CN210147468U - Longer, higher U axle rotating system of running accuracy of life-span - Google Patents

Abstract

The utility model provides a U-axis rotating system with longer service life and higher running precision, which comprises a carrying platform, a bearing plate, a direct-drive mechanism, two guide rails and a supporting platform, wherein the top surface of the supporting platform is provided with a groove, and two open sides of the groove are two guide rail supporting parts; the direct-drive mechanism is arranged in the groove, and the two guide rails are symmetrically arranged on the two guide rail supporting parts in a one-to-one correspondence mode. The direct-drive mechanism is arranged in the groove, so that the mounting height of the direct-drive mechanism is reduced, the guide rail is connected with the bearing plate only through the sliding block, a cushion block is not required to be added, or the height of the sliding block is reduced, the mounting height of the loading platform and the bearing plate is reduced, and finally the gravity center of the loading platform and the bearing plate is reduced, so that the front and back pitching torques of the loading platform and the bearing plate during emergency stop are reduced, the service life of the guide rail is prolonged, and the operation precision of the loading platform and the bearing plate is improved.

Description

Longer, higher U axle rotating system of running accuracy of life-span

[ technical field ] A method for producing a semiconductor device

The utility model relates to a high-speed intelligent cutting machine of electronic component, especially a longer, the higher U axle rotating system of running accuracy of life-span.

[ background of the invention ]

Along with the development of science and technology, electronic products are more and more in variety, increasingly powerful in function and smaller in size. This requires that the main electronic components of the electronic product, such as capacitors, resistors, inductors, sensors, etc., be made as small as possible and have as high a reliability as possible. At present, chip ceramic electronic components are mainly adopted, and the chip ceramic electronic components have excellent insulating property, heat resistance, durability and other aspects. Therefore, the manufacture, sale, and use of chip-type ceramic electronic components have been vigorously developed.

When a chip-type ceramic electronic component is manufactured, a cutting machine is required to cut the ceramic membrane, so as to obtain a tiny electronic component. The requirements for the cutting machine during the cutting process are very high, and the precision of the cutting machine is required to be in the micrometer level.

For example, the invention patent application number is 201610353697.X, the publication number is CN 105856437B, and the publication date is 2018.05.04, and specifically discloses a high-speed intelligent chip electronic component cutting machine, which comprises a machine body structure, a carrying platform, a detection positioning mechanism, a cutting mechanism and a control system, wherein a vacuum channel is arranged in the carrying platform, a feeding mechanism and a receiving mechanism which comprise a vacuum chuck, a conveying motor and a block bin are respectively arranged on the left side and the right side of the carrying platform, and an electric ejector rod capable of enabling a block to move up and down is arranged in the machine body structure at the bottom of the block bin; the lower part of the loading platform is connected with a bearing plate, a DD direct-drive servo rotating mechanism capable of enabling the loading platform to rotate for a certain angle relative to the bearing plate is arranged inside the joint of the loading platform and the bearing plate, a direct-drive mechanism capable of enabling the bearing plate to move linearly back and forth is arranged below the bearing plate, and the direct-drive mechanism adopts a linear drive servo motor with a magnetic suspension structure; the detection positioning mechanism is two groups of CCD detectors arranged on the left and right sides, and the CCD detectors are provided with motors which can drive the CCD to move, search the marking points of the blocks and automatically focus; the cutting mechanism comprises a cutter holder mechanism and a cutting motor, the cutter holder mechanism adopts an integrated structure consisting of a cutter holder, a cutting knife, a ball guide sleeve, a cutter clamping block, a cutter protecting block and a spring mechanism, and the cutter protecting block can move relative to the cutter clamping block; the control system is characterized in that an industrial computer is electrically connected with the CCD detector, the DD direct-drive servo rotating mechanism, the linear drive servo motor, the cutting mechanism and the feeding and receiving mechanism. It adopts linear servo motor to constitute by active cell and stator, adopt the transmission of magnetic suspension principle, keep certain clearance between active cell and stator, it adopts servo motor to have overcome prior art, lead screw and guide rail constitution transmission system, it is big that the lead screw has the sound at high-speed conveying and positioning process, easy wearing and tearing, conveying lead screw nut pressure variation, lead screw straightness accuracy changes and causes the conveying resistance change and can influence conveying moment and speed, cause the decline of cutting accuracy, bad phenomena such as unable cutting small-size piece formula ceramic electronic component have following advantage: the transmission sound is small, the abrasion is avoided, the transmission is stable, the speed is high, the positioning is accurate, and the consistency is high.

Wherein, the loading board of its loading board below directly drives the guide rail of mechanism and both sides and sets up on the top surface of organism structure, is located the coplanar, and this kind of structure is very common on the lathe, but, to the cutting machine that the required precision is high, this kind of structure still has following shortcoming:

firstly, in the actual use process, the height of the bearing plate direct-drive mechanism is higher than that of the guide rail, so that when the guide rails on two sides are installed, a cushion block needs to be added on the sliding block connected with the guide rail to connect the guide rail, or the height of the sliding block needs to be increased, the height of the bearing plate is undoubtedly increased, and meanwhile, the gravity center of the bearing plate is also increased. And in the course of working, the acceleration of motion of loading board is very big, just so can realize high efficiency, but the loading board when carrying out high-speed motion under the drive of loading board direct drive mechanism, because the weight ratio of microscope carrier and loading board is great, the loading board is when moving to the processing position at a high speed at every turn, need high acceleration start and stop, this inertia that just causes microscope carrier and loading board is very big, this pitching moment of torsion is too big around just causing easily, again because the focus of microscope carrier and loading board is high, make this phenomenon aggravation, this causes harmful effects to the precision and the life-span of guide rail easily, for example, can lead to the life-span to shorten, guide rail and guide rail slider appear the clearance, and then lead to the precision to reduce, influence the.

Secondly, the top surface of the machine body of the cutting machine for installing the bearing plate direct-drive mechanism and the guide rail is generally manufactured by adopting an iron plate, the cutting machine is manufactured by adopting the iron plate for a common machine tool or a machine tool with low requirement on precision grade, the use requirement can be met, the cost is low, but for the cutting machine of the chip type ceramic electronic element, the precision grade is required to be in a micron grade, the precision requirement is very high, and the iron plate is used as a supporting platform due to the defects of stress deformation and insufficient machining precision, so that the precision of the carrying platform and the bearing plate can be adversely affected.

[ Utility model ] content

For overcoming the defect that existing equipment exists, the utility model provides a longer, the higher U axle rotating system of operation precision of life-span reduces the focus of microscope carrier and loading board, and every single move moment of torsion improves operation precision and life around reducing.

The utility model discloses a realize like this: a U-axis rotating system with longer service life and higher operation precision comprises a carrying platform, a bearing plate, a direct-drive mechanism, two guide rails, a supporting platform and a supporting platform, wherein the carrying platform can be rotatably arranged on the bearing plate through the rotating mechanism; the direct-drive mechanism is arranged in the groove, and the two guide rails are symmetrically arranged on the two guide rail supporting parts in a one-to-one correspondence manner; the bottom of the bearing plate is connected with the direct drive mechanism; the bottom of the bearing plate is also connected with the two guide rails through the two sliding blocks in a sliding manner.

Further, the support table is a marble support table.

Further, it includes linear electric motor and grating chi directly to drive the mechanism, linear electric motor includes active cell and magnetic track, active cell fixed mounting in the bottom of loading board, the magnetic track is installed in the recess, grating chi and magnetic track parallel arrangement.

The utility model has the advantages that: the utility model discloses a brace table top is seted up the recess will directly drive the mechanism and install in the recess to reduce the mounting height who directly drives the mechanism, make the guide rail with the loading board only needs to pass through the slider and connects, need not to increase the cushion, perhaps reduces the height of slider, realizes will the mounting height of microscope stage and loading board reduces, and final realization will the focus of microscope stage and loading board reduces, thereby reduces the pitching moment of torsion around microscope stage and loading board when scram improves the life of guide rail, improves the operation precision of microscope stage and loading board.

[ description of the drawings ]

The invention will be further described with reference to the following examples with reference to the accompanying drawings.

Fig. 1 is a front view of the U-axis rotating system of the present invention.

Fig. 2 is a top view of the support table of the present invention.

Fig. 3 is a front view of the supporting table of the present invention.

Fig. 4 is a top view of the U-axis rotating system of the present invention.

Fig. 5 is a perspective view of the U-axis rotating system of the present invention.

Fig. 6 is an effect schematic diagram of the U-axis rotating system installed on the automatic cutting machine.

In the figure: 100. u axle rotating system, 1, microscope carrier, 2, loading board, 3, directly drive mechanism, 31, linear electric motor, 311, active cell, 312, magnetic track, 32, grating chi, 4, guide rail, 5, brace table, 51, recess, 52, guide rail supporting part, 6, slider.

[ detailed description ] embodiments

Referring to fig. 1 to 6, the present invention provides a U-axis rotating system 100 with a longer service life and a higher operation precision, which includes a carrier 1, a loading plate 2, a direct-drive mechanism 3 and two guide rails 4, wherein the carrier 1 is rotatably mounted on the loading plate 2 through a rotating mechanism (not shown), the U-axis rotating system further includes a supporting table 5, a groove 51 is formed on a top surface of the supporting table 5, and two guide rail supporting portions 52 are arranged on two sides of an opening of the groove 51; the direct drive mechanism 3 is arranged in the groove 51, and the two guide rails 4 are symmetrically arranged on the two guide rail supporting parts 52 in a one-to-one correspondence manner; the bottom of the bearing plate 2 is connected with the direct drive mechanism 3; the bottom of the bearing plate 2 is also connected with the two guide rails 4 in a sliding manner through two sliding blocks 6. The utility model discloses a supporting bench 5 tops are seted up recess 51 will directly drive mechanism 3 and install in recess 51 to reduce the mounting height who directly drives mechanism 3, make guide rail 4 with loading board 2 only needs to be connected through slider 6, need not to increase the cushion or increase the height of slider 6, the realization will the mounting height of microscope stage 1 and loading board 2 reduces, and the final realization will the focus of microscope stage 1 and loading board 2 reduces, thereby reduces the pitching moment of torsion around microscope stage 1 and loading board 2 when scram improves guide rail 4's life, improves microscope stage 1 and loading board 2's operation precision.

In the implementation, a preferred embodiment is as follows: the supporting table 5 is a marble supporting table 5, the supporting table 5 is made of marble, and compared with an iron plate, the marble does not deform due to stress and has higher processing precision, so that the grooves 51 and the two guide rail supporting parts 52 of the supporting table 5 have higher precision, and the mounting precision of the bearing plate 2 is improved.

Direct drive mechanism 3 includes linear electric motor 31 and grating chi 32, linear electric motor includes active cell 311 and magnetic track 312, active cell 311 fixed mounting is in the bottom of loading board 2, magnetic track 312 is installed in the recess 512, grating chi 32 and magnetic track 312 parallel arrangement. The linear motor 31 and the grating ruler 32 are used for linear driving of the bearing plate 2, response speed is high, positioning accuracy is high, speed of the cutting machine is improved by more than 40% compared with that of a conventional screw rod transmission cutting machine, noise is reduced by more than 10 decibels, and service life of the cutting machine is improved by nearly 10 times.

The grating ruler 32, also called as a grating ruler displacement sensor (grating ruler sensor), and the linear motor 31 are existing devices, and can be purchased directly on the market, and the materials are convenient to obtain.

In a using mode, the supporting table 5 is installed on a machine body of the cutting machine, the grating ruler 32 and the linear motor 31 are respectively connected to a control system of the cutting machine, the control system adopts a control system with the background patent application number of 201610353697.X, during operation, the position of the rotor 311 of the linear motor 31 is detected through the grating ruler 32 and then fed back to the control system in real time, the control system compares the position information of the rotor 311 fed back by the grating ruler 32 with the position information of the rotor 311 of the linear motor 31 in a preset processing program in the control system, and then the control system controls the linear motor 31 to adjust the position deviation of the rotor 311 in real time, so that the position adjustment of the carrier 1 and the carrier plate 2 is realized.

Although specific embodiments of the present invention have been described, it will be understood by those skilled in the art that the specific embodiments described are illustrative only and are not limiting upon the scope of the invention, and that equivalent modifications and variations can be made by those skilled in the art without departing from the spirit of the invention, which is to be limited only by the claims appended hereto.

Claims (3)

1. The utility model provides a longer, the higher U axle rotating system of running precision of life-span, includes microscope carrier, loading board, directly drives mechanism and two guide rails, the microscope carrier can the pivoted through slewing mechanism install on the loading board its characterized in that: the supporting device is characterized by further comprising a supporting table, wherein a groove is formed in the top surface of the supporting table, and two guide rail supporting parts are arranged on two sides of an opening of the groove; the direct-drive mechanism is arranged in the groove, and the two guide rails are symmetrically arranged on the two guide rail supporting parts in a one-to-one correspondence manner; the bottom of the bearing plate is connected with the direct drive mechanism; the bottom of the bearing plate is also connected with the two guide rails through the two sliding blocks in a sliding manner.

2. A U-axis rotary system of longer life and higher operating accuracy as defined in claim 1, wherein: the supporting platform is a marble supporting platform.

3. A U-axis rotary system of longer life and higher operating accuracy as defined in claim 1, wherein: directly drive the mechanism and include linear electric motor and grating chi, linear electric motor includes active cell and magnetic track, active cell fixed mounting be in the bottom of loading board, the magnetic track is installed in the recess, grating chi and magnetic track parallel arrangement.

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