology pipe are provided with the pan feeding mouth, the utility model relates to a low pressure diffusion furnace technical field. This five tub low pressure diffusion equipment of high productivity 1600 is provided with the air supply cabinet through the left side of host computer to the right side of host computer is provided with the sealing furnace, and the right side of sealing furnace is provided with the low pressure sealing door, has saved the reservation control of every equipment through compact structural style, is equivalent to two present equipment only need the operating space of original equipment, and two are listed as the material feeding and taking system that technology pipe can share the workstation, have reduced the manufacturing cost of wafer by a wide margin.
Description
Technical Field
The utility model relates to a low pressure diffusion furnace technical field specifically is a high productivity five pipe low pressure diffusion equipment of 1600 pieces.
Background
The traditional solar cell diffusion technology adopts normal pressure diffusion, but with the development of high-efficiency crystalline silicon cells, the diffusion junction depth becomes shallow continuously, the normal pressure diffusion is difficult to meet the technical requirements of high-efficiency and low-cost development of the crystalline silicon solar cells, the low pressure diffusion improves the performance of diffusion junction preparation by providing a low pressure process environment in a reaction tube, the influence relation of the low pressure diffusion on the high sheet resistance uniformity is analyzed in detail from the aspects of diffusion molecule free path, doping atom partial pressure ratio, gas field uniformity and the like through the detailed analysis of a low pressure diffusion mechanism, better uniformity can be obtained by adopting a novel low pressure diffusion furnace, the carrying quantity is greatly improved compared with the normal pressure diffusion, incomparable production advantages are achieved, and the solar cell diffusion technology is the main development direction of the future diffusion technology.
With the continuous and deep development of low-pressure diffusion in a photovoltaic diffusion process, the capacity of equipment becomes an urgent demand of customers, the occupied area of the equipment becomes a new problem when a photovoltaic cell manufacturer expands the capacity, and as photovoltaic cells develop to present, although the quality of wafers is continuously improved, the capacity is also a main source for the manufacturer to obtain benefits, so the capacity demand is continuously expanded, but the utilization rate of most factories basically reaches a saturated state, at this time, the capacity per occupied area becomes a new index for measuring the equipment, at present, the capacity of a low-pressure diffusion furnace in the global market is 1200 sheets/pipe, 5 pipes are maximally arranged on each equipment, the capacity is difficult to keep up with the demand, the production cost is higher, and the capacity per unit area is saturated.
SUMMERY OF THE UTILITY MODEL
Not enough to prior art, the utility model provides a high-yield 1600 five pipe low pressure diffusion equipment has solved among the prior art low pressure diffusion equipment unit area productivity saturation, and the productivity is difficult to the problem that improves.
In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: the utility model provides a five tub low pressure diffusion equipment of high productivity 1600, includes the host computer, the front of host computer articulates through the hinge has the host computer door, the left side of host computer is provided with the air supply cabinet to the right side of host computer is provided with the sealing furnace, the right side of sealing furnace is provided with the low pressure sealing door to the inside of sealing furnace is provided with the technology pipe, the middle part of low pressure sealing door and the right-hand member that is located the technology pipe are provided with the pan feeding mouth, the right side of pan feeding mouth is provided with the manipulator to the right side of sealing furnace is provided with the support to the inside of support is provided with automatic control system, the inboard of support is provided with automatic material feeding and taking system, and the bottom of support is provided with the bottom plate, the top of bottom plate is provided with.
Preferably, the front of support is provided with the control cabinet to the top of control cabinet is provided with the display screen.
Preferably, the middle part of the control console is provided with a control panel, the middle part of the control console is provided with a containing groove matched with the control panel, and the front surface of the control panel is provided with a handle.
Preferably, the middle part of the automatic feeding and taking system is provided with a quartz boat, and the automatic feeding and taking system drives the quartz boat to move left and right through a driving system.
Preferably, the front of the air source cabinet is hinged with a cabinet door through a hinge.
Preferably, the main machine, the gas source cabinet and the sealing furnace are arranged in pairs, the process pipes are arranged in 5 layers, and the single pipe production capacity is 1600 sheets/pipe.
Advantageous effects
The utility model provides a high-yield 1600-piece five-pipe low-pressure diffusion equipment. Compared with the prior art, the method has the following beneficial effects:
(1) the high-energy-yield 1600-piece five-pipe low-pressure diffusion equipment is characterized in that an air source cabinet is arranged on the left side of a main machine, a sealing furnace is arranged on the right side of the main machine, a low-pressure sealing door is arranged on the right side of the sealing furnace, a process pipe is arranged inside the sealing furnace, a feeding port is arranged in the middle of the low-pressure sealing door and at the right end of the process pipe, a manipulator is arranged on the right side of the feeding port, a support is arranged on the right side of the sealing furnace, an automatic control system is arranged inside the support, an automatic feeding and taking system is arranged inside the support, a bottom plate is arranged at the bottom of the support, a sliding rail is arranged at the top of the bottom plate, the top of the sliding rail is in sliding connection with the bottom of the support, the main machine, the air source cabinet and the sealing furnace are arranged in pairs, be equivalent to the operating space of two present equipment only need original equipment, calculate according to the operating space of this equipment, the utility model discloses equipment makes unit area's productivity improve 50%, on this basis, two are the material system of sending of workstation that can share of technology pipe, have reduced the manufacturing cost of wafer like this very by a wide margin, bring higher benefit for the enterprise, have satisfied the demand that the productivity constantly enlarges, have also solved solar wafer production unit occupation of land problem, have reduced manufacturing cost.
(2) This five tub low pressure diffusion equipment of high productivity 1600, front through the support is provided with the control cabinet, and the top of control cabinet is provided with the display screen, the middle part of control cabinet is provided with the control panel, and the middle part of control cabinet is seted up the groove of accomodating with control panel looks adaptation, the front of control panel is provided with the handle, the middle part of sending the extracting system automatically is provided with the quartz boat, and send the extracting system automatically and pass through the quartz boat side-to-side motion of actuating system drive, the front of air supply cabinet articulates through the hinge has the cabinet door, the host computer, air supply cabinet and sealed furnace set up in pairs, and the process tube sets up to 5 layers, the single tube productivity is 1600 pieces/pipe, the control panel can be accomodate, the protection of the control panel of being convenient for, the.
Drawings
FIG. 1 is a front view of the structure of the present invention;
fig. 2 is a side view of the support structure of the present invention;
fig. 3 is a partially enlarged view of a portion a in fig. 1 according to the present invention.
In the figure: 1-host computer, 2-host computer door, 3-air source cabinet, 4-sealing furnace, 5-low pressure sealing door, 6-process tube, 7-material inlet, 8-mechanical arm, 9-bracket, 10-automatic control system, 11-automatic material feeding and taking system, 12-bottom plate, 13-slide rail, 14-control console, 15-display screen, 16-control panel, 17-containing groove, 18-handle, 19-quartz boat and 20-cabinet door.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-3, the present invention provides a technical solution: a high-energy-yield 1600-piece five-tube low-pressure diffusion device comprises a host 1, and the device mainly comprises a frame (comprising an air source cabinet 3, a workbench, the host 1 and a bracket 9), a furnace door sealing mechanism, a heating furnace body part, a vacuum system, an automatic feeding and taking system 11, a process gas circuit system and an automatic control system 10, wherein the system parts mentioned in the text are well-established in the prior art and are not explained much, the front of the host 1 is hinged with a host door 2 through hinges, the left side of the host 1 is provided with the air source cabinet 3, the air source cabinet 3 contains the vacuum system, the front of the air source cabinet 3 is hinged with a cabinet door 20 through hinges, the right side of the host 1 is provided with a sealing furnace 4, the host 1, the air source cabinet 3 and the sealing furnace 4 are arranged in pairs, the process tubes 6 are arranged in 5 layers, the single-tube capacity is 1600-piece tubes, the right, and the inside of the sealing furnace 4 is provided with a process tube 6, the middle part of the low-pressure sealing door 5 and the right end of the process tube 6 are provided with a feeding port 7, the right side of the feeding port 7 is provided with a manipulator 8, the right side of the sealing furnace 4 is provided with a bracket 9, the front of the bracket 9 is provided with a console 14, the top of the console 14 is provided with a display screen 15, the middle part of the console 14 is provided with a control panel 16, the middle part of the console 14 is provided with a containing groove 17 matched with the control panel 16, the front of the control panel 16 is provided with a handle 18, the inside of the bracket 9 is provided with an automatic control system 10, the automatic control system 10 plays the role of brain commanding tightly, the equipment of the utility model can provide a stable low-pressure environment for the diffusion wafer through a whole set of closed-loop control software, the inside of the, the automatic material feeding and taking system 11 has the function that a quartz boat 19 carrying unscattered wafers is placed on a push-pull boat corresponding to each tube through a manipulator 8 of the material feeding and taking system and then is fed into the process tube 6, the quartz boat 19 is arranged in the middle of the automatic material feeding and taking system 11, the quartz boat 19 is driven by the automatic material feeding and taking system 11 through a driving system to move left and right, a bottom plate 12 is arranged at the bottom of a support 9, a slide rail 13 is arranged at the top of the bottom plate 12, the top of the slide rail 13 is in sliding connection with the bottom of the support 9, the support 9 is controlled by a control system and a push cylinder to move on the bottom plate 12, so that the two sets of process tubes 6 share one feeding system, and the push cylinder is arranged between the support.
During the use, the technology quartz boat 19 that carries the silicon wafer enters into the technology pipe 6 in the heating furnace body through automatic feeding and extracting system 11, through control system's automatic procedure for vacuum in the technology pipe 6 reaches the technological pressure requirement, then lets in the process gas of needs through technology gas circuit system, carries out the diffusion process under the heating temperature of furnace body, and after the technology, through decompressing the sealed furnace gate 5 of low pressure, then by automatic feeding and extracting system 11 take out quartz boat 19, the utility model discloses equipment diffusion is effectual, and the productivity is high, when reducing the cost of enterprises, has satisfied the demand that the productivity enlarges.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a five pipe low pressure diffusion equipment of high productivity 1600, includes host computer (1), the front of host computer (1) is articulated through the hinge has host computer door (2), its characterized in that: the left side of the main machine (1) is provided with an air source cabinet (3), the right side of the main machine (1) is provided with a sealing furnace (4), the right side of the sealing furnace (4) is provided with a low-pressure sealing door (5), a process pipe (6) is arranged in the sealing furnace (4), a feeding opening (7) is arranged in the middle of the low-pressure sealing door (5) and at the right end of the process pipe (6), a manipulator (8) is arranged on the right side of the feeding opening (7), a bracket (9) is arranged on the right side of the sealing furnace (4), an automatic control system (10) is arranged in the bracket (9), an automatic material feeding and taking system (11) is arranged on the inner side of the bracket (9), a bottom plate (12) is arranged at the bottom of the bracket (9), a slide rail (13) is arranged at the top of the bottom plate (12), and the top of the sliding rail (13) is connected with the bottom of the bracket (9) in a sliding way.
2. A high-throughput 1600-piece five-tube low-pressure diffuser apparatus according to claim 1, further comprising: the front of the support (9) is provided with a console (14), and the top of the console (14) is provided with a display screen (15).
3. A high-throughput 1600-piece five-tube low-pressure diffuser apparatus according to claim 2, further comprising: the middle part of the control console (14) is provided with a control panel (16), the middle part of the control console (14) is provided with a containing groove (17) matched with the control panel (16), and the front surface of the control panel (16) is provided with a handle (18).
4. A high-throughput 1600-piece five-tube low-pressure diffuser apparatus according to claim 1, further comprising: the middle part of the automatic feeding and taking system (11) is provided with a quartz boat (19), and the automatic feeding and taking system (11) drives the quartz boat (19) to move left and right through a driving system.
5. A high-throughput 1600-piece five-tube low-pressure diffuser apparatus according to claim 1, further comprising: the front surface of the air source cabinet (3) is hinged with a cabinet door (20) through a hinge.
6. A high-throughput 1600-piece five-tube low-pressure diffuser apparatus according to claim 1, further comprising: the main machine (1), the gas source cabinet (3) and the sealing furnace (4) are arranged in pairs, the process pipes (6) are arranged into 5 layers, and the capacity of a single pipe is 1600 sheets/pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921046956.XU CN210287585U (en) | 2019-07-06 | 2019-07-06 | High-yield 1600-piece five-pipe low-pressure diffusion equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921046956.XU CN210287585U (en) | 2019-07-06 | 2019-07-06 | High-yield 1600-piece five-pipe low-pressure diffusion equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210287585U true CN210287585U (en) | 2020-04-10 |
Family
ID=70100793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921046956.XU Active CN210287585U (en) | 2019-07-06 | 2019-07-06 | High-yield 1600-piece five-pipe low-pressure diffusion equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210287585U (en) |
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2019
- 2019-07-06 CN CN201921046956.XU patent/CN210287585U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210608 Address after: Room 402, building 3, 3255 Sixian Road, Songjiang District, Shanghai Patentee after: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Address before: 214135 rooms 101 and 201, building 12 (B3), Wuxi Zhongguancun Software Park, Xinwu District, Wuxi City, Jiangsu Province Patentee before: WUXI HUAYUAN JIANDIAN TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: A high capacity 1600 pieces of five-tube low-pressure diffusion equipment Effective date of registration: 20230209 Granted publication date: 20200410 Pledgee: Agricultural Bank of China Limited Shanghai Songjiang Sub-branch Pledgor: Ideal semiconductor equipment (Shanghai) Co.,Ltd. Registration number: Y2023310000023 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right |