CN210222357U - Two-dimensional scanning micro-mirror - Google Patents
Two-dimensional scanning micro-mirror Download PDFInfo
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- CN210222357U CN210222357U CN201921470622.5U CN201921470622U CN210222357U CN 210222357 U CN210222357 U CN 210222357U CN 201921470622 U CN201921470622 U CN 201921470622U CN 210222357 U CN210222357 U CN 210222357U
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Abstract
The utility model discloses a two-dimensional scanning micro-mirror, which comprises a frame, a reflection part and a torsion beam of a semi-enclosed structure which is symmetrical about the center of the reflection part, wherein two ends of the torsion beam are respectively connected with the reflection part and the frame; and a metal electrode is processed on the frame and connected with a conductive coil, the conductive coil is positioned on the surface of the reflection part, and the other surface of the reflection part is a mirror surface. The utility model discloses a two-dimensional scanning micro mirror uses neotype torsion beam structure, only needs the torsion beam of a frame and a set of central symmetry's semi-enclosed structure, can make the mirror surface deflect in two directions, realizes the two-dimensional scanning to the optical signal. Because only one frame and one group of torsion beams are adopted, the duty ratio of the mirror surface is obviously improved, and the transmission efficiency of signals is improved. And when the micro mirror array is formed, the duty ratio of the mirror surface can be improved, and the two-dimensional scanning micro mirror array is facilitated.
Description
Technical Field
The utility model belongs to the technical field of the micro-electro-mechanical system and specifically relates to a two-dimensional scanning micro-mirror based on MEMS processing technology preparation.
Background
MEMS refers to Micro-Electro-Mechanical systems (Micro-Electro-Mechanical systems), which is a revolutionary new technology developed on the basis of microelectronic technology, and is a high-tech electromechanical device manufactured by combining technologies such as photolithography, etching, thin film, silicon micromachining, and precision machining. The MEMS device is widely applied to high and new technology industry, and is a key technology related to scientific and technological development, economic prosperity and national defense safety. The scanning micro-mirror is a light reflection type device developed by applying MEMS technology, and drives the mirror surface to deflect under the action of electromagnetic force by connecting the torsion structure of the reflection mirror surface, so that the light beam can be reflected and scanned in one-dimensional or two-dimensional directions.
In many application scenarios of the MEMS micro-mirror, in order to reduce the diffraction effect during the reflection of the laser beam and obtain a high resolution image, a high-power large-sized laser source must be used, and therefore the MEMS micro-mirror with a large reflection area needs to be used. Fig. 1 shows a two-dimensional scanning micro-mirror with a conventional structure, which has an outer torsion beam 4 and an inner torsion beam 5 perpendicular to each other, the inner torsion beam 5 connects an inner frame 2 and a mirror surface 3, the outer torsion beam 4 connects an outer frame 1 and an inner frame 2, and the mirror surface 3 can deflect around the outer torsion beam 4 or the inner torsion beam 5 as a rotation axis. When the external control system simultaneously inputs driving signals in two directions to the micro-mirror, the mirror surface can be controlled to realize torsion in two directions by taking the two pairs of torsion beams as axes, and then two-dimensional scanning reflection of light rays can be realized. However, the dual-axis micromirror structure has the disadvantages of complex structure, high processing cost and low mirror surface duty ratio due to the existence of two pairs of torsion beams and the inner and outer frames, so that when a large-size laser signal is reflected, the reflection ratio is low and the optical loss is large, the optical signal reaching the optical receiving end after scanning is weakened, and the system signal transmission efficiency is reduced. Even if the micro mirror array is adopted, the duty ratio of the mirror surface cannot be improved, and the signal transmission efficiency is low.
SUMMERY OF THE UTILITY MODEL
The novel two-dimensional scanning micro mirror and the array thereof are provided, the torsion of the mirror surface in two directions can be realized only by using one frame and one group of torsion beams, the two-dimensional scanning of light is realized, the structure is simple, and the process difficulty and the cost are reduced. Meanwhile, the duty ratio of the mirror surface can be greatly improved, the more efficient reflection of light signals is realized, and the signal transmission efficiency is improved.
The utility model discloses the technical scheme who adopts as follows:
a two-dimensional scanning micro-mirror comprises a frame, a reflection part and a torsion beam of a semi-surrounding structure which is symmetrical about the center of the reflection part, wherein two ends of the torsion beam are respectively connected with the reflection part and the frame; and a metal electrode is processed on the frame and connected with a conductive coil, the conductive coil is positioned on the surface of the reflection part, and the other surface of the reflection part is a mirror surface.
As a further improvement of the above technical solution:
the mirror surface and the conductive coil are arranged on the same surface of the reflecting part; the mirror surface is plated with a reflective film, and the conductive coil is arranged on the lower layer of the film.
The reflecting part is of a square structure, the torsion beam is L-shaped, one end of the torsion beam is connected with the reflecting part, and the other end of the torsion beam is connected with the frame; two long right-angle edges of the torsion beam are parallel to the edge of the reflecting part.
The length of two sides of the torsion beam is the same, and the length of the two sides of the torsion beam is larger than half of the side length of the reflecting part.
The torsion beam is of a double-L-shaped structure.
The reflection part is circular, and the torsion beam is two semi-enclosed arc beams which are symmetrical about the center of the reflection part.
The torsion beam is of two pairs of L-shaped structures and is symmetrical about the center of the reflection part.
The metal electrode is connected with the conductive coil through a metal lead, and the end of the inner ring of the conductive coil is connected with one metal lead through a jumper wire; the metal lead is arranged on the surface of the torsion beam.
And feedback comb teeth are arranged on the torsion beam.
The mirror surface is plated with a reflective film; the reflecting film is made of gold, silver or aluminum; the winding shape of the conductive coil is square or round.
The utility model has the advantages as follows:
the utility model discloses a two-dimensional scanning micro mirror uses neotype torsion beam structure, only needs the torsion beam of a frame and a set of central symmetry's semi-enclosed structure, can make the mirror surface deflect in two directions, realizes the two-dimensional scanning to the optical signal. Because only one frame and one group of torsion beams are adopted, the duty ratio of the mirror surface is obviously improved, and the transmission efficiency of signals is improved. And when the micro mirror array is formed, the duty ratio of the mirror surface can be improved, and the two-dimensional scanning micro mirror array is facilitated.
The utility model discloses two-dimensional scanning micro mirror's overall structure is simple, and the technology degree of difficulty is low, and the yield in the course of working is improved in the processing of being convenient for. Moreover, if the mirror surface has the same area as the existing structure, the total area of the micromirror can be greatly reduced and the production cost can be reduced compared with the existing structure.
Drawings
Fig. 1 is a schematic structural diagram of a conventional two-dimensional scanning micro-mirror.
Fig. 2 is a schematic structural diagram of a first embodiment of the present invention.
Fig. 3 is a schematic view of the deflection shaft of fig. 2.
Fig. 4 is a schematic structural diagram of a second embodiment of the present invention.
Fig. 5 is a schematic structural diagram of a fourth embodiment of the present invention.
Fig. 6 is a schematic structural diagram of a fifth embodiment of the present invention.
Fig. 7 is a schematic structural diagram of a sixth embodiment of the present invention.
In the figure: 1. an outer frame; 2. an inner frame; 3. a mirror surface; 4. an outer torsion beam; 5. an inner torsion beam; 11. a frame; 12. a torsion beam; 13. a reflection section; 14. a metal electrode; 15. a conductive coil; 16. a metal lead; 17. feeding back comb teeth; 18. and a magnet.
Detailed Description
The following describes embodiments of the present invention with reference to the drawings.
The first embodiment is as follows:
as shown in fig. 2, the two-dimensional scanning micromirror of the present invention is an electromagnetic driving micromirror, and uses silicon material as a basic structure, including a frame 11 and a reflection portion 13, the reflection portion 13 and the frame 11 are connected together through two torsion beams 12 of a semi-enclosed structure, and the two torsion beams 12 are symmetrical with respect to the center of the reflection portion 13. In this embodiment, the reflection portion 13 is a square structure, the torsion beam 12 is L-shaped, two long right-angle sides are respectively parallel to the edges of the adjacent reflection portions 13, one end of the torsion beam 12 is connected to the edge of the reflection portion 13, and the other end is connected to the frame 11.
Preferably, the length of the two sides of the twist beam 12 is the same,
preferably, the length of both sides of the torsion beam 12 is greater than half of the side length of the reflection part 13.
Two metal electrodes 14 are arranged on the frame 11, the metal electrodes 14 are connected with an external signal source and are connected with two ends of a conductive coil 15 through metal leads 16, and the metal leads 16 are arranged on the surface of the torsion beam 12. The conductive coil 15 is wound in a circular shape and distributed on the surface of the reflection part 13, wherein the end of the inner ring of the conductive coil 15 is connected with a metal lead 16 in a jumper mode. The other surface of the reflection portion 13 is a mirror surface for reflecting light, and the surface is plated with an optical reflection film to improve the light reflection efficiency, wherein the optical reflection film is made of gold, silver or aluminum. Of course, the mirror surface may be on the same side of the reflective portion 13 as the conductive coil 15, and the conductive coil 15 is located at the lower layer of the mirror reflective film.
As shown in fig. 2 and fig. 3, two magnets 18 are disposed outside the two-dimensional scanning micromirror body of the present invention, the N-pole and S-pole of the two magnets 18 are opposite, and the conductive coil 15 is located in the stable magnetic field generated by the magnets. When the two-dimensional scanning micro-mirror works, an external signal source energizes the conductive coil 15 through the metal electrode 14, and the conductive coil 15 generates Lorentz force when energized to drive the reflection part 13 to deflect. In order to realize the two-dimensional scanning of the optical signal by the micromirror, the control signal is inputted with two superimposed signals of different frequencies, so that the reflection unit 13 can perform two-dimensional rotation with the diagonal direction a and the direction B perpendicular to each other as the deflection axis direction, respectively, to perform two-dimensional scanning of the optical signal.
When the micromirror performs two-dimensional scanning operation, in order to feed back the deflection angle in real time, as shown in fig. 2, feedback comb teeth 17 are respectively disposed at two ends of one torsion beam 12, and when the reflection portion 13 deflects, the overlapping area of the feedback comb teeth 17 is changed, so that the capacitance is changed. The capacitance signal is led out through an output lead, and real-time feedback of the deflection angle of the reflecting part 13 can be realized through the output capacitor. Of course, the two torsion beams 12 may also be respectively provided with one feedback comb 17, which is convenient for better performing differential processing on capacitance signals and obtaining more accurate deflection angle feedback information.
Example two:
in the first embodiment, a set of L-shaped torsion beams 12 is used, and the deflection angle of the reflection portion 13 is limited. To achieve a greater degree of deflection, the twist beam 12 is of a double L-shaped configuration, as shown in fig. 4. Because of adopting the folding double-L structure, the stress of the rotating shaft can be reduced, and deflection with larger angle can be realized.
Example three:
in this embodiment, the reflection portion 13 may also be processed into a circular shape, the torsion beam 12 is two semi-enclosed arc beams disposed at the outer ring of the reflection portion 13, and the arc torsion beam 12 is centrosymmetric with respect to the reflection portion 13.
Example four:
as shown in fig. 5, the torsion beam 12 has two pairs of L-shaped structures, and is centrally symmetrical with respect to the reflection portion 13. By adopting the two pairs of torsion beams 12 with the L-shaped structures, the reflecting part 13 and the frame 11 can have four connecting points, so that the symmetry and the structural stability are improved.
Example five:
as shown in fig. 6, two pairs of magnets 18 are provided outside the micromirrors as long as a stable magnetic field can be formed at the positions of the micromirrors. The conductive coil 15 may be wound in different shapes such as a square shape.
Example six:
as shown in fig. 7, the micromirrors of the present invention can be combined into an M × N two-dimensional scanning micromirror array, M, N is any positive integer. When the micro mirror array is used, the absolute area of the mirror surface can be increased, and when the micro mirror array is applied to the condition of surface light source irradiation, large-area optical signals are effectively reflected, so that the signal transmission efficiency is improved.
The above description is illustrative of the present invention and is not intended to limit the present invention, and the present invention may be modified in any manner without departing from the spirit of the present invention.
Claims (10)
1. A two-dimensional scanning micromirror, comprising: the torsion beam comprises a frame (11), a reflection part (13) and a torsion beam (12) which is of a semi-surrounding structure and is centrosymmetric with respect to the reflection part (13), wherein two ends of the torsion beam (12) are respectively connected with the reflection part (13) and the frame (11); a metal electrode (14) is processed on the frame (11), the metal electrode (14) is connected with a conductive coil (15), the conductive coil (15) is located on the surface of the reflection part (13), and the other surface of the reflection part (13) is a mirror surface.
2. The two-dimensional scanning micro-mirror of claim 1, wherein: the mirror surface and the conductive coil (15) are arranged on the same surface of the reflecting part (13); the mirror surface is plated with a reflective film, and the conductive coil (15) is arranged on the lower layer of the film.
3. The two-dimensional scanning micro-mirror of claim 1, wherein: the reflecting part (13) is of a square structure, the torsion beam (12) is L-shaped, one end of the torsion beam is connected with the reflecting part (13), and the other end of the torsion beam is connected with the frame (11); two long right-angle edges of the torsion beam (12) are parallel to the edge of the reflecting part (13).
4. The two-dimensional scanning micro-mirror of claim 3, wherein: the length of two sides of the torsion beam (12) is the same, and the length is larger than half of the side length of the reflection part (13).
5. The two-dimensional scanning micro-mirror of claim 1, wherein: the torsion beam (12) is of a double-L-shaped structure.
6. The two-dimensional scanning micro-mirror of claim 1, wherein: the reflecting part (13) is circular, and the torsion beam (12) is two semi-surrounding arc beams which are centrosymmetric about the reflecting part (13).
7. The two-dimensional scanning micro-mirror of claim 1, wherein: the torsion beam (12) is of two pairs of L-shaped structures and is centrosymmetric about the reflection part (13).
8. The two-dimensional scanning micro-mirror of claim 1, wherein: the metal electrode (14) is connected with the conductive coil (15) through a metal lead (16), and the end of the inner ring of the conductive coil (15) is connected with one metal lead (16) through a jumper wire; the metal lead (16) is arranged on the surface of the torsion beam (12).
9. The two-dimensional scanning micro-mirror of claim 1, wherein: and feedback comb teeth (17) are arranged on the torsion beam (12).
10. The two-dimensional scanning micro-mirror of claim 1, wherein: the mirror surface is plated with a reflective film; the reflecting film is made of gold, silver or aluminum; the winding shape of the conductive coil (15) is square or round.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921470622.5U CN210222357U (en) | 2019-09-02 | 2019-09-02 | Two-dimensional scanning micro-mirror |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921470622.5U CN210222357U (en) | 2019-09-02 | 2019-09-02 | Two-dimensional scanning micro-mirror |
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| CN210222357U true CN210222357U (en) | 2020-03-31 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426843A (en) * | 2019-09-02 | 2019-11-08 | 无锡微视传感科技有限公司 | Two-dimensional scanning micro mirror |
| WO2023136271A1 (en) * | 2022-01-14 | 2023-07-20 | 北陽電機株式会社 | Beam, oscillating element, and optical scanning device |
| WO2024022013A1 (en) * | 2022-07-26 | 2024-02-01 | 西安知微传感技术有限公司 | Mems micromirror capable of mitigating light path shielding, and preparation method therefor |
-
2019
- 2019-09-02 CN CN201921470622.5U patent/CN210222357U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110426843A (en) * | 2019-09-02 | 2019-11-08 | 无锡微视传感科技有限公司 | Two-dimensional scanning micro mirror |
| WO2023136271A1 (en) * | 2022-01-14 | 2023-07-20 | 北陽電機株式会社 | Beam, oscillating element, and optical scanning device |
| WO2024022013A1 (en) * | 2022-07-26 | 2024-02-01 | 西安知微传感技术有限公司 | Mems micromirror capable of mitigating light path shielding, and preparation method therefor |
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