CN205281014U

CN205281014U - Piezoelectricity drive two -dimensional scan micro mirror

Info

Publication number: CN205281014U
Application number: CN201520925939.9U
Authority: CN
Inventors: 李文翔
Original assignee: Suzhou Industrial Park Co Ltd Of Industries Based On Nanotechnology Institute For Research And Technology
Current assignee: Suzhou Industrial Park Co Ltd Of Industries Based On Nanotechnology Institute For Research And Technology
Priority date: 2015-11-19
Filing date: 2015-11-19
Publication date: 2016-06-01
Anticipated expiration: 2025-11-19

Abstract

The utility model relates to a piezoelectricity drive two -dimensional scan micro mirror, include two -dimensional scan micro mirror main part and hug closely the piezo -actuator below it, piezo -actuator includes the base plate and hugs closely piezoceramics piece above the base plate, two -dimensional scan micro mirror main part has can make resonance pivoted speculum respectively in double -phase vertically direction. The utility model discloses a piezoelectricity drive two -dimensional scan micro mirror compares the piezoelectricity cantilever beam actuator ware of placing on the plane, has reduced the device size greatly, and stable in structure is reliable in the drive, in addition, use universal joint structure realizes the two -dimensional scan of speculum, compares other structures, and scanning mirror is more stable in the reflection, warp forer a short time.

Description

A kind of micro-mirror of Piezoelectric Driving two-dimensional scan

Technical field

The utility model relates to Micro-Opto-Electro-Mechanical Systems technical field, particularly relates to a kind of micro-mirror of Piezoelectric Driving two-dimensional scan.

Background technology

Micro-Opto-Electro-Mechanical Systems (Micro-optical-electromechanicalsystems, MEMS) refers to and utilizes micro-processing technology for MEMS (Micro-electromechanicalsystems) device of optical system and system. Scanning micro-mirror or micro mirror array are a kind of important MEMS, and under the effect of motivating force, the mirror surface of micro-mirror deflects thus changes the reflection angle of incoming beam, it is achieved the scanning of reflected beam. The fields such as medical image, spectrograph, barcode reading can be widely used in.

According to the difference of micro-mirror type of drive, mainly it is divided into: static driven, electromagnetic drive, electrothermal drive and Piezoelectric Driving etc. The micro-mirror of static driven is the one that research is maximum at present, generally introduce one or more pairs of electrode in the structure, by interelectrode static-electronic driving micromirror movements, this type of drive needs higher operating voltage (>=50V), and operating voltage height is unfavorable for the integrated of device and circuit; Electromagnetic-drivmicro micro mirror is the magnetic field masterpiece utilizing electromagnet or permanent magnet to produce is motivating force, and the driving electric current of this type of drive is big; Electrothermally actuated microengine mirror utilizes to drive electric current to make material expanded by heating produce motivating force, and therefore response speed is low, and power consumption is big, and influenced by environmental temperature; And in prior art, MEMS piezoelectricity manufacturing process is also immature, manufacture difficulty is big, unstable properties so that MEMS piezoelectric driving device also fails commercially to obtain ripe application.

Scanning micro-mirror described in US Patent No. 8553307B2, by the vibration of left and right sides piezoelectric cantilever 6, drives the speculum 5 in the middle of socle girder top around torsion beam 4 and torsion beam 3 twisting motion. When two socle girders 6 vibrate direction contrary time, as shown in Figure 1a, and vibrational frequency reaches speculum 5 when the resonant frequency of torsion beam 4, and speculum 5 does the motion of reciprocal torsional resonances around torsion beam 4, and reverses angle and reaches maximum. When two socle girders 6 vibrate direction identical time, as shown in Figure 1 b, and vibrational frequency reaches speculum 5, torsion beam 4 and inner frame 2 when the resonant frequency of torsion beam 3, and speculum 5 does the motion of reciprocal torsional resonances around torsion beam 3, and reverses angle and reaches maximum. Thus make speculum realize two-dimensional scan. This drives structure is owing to being support speculum with socle girder and make it vibrate, and therefore stress is concentrated on the end of socle girder, it is easy to produce fatigure failure, thus there is the problem that reliability when driving for a long time is lower.

Vibrating mirror element described in patent CN101630063B, as shown in Figure 2, micro-reflector 21, by being placed on the torsion beam 24a of micro-reflector central shaft, is connected to the top of four piezoelectric cantilever 30a/30b/30c/30d, and the bottom of socle girder is fastened on structural framing 10. The piezoelectric cantilever of torsion beam both sides, is applied in contrary voltage signal, makes both sides socle girder that contrary deformation occur, thus makes torsion beam produce to reverse, and the speculum that band is automatically connected in torsion beam produces to reverse. When voltage signal frequency reaches the resonant frequency that micro-reflector reverses around torsion beam, micro-reflector does the motion of reciprocal torsional resonances around torsion beam, and this is that torsion angle is maximum. Equally also being support speculum with socle girder and make it vibrate, therefore stress is concentrated on socle girder, it is easy to produce fatigure failure, thus there is the problem that reliability when driving for a long time is lower.

Because above-mentioned defect, the design people, actively in addition research and innovation, to founding the micro-mirror of Piezoelectric Driving two-dimensional scan of a kind of novel texture so that it is have more the utility value in industry.

Practical novel content

For solving the problems of the technologies described above, the purpose of this utility model is to provide the micro-mirror of Piezoelectric Driving two-dimensional scan that a kind of volume is little, drives structure is reliable and stable.

The micro-mirror of Piezoelectric Driving two-dimensional scan of the present utility model, comprises the micro-mirror main body of two-dimensional scan and is close to the below the Piezoelectric Driving device in face, and described Piezoelectric Driving device comprises substrate and is close to the piezoelectric ceramics block above described substrate; Described two-dimensional scan micro-mirror main body has the speculum that can do resonance on two perpendicular directions respectively and rotate.

Further, the micro-mirror main body of described two-dimensional scan comprises the outside framework with back of the body chamber, described outside framework is connected with the inner frame being placed in described back of the body chamber by the first torsion shaft, and described inner frame connects described speculum by being perpendicular to the 2nd torsion shaft of described first torsion shaft.

Further, described first torsion shaft is two, connects the both sides that described inner frame is relative respectively.

Further, described 2nd torsion shaft is two, lays respectively at the two ends of described speculum central shaft.

Further, described substrate is the one in pcb board, metal sheet.

Further, described piezoelectric ceramics block is close to below described outside framework by a kind of mode of connection in epoxy bond, brazing metal bonding.

By such scheme, the utility model at least has the following advantages:

1, use conventional piezoelectric stupalith as the driving of the micro-mirror main body of MEMS two-dimensional scan, cost is lower, manufacturing technology is ripe, easy acquisition and drives structure reliable and stable;

2, MEMS processing technology is used can to produce the less speculum of structure, and tooling cost is lower, is easy to batch micro operations;

3, comparing the static driven in existing actuation techniques, the Piezoelectric Driving required voltage that the utility model adopts is lower, compares electromagnetic drive, and required electric current is less, compares electrothermal drive response speed faster;

4, the utility model uses gimbal structure to realize the two-dimensional scan of speculum, compares other structure, and scanning mirror is more stable, is out of shape less.

Above-mentioned explanation is only the general introduction of technical solutions of the utility model, in order to better understand technique means of the present utility model, and can be implemented according to the content of specification sheets, below with better embodiment of the present utility model and coordinate accompanying drawing to be described in detail as follows.

Accompanying drawing explanation

Fig. 1 a be US Patent No. 8553307B2 socle girder vibration direction contrary time structural representation;

Fig. 1 b be US Patent No. 8553307B2 socle girder vibration direction identical time structural representation;

The structural representation of Fig. 2 patent CN101630063B;

Fig. 3 is one-piece construction schematic diagram of the present utility model;

Fig. 4 is split structural representation of the present utility model;

Fig. 5 is the structural representation of the micro-mirror main body of two-dimensional scan in the utility model;

Fig. 6 is the structural representation of Piezoelectric Driving device in the utility model.

Embodiment

Below in conjunction with drawings and Examples, embodiment of the present utility model is described in further detail. Following examples are for illustration of the utility model, but are not used for limiting scope of the present utility model.

See Fig. 3 to Fig. 6, a kind of micro-mirror of Piezoelectric Driving two-dimensional scan described in the better embodiment of the utility model one, comprise the micro-mirror main body 10 of two-dimensional scan and Piezoelectric Driving device 20, the lower section being placed on the micro-mirror main body 10 of two-dimensional scan is close to by Piezoelectric Driving device 20, Scan mirror main body 10 by speculum 16, the 2nd torsion shaft 15, inner frame 14, first torsion shaft 13 and outside framework 12 form, and inner frame 14 is placed in the back of the body chamber 11 of outside framework 12. Speculum 16 and inner frame 14 are linked together by the 2nd torsion shaft 15, and the 2nd torsion shaft 15 is positioned at the two ends of speculum 16 central shaft, are connected to the diagonal position of square inner frame 14. Inner frame 14 and outside framework 12 are linked together by the first torsion shaft 13. First torsion shaft 13 is positioned at square inner frame 14 diagonal lines two ends and is perpendicular to the 2nd torsion shaft 15, is connected to square frame frame 12 diagonal position. Outside framework 12 arranges back of the body chamber 11 so that the first torsion shaft 13 and the 2nd torsion shaft 15 are unsettled, thus make speculum 16 have the space of torsion.

Piezoelectric Driving device 20 comprises piezoelectric ceramics block 22 and substrate 21, and piezoelectric ceramics block 22 is close to above substrate 21.

The principle of the micro-mirror of the utility model Piezoelectric Driving two-dimensional scan is, by the voltage signal of applying certain frequency to Piezoelectric Driving device 20, due to inverse piezoelectric effect, Piezoelectric Driving device 20 produces the vibration with voltage signal same frequency, and vibration passing is to the two-dimensional scan being close on Piezoelectric Driving device 20 micro-mirror main body 10 part. When vibrational frequency reaches the resonant frequency that inner frame 14, the 2nd torsion shaft 15 and speculum 16 rotate around the first torsion shaft 13, speculum 16 back and forth reverses around the first torsion shaft 13, and is issued to maximum twist angle at certain driving voltage; When vibrational frequency reaches the resonant frequency that speculum 16 rotates around the 2nd torsion shaft 15, speculum 16 back and forth reverses around the 2nd torsion shaft 15, and is issued to maximum twist angle at certain driving voltage. Like this, speculum 16 is by around the reciprocal torsion of the first torsion shaft 13 and the 2nd torsion shaft 15, completing the two-dimensional scan of reflected beam.

Preferably, in the utility model, Piezoelectric Driving device 20 uses conventional piezoelectric ceramic block 22 to manufacture, and is not limited to the piezoelectric ceramics block 22 of which kind of material, places on the base plate (21, and substrate 21 can be the materials such as pcb board, metal sheet; The speculum 16 of two-dimensional scan in the utility model is gimbal structure, and speculum 16 is not limited to circle, square or other is special-shaped etc., and two orthogonal first torsion shafts 13, the 2nd torsion shafts 15 are connected on the diagonal lines of inner frame and outside framework; In addition, in the utility model, Piezoelectric Driving device 20 is close to the mode below the micro-mirror main body 10 of two-dimensional scan, is not limited to use epoxy resin glue bonding, brazing metal bonding or other mode of connection.

The micro-mirror of Piezoelectric Driving two-dimensional scan of the present utility model is compared with US Patent No. 8553307B2, and the advantage of the utility model structure is as follows:

1, the micro-mirror main body of the utility model two-dimensional scan adopts MEMS fabrication technique, and it is less that structure can be done, and batch machining cost is low;

2, the utility model uses one piece of piezoelectric ceramics block as drives structure, is placed on below the micro-mirror main body of two-dimensional scan, compares the piezoelectric cantilever driving mechanism that plane is placed, it is possible to effectively reduce device area;

Compared with practical novel with described in patent CN101630063B, the advantage of the utility model structure is as follows:

1, the utility model is avoided using piezoelectricity thin film fabrication technology, it may also be useful to the conventional piezoelectric ceramic block that industry is more ripe, and manufacturing process is simple, is easy to processing;

2, the utility model uses gimbal structure to realize two-dimensional scan, and structure is firm.

The above is only preferred implementation of the present utility model; it is not limited to the utility model; should be understood that; for those skilled in the art; under the prerequisite not departing from the utility model know-why; can also making some improvement and modification, these improve and modification also should be considered as protection domain of the present utility model.

Claims

1. the micro-mirror of Piezoelectric Driving two-dimensional scan, it is characterised in that: comprising the micro-mirror main body of two-dimensional scan and be close to the below the Piezoelectric Driving device in face, described Piezoelectric Driving device comprises substrate and is close to the piezoelectric ceramics block above described substrate; Described two-dimensional scan micro-mirror main body has the speculum that can do resonance on two perpendicular directions respectively and rotate.

2. the micro-mirror of Piezoelectric Driving two-dimensional scan according to claim 1, it is characterized in that: the micro-mirror main body of described two-dimensional scan comprises the outside framework with back of the body chamber, described outside framework is connected with the inner frame being placed in described back of the body chamber by the first torsion shaft, and described inner frame connects described speculum by being perpendicular to the 2nd torsion shaft of described first torsion shaft.

3. the micro-mirror of Piezoelectric Driving two-dimensional scan according to claim 2, it is characterised in that: described first torsion shaft is two, connects the both sides that described inner frame is relative respectively.

4. the micro-mirror of Piezoelectric Driving two-dimensional scan according to claim 2, it is characterised in that: described 2nd torsion shaft is two, lays respectively at the two ends of described speculum central shaft.

5. the micro-mirror of Piezoelectric Driving two-dimensional scan according to claim 1, it is characterised in that: described substrate is the one in pcb board, metal sheet.

6. the micro-mirror of Piezoelectric Driving two-dimensional scan according to claim 2, it is characterised in that: described piezoelectric ceramics block is close to below described outside framework by a kind of mode of connection in epoxy bond, brazing metal bonding.