CN205562954U - Driving scanning micro mirror of voice coil motor - Google Patents
Driving scanning micro mirror of voice coil motor Download PDFInfo
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- CN205562954U CN205562954U CN201620268737.6U CN201620268737U CN205562954U CN 205562954 U CN205562954 U CN 205562954U CN 201620268737 U CN201620268737 U CN 201620268737U CN 205562954 U CN205562954 U CN 205562954U
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Abstract
The utility model provides a driving scanning micro mirror of voice coil motor, including the reflection mirror surface, the reflection mirror surface is driven by voice coil loudspeaker voice coil driving motor, voice coil loudspeaker voice coil driving motor comprises haier's bake permanent magnetism array and electrical coil, electrical coil drives the motion of reflection mirror surface in the magnetic field that haier's bake permanent magnetism array formed. The utility model discloses in, the magnetism that " magnetic monopole " characteristic that haier's bake permanent magnetism array has can realize voice coil motor reduces the electromagnetic interference of motor to the external environment condition from blocking function, more importantly, the strongest magnetic field can be realized with minimum magnet to haier's bake permanent magnetism array to show the quality and the volume that reduce scanning micro mirror drive arrangement, moreover, can improve further still through accuracy design permanent magnetism array that the micro mirror twists reverse or travel direction nature and accuracy nature, for miniaturization, the intelligent development of scanning micro mirror terminal product provide unlimited maybe.
Description
Technical field
This utility model relates to a kind of scanning micro-mirror, is specifically related to a kind of driving scanning micro-mirror of voice coil motor.
Background technology
The scanning micro-mirror using MEMS technology manufacture has the significant advantages such as small size, low cost, low-power consumption, can be widely applied to the optical instruments such as optical scanning projection display system, laser imaging radar, spectrogrph, bar code scanner, Laser Scanning Confocal Microscope, endoscope.
The type of drive of scanning micro-mirror mainly has electrostatic drive and Electromagnetic Drive.Wherein, electrostatic drive produces electrostatic force mainly by the capacitance variations between electrode, thus drives micro mirror to move around axle.Electrostatic drive micro mirror is divided into again plate condenser type and pivotal quantity two types, comparatively speaking, comb electrostatic drive micro mirror can obtain bigger windup-degree under relatively small driving voltage, but still there is the shortcoming that driving force is little, driving voltage is high, and the too much comb electrodes of mirror environment adds the rotary inertia of micro mirror, micro mirror resonant frequency is difficult to further improve, limit the scanning speed of micro mirror.
Electromagnetic Drive produces magnetic force mainly by alternating current in magnetic field thus drives micro mirror to move around axle, or by electric magnet, captivation or the repulsive force of magnetic pole is realized the purpose that driving micro mirror moves around axle.Compared with electrostatic drive, Electromagnetic Drive has the advantages such as driving force big, electromagnetic conversion efficiency height, bi-directional drive, and use magnetic field force as driving force, drive structure without being directly connected to driving structure, avoid displacement to limit, but the MEMS scanning micro-mirror of electromagnetic drive mode needs to be operated under the environment of external magnetic field, need to use assembling integrated technology, add the difficulty of system processing and manufacturing.
In order to neutralize electrostatic drive and Electromagnetic Drive pluses and minuses, maradin company of the U.S. is utility model a kind of electromagnetism-electrostatic combination drive two-dimensional scan micro mirror in US20100020379A1 patent, utilize minute surface in the static-electronic driving that static broach produces, the permanent magnet being fixed on frame beam structure is driven with U-shaped energization solenoid, drive framework reverses, realize micro mirror reflection scanning in the two-dimensional direction, but needing to be fixed in micro mirror framework torsion beam magnetic material assembling in this scanning mirror, its production technology is incompatible with IC technique.In order to solve the problems referred to above, Northwestern Polytechnical University disclose in the patent that application publication number is CN 104765144A a kind of sound comb electrostatic drive and use etching, peel off, the process means such as plating prepares coil used by Electromagnetic Drive at micro mirror periphery.Having problems in that in the above prior art, permanent magnet or electric magnet that scanning micro-mirror Electromagnetic Drive is used need to arrange magnetic shield overcoat in outside, to place the electromagnetic interference that driving means and driving means environment to external world are caused by external environment；It addition, permanent magnet and the quality of electric magnet and volume are relatively big, after causing assembling, end product volume cannot reduce further, limits scanning micro-mirror and develops to miniaturization, intelligentized direction.
Utility model content
In order to solve the problems referred to above, the purpose of this utility model is to provide a kind of driving scanning micro-mirror of novel voice coil motor, tradition electromagnetic drive structures and function are carried out breakthrough improvement, has significantly reduced magnet volume and improve directivity and the accuracy that scanning micro-mirror reverses.
The technical solution adopted in the utility model is: a kind of driving scanning micro-mirror of voice coil motor, including mirror surface, described mirror surface is driven motor to drive by voice coil loudspeaker voice coil, described voice coil loudspeaker voice coil drives motor to be made up of Halbach permanent magnet array and hot-wire coil, and described hot-wire coil drives mirror surface to move in the magnetic field that Halbach permanent magnet array is formed.
Preferably, described Halbach permanent magnet array is linear array, and described linear array can provide the driving moment that mirror surface reverses around X-axis and/or Y-axis.
Preferably, described linear array magnet structure is 2 pieces, every pole, 3 pieces, every pole or every 4 pieces, pole.
Preferably, described Halbach permanent magnet array is annular array, and described annular array can provide the driving moment that mirror surface reverses, or the driving moment that offer mirror surface moves up and down along Z-direction around X-axis and/or Y-axis.
Preferably, described mirror surface is square or circular.
Preferably, described hot-wire coil is square or circular.
Compared with prior art, the beneficial effects of the utility model are:
This utility model by Halbach permanent magnet array application to voice coil motor, utilizes " magnetic monopole " characteristic of Halbach permanent magnet array to make it produce magnetic field in mirror surface space, and realizes the Electromagnetic Drive to mirror surface by hot-wire coil pioneeringly.In this utility model, " magnetic monopole " characteristic that Halbach permanent magnet array has, it is possible to realize the magnetic self-shileding function of voice coil motor, substantially reduce the voice coil motor electromagnetic interference to external environment condition；The more important thing is, Halbach permanent magnet array can realize the strongest magnetic field with minimal amount of magnet, thus significantly reduces quality and the volume of scanning micro-mirror driving means；Furthermore, also can further improve, by careful design permanent magnet array, directivity and the accuracy that micro mirror reverses, miniaturization, intelligent development for scanning micro-mirror end product provide and infinitely may.
Accompanying drawing explanation
Fig. 1 is the structural representation of prior art 1；
Fig. 2 is the structural representation of prior art 2
Fig. 3 is this utility model voice coil loudspeaker voice coil driving scanning micro-mirror perspective view 1；
Fig. 4 is mirror surface plan structure schematic diagram in Fig. 3；
Fig. 5 (a) is the Halbach permanent magnet array arrangement mode one that this utility model embodiment provides；
Fig. 5 (b) is the Halbach permanent magnet array arrangement mode two that this utility model embodiment provides；
Fig. 5 (c) is the Halbach permanent magnet array arrangement mode three that this utility model embodiment provides；
Fig. 6 is this utility model voice coil loudspeaker voice coil driving scanning micro-mirror perspective view 2；
Fig. 7 is mirror surface plan structure schematic diagram in Fig. 6；
Fig. 8 (a) is the Halbach permanent magnet array arrangement mode four that this utility model embodiment provides；
Fig. 8 (b) is the Halbach permanent magnet array arrangement mode five that this utility model embodiment provides；
Fig. 8 (c) is the Halbach permanent magnet array arrangement mode six that this utility model embodiment provides.
Detailed description of the invention
Below in conjunction with accompanying drawing, this utility model is further described.
Embodiment 1: see Fig. 3 and Fig. 4, a kind of driving scanning micro-mirror of voice coil motor, including mirror surface 10, described mirror surface 10 is driven motor to drive by voice coil loudspeaker voice coil, described voice coil loudspeaker voice coil drives motor to be made up of Halbach permanent magnet array 20 and hot-wire coil 11, and described hot-wire coil 11 drives mirror surface 10 to move in the magnetic field that Halbach permanent magnet array 20 is formed.
In the present embodiment, described mirror surface 10 is by Y-axis brachium pontis 12, X-axis brachium pontis 13 and X-axis brachium pontis support 14 realize the torsion of two-dimensional directional, described hot-wire coil 11 is separately positioned on mirror surface 10 and X-axis brachium pontis support 14, specifically can be arranged on the front of mirror surface or the back side and the front of X brachium pontis support or the back side, thus drive mirror surface to reverse around axle, described mirror surface 10, hot-wire coil 11, Y-axis brachium pontis 12, X-axis brachium pontis 13 and X-axis brachium pontis support 14 and hot-wire coil circuit access point 15 all use IC technique to be processed in silicon wafer 100.
Specifically, described Halbach permanent magnet array 20 can be the square array of linear array composition, wherein, permanent magnet be arranged with various ways, can be 2 pieces, every pole (90 °), 3 pieces, every pole (60 °) or every 4 pieces, pole (45 °) according to the block number difference constituting every pole, respectively such as Fig. 5 (a), 5(b) and 5(c) shown in.The Halbach permanent magnet array using above-mentioned arrangement mode can spatially produce stronger transverse magnetic field at mirror surface, and magnetic field on another side is almost nil, in hot-wire coil 11, electric current is imported again by circuit connection point 15, mirror surface can be provided around Y-axis and/or the driving moment of X-axis, drive mirror surface 10 to reverse alone about Y-axis by Y-axis brachium pontis 12 and X-axis brachium pontis 13, reverse alone about X-axis or simultaneously around X, the torsion of Y-axis hybrid directional, apply the display that can realize rectangular scanning image to laser scanning projection device.
Embodiment 2: see Fig. 6 and Fig. 7, other parts are same as in Example 1, and difference is: described mirror surface 10 is circle, hot-wire coil 11 be shaped as annular, Halbach permanent magnet array is then annular array.
Here, in described annular array, the arrangement mode of magnetic pole has multiple, and different arrangement modes can form the magnetic field of different directions in mirror surface space.
Example, it can be the pole arrangement mode as shown in Fig. 8 (a), the transverse magnetic field of single direction can be spatially formed at mirror surface, the magnetic direction that this type arrangement mode is formed with embodiment 1 cathetus array is similar, it is possible to provide the driving moment that mirror surface reverses around X-axis and/or Y-axis；
Or, the pole arrangement mode as shown in Fig. 8 (b), the transverse magnetic field in 4 directions can be spatially formed at mirror surface；Or be the pole arrangement mode as shown in Fig. 8 (c), the transverse magnetic field in 6 directions can be spatially formed at mirror surface, arrangement mode shown in figure (b) and figure (c) is different with aforementioned manner, by changing the sense of current being passed through in hot-wire coil, described Halbach permanent magnet array can provide mirror surface 11 along the upper and lower driving force moved of Z-direction, and binding site sensor can realize the dynamic regulation of scanning micro-mirror position skew.
In this utility model, shape, number, magnetic pole and the arrangement mode of Halbach permanent magnet array magnet determines mirror surface torsion or the directivity of motion and accuracy, and shape, number, magnetic pole and the arrangement mode of Halbach permanent magnet array magnet have multiple choices, it is not limited to the embodiment provided in above-described embodiment.It addition, in the above-described embodiments, by mirror surface and hot-wire coil for circular or square as a example by be illustrated, but the shape of mirror surface and hot-wire coil is not limited to this, and this utility model does not limits.
This utility model provides a kind of driving scanning micro-mirror of novel voice coil motor, tradition scanning micro-mirror electromagnetic drive structures and function have been carried out breakthrough improvement, by in Halbach permanent magnet array application to voice coil motor, " magnetic monopole " characteristic utilizing Halbach permanent magnet array makes it produce magnetic field in scanning micro-mirror space, and realizes the Electromagnetic Drive to scanning micro-mirror by hot-wire coil.In this utility model, " magnetic monopole " characteristic that Halbach permanent magnet array has is capable of the magnetic self-shileding function of voice coil motor, effectively reduces the voice coil motor electromagnetic interference to external environment condition；What is more important, Halbach permanent magnet array can realize the strongest magnetic field with minimal amount of magnet, thus significantly reduce quality and the volume of scanning micro-mirror driving means；Furthermore, magnetic pole and arrangement mode by careful design permanent magnet array can also improve directivity and the accuracy that micro mirror reverses further, and miniaturization, intelligent development for scanning micro-mirror end product provide and infinitely may.
It should be noted that, the all accompanying drawings of this utility model are the simple schematic diagrams of the driving scanning micro-mirror of above-mentioned voice coil motor, only embody the structure relevant to utility model point for clearly describing this programme, the structure unrelated with utility model point for other is existing structure, the most embodiment or only realizational portion.
In a word; these are only this utility model preferred embodiment; it is not intended to limit protection domain of the present utility model, within scope of the present utility model, within the equivalents being made this utility model or amendment should be included in protection domain of the present utility model.
Claims (6)
1. the driving scanning micro-mirror of voice coil motor, including mirror surface, it is characterized in that: described mirror surface is driven motor to drive by voice coil loudspeaker voice coil, described voice coil loudspeaker voice coil drives motor to be made up of Halbach permanent magnet array and hot-wire coil, and described hot-wire coil drives mirror surface to move in the magnetic field that Halbach permanent magnet array is formed.
A kind of driving scanning micro-mirror of voice coil motor the most according to claim 1, it is characterised in that: described Halbach permanent magnet array is linear array, and described linear array can provide the driving moment that mirror surface reverses around X-axis and/or Y-axis.
A kind of driving scanning micro-mirror of voice coil motor the most according to claim 2, it is characterised in that: described linear array magnet structure is 2 pieces, every pole, 3 pieces, every pole or every 4 pieces, pole.
A kind of driving scanning micro-mirror of voice coil motor the most according to claim 1, it is characterized in that: described Halbach permanent magnet array is annular array, described annular array can provide the driving moment that mirror surface reverses, or the driving moment that offer mirror surface moves up and down along Z-direction around X-axis and/or Y-axis.
A kind of driving scanning micro-mirror of voice coil motor the most according to any one of claim 1 to 4, it is characterised in that: described mirror surface is square or circular.
A kind of driving scanning micro-mirror of voice coil motor the most according to any one of claim 1 to 4, it is characterised in that: described hot-wire coil is square or circular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620268737.6U CN205562954U (en) | 2016-04-05 | 2016-04-05 | Driving scanning micro mirror of voice coil motor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620268737.6U CN205562954U (en) | 2016-04-05 | 2016-04-05 | Driving scanning micro mirror of voice coil motor |
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| CN205562954U true CN205562954U (en) | 2016-09-07 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105676447A (en) * | 2016-04-05 | 2016-06-15 | 合肥芯福传感器技术有限公司 | Voice-coil-motor-driven scanning micro-mirror |
| CN108710138A (en) * | 2018-01-29 | 2018-10-26 | 上海思致汽车工程技术有限公司 | A kind of broad field laser radar system based on MEMS |
-
2016
- 2016-04-05 CN CN201620268737.6U patent/CN205562954U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105676447A (en) * | 2016-04-05 | 2016-06-15 | 合肥芯福传感器技术有限公司 | Voice-coil-motor-driven scanning micro-mirror |
| CN108710138A (en) * | 2018-01-29 | 2018-10-26 | 上海思致汽车工程技术有限公司 | A kind of broad field laser radar system based on MEMS |
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