CN205720868U - micro two-dimensional scanning mirror - Google Patents
micro two-dimensional scanning mirror Download PDFInfo
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- CN205720868U CN205720868U CN201620380556.2U CN201620380556U CN205720868U CN 205720868 U CN205720868 U CN 205720868U CN 201620380556 U CN201620380556 U CN 201620380556U CN 205720868 U CN205720868 U CN 205720868U
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- micro
- scanning mirror
- reflector plate
- dimensional scanning
- piezoelectric patches
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Abstract
This case relates to a kind of micro two-dimensional scanning mirror, including: support, it is surrounded a framework by bonding jumper, has two side arms；Reflector plate, it is suspended in described framework by two symmetrical elastic arms, and one end of described elastic arm connects described reflector plate, and the other end connects the side arm of described support；Piezoelectric patches, it is arranged on the side arm of described support, for producing inverse piezoelectric effect under electric field action, thus drives reflector plate to rotate.This case solves a problem that peacekeeping Scan mirror rate of scanning is low, structure is complicated, difficulty of processing is big；Overall structure is simple, drives the two-dimensional deflection realizing reflecting mirror under source, monolithic piezoelectric sheet to scan a kind of, it is easy to miniaturization；With low cost, use metallic substrates and laser plate curving technology can complete the processing of substrate, beneficially large-scale mass production.
Description
Technical field
This utility model relates to a kind of scanning mirror, particularly to a kind of micro two-dimensional scanning mirror.
Background technology
Scanning mirror is such as laser scanning microscope, laser scanning display device, laser printer and bar shaped
Critical component in many optical systems such as code reader, it usually needs possess one-dimensional or two-dimentional scanning
Ability, meets the requirement of certain scanning angle, rate of scanning and scanning resolution.Simultaneously according to application
Occasion need consider driving voltage, volume weight, structural stability, processing compatibility, production cost and
Service life etc..
Laser scanner technique mostly is galvanometer mirror techniques, a lot of business-like scanning microscope systems at present
System uses this scheme, it is advantageous that cost is relatively low, scanning angle big, but during little step-length step response
Between more than 0.3ms, entire scan frequency is less than 500Hz, partially sweeps speed slower.Acoustooptic diffraction technical controlling
The frequency of sound wave that drives of acousto-optic crsytal makes to be realized light path deviation swept by the laser diffraction Angulation changes of crystal
Retouch.But scanning angle is relevant to optical maser wavelength, and light beam will through its light spot shape of acoustooptic diffraction and power
Change, need follow-up detection to compensate.
Laboratory has been developed that all kinds of scanning galvanometer based on different principle based on MEMS technology both at home and abroad,
Including electrostatic, electromagnetic type, thermoelectric (al) type and piezoelectric type.Wherein, driving type piezoelectric actuator is because response is fast, bandwidth
Greatly, the advantage such as efficiency height, good stability and there is bigger development potentiality.Compared to traditional prism and
Galvanometer scanning mirror, the performance of micro scanning mirror is more superior, has bigger scanning angle and higher
Rate of scanning, its volume is smaller and more exquisite simultaneously so that it is in such as endoscope and small projector etc.
Application is possibly realized.But, the manufacture of silica-based MEMS galvanometer is complicated, expensive, yield rate is low, the life-span
Short, it is difficult to be widely used in commodity.
Utility model content
The deficiency existed for prior art, this case utilizes piezoelectricity chip oscillator to combine metal basal board design one
Peacekeeping two dimension high frequency optical scan vibration lens.Compared with piezoelectric membrane normally used in MEMS galvanometer, chip
Oscillator can provide higher power density, simultaneously manufacturing process relative maturity, it is to avoid manufacturing defect.Gold
Belong to that substrate fabrication technique is simple, the cycle is short, allowable stress is big, can provide bigger reflection angle.With
It is good that silicon materials compare its shock resistance, and it has higher hardness and mechanical quality compared with resin material
Factor.This Metal Substrate piezoelectric vibrating mirror can provide bigger scanning angle and rate of scanning, good stability, become
This is cheap.
For achieving the above object, this case is achieved through the following technical solutions:
A kind of micro two-dimensional scanning mirror, comprising:
Support, it is surrounded a framework by bonding jumper, has two side arms；
Reflector plate, it is suspended in described framework by two symmetrical elastic arms, described elastic arm
One end connects described reflector plate, and the other end connects the side arm of described support；
Piezoelectric patches, it is arranged on the side arm of described support, imitates for producing inverse piezoelectricity under electric field action
Should, thus drive reflector plate to rotate.
Preferably, described micro two-dimensional scanning mirror, wherein, described support is provided with for inserting
Groove is to realize fixing lobe.
Preferably, described micro two-dimensional scanning mirror, wherein, described piezoelectric patches at least provided with two panels,
And lay respectively on two side arms of described support.
Preferably, described micro two-dimensional scanning mirror, wherein, described two panels piezoelectric patches is positioned at described
The homonymy of plane residing for frame.
Preferably, described micro two-dimensional scanning mirror, wherein, described two panels piezoelectric patches is positioned at described
The both sides of plane residing for frame.
Preferably, described micro two-dimensional scanning mirror, wherein, described elastic arm is metal arm.
Preferably, described micro two-dimensional scanning mirror, wherein, described reflector plate surface is provided with metal foil
Film layer.
The beneficial effects of the utility model are: this case solve a peacekeeping Scan mirror rate of scanning low,
The problem that structure is complicated, difficulty of processing is big；Overall structure is simple, drives source, monolithic piezoelectric sheet in one
The lower two-dimensional deflection scanning realizing reflecting mirror, it is easy to miniaturization；With low cost, use metallic substrates and swash
Photolithography plate technique can complete the processing of substrate, beneficially large-scale mass production.
Accompanying drawing explanation
Fig. 1 is the structural representation of micro two-dimensional scanning mirror in embodiment 1.
Fig. 2 is that in embodiment 1, micro two-dimensional scanning mirror deflects vibrogram around x-axis.
Fig. 3 is that in embodiment 1, micro two-dimensional scanning mirror deflects vibrogram around z-axis.
Fig. 4 is the structural representation of micro two-dimensional scanning mirror in embodiment 2.
Detailed description of the invention
Below in conjunction with the accompanying drawings this utility model is described in further detail, to make those skilled in the art
Can implement according to this with reference to description word.
Embodiment 1
As it is shown in figure 1, the micro two-dimensional scanning mirror of an embodiment is listed in this case, comprising:
Support 1, it is surrounded a framework by bonding jumper, has two side arms 6；
Reflector plate 2, it is suspended in framework by two symmetrical elastic arms 3, the one of elastic arm 3
End connects reflector plate 2, and the other end connects the side arm 6 of support 1；
Piezoelectric patches 4, it is arranged on the side arm 6 of support 1, for producing inverse piezoelectricity under electric field action
Effect, thus drive reflector plate 2 to rotate.After piezoelectric patches 4 energising, produce inverse piezoelectric effect, drive and prop up
Frame 1 produces bending vibration, thus excites torsion or the bending of elastic arm 3, orders about reflector plate 2 and deflects one
Determine angle.When the frequency of vibration of piezoelectric patches 4 is consistent with the resonant frequency of reflector plate 2, windup-degree
Reach maximum, thus realize the wide-angle deflection scanning of laser.
In this embodiment, support 1 is the most preferably provided with for inserting groove fixing convex to realize
Play portion 5.Here groove is normally at such as laser scanning microscope, laser scanning display device, laser
Printer and bar code reader etc. need install on the base of scanning constant mirror.
When the quantity of piezoelectric patches 4 is one, can there be three kinds of mode of operations: mode of operation 1: such as Fig. 2
Shown in, applying to drive after signal, piezoelectric patches 4 drives two side arms 6 of support 1 to produce homophase bending to shake
Dynamic, select suitable driving frequency, elastic arm 3 can be made to produce torsional resonances, thus drive reflector plate 2
Produce the big angle rotary around x-axis to move, then realize the laser deflection scanning along z-axis.Work now
Working frequency is the resonant frequency of the corresponding vibration shape in Fig. 2.Mode of operation 2: as it is shown on figure 3, driven galvanic electricity
Pressure effect, piezoelectric patches 4 drives support 1 to produce bending vibration, due to the asymmetry of scanning mirror structure,
By selecting suitable driving frequency, two side arms 6 of support 1 can be excited to produce opposite curvature resonance,
Thus drive elastic arm 3 and reflector plate 2 to produce the rotary motion around z-axis, then realize laser along x-axis
Deflection scanning.Operating frequency now is the resonant frequency of the corresponding vibration shape in Fig. 3.Mode of operation 3:
Resonant frequency synthesis driving voltage in both direction, or the size of appropriately designed scanning mirror is applied when simultaneously
Make resonant frequency under two kinds of mode of operations close to time, reflector plate 2 will produce around x and z-axis simultaneously
Rotary motion, it is achieved two-dimensional scan.It is pointed out that when using a piezoelectric patches, it is necessary to manufacture
Go out the scanning mirror asymmetry structure about z-axis, just can inspire the mode needed in mode of operation 2 and shake
Type.
Embodiment 2
As shown in Figure 4, on the basis of embodiment 1, piezoelectric patches 4 is at least provided with two panels, and difference
It is positioned on two side arms 6 of support 1；Four are may also set up, i.e. such as the piezoelectric patches 4a in Fig. 4, pressure
Electricity sheet 4b, piezoelectric patches 4c and piezoelectric patches 4d.
In this embodiment, when piezoelectric patches 4 quantity is two panels, two panels piezoelectric patches 4 may be located at support
The homonymy of plane residing for 1 (such as piezoelectric patches 4a and piezoelectric patches 4d, or piezoelectric patches 4b and piezoelectric patches 4c) or
It is positioned at the both sides of plane residing for support 1 (such as piezoelectric patches 4a and piezoelectric patches 4c, or piezoelectric patches 4b and piezoelectricity
Sheet 4d).When piezoelectric patches 4 quantity is two panels, there are three kinds of mode of operations: mode of operation 1: apply to drive
After signal, piezoelectric patches is forced to drive two side arms 6 of support 1 to produce homophase bending vibration, by selecting
Suitable driving frequency, can make elastic arm 3 produce torsional resonances, thus drive reflector plate 2 to produce around x
The big angle rotary motion of axle.Mode of operation 2: after applying to drive signal, forces piezoelectric patches to drive support 1
Two side arms 6 produce anti-phase bending vibration, by selecting suitable driving frequency, it is possible to inspire
The opposite curvature resonance of frame two-arm, thus the rotation driving elastic arm 3 and reflector plate 2 to produce around z-axis is transported
Dynamic.Mode of operation 3: when simultaneously applying resonant frequency synthesis driving voltage in both direction, reflector plate 2
The rotary motion around x and z-axis will be produced, it is achieved two-dimensional scan simultaneously.
When piezoelectric patches 4 quantity is four, operation principle is identical with the scanning mirror using two piezoelectric patches.
Difference, two piezoelectric patches staggered relatively on same side arm 6 produce after applying driving voltage all the time
Raw reverse strain, forces two side arms 6 of support 1 to produce bending.Can be by suitably planning piezoelectric patches
Polarised direction reduces the number of drive electrode line.
This case drive waveforms driving power supply used can be AC sine waveform or square wave, drives the frequency of ripple
Rate is the resonant frequency using mode, it is also possible to adjust in certain limit near its resonant frequency.
In embodiment 1 and 2, elastic arm 3 preferably metal arm.
In embodiment 1 and 2, reflector plate 2 surface is preferably provided with metal film layer, to increase reflection system
Number.
Although embodiment of the present utility model is disclosed as above, but it is not restricted to description and reality
Executing listed in mode utilization, it can be applied to various applicable field of the present utility model completely, for
For those skilled in the art, it is easily achieved other amendment, therefore without departing substantially from claim
And under the general concept that limited of equivalency range, this utility model is not limited to specific details and shows here
The legend gone out and describe.
Claims (7)
1. a micro two-dimensional scanning mirror, it is characterised in that including:
Support, it is surrounded a framework by bonding jumper, has two side arms；
Reflector plate, it is suspended in described framework by two symmetrical elastic arms, described elastic arm
One end connects described reflector plate, and the other end connects the side arm of described support；
Piezoelectric patches, it is arranged on the side arm of described support, imitates for producing inverse piezoelectricity under electric field action
Should, thus drive reflector plate to rotate.
2. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that arrange on described support
Have for inserting groove to realize fixing lobe.
3. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that described piezoelectric patches is at least
It is provided with two panels, and lays respectively on two side arms of described support.
4. micro two-dimensional scanning mirror as claimed in claim 3, it is characterised in that described two panels piezoelectric patches
It is positioned at the homonymy of plane residing for described support.
5. micro two-dimensional scanning mirror as claimed in claim 3, it is characterised in that described two panels piezoelectric patches
It is positioned at the both sides of plane residing for described support.
6. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that described elastic arm is gold
Belong to arm.
7. micro two-dimensional scanning mirror as claimed in claim 1, it is characterised in that described reflector plate surface
It is provided with metal film layer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620380556.2U CN205720868U (en) | 2016-04-29 | 2016-04-29 | micro two-dimensional scanning mirror |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620380556.2U CN205720868U (en) | 2016-04-29 | 2016-04-29 | micro two-dimensional scanning mirror |
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| CN205720868U true CN205720868U (en) | 2016-11-23 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105717639A (en) * | 2016-04-29 | 2016-06-29 | 中国科学院苏州生物医学工程技术研究所 | Miniature two-dimensional scanning mirror |
-
2016
- 2016-04-29 CN CN201620380556.2U patent/CN205720868U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105717639A (en) * | 2016-04-29 | 2016-06-29 | 中国科学院苏州生物医学工程技术研究所 | Miniature two-dimensional scanning mirror |
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| GR01 | Patent grant |