JP2012198298A - Optical deflection device, and optical scanning device, image projection device, image reading device and image forming device provided with the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical deflection device in which dynamic deformation of a mirror is restrained and which achieves high speed driving, and an optical scanning device, an image projection device, and an image forming device thereof.SOLUTION: A plurality of long ridge-shaped reinforcing ribs 11 which linearly bulge and reinforce a mirror section 10 are formed at a rear surface 10b being opposite to a reflection surface 10a of the mirror section 10 which is supported by free ends of a pair of driving units 30a and 30b via a pair of torsion bar springs 20a and 20b. More specifically, the reinforcing ribs include a plurality of first reinforcing ribs 11a extending in a direction perpendicular to the rotation axis direction of the mirror section 10 and a second reinforcing rib 11b provided to the rotation center of the mirror section 10 and extending in the rotation axis direction of the mirror section 10.

Description

  The present invention relates to an optical deflection apparatus and an optical scanning apparatus, an image projection apparatus, an image reading apparatus, and an image forming apparatus provided with the optical deflection apparatus.

  2. Description of the Related Art Conventionally, an optical deflecting device that deflects light is used in an optical scanning device, an image reading device such as a barcode reader, an image projection device such as a projector, and the like.

  As an optical deflecting device, an optical deflecting device includes a mirror supported by a torsion bar spring which is an elastic support member, and a driving means having a piezoelectric body or the like for torsionally deforming the torsion bar spring and swinging the mirror. Known (for example, Patent Document 1). In the optical deflecting device described in Patent Document 1, a mirror is fixed to one end of a torsion bar spring, and a driving means for twisting the torsion bar spring is connected to the other end. By driving the driving means and twisting the torsion bar spring, the mirror rotates, and the light incident on the mirror from the light source can be deflected and scanned.

  In addition, when optical scanning is performed at high speed using the above optical deflecting device, the mirror is rotated and vibrated at high speed, and the mirror itself is dynamically deformed by the inertia of the mirror itself, and the reflection surface of the mirror is distorted. Scanning light deteriorates. Therefore, it is conceivable to increase the rigidity by increasing the thickness of the mirror. However, increasing the thickness of the mirror increases the weight of the mirror, increases the inertia of the mirror, reduces the response of the mirror, and hinders high-speed driving.

  In Patent Document 2, the thickness of a portion where the dynamic deformation of the mirror is large is increased, the thickness of the portion where the dynamic deformation of the mirror is small is reduced, or a part of the mirror is cut away, thereby increasing the weight of the mirror. An optical deflecting device that increases the rigidity of the mirror while suppressing is described.

  However, in the optical deflecting device described in Patent Document 2, a sufficient mirror weight cannot be suppressed, and sufficient high-speed driving cannot be realized.

  The present invention has been made in view of the above problems, and an object of the present invention is to provide an optical deflection device, an optical scanning device, an image projection device, and an optical deflection device that can suppress dynamic deformation of a mirror and realize high-speed driving. An image forming apparatus is provided.

In order to achieve the above object, a first aspect of the present invention provides a mirror for reflecting light from a light source, elastic support means for supporting the mirror, and twisting the elastic support means to rotate the mirror. An optical deflecting device including a driving unit is characterized in that a plurality of reinforcing ribs for reinforcing the mirror are provided on a surface opposite to the reflecting surface that reflects the light of the mirror.
According to a second aspect of the present invention, in the optical deflecting device according to the first aspect, the reinforcing rib has an elongated linear shape.
According to a third aspect of the present invention, in the optical deflecting device of the first or second aspect, the mirror has an elliptical shape having a major axis in the direction of the central axis of rotation of the mirror.
According to a fourth aspect of the present invention, in the optical deflecting device according to any one of the first to third aspects, the reinforcing rib includes a first rib that reinforces a direction orthogonal to a central axis direction of rotation of the mirror, and the mirror. And a second rib for reinforcing the direction of the central axis of rotation.
According to a fifth aspect of the present invention, in the optical deflecting device according to the fourth aspect, the first rib is a plurality of ribs extending in a direction orthogonal to a central axis direction of the rotation of the mirror, and the second rib. The rib is a rib that is provided at the center of rotation of the mirror and extends in the direction of the central axis of rotation of the mirror.
According to a sixth aspect of the present invention, in the optical deflecting device according to any one of the first to third aspects, the reinforcing rib includes a first rib inclined by + 45 ° with respect to a central axis direction of rotation of the mirror, and the mirror. And a second rib inclined by −45 ° with respect to the direction of the central axis of rotation.
According to a seventh aspect of the present invention, in the optical deflecting device according to any one of the fourth to sixth aspects, the reinforcing rib includes a third rib for reinforcing an edge of the mirror.
The invention according to claim 8 is the optical deflecting device according to claim 7, wherein the mirror has an elliptical shape having a major axis in the direction of the central axis of rotation of the mirror, and the third rib has an elliptical shape of the mirror. It is characterized by the similar shape.
According to a ninth aspect of the present invention, in the optical deflecting device of the seventh aspect, the mirror has an elliptical shape with a major axis extending in the direction of the central axis of rotation of the mirror, and the third rib has an oval shape. It is characterized by.
According to a tenth aspect of the present invention, in the optical deflection apparatus according to any one of the first to ninth aspects, the elastic support means includes a first elastic support member having one end connected to one side of the mirror, and one end having the other end of the mirror. A second elastic support member connected to the side, wherein the drive means is cantilevered and a first drive beam having the other end of the first elastic support member connected to a free end, and the first drive beam A first drive unit including a first piezoelectric member that flexures and vibrates the drive beam around a direction in which the elastic support member is connected to the drive beam, and cantilevered, and a free end portion of the second elastic support member. A second drive comprising: a second drive beam having the other end connected; and a second piezoelectric member that flexures and vibrates the second drive beam around a connection direction of the second elastic support member with the second drive beam. And a section.
According to an eleventh aspect of the present invention, in the optical deflecting device according to the tenth aspect, the first and second driving sections have a unimorph structure or a bimorph structure.
According to a twelfth aspect of the present invention, in the optical deflection apparatus according to any one of the first to eleventh aspects, the driving unit is supported, parallel to the reflecting surface of the mirror, and with respect to a central axis of rotation of the mirror. A movable frame supported by a fixed frame so as to be rotatable around a direction orthogonal to each other, and a movable frame driving means for rotating the movable frame are provided.
According to a thirteenth aspect of the present invention, in the optical deflecting device of the twelfth aspect, a first movable frame elastic support member connected to one side of the movable frame and a second movable frame connected to the other side of the movable frame. A frame elastic support member, wherein the movable frame drive means is cantilevered by the fixed frame, and a first movable frame drive beam having the first movable frame elastic support member connected to a free end; A first movable frame drive unit including a first movable frame piezoelectric member that flexures and vibrates one movable frame drive beam about the rotation axis of the movable frame; and a free end portion that is cantilevered by the fixed frame. A second movable frame drive beam to which the second movable frame elastic support member is connected, and a second movable frame piezoelectric member that flexures and vibrates the second movable frame drive beam about the central axis of rotation of the movable frame; And a second movable frame driving unit including
According to a fourteenth aspect of the present invention, in the optical deflecting device according to the thirteenth aspect, the first and second movable frame driving sections have a unimorph structure or a bimorph structure.
The invention of claim 15 is an optical scanning device comprising a light source and a light deflecting means for deflecting and scanning the light from the light source, and the light deflecting device according to any one of claims 1 to 11 is used as the light deflecting means. It is characterized by being used.
According to a sixteenth aspect of the present invention, there is provided a latent image carrier for carrying a latent image, optical scanning means for forming a latent image on the surface of the latent image carrier by optical scanning, and the latent image carrier. An image forming apparatus including a developing unit that develops a latent image uses the optical scanning device according to claim 15 as the optical scanning unit.
According to a seventeenth aspect of the present invention, there is provided an image projection apparatus comprising: a light source; a modulator that modulates light output in accordance with an image signal; and a light deflecting unit that deflects and scans light from the modulator. As a means, the optical deflector according to any one of claims 12 to 14 is used.
According to the eighteenth aspect of the present invention, the image information is obtained based on the light source, the light deflecting means for deflecting and scanning the light from the light source, the light receiving means for receiving the light reflected from the image, and the light received by the light receiving means. An image reading apparatus provided with image information generating means to generate uses the optical deflection apparatus according to any one of claims 1 to 11 as the optical deflection means.

  According to the present invention, the strength of the mirror can be increased by providing a plurality of reinforcing ribs on the surface opposite to the reflecting surface of the mirror. Also, compared with the case where the mirror thickness is increased to increase the mirror rigidity, the increase in the mirror weight can be suppressed, the increase in the mirror inertia can be suppressed, and the mirror thickness is increased. Compared with the configuration, high-speed driving can be performed.

1 is a perspective view of an optical deflecting device according to an embodiment. The back surface perspective view of the same optical deflection | deviation apparatus. The back surface front view of the same light deflection apparatus. The schematic diagram which expanded and showed the 1st drive part and the fixed frame of the vicinity. The graph which shows the frequency response characteristic of the amplitude of the rotation angle of a mirror part with respect to the applied voltage to the piezoelectric member of each drive part. The figure which showed each natural vibration mode shape of the mirror part in the resonance points a and b in the frequency response characteristic of FIG. The figure which showed the relationship between the bending deformation of each drive part in the case of mode 2, and rotation of a mirror part. The graph which shows the frequency response characteristic of the amplitude of the rotation angle of a mirror part with respect to the applied voltage to the piezoelectric member of each drive part at the time of making the center of a mirror part correspond with the central axis of a torsion bar spring. The figure which showed the natural vibration mode shape of the mirror part in the resonance points a and b in the frequency response characteristic of FIG. The figure explaining the dynamic deformation | transformation of a mirror part. FIG. 9 is a rear perspective view of a light deflecting device according to Modification 1. FIG. 9 is a front view of the back surface of the light deflecting device according to Modification 1; FIG. 10 is a rear perspective view of a light deflecting device according to Modification 2. FIG. 10 is a front view of the back surface of a light deflecting device according to Modification 2. FIG. 14 is a rear perspective view of a light deflecting device according to Modification 3. FIG. 14 is a front view of the back surface of a light deflecting device according to Modification 3. FIG. 14 is a rear perspective view of a light deflecting device according to Modification 4. FIG. 16 is a front view of the back surface of a light deflecting device according to Modification 4; The figure which shows the result of having calculated | required the dynamic deformation | transformation by the finite element method about the optical deflection apparatus of the modification 4. 1 is a schematic configuration diagram of an image forming apparatus. The perspective view which showed the optical system component of the optical scanning device. The connection diagram of an optical deflector and a drive means. The figure which shows the whole structure of an image projector. The schematic block diagram also including the control system of an image projector. The perspective view which shows the whole structure of a barcode reader.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 is a perspective view of the optical deflection apparatus 1 according to the present embodiment, FIG. 2 is a rear perspective view of the optical deflection apparatus 1, and FIG. 3 is a rear front view of the optical deflection apparatus 1.
As shown in the figure, the light deflection apparatus 1 includes a mirror unit 10 having a reflection surface 10a for reflecting light. A first torsion bar spring 20a as a first elastic support member that supports the mirror unit 10 so as to be rotatable (swingable) is connected to one end of the mirror unit 10, and the other end is connected to the other end. The second torsion bar spring 20b as the second elastic support member is connected. The end of the first torsion bar spring 20a opposite to the mirror part 10 is connected to a first connection part 310a extending from the free end of the first drive beam 31a that is cantilevered by the fixed frame 40. The end of the second torsion bar spring 20b opposite to the mirror portion 10 is connected to a second connecting portion 310a extending from the free end of the second drive beam 31b that is cantilevered by the fixed frame 40. Yes.

  A first piezoelectric member 32a made of a thin film of lead zirconate titanate (PZT) is laminated on one surface of the first driving beam 31a, and the first driving beam 31a and the first piezoelectric member 32a are formed into a flat short rail-shaped unimorph. A first drive unit 30a having a structure is formed. In addition, a second piezoelectric member 32b made of thin film lead zirconate titanate (PZT) is laminated on one surface of the second driving beam 31b, and the second driving beam 31a and the second piezoelectric member 31a are formed into a flat plate-shaped short fence shape. The second drive unit 30b having a unimorph structure is formed.

  As shown in FIGS. 2 and 3, a plurality of eaves-like reinforcing ribs 11 are provided on the back surface 10 b opposite to the reflecting surface 10 a of the mirror portion 10. It has been. Specifically, the reinforcing ribs are provided at the rotation center of the mirror unit 10 and a plurality of first reinforcing ribs 11a extending in a direction orthogonal to the rotation axis direction of the mirror unit 10, and the rotation axis direction of the mirror unit 10 And a second reinforcing rib 11b extending in the direction.

  The mirror unit 10 has an elliptical shape in which the rotation axis direction of the mirror unit 10 has a long diameter and the direction orthogonal to the rotation axis direction has a short diameter. Thereby, the direction orthogonal to the rotation axis direction of the mirror part 10 can be shortened as much as possible, and the amount of light can be secured. Even if the mirror part 10 has a quadrangular shape, light does not hit the four corners, which is useless. Therefore, the weight of the mirror unit 10 can be reduced as compared with a rectangular shape while deflecting light satisfactorily. Moreover, the inertia of the mirror part 10 can be reduced by shortening the direction orthogonal to the rotation axis direction of the mirror part 10 as much as possible by making the direction orthogonal to the rotation axis direction into an elliptical shape with a short diameter. High speed driving can be realized.

  The drive units 30a and 30b, the mirror unit 10, and the torsion bar springs 20a and 20b are integrally formed by processing using, for example, a MEMS (micro electro mechanical systems) process. The mirror part 10 forms the reflective surface 10a by forming a metal thin film such as aluminum or gold on the surface of a silicon substrate.

4A and 4B are schematic views showing the first drive unit 30a and the fixed frame 40 in the vicinity thereof in an enlarged manner, where FIG. 4A is a plan view before being covered with an insulating layer, and FIG. 4B is a view after being covered with an insulating layer. A top view and (c) are sectional views of the AA 'line portion of (b). Since the second drive unit 30b has the same configuration, the illustration is omitted.
As shown in FIG. 4, the first driving unit 30a has an adhesive layer 33a, a lower electrode 35a, a piezoelectric material (first piezoelectric member) 32a, on a first driving beam 31a formed protruding from the fixed frame 40. The upper electrode 34a and the insulating layer 36a are sequentially formed and laminated by sputtering, and are etched so that only necessary portions such as the land portions 37a and 38a remain. The material of the adhesive layer 33a is titanium (Ti), the upper electrode 34a and the lower electrode 35a are platinum (Pt), and the piezoelectric material 32a is lead zirconate titanate (PZT).

  When wiring is drawn from the land portions 37a and 38a and a voltage is applied between the upper electrode 34a and the lower electrode 35a, the piezoelectric material 32a expands and contracts in the in-plane direction on the surface of the first drive beam 31a due to its electrostrictive characteristics. Thus, the entire first driving unit 30a warps and deforms. The second driving unit 30b is also bent and deformed in the same direction as the first driving unit 30a by applying a voltage in phase with the piezoelectric member 32a. Each drive part 30a. The waveform of the voltage applied to the piezoelectric members 32a and 32b of 30b may be either a pulse wave or a sine wave.

  In addition, the structure in which the piezoelectric material is formed by sputtering together with the lower electrode 35a and the upper electrode 34a is shown. However, the piezoelectric material may be a bulk material cut into a predetermined size and attached with an adhesive. You may form by the aerosol deposition method (AD method). In addition, although the unimorph structure in which the piezoelectric material is arranged on one side of the drive beam 31a is used, a bimorph structure in which the piezoelectric material is arranged on both sides of the drive beam may be used. This is the same in the following embodiments.

  Since the longitudinal directions of the torsion bar springs 20a and 20b and the longitudinal directions of the drive units 30a and 30b are arranged so as to be substantially orthogonal to each other, the drive beams are generated by bending vibration of the drive units 30a and 30b. Since the vertical vibrations of the connection portions 310a of 31a and 31b act perpendicularly to the torsional central axes of the torsion bar springs 20a and 20b, the bending vibrations of the drive portions 30a and 30b cause the rotational vibrations of the torsion bar springs 20a and 20b ( Torsional vibration), and the mirror portion 10 is largely rotated and vibrated. Further, since the torsion bar springs 20a and 20b and the mirror portion 10 are supported on the free ends of the drive beams 31a and 31b, the mirror portion 10 can obtain a larger angular amplitude. Further, the torsion bar spring can be torsionally vibrated by one drive unit 30 (drive beam 31 and piezoelectric member), and the size can be reduced. These actions and effects are basically the same in the following embodiments.

  FIG. 5 is a graph showing the frequency response characteristic of the amplitude of the rotation angle of the mirror unit 10 with respect to the voltage applied to the piezoelectric members 32a and 32b of the drive units 30a and 30b in the optical deflecting device 1 of the present embodiment. In FIG. 5, a and b are resonance points, respectively. However, in a and b, the mirror part 10 shows different natural vibration mode shapes. Here, the natural vibration mode shape at the resonance point a is referred to as mode 1, and the natural vibration mode at the resonance point b is referred to as mode 2.

  FIG. 6 shows the natural vibration mode shapes (mode 1 and mode 2) of the mirror unit 10 at the resonance points a and b in the frequency response characteristics of FIG. As shown in FIG. 5A, in mode 1, the torsion bar springs 20a and 20b are bent and deformed, and the entire mirror portion 10 is changed in the Z direction in the drawing. On the other hand, in mode 2, as shown in FIG. 5 (b), the torsion bar springs 20a and 20b are hardly bent, and the torsion bar springs 20a and 20b are largely twisted, so that the mirror portion 10 is greatly increased near the center of the mirror. Rotate. In the optical deflecting device 1, it is necessary to use the frequency in the natural vibration mode of mode 2 because it is necessary to prevent fluctuation in the Z direction of the entire mirror unit and rotate it near the center of the mirror unit 10. By applying an applied voltage to the piezoelectric members 32a and 32b of the drive units 30a and 30b at the natural frequency of mode 2, the mirror unit 10 can obtain a large angular amplitude, and the entire mirror unit 10 varies in the Z direction. Can be prevented.

  Since the mass of the mirror part 10 is driven at high speed and the shape (mass) of the mirror part is determined in advance, the torsion bar springs 20a and 20b are shaped to obtain the resonance frequency desired to be obtained by the system. Further, the natural frequency of the primary bending deformation mode of each drive unit 30a, 30b is set in the vicinity of the natural frequency of the primary torsional deformation mode of each torsion bar spring 20a, 20b. By doing so, the mirror unit 10 vibrates with a large angular amplitude.

  Further, as shown in FIG. 3, the light deflection apparatus 1 of the present embodiment has a fixed frame 40 in which the center (center of gravity) O of the mirror portion 10 is more than the connection portion between the torsion bar springs 20 a and 20 b and the mirror portion 10. Are offset by a distance ΔS on the side where the drive portions 30a, 30b are cantilevered. By doing so, when the connection part of the torsion bar springs 20a, 20b to the mirror part 10 and the center (center of gravity) O of the mirror part 10 are provided at the same position in the direction orthogonal to the rotation axis direction of the mirror part 10 In comparison, the mirror unit 10 can be largely rotated and oscillated by utilizing the flexural deformation of the drive units 30a and 30b. Moreover, the fluctuation | variation of the Z direction of the mirror part 10 whole can be prevented. In addition, the mirror unit 10 can obtain a larger angular amplitude.

  FIG. 7 shows the relationship between the bending deformation of each drive unit 30a, 30b and the rotation of the mirror unit 10 in mode 2. In mode 2 in which the torsion bar springs 20a and 20b are twisted, the distance ΔL between the mirror portion 10 and the connection portion p of the torsion bar springs 20a and 20b and the rotation center q of the mirror portion 10 and the rotation angle of the mirror portion 10 are set. When θ is set, the mirror part 10 is rotated when the mirror unit 10 is rotated by setting the bending deformation d in the direction perpendicular to the mirror reflection surfaces of the drive units 30a and 30b (Z direction) to be ΔL · sin θ. A configuration in which the ten rotation centers b do not vary in the Z direction can be adopted. Further, since the center of rotation of the mirror unit 10 is close to the center of gravity O of the mirror unit 10, the moment of inertia is reduced and the natural frequency can be increased. That is, higher speed driving is possible.

  The center of gravity of the mirror unit 10 is the center of gravity of the entire rotating unit supported by the torsion bar springs 20a and 20b, and the center of gravity may be offset including the rib structure on the back surface of the mirror. When the entire mirror part is of equal mass, the center of the mirror part 10 is the center of gravity.

  Further, the center (center of gravity) of the mirror unit 10 may be made to coincide with the center axis of the torsion bar springs 20a and 20b. FIG. 8 shows a mirror portion corresponding to the voltage applied to the piezoelectric members 32a and 32b of the drive portions 30a and 30b when the center (center of gravity) of the mirror portion 10 is made coincident with the central axis of the torsion bar springs 20a and 20b. It is a graph which shows the frequency response characteristic of the amplitude of 10 rotation angles. FIG. 9 shows the natural vibration mode shapes (mode 1 and mode 2) of the mirror unit 10 at the resonance points a and b in the frequency response characteristics of FIG.

  Even when the center (center of gravity) of the mirror part 10 is made to coincide with the center axis of the torsion bar springs 20a and 20b, the applied voltage to the piezoelectric members 32a and 32b of the drive parts 30a and 30b at the natural frequency of mode 2. Therefore, the mirror unit 10 can obtain a large angular amplitude, and can prevent fluctuations in the Z direction of the entire mirror unit 10.

  In the present embodiment, since the mirror unit 10 is driven at a high speed, the mirror unit 10 is dynamically deformed by the inertia of the mirror unit 10 as indicated by a dotted line in FIG. When such dynamic deformation occurs, the reflecting surface 10a of the mirror unit 10 is distorted, and the scanning light is deteriorated. However, in this embodiment, as shown in FIGS. 2 and 3, the first and second reinforcing ribs 11 a and 11 b are provided on the back surface 10 b of the mirror portion 10. The direction orthogonal to the rotation axis direction of the mirror unit 10 is reinforced by the plurality of first reinforcing ribs 11 a extending in the direction orthogonal to the rotation axis direction of the mirror unit 10. Thereby, the mirror part 10 can suppress a deformation | transformation around the rotating shaft of a mirror part. Further, the rotation axis direction of the mirror unit 10 is reinforced by the second reinforcing ribs 11 b provided at the rotation center of the mirror unit 10 and extending in the rotation axis direction of the mirror unit 10. Thereby, the deformation | transformation around the direction orthogonal to the rotating shaft direction of the mirror part 10 can be suppressed. Thus, by reinforcing the mirror part 10 with the first reinforcing rib and the second reinforcing rib, the rigidity of the mirror part 10 can be increased, and the dynamic deformation of the mirror part 10 can be suppressed.

  Further, since each of the reinforcing ribs 11a and 11b has a long and straight bowl-like shape, the increase in the mass of the mirror portion 10 can be kept to the minimum necessary, and a decrease in driving efficiency is kept to the minimum necessary. be able to.

  Next, a modification of this embodiment will be described.

[Modification 1]
FIG. 11 is a rear perspective view of the optical deflecting device 1a of the first modification, and FIG. 12 is a rear front view of the optical deflecting device 1a of the first modified example.
As shown in FIGS. 11 and 12, the optical deflecting device 1 a of Modification 1 is provided with a third reinforcing rib 11 c having an elliptical shape similar to the elliptical shape of the mirror portion 10. The third reinforcing rib 11c reinforces the periphery of the mirror portion 10. Since the edge of the mirror unit 10 is located away from the center of rotation of the mirror unit 10, the influence of the inertial force when the mirror unit 10 is rotated is the largest and is likely to be dynamically deformed. Therefore, by providing the 3rd reinforcement rib 11c, the dynamic deformation of the edge part of the mirror part 10 can be suppressed, and deterioration of scanning light can be suppressed.

[Modification 2]
FIG. 13 is a rear perspective view of the optical deflecting device 1b according to the second modification, and FIG. 14 is a rear front view of the optical deflecting device 1b according to the second modification.
As shown in FIGS. 13 and 14, in the second modification, the optical deflection device 1 b has a third reinforcing rib in an oval shape. Even if the second reinforcing rib has an oval shape, the periphery of the edge of the mirror portion 10 can be reinforced.

[Modification 3]
FIG. 15 is a rear perspective view of the light deflection apparatus 1c according to the third modification, and FIG. 16 is a rear front view of the light deflection apparatus 1c according to the third modification.
As shown in FIGS. 15 and 16, the light deflecting device 1 c according to the third modified example passes through the center (center of gravity) O of the mirror portion 10 and is inclined by + 45 ° with respect to the central axis R of rotation. Similar to the shape of the rib 11d-1, the second inclined reinforcing rib 11d-2 that passes through the center (center of gravity) O of the mirror portion 10 and is tilted by −45 ° with respect to the central axis R of the rotation, and the shape of the mirror portion 10 The third reinforcing rib 11c. By tilting the reinforcing ribs, the two reinforcing ribs can reinforce the rotation axis direction of the mirror portion and the direction orthogonal to the rotation axis direction. Thereby, the number of reinforcing ribs can be reduced, the mirror unit 10 can be reduced in weight, the inertia of the mirror unit 10 can be further reduced, and further high-speed driving can be achieved.

[Modification 4]
FIG. 17 is a rear perspective view of the light deflecting device 1d of Modification 4. FIG. 17 is a rear front view of the light deflecting device 1c of Modification 4.
As shown in the figure, in the optical deflecting device 1d of the fourth modification, the drive units 30a and 30b are rotatable around a direction orthogonal to the rotation axis direction by the drive units 30a and 30b of the mirror unit 10. The supported movable frame 140 is cantilevered. The movable frame 140 is supported by the fixed frame 40 via a pair of movable frame torsion bar springs 120a and 120b. Connected to each of the movable frame torsion bar springs 120a and 120b is a movable frame drive unit 130a and 130b whose longitudinal direction is substantially perpendicular to the longitudinal direction of the movable frame torsion bar spring. Each of the movable frame drive units 130a and 130b has the same configuration as the drive units 30a and 30b shown in FIG. 4, is cantilevered by the fixed frame 40, and is a free end of the movable frame drive units 130a and 130b. The movable frame torsion bar springs 120a and 120b are connected to the portion side.

  In the optical deflecting device 1d of the fourth modification, the movable frame torsion bar springs 120a and 120b are twisted and deformed by the vertical vibrations of the movable frame driving units 130a and 130b, and the movable frame 140 is moved to the movable frame torsion bar springs 120a and 120b. By swinging around the longitudinal direction, the mirror part 10 supported by the movable frame 140 via the drive parts 30a and 30b and the torsion bar springs 20a and 20b is moved around the longitudinal direction of the movable frame torsion bar springs 120a and 120b. It can be swung. As a result, the torsion bar springs 20a and 20b connected to the mirror unit 10 swing around the longitudinal direction and the movable frame torsion bar springs 120a and 120b connected to the movable frame 140 rotate in the direction orthogonal to the longitudinal direction. Can be swung. Thereby, light can be deflected in the biaxial direction. The natural frequency of the oscillation of the torsion bar springs 20a and 20b around the longitudinal direction and the natural frequency of the oscillation of the movable frame torsion bar springs 120a and 120b around the longitudinal direction are different from each other, and the drive unit is driven at each frequency. By driving 30a, 30b and the movable frame driving units 130a, 130b, the mirror unit 10 can be largely rotated in the biaxial direction.

  FIG. 19 is a diagram illustrating a result of dynamic deformation obtained by the finite element method for the optical deflecting device 1d of the fourth modification. A dotted line in the figure indicates a reflection effective surface of the mirror unit 10. The mirror part 10 has an elliptical shape with a major axis of 1.2 mm and a minor axis of 1.0 mm, and a thickness of 1.0 mm. The dynamic deformation was calculated at a resonance frequency of about 20 kHz. The reinforcing rib is as shown in FIGS. That is, a plurality of first reinforcing ribs extending in a direction orthogonal to the longitudinal direction of the torsion bar spring, a second reinforcing rib extending in the longitudinal direction of the torsion bar spring and passing through the center of the mirror portion 10, and an oval third A reinforcing rib is provided. As can be seen from the figure, the amount of dynamic deformation on the reflection effective surface of the mirror portion 10 indicated by the dotted line in the figure can be suppressed to about 50 nm.

Next, a configuration example of an apparatus using the above-described optical deflection apparatus will be described.
First, an example in which the optical deflecting device of the present invention is applied to an optical scanning device as an optical writing unit of an image forming apparatus will be described.
FIG. 20 is a schematic configuration diagram of an image forming apparatus provided with an optical scanning device 1001 using the optical deflecting device of the present invention, and FIG. 21 is a perspective view showing optical system components of the optical scanning device 1001.
As shown in FIG. 20, the image forming apparatus includes a photosensitive drum 1002, and includes a charging unit 1004, a developing unit 1005, a transfer unit 1006, and a cleaning unit around the photosensitive drum.

  The photosensitive drum 1002 is rotationally driven in the direction of an arrow 1003, and an optical latent image is formed on the surface charged by the charging unit 1004 by optical scanning with the optical scanning device 1001. The electrostatic latent image is visualized as a toner image by the developing unit 1005, and the toner image is transferred to the recording paper 1007 by the transfer unit 1006. The transferred toner image is fixed on the recording paper 1007 by the fixing unit 1008. Residual toner is removed by the cleaning unit 1009 from the surface portion of the photosensitive drum that has passed the transfer unit 1006 facing portion of the photosensitive drum 1002.

  A configuration using a belt-like photoconductor in place of the photoconductor drum 1002 is also possible. Further, the toner image may be temporarily transferred to a transfer medium other than the recording paper, and the toner image may be transferred from the transfer medium to the recording paper and fixed.

  As shown in FIG. 21, an optical scanning device 1001 includes a light source unit 1020 as a laser element that emits one or a plurality of laser beams modulated by a recording signal, a light source driving unit 1500 that modulates a laser beam, and a laser beam. And an imaging optical system 1021 for imaging a laser beam (light beam) modulated by a recording signal from the light source unit 1020 on the mirror surface of the mirror substrate of the optical deflector 1022. And a scanning optical system 1023 which is a means for forming an image of one or a plurality of laser beams reflected and deflected by the mirror surface on the surface (scanned surface) of the photosensitive drum 1002. As the optical deflector 1022, any of the above-described optical deflecting devices 1 to 1c that deflect a laser beam in one axial direction is used.

The optical deflector 1022 is incorporated in the optical writing unit 1001 in a form mounted on a circuit board 1025 together with an integrated circuit (driving means) 1024 for driving the optical deflector 1022.
FIG. 22 is a connection diagram between the optical deflector 1022 and the driving means 1024. As shown in the figure, the optical deflector 1022 is electrically connected to the driving means 1024. The driving means 1024 applies a driving voltage to the upper electrode 34a and the lower electrode 35a of the driving units 30a and 30b of the optical deflector 1022 (see FIG. 4). As a result, the mirror unit 10 of the optical deflector 1022 rotates to deflect the laser light, and the beam scanning surface 1002 is optically scanned.

  As shown in FIG. 20, the laser light from the light source unit 1020 is deflected by the optical deflector 1022 after passing through the collimator lens system 1021. The laser beam deflected by the light deflecting device 1022 is then irradiated onto a beam scanning surface 1002 such as a photosensitive drum through a scanning optical system 1023 including a first lens 1023a, a second lens 1023b, and a reflecting mirror 1023c.

  Since the optical deflecting device 1 of the present invention consumes less power for driving than the conventional rotary polygon mirror, the optical deflecting device of the present invention is used for the optical deflector 1022 of the optical scanning device, so that an image forming apparatus is used. The power saving can be achieved. Further, the light deflecting device 1 of the present invention has a lower wind noise when the mirror substrate vibrates than that of the rotary polygon mirror. Therefore, by using the light deflecting device of the present invention for the optical deflector 1022 of the optical scanning device, an image can be obtained. The quietness of the forming apparatus can be improved. Furthermore, since the optical deflecting device 1 of the present invention requires much less installation space than the rotary polygon mirror and generates a small amount of heat, the optical deflecting device 1 of the present invention can be used as an optical scanning device. By using the deflector 1022, the image forming apparatus can be easily downsized.

Next, an example in which the light deflection apparatus of the present invention is used in an image projection apparatus will be described.
FIG. 23 is a diagram illustrating the overall configuration of the image projection apparatus.
As shown in the figure, laser light sources 2001-R, 2001-G, and 2001-B that emit laser light having three different wavelengths of red (R), green (G), and blue (B) are attached to the housing 2000. In the vicinity of the emission ends of these laser light sources 2001-R, 2001-G, and 2001-B, a condenser lens that condenses the emitted light from the laser light sources 2001-R, 2001-G, and 2001-B into substantially parallel light. 2002-R, 2002-G, 2002-B are arranged. The R, G, and B laser beams that are substantially parallel by the condensing lenses 2002-R, 2002-G, and 2002-B are combined by the combining prism 2005 via the mirror 2003 and the half mirror 2004, and the optical deflector 2006. Is incident on the mirror surface. As the optical deflector 2006, an optical deflecting device 1d configured to deflect light in two axial directions as shown in FIGS. 17 and 18 is used. The combined laser light incident on the mirror surface of the optical deflector 2006 is two-dimensionally deflected and scanned by the optical deflector 2006 and projected onto the projection surface to project an image.

  FIG. 24 is a schematic configuration diagram including a control system of the image projection apparatus. In FIG. 24, the three-wavelength laser light source and the condensing lens are shown together, and the mirror, the half mirror, and the combining prism are omitted.

  The image generation unit 2011 generates an image signal according to the image information, and the image signal is sent to the light source drive circuit 2013 via the modulator 2012, and the image synchronization signal is sent to the scanner drive circuit 2014. The scanner drive circuit 2014 supplies a drive signal to the optical deflector 2006 according to the image synchronization signal. By this drive signal, the mirror unit 10 of the optical deflector 2006 resonates and vibrates in two orthogonal directions with an amplitude of a predetermined angle (for example, about 10 deg), and the incident laser light is two-dimensionally deflected and scanned. On the other hand, the intensity of the laser light emitted from the laser light source 2001 is modulated by the light source driving circuit 2013 in accordance with the timing of the two-dimensional deflection scanning of the optical deflector 2006, and thereby a two-dimensional image is projected on the projection surface 2007. Information is projected. Intensity modulation may modulate the pulse width or the amplitude. The modulator 2012 performs pulse width modulation or amplitude modulation on the image signal, and modulates the modulated signal into a current that can drive the laser light source 2001 by the light source driving circuit 2013 to drive the laser light source 2001.

  Here, a rotary scanning mirror such as a polygon mirror can be used as the optical deflecting device 2006. However, by using the optical deflecting device 1d of the present invention, the power consumption for driving can be reduced, and the image projecting device can be reduced. The power saving can be achieved. In addition, wind noise during vibration of the mirror substrate can be reduced as compared with the case where a rotating scanning mirror is used, and the quietness of the image projection apparatus can be improved. Furthermore, by using the optical deflecting device of the present invention, the image projector can be miniaturized.

Next, an example in which the light deflection apparatus of the present invention is used in a barcode reader as an image reading apparatus will be described.
FIG. 25 is a perspective view showing the overall configuration of the barcode reader.
As shown in the figure, the bar code reader converges the laser light emitted from the laser diode 3001 with a condenser lens 3002, and passes through an aperture formed in the center of an aperture stop 3003 and a collector lens 3004, and thereby an optical deflector 3005. Thus, the barcode 3007 as an image printed by being irradiated onto the barcode surface 3006 is scanned.

  Reflected light from the barcode surface 3006 is sequentially reflected by the optical deflector 3005 and the collector lens 3004, and then received by the photodetector 3009 through the band pass filter 3008, and the barcode 3007 is read based on the output. Any of the optical deflecting devices 1 to 1c configured to deflect light in one axial direction is used for the optical deflector 3005.

  By using the optical deflector of the present invention as the optical deflector 3005, it is possible to achieve power saving, quietness, and miniaturization of the barcode reader as compared with the case where a rotary scanning mirror such as a polygon mirror is used. .

  In addition to the above, the optical deflecting device of the present invention can be applied to a laser radar device or the like.

  As described above, according to the light deflection apparatus of the present embodiment, the mirror unit 10 that is a mirror that reflects light from the light source, the pair of torsion bar springs 20a and 20b that are elastic support means for supporting the mirror unit 10, and these torsion bars Spring 20a, 20b and drive part 30a, 30b which rotates the mirror part 10 are provided. And the some reinforcement rib 11 which reinforces the mirror part 10 was provided in the back surface 10b which is a surface on the opposite side to the reflective surface 10a which reflects the light of the mirror part 10. As shown in FIG. Thereby, the mirror part 10 is reinforced, the dynamic deformation of the mirror part 10 can be suppressed, and deterioration of scanning light can be suppressed.

  In addition, since the reinforcing rib 11 has an elongated linear shape, an increase in weight due to the reinforcing rib can be suppressed to a necessary minimum level, an increase in the weight of the mirror portion 10 can be suppressed, and the inertia of the mirror portion 10 can be suppressed. Increase in the necessary amount. Thereby, inhibition of high-speed driving can be minimized.

  Moreover, the mirror part 10 was made into the elliptical shape where the central axis direction of rotation of the said mirror part 10 has a long diameter. Thereby, the length of the direction orthogonal to the rotation axis | shaft of the mirror part 10 can be shortened, ensuring the reflective effective surface of the mirror part 10. FIG. Thereby, the mirror part 10 can be reduced in weight, the inertia of the mirror part 10 can be reduced, and a high-speed drive can be implement | achieved. Moreover, the inertia of the mirror part 10 can be reduced by shortening the length in the direction orthogonal to the rotation axis, and high-speed driving can be realized.

  The reinforcing rib includes a first rib 11 a that reinforces a direction orthogonal to the central axis direction of rotation of the mirror unit 10, and a second rib 11 b that reinforces the central axis direction of rotation of the mirror unit 10. Thereby, dynamic deformation around the central axis direction of rotation of the mirror unit 10 and dynamic deformation about a direction orthogonal to the central axis direction of rotation of the mirror unit 10 can be suppressed.

  Specifically, the first rib 11a is a plurality of ribs extending in a direction orthogonal to the rotation central axis direction of the mirror portion, thereby causing a direction orthogonal to the rotation central axis direction of the mirror portion 10. Can be reinforced. Further, the second rib 11b is a rib provided at the center of rotation of the mirror unit 10 and extending in the direction of the center axis of rotation of the mirror unit, thereby reinforcing the center axis direction of rotation of the mirror unit 10. can do. Further, by providing the second rib 11b at the center of rotation of the mirror part 10, the weight of the second rib does not affect the inertia of the mirror part when the mirror part 10 is swung. Thereby, the high-speed drive of the mirror part 10 is realizable.

  Further, as shown in the third modification, the reinforcing ribs are inclined by + 45 ° with respect to the central axis direction of the rotation of the mirror part 10 and in the central axis direction of the rotation of the mirror part 10. Even if the second rib 11d-2 inclined by −45 ° is configured, the central axis direction of the rotation of the mirror unit 10 and the direction orthogonal to the central axis direction of the rotation of the mirror unit 10 are set. Can be reinforced. In addition, by forming the reinforcing ribs in this way, the mirror includes a rib extending in a direction orthogonal to the central axis direction of rotation of the mirror portion and a rib extending in the central axis direction of rotation of the mirror portion. Compared to the case where the central axis direction of rotation of the portion 10 and the direction orthogonal to the central axis direction of rotation of the mirror portion 10 are reinforced, the mirror portion 10 can be reinforced with a smaller number of mirrors. The weight of the part 10 can be reduced.

  Moreover, by providing the 3rd rib which reinforces the edge of the mirror part 10, the dynamic deformation around the edge of the mirror part 10 can be suppressed. The edge portion is the portion where the inertia is maximized when the mirror portion 10 is oscillated and oscillated, so that the dynamic deformation of the mirror portion 10 is effectively suppressed by reinforcing this with the third rib. Can do.

  Moreover, the edge part of the elliptical mirror part 10 can be favorably reinforced by making the 3rd rib 11c into a shape similar to the elliptical shape of the said mirror, or an oval shape.

  Further, the drive portions 30a and 30b are cantilevered, and are composed of drive beams 31a and 31b having torsion bar springs 20a and 20b connected to free ends, and the drive beams 31a and 31b of the torsion bar springs 20a and 20b. The driving beams 31a and 31b are bent and vibrated around the connecting direction, and the piezoelectric members 32a and 32b are used. When the piezoelectric members 32a and 32b are driven and the driving beams 31a and 31b are bent and vibrated, the torsion spring bar is twisted and deformed, and the mirror portion 10 can be oscillated and oscillated. In particular, in the present embodiment, since the torsion bar springs 20a and 20b are connected to the free ends of the drive beams 31a and 31b, the bending vibrations of the drive beams 31a and 31b are caused by the rotational vibrations of the torsion bar springs 20a and 20b ( Torsional vibration), and the mirror portion 10 can be largely rotated and vibrated. Further, the torsion bar springs can be torsionally vibrated by one drive unit 30 by bending and vibrating the drive beams 31a and 31b around the connection direction of the torsion bar springs 20a and 20b with the drive beams 31a and 31b. Therefore, the size can be reduced.

  Further, by making each of the drive units 30a and 30b have a unimorph structure or a bimorph structure, the drive beams 31a and 31 "b can be bent and vibrated with a simple configuration.

  Further, as shown in Modification 4, the driving units 30a and 30b are supported, and can be rotated in a direction parallel to the reflecting surface 10a of the mirror unit 10 and perpendicular to the central axis of rotation of the mirror unit 10. The movable frame 140 is supported by the fixed frame 40, and movable frame driving units 130a and 130b, which are movable frame driving means for rotating the movable frame 140, are provided. Thereby, light can be deflected in the biaxial direction.

  In addition, one end of the movable frame 140 includes movable frame torsion bar springs 120 a and 120 b which are a pair of movable frame elastic support members connected to one side of the movable frame 140, and the movable frame driving units 130 a and 130 b are cantilevered on the fixed frame 40. The movable frame drive beams 131a and 131b, to which the movable frame torsion bar springs 120a and 120b are connected at the free ends, and the movable frame piezoelectric members 131b and 131b that flexure and vibrate the movable frame drive beams 131a and 131b around the rotation axis direction of the movable frame. And. Accordingly, when the movable frame piezoelectric members 132a and 132b are driven and the movable frame driving beams 131a and 131b are flexed and vibrated, the movable frame torsion bar springs 120a and 120b are torsionally deformed, and the movable frame 140 is oscillated and oscillated. be able to. In particular, since the movable frame torsion bar springs 20a and 20b are connected to the free ends of the movable frame driving beams 131a and 131b, the bending vibration of the movable frame driving beams 131a and 131b causes rotation of the movable frame torsion bar springs 120a and 120b. It can be efficiently converted into vibration (torsional vibration), and the mirror unit 10 can be largely rotated and vibrated. In addition, the movable frame torsion bar spring can be torsionally vibrated with a single drive unit 30, and the size can be reduced.

  Further, by making the movable frame driving units 130a and 130b unimorph structure or bimorph structure, the movable frame driving beams 131a and 131b can be flexibly vibrated with a simple configuration.

  Further, by using the above-described optical deflecting device as the optical deflector of the optical scanning device, it is possible to suppress the deterioration of the scanning light and perform optical writing on the photosensitive drum at a high speed. Further, power saving, quietness, and miniaturization can be achieved as compared with the case where a polygon scanner is used as the optical deflector.

  Further, by using the above-described optical scanning as the image forming apparatus, it is possible to suppress deterioration of the latent image and obtain a high-quality image. Further, since the latent image can be written at a high speed, the productivity of the apparatus can be improved.

  Further, by using the above-described optical deflecting device as the optical deflector of the image projecting device, the dynamic deformation of the mirror unit 10 can be suppressed, so that a good projected image can be projected onto the projection surface. Further, since the mirror unit 10 can be driven at high speed, flickering of the projected image can be suppressed. Further, power saving, quietness, and miniaturization can be achieved as compared with the case where a polygon scanner is used.

  Further, by using the above-described optical deflecting device as an optical deflector of a bar code reader serving as an image reading device, the dynamic deformation of the mirror unit 10 can be suppressed, so that the bar code can be read satisfactorily. Moreover, since the mirror part 10 can be driven at high speed, a barcode can be read quickly. Further, power saving, quietness, and miniaturization can be achieved as compared with the case where a polygon scanner is used.

1: Light deflector 10: Mirror portion 10a: Reflecting surface 10b: Back surface 11a: First reinforcing rib 11b: Second reinforcing rib 11c: Third reinforcing rib 11d: Inclined reinforcing rib 20: Torsion bar spring 30: Drive unit 31: Drive beam 32: piezoelectric material 40: fixed frame 120a: movable frame torsion bar spring 130: movable frame drive unit 131: movable frame drive beam 132: movable frame piezoelectric member 140: movable frame 310: connecting portion

JP 2011-18026 A JP 2010-244012 A

Claims (18)

A mirror that reflects light from the light source;
Elastic support means for supporting the mirror;
In an optical deflection apparatus comprising a driving means for rotating the mirror by twisting the elastic support means,
An optical deflecting device comprising a plurality of reinforcing ribs for reinforcing the mirror on a surface opposite to the reflecting surface for reflecting the light of the mirror. The optical deflection apparatus according to claim 1, wherein
The optical deflecting device, wherein the reinforcing rib has an elongated linear shape. The optical deflecting device according to claim 1 or 2,
An optical deflection apparatus characterized in that the mirror has an elliptical shape with a major axis in the direction of the central axis of rotation of the mirror. The optical deflection apparatus according to any one of claims 1 to 3,
The reinforcing rib includes a first rib that reinforces the direction orthogonal to the central axis direction of the mirror rotation, and a second rib that reinforces the central axis direction of the mirror rotation. apparatus. The optical deflection apparatus according to claim 4, wherein
The first rib is a plurality of ribs extending in a direction orthogonal to the direction of the central axis of rotation of the mirror, and the second rib is provided at the center of rotation of the mirror. An optical deflecting device characterized by being a rib extending in the direction of the central axis of motion. The optical deflection apparatus according to any one of claims 1 to 3,
The reinforcing rib includes a first rib inclined by + 45 ° with respect to the central axis direction of rotation of the mirror and a second rib inclined by −45 ° with respect to the central axis direction of rotation of the mirror. An optical deflector characterized by that. The light deflection apparatus according to any one of claims 4 to 6,
The optical deflecting device, wherein the reinforcing rib includes a third rib for reinforcing the edge of the mirror. The optical deflection apparatus according to claim 7, wherein
The mirror has an elliptical shape in which the central axis direction of rotation of the mirror is a long diameter,
The optical deflecting device, wherein the third rib has a shape similar to the elliptical shape of the mirror. The optical deflection apparatus according to claim 7, wherein
The mirror has an elliptical shape in which the central axis direction of rotation of the mirror is a long diameter,
The optical deflecting device, wherein the third rib has an oval shape. The light deflection apparatus according to any one of claims 1 to 9,
The elastic support means includes a first elastic support member having one end connected to one side of the mirror, and a second elastic support member having one end connected to the other side of the mirror,
The drive means is cantilevered and has a free end portion connected to the other end of the first elastic support member and a connection direction between the first elastic support member and the drive beam. A first drive unit including a first piezoelectric member that flexures and vibrates the drive beam;
The second drive around the direction of connection between the second drive beam, which is cantilevered and the other end of the second elastic support member is connected to the free end, and the second drive beam of the second elastic support member An optical deflecting device comprising: a second driving unit including a second piezoelectric member that flexures and vibrates the beam. The optical deflection apparatus according to claim 10, wherein
An optical deflecting device characterized in that the first and second driving sections have a unimorph structure or a bimorph structure. The light deflection apparatus according to any one of claims 1 to 11,
A movable frame that supports the driving means, is supported by a fixed frame so as to be rotatable around a direction parallel to the reflecting surface of the mirror and orthogonal to the central axis of rotation of the mirror;
An optical deflection apparatus comprising: a movable frame driving means for rotating the movable frame. The optical deflecting device of claim 12,
A first movable frame elastic support member connected to one side of the movable frame; and a second movable frame elastic support member connected to the other side of the movable frame;
The movable frame driving means is cantilevered by the fixed frame and has a first movable frame driving beam connected to the first movable frame elastic support member at a free end, and the first movable frame driving beam is movable. A first movable frame drive unit including a first movable frame piezoelectric member that bends and vibrates around the central axis of rotation of the frame;
A second movable frame drive beam, which is cantilevered by the fixed frame and connected to the second movable frame elastic support member at a free end; and the second movable frame drive beam is a central axis of rotation of the movable frame An optical deflecting device comprising: a second movable frame driving unit including a second movable frame piezoelectric member that bends and vibrates around. The optical deflection apparatus according to claim 13,
An optical deflection apparatus characterized in that the first and second movable frame driving sections have a unimorph structure or a bimorph structure. In an optical scanning device comprising a light source and light deflecting means for deflecting and scanning light from the light source,
An optical scanning apparatus using the optical deflection apparatus according to claim 1 as the optical deflection means. A latent image carrier that carries a latent image, an optical scanning unit that forms a latent image on the surface of the latent image carrier by optical scanning, and a developing unit that develops the latent image carried on the latent image carrier. In the image forming apparatus provided,
An image forming apparatus using the optical scanning device according to claim 15 as the optical scanning unit. A light source;
A modulator that modulates the light output in response to an image signal;
In an image projection apparatus comprising an optical deflecting unit that deflects and scans light from a modulator,
15. An image projection apparatus using the light deflection apparatus according to claim 12 as the light deflection means. A light source;
Light deflecting means for deflecting and scanning light from the light source;
A light receiving means for receiving light reflected from the image;
In an image reading apparatus comprising image information generating means for generating image information based on light received by the light receiving means,
An image reading apparatus using the light deflecting device according to claim 1 as the light deflecting unit.