CN210245451U - Broken line progressive type multi-stage rod ion focusing transmission equipment and device - Google Patents
Broken line progressive type multi-stage rod ion focusing transmission equipment and device Download PDFInfo
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- CN210245451U CN210245451U CN201920480202.9U CN201920480202U CN210245451U CN 210245451 U CN210245451 U CN 210245451U CN 201920480202 U CN201920480202 U CN 201920480202U CN 210245451 U CN210245451 U CN 210245451U
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Abstract
The utility model discloses a broken line progressive multi-level rod ion focusing transmission device, which comprises an ion source component, an ion lens component, a focusing component, an analyzer component and a detector component, wherein the focusing component comprises a plurality of focusing units which are linearly arranged; the ion lens component, the first focusing unit, the second focusing unit, the nth focusing unit and the analyzer component are all connected with a vacuum system, an internal vacuum chamber is formed under the working state, a multi-stage rod ion focusing transmission component is arranged inside the first focusing unit and the nth focusing unit, and the multi-stage rod ion focusing transmission component comprises a multi-stage rod focusing structure with a large inlet, a small outlet and a smooth and gradually-reduced diameter from the inlet caliber to the outlet caliber; the utility model discloses make the mechanism preparation simple and easy convenient, arrange more the volume and the cost that can further reduce whole equipment than the straight line, more can improve the ion focusing ability, promote ultimate detectivity, use corresponding focus structure than singly simultaneously, its whole volume that can greatly reduced.
Description
Technical Field
The utility model belongs to the technical field of the ion focusing transmission and specifically relates to a broken line progressive type multistage pole ion focusing transmission equipment and device.
Background
The mass spectrometer is a high-sensitivity and high-resolution instrument for detecting chemical components of substances, and is characterized by that firstly, the sample is converted into gaseous ions, then the ions are separated according to the mass-to-charge ratio (m/z) by means of electric field or magnetic field, then the intensity of the ions is measured to form mass spectrum, and according to the mass spectrum the chemical components of the substances can be qualitatively or quantitatively obtained.
Analyte ions for analysis by mass spectrometry can be generated by any of a variety of ionization systems. For example, AP-MALDI, APPI, ESI, APCI, and ICP systems can be used in mass spectrometry systems to generate ions. Many of these systems generate ions at or near atmospheric pressure (760 Torr). After the ions are generated, the analyte ions must be introduced or sampled into the mass spectrum. Typically, the analyzer portion of the mass spectrometer is held at 10-4Torr to 10-8High vacuum level of Torr. In practice, sampling the ions involves transporting the analyte ions in the form of a finely defined ion beam from the ion source via one or more intermediate vacuum chambers to a high vacuum mass spectrometer chamber. Each of the intermediate vacuum chambers maintains a vacuum level between the front and rear chambers. Thus, the analyte ions are transitioned from the pressure level associated with ion formation to the pressure level of the mass spectrometer in a stepwise manner therein. In most applications, it is desirable to transport ions through each of the various chambers of a mass spectrometer system without significant ion loss. Ion guidance is commonly used in MS systems to move ions in a defined direction.
The ion transmission product on the market is a six-grade rod with uniform diameter, and the diameter of an inlet and the diameter of an outlet formed by 6 inscribed circles of the six-grade rod are the same. After a radio frequency electric field and an axial gradient electric field are applied to the six-stage rod, ions can be focused inside the six-stage rod and then enter the outlet from the inlet, and because the ion source is in the atmospheric pressure outside the vacuum, the ions and the neutral gas are driven by the pressure difference between the vacuum and the atmospheric pressure and enter through a small narrow hole, the hole diameter is enlarged, the total amount of the ions and the neutral gas which can enter the vacuum can be increased, but a vacuum pump with higher pumping speed is needed to maintain separation, and the necessary background vacuum of the ions is detected. And correspondingly, the inscribed circle of the six-stage rod needs to be larger, so that most of the ions enter the six-stage rod after rapidly expanding through the small hole, are restrained by the alternating current electric field and then are focused. However, after the diameter of the inscribed circle of the six-stage rod is large, the focusing effect at the outlet is poor, and more ions are diffused and lost after exiting the six-stage rod and are difficult to enter the lower-stage ion optical path, so that a method and a method are needed to be found, wherein the method and the method can obtain more ions to be detected at the inlet, better focused ions at the outlet and better detection background to obtain higher sensitivity.
SUMMERY OF THE UTILITY MODEL
In view of the above, there is a need to overcome at least one of the above-mentioned drawbacks of the prior art, and the present invention provides a multi-stage rod ion focusing transmission apparatus including an ion source part located in a first order, an ion lens part located in a second order, a focusing part located in a third order, an analyzer part located in a fourth order, and a detector part located in a fifth order, the focusing part including a plurality of focusing units arranged in a zigzag, i.e., a first focusing unit, a second focusing unit, to an nth focusing unit, a first barrier provided with a first through hole for an ion beam generated by the ion source part being installed between the ion source part and the ion lens part, a second barrier provided with a second through hole for an ion beam focused by the ion lens being installed between the ion lens part and the focusing part, and a second barrier provided with a second through hole for an ion beam focused by the ion lens being installed between the first focusing unit and the second focusing unit A first focusing partition plate of a first focusing through hole of the ion beam of the unit, a second focusing partition plate provided with a second focusing through hole of the ion beam passing through the second focusing unit is installed between the second focusing unit and the third focusing unit, until, an (n-1) th focusing diaphragm provided with an (n-1) th focusing through hole through which the ion beam passes through the (n-1) th focusing unit is installed between the (n-1) th focusing unit and the nth focusing unit, an nth focusing diaphragm provided with an nth focusing through hole through which the ion beam passes through the nth focusing unit is installed between the nth focusing unit and the detector part, a fourth diaphragm provided with a fourth through hole through which the ion beam from the analyzer unit passes is installed between the detector unit and the analyzer unit; the ion lens component, the first focusing unit, the second focusing unit, the nth focusing unit and the analyzer component are all connected with a vacuum system, an internal vacuum chamber is formed in the working state, a multi-stage rod ion focusing transmission component is arranged in the first focusing unit and the nth focusing unit, and the multi-stage rod ion focusing transmission component comprises a multi-stage rod focusing structure with a large inlet, a small outlet and a smooth and gradually-reduced diameter from the inlet aperture to the outlet aperture;
the ion source component emits ion beams, the ion beams enter a vacuum chamber in the ion lens component through a first through hole, after being focused by the ion lens component, the ion beams enter the vacuum chamber of the first focusing unit in the focusing component through a second through hole, gaps are reserved among the second partition plate, the inlet, the outlet and the third plate, the aperture of the second through hole is set according to the diameter formed by the ion beams, the ion beams are focused through the multi-stage rod focusing structures which are linearly arranged and are emitted through the nth focusing through hole, and the aperture of the nth focusing through hole is set according to the ion beams emitted out of the outlet and enters the analyzer component and the detector component at the fifth position through the nth focusing through hole for analysis and detection.
According to the prior art in the background of the patent, the apertures of an ion beam inlet and an ion beam outlet are the same, so that the problem that the cost and the complexity of the whole equipment cannot be increased and the focusing capacity can be improved by a low cost or a simple method cannot be simultaneously solved; the utility model discloses a broken line progressive type multi-stage rod ion focusing transmission device, which adopts the broken line progressive type multi-stage rod ion focusing transmission device with the ion beam inlet aperture larger than the ion beam outlet aperture, can make the mechanism simple and convenient to manufacture, can further reduce the volume of the whole device, can reduce the cost, can further improve the ion focusing capacity, and improve the final detection sensitivity, meanwhile, the structure of the application can greatly reduce the whole volume compared with the single corresponding focusing structure due to the adoption of a plurality of focusing structures with the inlet apertures larger than the outlet aperture for series connection, and can further reduce the background by adopting the broken line progressive type linear progressive type, thereby improving the sensitivity and the accuracy of the whole detection, further reducing the volume, and simultaneously, because the effect obtains the cylindrical structure and the conical structure of the application, it should also be understood that structures of uniform cross-section and size and structures of decreasing cross-section and size are also possible and should not be limited by the specific wording of this disclosure.
The ion source is in the atmospheric pressure outside the vacuum, ions and neutral gas are driven by the pressure difference between the vacuum and the atmospheric pressure, the ions enter a space structure with a large inlet and a small outlet through a first through hole and a second through hole at high speed, the ions can be focused inside the multi-stage rod after a radio frequency electric field and an axial gradient electric field are applied to the rod body, and then enter the outlet from the inlet, on one hand, the diameter of the inlet of the multi-stage rod is large, so that more ions can enter the multi-stage rod after being rapidly expanded through the small holes, are restrained by an alternating current electric field and then are focused; on the other hand, due to the adoption of the equipment structure applied by the scheme, the field intensity in a space structure can be further increased, the size of the outlet can be further reduced, the ion focusing performance is enhanced, meanwhile, the detection background can be further reduced due to the further reduction of the size of the outlet, and the overall sensitivity of detection is improved.
Meanwhile, the utility model further provides a broken line progressive type multi-stage rod ion focusing transmission device, which comprises a plurality of focusing units arranged in a broken line, namely a first focusing unit, a second focusing unit and an nth focusing unit, wherein a first focusing partition plate provided with a first focusing through hole for passing through the ion beam of the first focusing unit is arranged between the first focusing unit and the second focusing unit, a second focusing partition plate provided with a second focusing through hole for passing through the ion beam of the second focusing unit is arranged between the second focusing unit and the third focusing unit, until a (n-1) th focusing partition plate provided with an (n-1) th focusing through hole for passing through the ion beam of the (n-1) th focusing unit is arranged between the (n-1) th focusing unit and the nth focusing unit, the rear side of the nth focusing unit is provided with an nth focusing partition plate provided with an nth focusing through hole for the ion beam passing through the nth focusing unit, the first focusing unit, the second focusing unit and the nth focusing unit are connected with a vacuum system to form an internal vacuum chamber under the working state, a multi-stage rod ion focusing transmission part is arranged in the first focusing unit and the nth focusing unit, and the multi-stage rod ion focusing transmission part comprises a multi-stage rod focusing structure with a large inlet, a small outlet and a smooth and gradually decreased diameter from the inlet to the outlet.
By adopting the plurality of series structures, the volume of the whole equipment or device can be greatly reduced under the condition of the same effect, and better effect can be obtained.
In addition, according to the utility model discloses a broken line progressive type multistage pole ion focusing transmission device still has following additional technical characterstic:
furthermore, the multistage rod focusing structure comprises a plurality of conductive rod pieces, and the conductive rod pieces form a space symmetrical structure with a large inlet aperture and a small outlet aperture around the same central axis; the conductive rods are fixedly connected in the hollow cavities of the supporting bases.
Further, the number of the conductive rods is 4 or 6 or 8.
Furthermore, the conductive rod piece is a metal rod piece or a rod piece with a wrapped metal coating or a rod piece with a metal rod piece inside and an insulating coating outside.
Further, the multi-stage focusing structure is a bagThe device comprises a plurality of long-axis equal-diameter conducting rods, wherein the long-axis equal-diameter conducting rods form a space symmetrical structure around the same axis to form a long-axis equal-diameter conical structure with an entrance aperture larger than an exit aperture; a plurality of supporting seats, each supporting seat is provided with an internal through hole, the long-axis equal-diameter conducting rod is fixedly connected to the inner side of the through hole, the caliber of the outlet is more than or equal to 2mm, and the diameter of the long-axis equal-diameter conducting rod is more than or equal to 2mm1mm and is not more than50mm, the support seat is connected with the long-axis equal-diameter conducting rod in a staggered mode, and is connected with an external power supply capable of forming a radio-frequency electric field and an axial gradient electric field in the conical structure together with the long-axis conducting rod;
or
The multistage rod focusing structure comprises a plurality of conical conducting rods and a supporting seat, the conical conducting rods are distributed in a central symmetry mode around a central axis and form a conical space structure with an open cavity inside, an inlet and an outlet are formed at two ends of the conical space structure, and the diameter of the inlet is larger than that of the outlet; the supporting seat comprises a fixing piece, a first conductive polar plate and a second conductive polar plate, the conical conductive rods, the first conductive polar plate and the second conductive polar plate form sequential connection of a high-frequency electric field and an axial gradient electric field in the open type cavity, the first conductive polar plate and the second conductive polar plate are fixedly installed on the fixing piece, the conical conductive rods are fixedly connected to the inner side of a hollow hole of the fixing piece, and the first conductive polar plate and the second conductive polar plate are connected with an external power supply.
Or
The multistage rod focusing structure comprises a plurality of bending conductive rods and a supporting seat, the bending conductive rods are distributed in a central symmetry mode around a central axis and form a bending space structure with an open cavity inside, each bending conductive rod comprises a straight section and a bending section, the straight section is of a cylindrical structure or a conical structure, the bending section is of a cylindrical structure or a conical structure, the top end face of the straight section is the bottom end face of the bending section, the top ends of the bending sections are converged towards the central axis to form a central symmetry distribution structure around the central axis, and the bending space structure forms a bending space structure with a large inlet aperture and a small outlet aperture; the supporting seat comprises a fixing piece, a first conductive polar plate and a second conductive polar plate, the first conductive polar plate and the second conductive polar plate are fixedly installed on the fixing piece, a plurality of bending conductive rods are fixedly connected to the inner side of a hollow hole of the fixing piece, the first conductive polar plate and the second conductive polar plate are connected with an external power supply, and the bending conductive rods, the first conductive polar plate and the second conductive polar plate form sequential connection of a high-frequency electric field and an axial gradient electric field inside the open type cavity.
The long-shaft equal-diameter conducting rod is lower in manufacturing cost and more convenient to machine, assemble and maintain, but the minimum value of the diameter of an outlet is limited during manufacturing, so that the disadvantage of reducing the overall volume of the overall equipment is overcome;
by adopting the conical conducting rod structure, the manufacturing cost is higher than that of the conducting rod with the long shaft and the equal diameter, the processing, the assembly and the maintenance are slightly complicated, but the advantage that the diameter of an outlet can be infinitely small exists in theory, and the advantage is extremely obvious in the aspect of reducing the volume of the whole equipment;
by adopting the bent conducting rod, the ion beam at the entrance can be stabilized on the basis of adopting the conical conducting rod structure, so that better effects are brought to subsequent various processes, but the ion beam is weak in volume reduction and adopts the conical conducting structure.
Furthermore, when the multistage rod focusing structure comprises a plurality of conical conducting rods, the end faces of the conical conducting rods at the inlet are provided with first end faces which are distributed around the center axis in a central symmetry manner, each first end face is provided with an inclined face, and the inclined face and the end faces form a second end face with a smaller inclined face at one side close to the center axis;
or
When the multistage rod focusing structure comprises a plurality of bending conductive rods, the end face of each bending conductive rod at the inlet is provided with a first end face which is symmetrically distributed around the center of the central axis, and the inclined face and the end face form a second end face with a smaller relative inclined face at one side close to the central axis; the straight section is of a cylindrical structure or a conical structure, the bending section is of a cylindrical structure or a conical structure, and the bending conductive rods are freely combined with the structures.
Preferably, the tapered conducting rod or the bent conducting rod is integrally formed.
If great, then this terminal surface electric charge gathering is more, can produce certain hindrance effect to the entering of ion, consequently will be here near the terminal surface of axis and reduce as far as possible, can significantly reduce the repulsion of terminal surface electric charge to entering ion from this, can make more ions get into inside the toper spatial structure for final detection's result is more accurate, the concrete area of first terminal surface can be adjusted according to specific empirical data, simultaneously the toper conducting rod is integrated into one piece, for guaranteeing sufficient precision, needs to make with root material promptly.
Furthermore, the first focusing unit, the second focusing unit and the nth focusing unit are all connected with a vacuum system, an internal vacuum chamber is formed in the working state, and the internal vacuum degrees are sequentially increased from small to large.
Furthermore, the broken line progressive type multi-level rod ion focusing transmission device is formed by arranging a plurality of multi-level rod focusing structures in a staggered mode, namely the central axes of the multi-level rod focusing structures are not on the same straight line and are staggered.
Preferably, the staggered arrangement may be staggered arrangement around the circumference on the coaxial line, or staggered arrangement up and down on the same plane.
Further, the aperture of the nth focusing through hole is smaller than that of the (n-1) th focusing through hole until the aperture of the second focusing through hole is smaller than that of the first focusing through hole, and the aperture of the first focusing through hole is smaller than that of the second focusing through hole.
Further, the taper of the space symmetrical structure formed by the focusing units is less than or equal to 30 degrees and greater than 0 degree.
Furthermore, the taper of the space symmetry structure is greater than or equal to 0.01 degree.
Additional aspects and advantages of the invention will be set forth in part in the description which follows and, in part, will be obvious from the description, or may be learned by practice of the invention.
Drawings
The above and/or additional aspects and advantages of the present invention will become apparent and readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings of which:
fig. 1 is a schematic structural diagram of an embodiment of the present invention (using 3 focusing components);
FIG. 2 is a schematic view of multiple focusing elements of FIG. 1 in a zigzag progression;
FIG. 3 is a schematic view of the focusing structure of the multi-stage rod of the present invention using the conductive rod with a long axis and an equal diameter;
FIG. 4 is a schematic view of the multi-stage focusing structure of the present invention using tapered conductive rods;
FIG. 5 is a schematic view of the tapered conductor bar of FIG. 4;
FIG. 6 is a schematic view of the multi-stage focusing structure of the bending conductive rod of the present invention;
FIG. 7 is a schematic view of the bending type conductive rod of FIG. 6;
FIG. 8 is an enlarged fragmentary view of FIG. 5, with the ends being similar to the corresponding ends of FIG. 7;
wherein, fig. 1A ion source component, B ion lens component, C focusing component, D analyzer component, E detector component, downward arrows are vacuum-pumping schematic, a1 first through hole, a2 first partition, B1 second through hole, B2 second partition, C1 first focusing component, C2 second focusing component, C3 third focusing component, C11 first focusing through hole, C12 first focusing partition, C21 second focusing through hole, C22 second focusing partition, C31 third focusing through hole, C32 third focusing partition, D1 fourth through hole, D2 fourth partition; .
Detailed Description
Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar functions throughout; the embodiments described below by referring to the drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "upper", "lower", "bottom", "top", "front", "rear", "inner", "outer", "lateral", "vertical", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are used merely for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "coupled," "communicating," "connected," and "coupled" are to be construed broadly and may, for example, be fixedly connected, integrally connected, or detachably connected; may be communication within two elements; can be directly connected or indirectly connected through an intermediate medium; the term "fit" can be a surface-to-surface fit, a point-to-surface or a line-to-surface fit, and also includes a hole-axis fit, and a person skilled in the art can understand the specific meaning of the above terms in the present invention in specific situations.
The utility model discloses a conceive as follows, the utility model provides a broken line progressive type multistage pole ion focusing transmission equipment, the little spatial structure of multistage pole entry export that has the ion beam entry bore of being greater than the ion beam export bore through adopting a plurality of straight lines to arrange, can make the mechanism preparation simple and easy convenient, also can reduce certain cost simultaneously, more can improve the ion focusing ability, promote ultimate detectivity, simultaneously because the little spatial structure of this entry export is big, can make the entry size of detection analysis part, not only can promote the precision that detects greatly, and can greatly reduced background noise, simultaneously owing to adopt this structure, can make whole equipment volume reduce more, simultaneously can make the cost also obtain reducing.
As shown in the drawings, according to an embodiment of the present invention, the broken line progressive multi-stage rod ion focusing transmission apparatus includes an ion source component located in a first order, an ion lens component located in a second order, a focusing component located in a third order, an analyzer component located in a fourth order, and a detector component located in a fifth order, the focusing component includes a plurality of focusing units arranged along a broken line, that is, a first focusing unit, a second focusing unit, to an n-th focusing unit, a first spacer provided with a first through hole for passing an ion beam generated by the ion source component is installed between the ion source component and the ion lens component, a second spacer provided with a second through hole for passing an ion beam focused by the ion lens is installed between the ion lens component and the focusing component, and a first focusing unit provided with an ion beam passing the first focusing unit is installed between the first focusing unit and the second focusing unit A first focusing spacer of a focusing through hole, a second focusing spacer provided with a second focusing through hole through which the ion beam passes through the second focusing unit is installed between the second focusing unit and the third focusing unit, up to an (n-1) th focusing spacer provided with an (n-1) th focusing through hole through which the ion beam passes through the (n-1) th focusing unit is installed between the (n-1) th focusing unit and the nth focusing unit, an nth focusing spacer provided with an nth focusing through hole through which the ion beam passes through the nth focusing unit is installed between the nth focusing unit and the detector part, and a fourth spacer provided with a fourth through hole through which the ion beam passes from the analyzer part is installed between the detector part and the analyzer part；The ion lens component, the first focusing unit, the second focusing unit, the nth focusing unit and the analyzer component are all connected with a vacuum system, an internal vacuum chamber is formed in the working state, a multi-stage rod ion focusing transmission component is arranged in the first focusing unit and the nth focusing unit, and the multi-stage rod ion focusing transmission component comprises a multi-stage rod focusing structure with a large inlet, a small outlet and a smooth and gradually-reduced diameter from the inlet aperture to the outlet aperture;
the ion source component emits ion beams, the ion beams enter a vacuum chamber in the ion lens component through a first through hole, after being focused by the ion lens component, the ion beams enter the vacuum chamber of the first focusing unit in the focusing component through a second through hole, gaps are reserved among the second partition plate, the inlet, the outlet and the third plate, the aperture of the second through hole is set according to the diameter formed by the ion beams, the ion beams are focused through the multi-stage rod focusing structures which are linearly arranged and are emitted through the nth focusing through hole, and the aperture of the nth focusing through hole is set according to the ion beams emitted out of the outlet and enters the analyzer component and the detector component at the fifth position through the nth focusing through hole for analysis and detection.
The utility model further provides a broken line progressive type multi-stage rod ion focusing transmission device, according to the embodiment of the present application, comprising a plurality of focusing units arranged in a broken line, namely a first focusing unit, a second focusing unit to an nth focusing unit, a first focusing partition plate provided with a first focusing through hole for passing the ion beam passing through the first focusing unit is installed between the first focusing unit and the second focusing unit, a second focusing partition plate provided with a second focusing through hole for passing the ion beam passing through the second focusing unit is installed between the second focusing unit and the third focusing unit, until an (n-1) th focusing partition plate provided with an (n-1) th focusing through hole for passing the ion beam passing through the (n-1) th focusing unit is installed between the (n-1) th focusing unit and the nth focusing unit, the rear side of the nth focusing unit is provided with an nth focusing partition plate provided with an nth focusing through hole for the ion beam passing through the nth focusing unit, the first focusing unit, the second focusing unit and the nth focusing unit are connected with a vacuum system to form an internal vacuum chamber in a working state, a multi-stage rod ion focusing transmission part is arranged in the first focusing unit and the nth focusing unit, the multi-stage rod ion focusing transmission part comprises a multi-stage rod focusing structure with a large inlet, a small outlet and a smooth and gradually-reduced inlet aperture and outlet aperture, and the volume can be further reduced and the overall detection effect can be improved by adopting a polygonal line arrangement rather than a linear arrangement.
In addition, according to the utility model discloses a broken line progressive type multistage pole ion focusing transmission device still has following additional technical characteristics:
according to some embodiments of the present invention, the multistage rod focusing structure comprises a plurality of conductive rod members, and the conductive rod members form a space symmetric structure around the same central axis, in which an entrance aperture is large and an exit aperture is small; the conductive rods are fixedly connected in the hollow cavities of the supporting bases.
According to some embodiments of the present invention, the number of the conductive bars is 4 or 6 or 8.
Further, the conducting rod piece is a metal rod piece or a rod piece with a wrapped metal coating or a rod piece with a metal rod piece inside and an insulating coating outside.
According to some embodiments of the present invention, the multistage rod focusing structure comprises a plurality of long-axis equal-diameter conducting rods, the long-axis equal-diameter conducting rods form a spatially symmetrical structure around the same axis, and a long-axis equal-diameter conical structure with an entrance aperture larger than an exit aperture is formed; a plurality of supporting seats, each supporting seat is provided with an internal through hole, the long-axis equal-diameter conducting rod is fixedly connected to the inner side of the through hole, the caliber of the outlet is more than or equal to 2mm, and the diameter of the long-axis equal-diameter conducting rod is more than or equal to 2mm1mm and is not more than50mm, the support seat is connected with the long-axis equal-diameter conducting rod in a staggered mode, and is connected with an external power supply capable of forming a radio-frequency electric field and an axial gradient electric field in the conical structure together with the long-axis conducting rod;
or
According to some embodiments of the present invention, the multistage rod focusing structure comprises a plurality of tapered conductive rods and a supporting seat, the tapered conductive rods are distributed in a central symmetry around a central axis and form a tapered space structure with an open cavity therein, an inlet and an outlet are formed at two ends of the tapered space structure, and an inlet aperture is larger than an outlet aperture; the supporting seat comprises a fixing piece, a first conductive polar plate and a second conductive polar plate, the conical conductive rods, the first conductive polar plate and the second conductive polar plate form sequential connection of a high-frequency electric field and an axial gradient electric field in the open type cavity, the first conductive polar plate and the second conductive polar plate are fixedly installed on the fixing piece, the conical conductive rods are fixedly connected to the inner side of a hollow hole of the fixing piece, and the first conductive polar plate and the second conductive polar plate are connected with an external power supply.
Or
According to some embodiments of the present invention, the multistage rod focusing structure includes a plurality of bending conductive rods, a supporting seat, and a plurality of bending conductive rods, the bending conductive rods are distributed in a central symmetrical manner around the central axis and form a bending space structure with an open chamber therein, the bending conductive rods include a straight section and a bending section, the straight section is a cylindrical structure or a conical structure, the bending section is a cylindrical structure or a conical structure, the top end surface of the straight section is the bottom end surface of the bending section, the top end of the bending section is converged towards the central axis to form a central symmetrical distribution structure around the central axis, and the bending space structure forms a bending space structure with a large inlet aperture and a small outlet aperture; the supporting seat comprises a fixing piece, a first conductive polar plate and a second conductive polar plate, the first conductive polar plate and the second conductive polar plate are fixedly installed on the fixing piece, a plurality of bending conductive rods are fixedly connected to the inner side of a hollow hole of the fixing piece, the first conductive polar plate and the second conductive polar plate are connected with an external power supply, and the bending conductive rods, the first conductive polar plate and the second conductive polar plate form sequential connection of a high-frequency electric field and an axial gradient electric field inside the open type cavity.
The long-shaft equal-diameter conducting rod is lower in manufacturing cost and more convenient to machine, assemble and maintain, but the minimum value of the diameter of an outlet is limited during manufacturing, so that the disadvantage of reducing the overall volume of the overall equipment is overcome;
by adopting the conical conducting rod structure, the manufacturing cost is higher than that of the conducting rod with the long shaft and the equal diameter, the processing, the assembly and the maintenance are slightly complicated, but the advantage that the diameter of an outlet can be infinitely small exists in theory, and the advantage is extremely obvious in the aspect of reducing the volume of the whole equipment;
by adopting the bent conducting rod, the ion beam at the entrance can be stabilized on the basis of adopting the conical conducting rod structure, so that better effects are brought to subsequent various processes, but the ion beam is weak in volume reduction and adopts the conical conducting structure.
According to some embodiments of the present invention, when the multistage rod focusing structure includes a plurality of tapered conductive rods, the end surface of the tapered conductive rod at the inlet has a first end surface symmetrically distributed around the center axis, the first end surface has an inclined surface, and the inclined surface and the end surface form a second end surface with a smaller relative inclined surface on a side close to the center axis;
or
According to some embodiments of the present invention, when the multistage rod focusing structure includes a plurality of bending conductive rods, the end surface of the bending conductive rod at the inlet has a first end surface symmetrically distributed around the central axis, and the inclined surface and the end surface form a second end surface with a smaller relative inclined surface on a side close to the central axis; the straight section is of a cylindrical structure or a conical structure, the bending section is of a cylindrical structure or a conical structure, and the bending conductive rods are freely combined with the structures.
Preferably, the tapered conducting rod or the bent conducting rod is integrally formed.
If great, then this terminal surface electric charge gathering is more, can produce certain hindrance effect to the entering of ion, consequently will be here near the terminal surface of axis and reduce as far as possible, can significantly reduce the repulsion of terminal surface electric charge to entering ion from this, can make more ions get into inside the toper spatial structure for final detection's result is more accurate, the concrete area of first terminal surface can be adjusted according to specific empirical data, simultaneously the toper conducting rod is integrated into one piece, for guaranteeing sufficient precision, needs to make with root material promptly.
According to the utility model discloses a some embodiments, in the type conducting rod of bending the straight section is cylinder type structure or toper structure, and the section of shown bending is cylinder type structure or toper structure, the type conducting rod of bending is the independent assortment of above-mentioned structure.
According to the utility model discloses an embodiment, straight section is the cylinder type, the section of bending is the cylinder type, and the space electric field in straight section this moment is even, and the section of bending space electric field can strengthen because the gradual diminishing of space bore, nevertheless the exit aperture can be because cylinder type terminal surface homogeneous can't further reduce, and bore size can receive the restriction promptly.
According to the utility model discloses an embodiment, straight section is the cylinder type, the section of bending is the circular cone type, and the space electric field in straight section this moment is even, and the section of bending space electric field can be because the gradual diminishing of space bore and reinforcing, simultaneously because circular cone type member self cross section size also dwindles, also can cause the reinforcing of corresponding field intensity, simultaneously, the export bore can further dwindle, theoretically can infinitely little, and this can be very big improvement exit's environment, and concrete digital accessible experiment is confirmed.
According to the utility model discloses an embodiment, straight section is the circular cone type, the section of bending is the cylinder type, in this embodiment, straight section toper structural change then needs gently to do benefit to the stability that gets into the air current at a high speed, the section of bending then can be adjusted according to actual need, and its main function is for ion focusing.
According to the utility model discloses an embodiment, straight section is the circular cone type, the section of bending is the circular cone type, in this embodiment, straight section toper structural change then needs gently to do benefit to the stability of high-speed entering air current, and straight section self tapering and straight section angle are confirmed according to actual need, and the section of bending then can be adjusted according to actual need, in this embodiment, the bore of export also can be infinitely little in theory, and its primary function is for ion focusing.
According to the utility model discloses an embodiment, first focusing unit, second focusing unit are all linked with vacuum system up to nth focusing unit, form inside vacuum chamber under the operating condition, and inside vacuum increases according to the order from little to big in proper order.
According to some embodiments of the utility model, broken line progressive type multistage pole ion focusing transmission device is a plurality of dislocation that multistage pole focus structure goes on is arranged, promptly the axis of multistage pole focus structure is not at same straight line, exists the dislocation.
According to the utility model discloses a some embodiments, the dislocation is arranged and can be around circumference dislocation arrangement on the coaxial line, also can be with planar upper and lower dislocation arrangement, but the structure of arranging need not avoid the ion beam phenomenon that the skew appears or lose the ion to guarantee final detection's accuracy and sensitivity.
According to some embodiments of the invention, the nth focus through-hole aperture is smaller than the (n-1) th focus through-hole aperture until the second focus through-hole aperture is smaller than the first focus through-hole aperture, the first focus through-hole aperture being smaller than the second through-hole aperture.
According to some embodiments of the invention, the taper of the focusing unit forming the spatially symmetrical structure is less than or equal to 30 degrees and greater than 0 degree.
According to some embodiments of the present invention, the taper of the space symmetric structure is greater than or equal to 0.01 degree.
Any reference to "one embodiment," "an embodiment," "example embodiment," etc., means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the invention; the schematic representations in various places in the specification do not necessarily refer to the same embodiment; further, when a particular feature, structure, or characteristic is described in connection with any embodiment, it is submitted that it is within the purview of one skilled in the art to effect such feature, structure, or characteristic in connection with other ones of the embodiments.
While the invention has been described in detail with reference to a number of illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this invention; in particular, reasonable variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the foregoing disclosure, the drawings and the appended claims without departing from the spirit of the invention; except variations and modifications in the component parts and/or arrangements, the scope of which is defined by the appended claims and equivalents thereof.
Claims (13)
1. A broken-line progressive multi-stage rod ion focusing transport apparatus comprising an ion source part in a first order, an ion lens part in a second order, a focusing part in a third order, an analyzer part in a fourth order, and a detector part in a fifth order, the focusing part comprising a plurality of focusing units arranged in a broken line, i.e., a first focusing unit, a second focusing unit to an nth focusing unit, a first barrier provided with a first through hole through which an ion beam generated by the ion source part passes being installed between the ion source part and the ion lens part, a second barrier provided with a second through hole through which an ion beam focused by the ion lens passes being installed between the ion lens part and the focusing part, a first focusing barrier provided with a first focusing through hole through which an ion beam passed through the first focusing unit passes being installed between the first focusing unit and the second focusing unit, a second focusing diaphragm provided with a second focusing through hole through which the ion beam passes through the second focusing unit is installed between the second focusing unit and the third focusing unit, until an (n-1) th focusing diaphragm provided with an (n-1) th focusing through hole through which the ion beam passes through the (n-1) th focusing unit is installed between the (n-1) th focusing unit and the nth focusing unit, an nth focusing diaphragm provided with an nth focusing through hole through which the ion beam passes through the nth focusing unit is installed between the nth focusing unit and the detector part, and a fourth diaphragm provided with a fourth through hole through which the ion beam passes from the analyzer part is installed between the detector part and the analyzer part; the ion lens component, the first focusing unit, the second focusing unit, the nth focusing unit and the analyzer component are all connected with a vacuum system, an internal vacuum chamber is formed in the working state, a multi-stage rod ion focusing transmission component is arranged in the first focusing unit and the nth focusing unit, and the multi-stage rod ion focusing transmission component comprises a multi-stage rod focusing structure with a large inlet, a small outlet and a smooth and gradually-reduced diameter from the inlet aperture to the outlet aperture;
the ion source component emits ion beams, the ion beams enter a vacuum chamber in the ion lens component through a first through hole, after being focused by the ion lens component, the ion beams enter the vacuum chamber of the first focusing unit in the focusing component through a second through hole, gaps are reserved among the second partition plate, the inlet, the outlet and the third plate, the aperture of the second through hole is set according to the diameter formed by the ion beams, the ion beams are focused through the multi-stage rod focusing structures which are linearly arranged and are emitted through the nth focusing through hole, and the aperture of the nth focusing through hole is set according to the ion beams emitted out of the outlet and enters the analyzer component and the detector component at the fifth position through the nth focusing through hole for analysis and detection.
2. A zigzag-line progressive multi-stage rod ion focusing transport apparatus for the zigzag-line progressive multi-stage rod ion focusing transport apparatus claimed in claim 1, comprising a plurality of focusing units arranged in zigzag lines, i.e., a first focusing unit, a second focusing unit to an nth focusing unit, a first focusing partition provided with a first focusing through-hole for passing the ion beam passing through the first focusing unit is installed between the first focusing unit and the second focusing unit, a second focusing partition provided with a second focusing through-hole for passing the ion beam passing through the second focusing unit is installed between the second focusing unit and the third focusing unit, until a (n-1) th focusing partition provided with a (n-1) th focusing through-hole for passing the ion beam passing through the (n-1) th focusing unit is installed between the (n-1) th focusing unit and the nth focusing unit, the rear side of the nth focusing unit is provided with an nth focusing partition plate provided with an nth focusing through hole for the ion beam passing through the nth focusing unit, the first focusing unit, the second focusing unit and the nth focusing unit are connected with a vacuum system to form an internal vacuum chamber under the working state, a multi-stage rod ion focusing transmission part is arranged in the first focusing unit and the nth focusing unit, and the multi-stage rod ion focusing transmission part comprises a multi-stage rod focusing structure with a large inlet, a small outlet and a smooth and gradually decreased diameter from the inlet to the outlet.
3. The broken-line progressive multi-stage rod ion focusing transmission device according to claim 2, wherein the multi-stage rod focusing structure comprises a plurality of conductive rod pieces, and the conductive rod pieces form a spatially symmetrical structure with a large inlet aperture and a small outlet aperture around the same central axis; the conductive rods are fixedly connected in the hollow cavities of the supporting bases.
4. The broken line progressive multi-stage rod ion focusing transmission device according to claim 3, wherein there are 4, 6 or 8 conductive rod members.
5. The ion focusing and transporting device as claimed in claim 3, wherein said conductive rod is a metal rod or a rod with a metal coating or a rod with a metal rod inside and an insulating coating on the outer layer.
6. The broken line progressive type multistage rod ion focusing transmission device according to claim 3, wherein the multistage rod focusing structure comprises a plurality of long-axis constant-diameter conducting rods, the long-axis constant-diameter conducting rods form a space symmetrical structure around the same axis to form a long-axis constant-diameter conical structure with an inlet aperture larger than an outlet aperture; the supporting seats are provided with internal through holes, the long-axis constant-diameter conducting rods are fixedly connected to the inner sides of the through holes, the caliber of the outlet is greater than or equal to 2mm, the diameter of each long-axis constant-diameter conducting rod is greater than or equal to 1mm and less than or equal to 50mm, the supporting seats are connected with the long-axis constant-diameter conducting rods in a staggered mode, and an external power supply capable of forming a radio-frequency electric field and an axial gradient electric field in the conical structure with the long-axis conducting rods is connected;
or
The multistage rod focusing structure comprises a plurality of conical conducting rods and a supporting seat, the conical conducting rods are distributed in a central symmetry mode around a central axis and form a conical space structure with an open cavity inside, an inlet and an outlet are formed at two ends of the conical space structure, and the diameter of the inlet is larger than that of the outlet; the supporting seat comprises a fixing piece, a first conductive polar plate and a second conductive polar plate, the conical conductive rods, the first conductive polar plate and the second conductive polar plate form sequential connection of a high-frequency electric field and an axial gradient electric field in the open type cavity, the first conductive polar plate and the second conductive polar plate are fixedly arranged on the fixing piece, the conical conductive rods are fixedly connected to the inner side of a hollow hole of the fixing piece, and the first conductive polar plate and the second conductive polar plate are connected with an external power supply;
or
The multistage rod focusing structure comprises a plurality of bending conductive rods and a supporting seat, the bending conductive rods are distributed in a central symmetry mode around a central axis and form a bending space structure with an open cavity inside, each bending conductive rod comprises a straight section and a bending section, the straight section is of a cylindrical structure or a conical structure, the bending section is of a cylindrical structure or a conical structure, the top end face of the straight section is the bottom end face of the bending section, the top ends of the bending sections are converged towards the central axis to form a central symmetry distribution structure around the central axis, and the bending space structure forms a bending space structure with a large inlet aperture and a small outlet aperture; the supporting seat comprises a fixing piece, a first conductive polar plate and a second conductive polar plate, the first conductive polar plate and the second conductive polar plate are fixedly installed on the fixing piece, a plurality of bending conductive rods are fixedly connected to the inner side of a hollow hole of the fixing piece, the first conductive polar plate and the second conductive polar plate are connected with an external power supply, and the bending conductive rods, the first conductive polar plate and the second conductive polar plate form sequential connection of a high-frequency electric field and an axial gradient electric field inside the open type cavity.
7. The ion focusing transmission device according to claim 6, wherein when the multi-stage focusing structure comprises a plurality of tapered conductive rods, the end surface of each tapered conductive rod at the inlet has a first end surface symmetrically distributed around the central axis, the first end surface has an inclined surface, and the inclined surface and the end surface form a second end surface with a smaller inclined surface on the side close to the central axis;
or
When the multistage rod focusing structure comprises a plurality of bending conductive rods, the end face of each bending conductive rod at the inlet is provided with a first end face which is symmetrically distributed around the center of the central axis, and the inclined face and the end face form a second end face with a smaller relative inclined face at one side close to the central axis; the straight section is of a cylindrical structure or a conical structure, the bending section is of a cylindrical structure or a conical structure, and the bending conductive rods are freely combined with the structures.
8. The broken line progressive multi-stage rod ion focusing transmission device according to claim 7, wherein the tapered conductive rod or the bent conductive rod is integrally formed.
9. The ion focusing transmission device of claim 2, wherein the first focusing unit, the second focusing unit, and the nth focusing unit are all connected to a vacuum system, and an internal vacuum chamber is formed in an operating state, and the internal vacuum degree increases in sequence from small to large.
10. The broken-line progressive multi-stage rod ion focusing transmission device according to claim 2, wherein the broken-line progressive multi-stage rod ion focusing transmission device is a staggered arrangement of the multi-stage rod focusing structures, namely, central axes of the multi-stage rod focusing structures are not in the same straight line and have dislocation.
11. The apparatus according to claim 1, wherein the nth focusing via aperture is smaller than the (n-1) th focusing via aperture, until the second focusing via aperture is smaller than the first focusing via aperture, and the first focusing via aperture is smaller than the second via aperture.
12. The ion focusing and transporting apparatus with polygonal line progressive multi-stage rods according to claim 2, wherein the aperture of the nth focusing through hole is smaller than the aperture of the (n-1) th focusing through hole, until the aperture of the second focusing through hole is smaller than the aperture of the first focusing through hole, and the aperture of the first focusing through hole is smaller than the aperture of the second focusing through hole.
13. The broken line progressive multi-stage rod ion focusing transmission device according to claim 1, wherein the taper of the focusing unit forming a space symmetrical structure is less than or equal to 30 degrees and greater than 0 degree.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110010443A (en) * | 2019-04-10 | 2019-07-12 | 江苏天瑞仪器股份有限公司 | A kind of progressive multistage bar ion focusing transmission device of broken line and device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110010443A (en) * | 2019-04-10 | 2019-07-12 | 江苏天瑞仪器股份有限公司 | A kind of progressive multistage bar ion focusing transmission device of broken line and device |
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