CN210287526U - Machine tool for machining micropores by using micro-droplet corrosion of corrosive liquid - Google Patents
Machine tool for machining micropores by using micro-droplet corrosion of corrosive liquid Download PDFInfo
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- CN210287526U CN210287526U CN201920778200.8U CN201920778200U CN210287526U CN 210287526 U CN210287526 U CN 210287526U CN 201920778200 U CN201920778200 U CN 201920778200U CN 210287526 U CN210287526 U CN 210287526U
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Abstract
The utility model provides a utilize the micropore lathe of processing of corrosive liquid droplet corrosion, its constitution includes the base, install on the base by X axle sliding table and Y axle sliding table constitute can move the slide bracket of location in the XY plane, fixed mounting is used for settling the workstation of processing the part on the slide bracket, set up piezoelectric corrosion liquid droplet device, control slide bracket and piezoelectric corrosion liquid droplet device's controller above the slide bracket through fixing on the base; the sliding platform and the piezoelectric corrosive liquid micro-droplet device are coordinated to operate under the control of the main controller, a part to be processed positioned on the workbench moves in an XY plane along a design line, and corrosive micro-droplets are dripped from a micro-droplet liquid pipe of the piezoelectric corrosive liquid micro-droplet device to carry out micro-hole processing on the part to be processed. Utilize the utility model discloses processing micropore, than the photoetching processing method, saved a plurality of manufacturing procedure links, the processing technology is very simple, and the processing cost reduces.
Description
Technical Field
The utility model relates to a corrode processing technology field, more specifically say, relate to an utilize the micropore lathe of the processing of corrosive liquids micro-droplet corrosion.
Background
In order to improve the working performance of some mechanical precision parts, a certain microstructure is often processed on the working end face of the part to improve the working performance, such as mechanical sealing, and the friction and sealing performance are effectively improved by processing micron-sized micropores on the sealing end face. This was confirmed both in scientific experiments and practice. The materials used for mechanical sealing are hard alloy and Al2O3Ceramics, SiC ceramics and other superhard materials that are difficult to process using conventional machining methods. The method for machining the micropores on the end face of the existing mechanical seal mainly comprises the following steps: micro-milling, laser ablation, photo-etching. The most similar method of the present invention is photo etching, which is to use photo and other means to make the corrosion resistant film image, to cover and protect the surface which is not needed to be processed with the corrosion resistant film, and expose the surface which needs to be processed, and to etch the material which is not covered and protected by the corrosion resistant film by the corrosive agent, and etch the corresponding micro-hole on the mechanical sealing end face. The use of a photo-etching processing machine for sealing the micropores on the end face requires not only the production of a resist image by means of photography or the like, the production of a resist film using a photoresist, the application of the resist film on the end face to be processed as designed, but also the removal of the resist film after the completion of the etching processing, and therefore requires many processing steps and a low processing efficiency. In addition, the photoetching micropore processing needs to be completed by a photoetching machine, and the photoetching machine cannot realize the photoetching micropore processing, but the photoetching machine is very expensive, so the photoetching micropore processing has low processing efficiency and high processing cost.
SUMMERY OF THE UTILITY MODEL
To the technical current situation of precision parts functional surface micropore processing, the utility model aims at providing an utilize the micropore lathe of the processing of corrosive liquids micro-droplet corrosion to improve micropore processing's efficiency, reduce micropore processing's cost.
The utility model provides a utilize the micropore lathe of processing of corrosive liquid droplet corrosion, its constitution includes the base, install on the base by X axle sliding table and Y axle sliding table constitute can move the slide bracket of location in the XY plane, fixed mounting is used for settling the workstation of processing the part on the slide bracket, set up piezoelectric corrosion liquid droplet device, control slide bracket and piezoelectric corrosion liquid droplet device's controller above the slide bracket through fixing on the base; the distance between a micro-droplet liquid pipe of the piezoelectric corrosive liquid micro-droplet device arranged on the bracket and the upper surface of the part to be processed is that the micro-droplet liquid is dripped without sputtering; the sliding platform and the piezoelectric corrosive liquid micro-droplet device are coordinated to operate under the control of the controller, a part to be processed positioned on the workbench moves in an XY plane along a design line, and corrosive micro-droplets are dripped from a micro-droplet liquid pipe of the piezoelectric corrosive liquid micro-droplet device to carry out micro-hole processing on the part to be processed.
The above technical scheme of the utility model, in order to be applicable to the micropore on the processing not unidimensional part terminal surface better, design one better by controller control moving Z axle sliding stand, the little liquid drop device of piezoelectricity corruption liquid passes through the Z axle sliding stand and installs on the support that is fixed in on the base, the little liquid drop device of piezoelectricity corruption liquid drives the up-and-down motion at Z axle sliding stand, makes the little liquid pipe of the little liquid drop device of piezoelectricity corruption liquid and waits to process and keep suitable distance of dripping between the part upper surface. Of course, other means for adjusting the distance between the droplet liquid pipe and the upper surface of the part to be processed, such as manually, may be used. For a special machine tool for processing the micropores on the end face of a certain specific part, the piezoelectric corrosive liquid micro-droplet device can also be directly arranged on a bracket fixedly arranged on the base, so that a fixed distance is kept between the micro-droplet liquid pipe and the upper surface of the part to be processed.
The above technical scheme of the utility model, preferentially take the controller to be connected with X axle sliding stand, Y axle sliding stand and Z axle sliding stand through motor driver respectively, be connected with the little liquid drop device of piezoelectricity etching liquid through piezoelectric driver, three sliding stand and the little liquid drop device of piezoelectricity etching liquid coordinated operation under the controller control, realize the processing of corroding to the part terminal surface micropore. Further, the drive motors of the three slide tables preferably employ servo motors or stepping motors.
The above technical solution of the present invention is that the distance between the micro droplet liquid tube of the piezoelectric etching liquid micro droplet device and the upper surface of the part to be processed is changed due to the different sizes of the corroded viscosity and the micro droplet, but is generally controlled within the range of 0.5mm-1.0 mm.
The above technical solution of the present invention, piezoelectric corrosion liquid droplet device, it constitutes generally by the barrel that holds the corrosive liquid and settles and order about the piezoelectric actuator that the interior corrosive liquid of barrel dripped from the droplet liquid pipe that is located the barrel below on the barrel and constitute, and the controller passes through piezoelectric actuator and is connected with the piezoelectric actuator electricity, controls the operation of piezoelectric corrosion liquid droplet device.
In the above technical solution of the present invention, the cylinder containing the corrosive liquid is preferably designed with a corrosive liquid inlet pipe, so that the corrosive liquid in the cylinder is connected to a pressurized corrosive liquid source; furthermore, in order to control the pressure of the corrosive liquid in the cylinder of the piezoelectric corrosive liquid micro-droplet device, a pressure gauge and a control valve are preferably arranged on a liquid inlet pipe connected with a pressure corrosive liquid source.
The above technical solution of the present invention, the support for installing the Z-axis sliding table may be a cantilever structure support, or a door-shaped structure support. Preferably, a portal-type structure of the stent is used. The controller preferably adopts a PLC controller or a PC controller.
The above technical solution of the present invention, three sliding tables can be designed to include a sliding slot, a sliding plate matching with the sliding slot, a driving motor installed in the sliding slot, and a transmission mechanism connected with the driving motor, wherein the sliding plate is driven by the transmission mechanism to slide relative to the sliding slot. The transmission mechanism can be a common screw nut transmission mechanism, and can also adopt a ball screw nut transmission mechanism. The transmission precision of the ball screw nut transmission mechanism is higher, the displacement precision of the sliding table can be ensured, and the micropore position arrangement precision is ensured.
The utility model provides an utilize the micropore lathe of the processing of little liquid drop corrosion of corrosive liquid, its X axle sliding stand, Y axle sliding stand and Z axle sliding stand constitute triaxial linkage platform under the control of controller, and three sliding stand and the little liquid drop device of piezoelectricity corrosive liquid are synchronous coordinated motion under the control of controller, and the little liquid drop of corrosive liquid is deployed to treating processing work piece processing region accurately, processes out the micropore that will process.
The size of the micropores is controlled by the size of the micro-droplets of the corrosive liquid, the size of the micro-droplets of the corrosive liquid is controlled by the inner diameter of the micro-droplet liquid pipe and the properties of the corrosive liquid, and the properties of the corrosive liquid mainly comprise viscosity, temperature, surface tension and the like. The formulation of the etching solution varies depending on the material to be processed.
Adopt the utility model provides a lathe utilizes the little liquid drop of corrosive liquid to corrode processing micropore, with the utility model discloses close photoetching processing method compares, and the processing technology is very simple, has saved and has utilized photographic means preparation resist film like in the photoetching processing method, uses photoresist preparation resist film, lays the resist film according to the design and carries on waiting the terminal surface of processing, clears away a plurality of process links such as resist film after the corrosion processing finishes, under the control of controller, sliding platform and the little liquid drop device of piezoelectricity corrosive liquid coordinate the cooperation, can accurately lay out the little liquid drop of corrosive liquid to the micropore position fast and corrode processing, and machining efficiency is for improving greatly. The utility model provides an utilize the micropore lathe of the processing of corrosive liquid droplet corrosion, its structure is very simple, and the triaxial linkage platform in the usable digit control machine tool is equipped with the little liquid droplet device preparation of piezoelectricity corrosive liquid, and the design low in manufacturing cost, the photoetching machine of prior art, equipment cost is low, greatly reduced the processing cost. Besides, the corrosion liquid can be effectively saved, and the problem of treatment of the corrosion processing waste liquid is solved.
Drawings
Fig. 1 is a schematic structural diagram of a machine tool entity according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a piezoelectric etching solution micro-droplet device in a machine tool entity part of the present invention.
Fig. 3 is a schematic structural diagram of a machine tool control portion according to an embodiment of the present invention.
The objects identified by the various figure designations in the above-referenced drawings are: 1-a base; 2-Y axis slide table; 3-a workbench; 4-X axis slide table; 5-a bracket; 6-Z axis sliding table; 7-a piezoelectric corrosive liquid micro-droplet device; 8-parts to be processed; 9-a controller; 10-a liquid inlet pipe; 11-a control valve; 12-pressure gauge; 13-a piezoelectric actuator; 14-a cylinder body; 15-microdroplet tube.
Detailed Description
The following provides a detailed description of the present invention with reference to the drawings, and further describes the machine tool for machining micro-holes by using micro-droplet etching of etching solution provided by the present invention. It should be particularly noted that the embodiments of the present invention are not limited to the forms described in the examples.
In the following embodiments of the present invention, terms of orientation such as up and down, left and right, front and back, and the like are referred to based on the orientation facing the drawings.
Example 1
The machine tool for machining micropores by using corrosion liquid micro-droplets in the embodiment is a general machine tool which can be used for machining micropores on mechanical sealing end surfaces of various structures with different sizes, and the structure of the machine tool is shown in the attached drawings 1, 2 and 3, and the machine tool comprises a base 1, a Y-axis sliding table 2, a workbench 3, an X-axis sliding table 4, a support 5, a Z-axis sliding table 6, a piezoelectric corrosion liquid micro-droplet device 7, a controller 9, a piezoelectric driver and a motor controller. The X-axis sliding table, the Y-axis sliding table and the Z-axis sliding table are identical in structure and are all composed of a sliding groove, a sliding plate matched with the sliding groove, a ball screw transmission mechanism installed in the sliding groove and a stepping motor used as a driving motor, the sliding plate is driven by the ball screw transmission mechanism to slide relative to the sliding groove, and the stepping motor is electrically connected with a PLC (programmable logic controller) used as a controller through a motor controller. The X-axis sliding table is vertically arranged on a sliding plate of the Y-axis sliding table through a sliding chute to form a sliding platform which can move and position in an XY plane, the sliding platform is arranged on a base 1 of a plate-shaped structure through a Y-axis sliding table 4 of the sliding platform, and a workbench 3 for fixing a part 8 to be processed is arranged on the sliding plate of the X-axis sliding table 4. The support 5 is a support of a door-shaped structure and is fixedly arranged on a base of a plate-shaped structure, the Z-axis sliding table is arranged at the middle position of the support of the door-shaped structure through a sliding chute of the Z-axis sliding table, and the piezoelectric corrosion liquid micro-droplet device 7 is arranged on a sliding plate of the Z-axis sliding table. The piezoelectric corrosive liquid micro-droplet device consists of a cylinder 14 containing corrosive liquid and a piezoelectric actuator 13 arranged on the cylinder and used for driving the corrosive liquid in the cylinder to drip from a micro-droplet liquid pipe 15 positioned below the cylinder, and the piezoelectric actuator and the pressure are matched
A control valve 11 and a pressure gauge (12) are designed on the pipeline of the corrosive liquid inlet pipe 10, and the piezoelectric actuator is electrically connected with a PLC (programmable logic controller) serving as a controller through a piezoelectric driver. When the micro-hole on the mechanical sealing end surface is machined, the controller controls the Z-axis sliding table to drive the piezoelectric corrosion liquid micro-droplet device to move up and down, so that the distance between a micro-droplet liquid pipe of the piezoelectric corrosion liquid micro-droplet device and the upper surface of a part to be machined is controlled within the range of 0.5mm-1.0mm, the sliding platform and the piezoelectric corrosion liquid micro-droplet device are coordinated under the control of the controller, the part to be machined on the working table moves in an XY plane along a designed line, and the corrosion micro-droplet liquid drips from the micro-droplet liquid pipe of the piezoelectric corrosion liquid micro-droplet device to be machined to perform micro-hole machining.
Example 2
The machine tool for machining micropores by using corrosion liquid micro-droplets in the embodiment is a special machine tool specially used for machining micropores on mechanical sealing end faces of a structure with a specific size, and the structure of the machine tool is basically the same as that of the machine tool in the embodiment 1, and the difference is that the piezoelectric corrosion liquid micro-droplet device 7 is directly installed in the middle of a portal structure support, so that a Z-axis sliding table and a special controller for controlling the Z-axis sliding table are omitted.
Claims (10)
1. A machine tool for processing micropores by using corrosion liquid micro-droplet corrosion is characterized by comprising a base (1), a sliding platform which is arranged on the base and consists of an X-axis sliding table (4) and a Y-axis sliding table (2) and can move and position in an XY plane, a workbench (3) which is fixedly arranged on the sliding platform and is used for arranging a part to be processed, a piezoelectric corrosion liquid micro-droplet device (7) which is arranged above the sliding platform through a bracket (5) fixed on the base, and a controller (9) for controlling the sliding table and the piezoelectric corrosion liquid micro-droplet device to operate; the distance between a micro-droplet liquid pipe (15) of the piezoelectric corrosive liquid micro-droplet device arranged on the bracket and the upper surface of the part to be processed is that the micro-droplet is dripped without sputtering; the sliding platform and the piezoelectric corrosive liquid micro-droplet device are coordinated to operate under the control of the controller, a part to be processed on the workbench moves in an XY plane along a design line, and corrosive micro-droplets are dripped from a micro-droplet liquid pipe of the piezoelectric corrosive liquid micro-droplet device to carry out micro-hole processing on the part to be processed.
2. The machine tool for processing the micro-hole by using the micro-droplet corrosion of the corrosive liquid according to claim 1, wherein the micro-droplet device of the piezoelectric corrosive liquid is arranged above the sliding platform through a Z-axis sliding table (6) arranged on a bracket (5), and the controller controls the Z-axis sliding table to drive the micro-droplet device of the piezoelectric corrosive liquid arranged on the Z-axis sliding table to move up and down.
3. A machine tool for etching and processing micro-holes by using micro-droplets of etching solution according to claim 2, wherein the controller is connected with the X-axis slide table, the Y-axis slide table and the Z-axis slide table through the motor driver, and is connected with the micro-droplet device of piezoelectric etching solution through the piezoelectric driver, and the three slide tables and the micro-droplet device of piezoelectric etching solution operate in coordination under the control of the main controller.
4. A machine tool for etching a micro-hole using micro-droplets of etching solution according to claim 3, wherein the driving motors of the driving mechanisms of the three slide tables are servo motors or stepping motors.
5. A machine tool for micro-etching and processing with micro-droplets of etching solution according to any one of claims 1 to 4, wherein the micro-droplet liquid pipe of the piezoelectric etching solution micro-droplet device is spaced from the upper surface of the part to be processed by a distance of 0.5mm to 1.0 mm.
6. The machine tool for etching micro-holes with micro-droplets of etching solution according to any one of claims 1 to 4, wherein the piezoelectric etching solution micro-droplet device is composed of a cylinder (14) for containing the etching solution and a piezoelectric actuator (13) arranged on the cylinder for driving the etching solution in the cylinder to drop from a micro-droplet pipe located below the cylinder, and the main controller is electrically connected with the piezoelectric actuator through the piezoelectric actuator for controlling the operation of the piezoelectric etching solution micro-droplet device.
7. A machine tool for machining micro-holes by etching with micro-droplets of etching liquid according to claim 6, characterized in that the cylinder is designed with an inlet pipe (10) for etching liquid connected to a source of pressurized etching liquid.
8. A machine tool for etching micro-holes with micro-droplets of etching solution according to claim 7, wherein a pressure gauge (11) and a control valve (12) are provided on the feed liquid connected to the source of pressurized etching solution.
9. A machine tool for etching and processing micro-holes by using micro-droplets of etching solution according to any one of claims 1 to 4, wherein the bracket on which the Z-axis slide table is mounted is a gantry-type structural bracket.
10. A machine tool for etching and processing micro-holes by using micro-droplets of etching solution according to any one of claims 1 to 4, wherein the controller is a PLC controller or a PC controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920778200.8U CN210287526U (en) | 2019-05-27 | 2019-05-27 | Machine tool for machining micropores by using micro-droplet corrosion of corrosive liquid |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920778200.8U CN210287526U (en) | 2019-05-27 | 2019-05-27 | Machine tool for machining micropores by using micro-droplet corrosion of corrosive liquid |
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| CN210287526U true CN210287526U (en) | 2020-04-10 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113862674A (en) * | 2021-11-09 | 2021-12-31 | 贵州航天南海科技有限责任公司 | Upward-spraying corrosion processing system and processing method thereof |
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2019
- 2019-05-27 CN CN201920778200.8U patent/CN210287526U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113862674A (en) * | 2021-11-09 | 2021-12-31 | 贵州航天南海科技有限责任公司 | Upward-spraying corrosion processing system and processing method thereof |
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