CN210139189U - Device for measuring rigidity of air floatation pad of ultra-precision machine tool - Google Patents
Device for measuring rigidity of air floatation pad of ultra-precision machine tool Download PDFInfo
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- CN210139189U CN210139189U CN201920693195.0U CN201920693195U CN210139189U CN 210139189 U CN210139189 U CN 210139189U CN 201920693195 U CN201920693195 U CN 201920693195U CN 210139189 U CN210139189 U CN 210139189U
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Abstract
The utility model relates to a device for measuring ultra-precision machine tool air supporting pad rigidity, including base, stand, air supporting pad, clamp plate, S type pressure sensor, screw thread adapter, piezoelectric actuator, displacement sensor, coarse adjusting screw rod, upper cover, top cap and handle, be equipped with displacement sensor, stand and air supporting pad on the base, set up the clamp plate on the air supporting pad, the clamp plate links to each other with S type pressure sensor 'S bottom, and piezoelectric actuator passes through screw thread adapter and S type pressure sensor' S upper end and links to each other, piezoelectric actuator links to each other with the upper cover, and the upper cover setting is in the stand top, and the coarse adjusting screw rod sets up on the upper cover, and the handle is fixed on the top cap, and handle control coarse adjusting screw rod removes. The utility model discloses the device can effectively measure the rigidity value of air supporting under different air film clearances, simple structure, and easily operation provides the guidance for the manufacturing and designing of ultra-precision machine tool.
Description
Technical Field
The utility model relates to an accurate measurement field especially relates to a device for measuring ultra-precision machine tool air supporting pad rigidity.
Background
The ultra-precision machining technology is a development direction of modern manufacturing technology, plays a vital role in promoting the progress of scientific technology, has higher and higher requirements on product quality, performance, reliability and the like in modern industry, and is gradually innovated. The precision of ultra-precision machining is affected by machining processes, equipment, workpiece materials, tools, environments, detection and the like in the machining process. The development direction of the ultra-precision machining technology tends to have the characteristics of high precision, high efficiency, miniaturization, large-scale, intellectualization and the like. The ultra-precision cutting (turning, milling and fly-cutting) machine tool is the most widely used processing equipment for ultra-precision processing, many parts in the machine tool adopt air floating pad devices, such as air bearings, air floating guide rails and the like, and the processing equipment made of the air floating pads has very small and uniform dynamic and static friction coefficients, so that higher processing precision can be obtained. The rigidity of the air-bearing cushion is one of the important performances, and has great influence on the processing precision of a machine tool. Therefore, the development of the air bearing cushion rigidity measurement has important significance for promoting the rapid development of the ultra-precision machining technology.
The air cushion air film rigidity is defined as the ratio between the variation of the bearing force applied to the air cushion and the variation of the air film gap caused at this time. The rigidity testing device of the air-floating cushion consists of a force loading device, a force sensor and a displacement sensor. The force loading device is used for changing the bearing capacity of the air floating cushion, the force sensor is used for measuring the variation of the bearing capacity, and the displacement sensor is used for measuring the variation of the air film gap. The air floatation pad rigidity measuring device can detect the rigidity of the air floatation pad and provides a selection basis for manufacturing of the ultra-precision machine tool.
SUMMERY OF THE UTILITY MODEL
In order to solve the prior technical problem, the utility model provides a device for measuring ultra-precision machine tool air supporting pad rigidity.
The specific contents of the utility model are as follows: the utility model provides a device for measuring ultra-precision machine tool air supporting pad rigidity, includes base, stand, air supporting pad, clamp plate, S type pressure sensor, screw thread adapter, piezoelectric actuator, displacement sensor, coarse adjusting screw rod, upper cover, top cap and handle, be equipped with displacement sensor, stand and air supporting pad on the base, set up the clamp plate on the air supporting pad, the clamp plate links to each other with S type pressure sensor 'S bottom, and piezoelectric actuator passes through screw thread adapter and S type pressure sensor' S upper end and links to each other, piezoelectric actuator links to each other with the upper cover, and the upper cover setting is in the stand top, and the coarse adjusting screw rod sets up on the upper cover, and the handle is fixed on the top cap, and handle control coarse adjusting.
The S-shaped pressure sensor is made of alloy steel or stainless steel, can bear two purposes of tension and compression, has high precision and stable performance, and is suitable for tension-pressure weighing and force-measuring places with small space sizes. The bearing capacity is uniformly applied to the upper surface of the air floatation cushion through the pressing plate, the bearing capacity and the position of the air floatation cushion are respectively read through the pressure sensor and the displacement sensor, the position of the air floatation cushion is changed by changing the voltage of the piezoelectric driver, and the air film gap and the corresponding bearing capacity are obtained.
Further, the displacement sensor measures the air film gap between the air floatation cushion and the base, and the pressure sensor measures the numerical value of the bearing capacity of the air floatation cushion.
This application sets up coarse adjusting screw rod and connects piezoelectric actuator and be used for adjusting the bearing capacity and the air film clearance of air supporting pad, and displacement sensor measures the displacement change of air supporting pad to obtain the bearing capacity that air supporting pad corresponds under the air film clearance of difference.
Furthermore, the displacement sensitive direction of the displacement sensor is a vertical direction, and the resolution is 0.1 μm.
Furthermore, the force sensing direction of the pressure sensor is a vertical direction, and the resolution is less than or equal to 1N.
Furthermore, the upper cover is connected with the upright post through a screw, a thread guide seat with inner threads is arranged on the upper cover, the cylindrical surface of the top cover is connected with a coarse adjustment screw rod through a screw, the handle is fixed on the top cover, and the coarse adjustment screw rod is connected with the thread guide seat of the upper cover through threads; the coarse adjustment screw rod and the thread guide seat form a thread feeding device for macroscopic adjustment, and the coarse adjustment screw rod moves along the thread guide seat in the vertical direction through the handle.
Furthermore, the side of the thread guide seat is provided with an opening, and the piezoelectric driver is powered by an external power supply through the opening.
Further, the center lines of the coarse tuning screw and the piezoelectric actuator are coaxial.
Further, the displacement sensor is perpendicular to the base.
Further, the displacement sensor comprises a capacitance displacement sensor or a laser displacement sensor.
Furthermore, the bottom of the base is provided with a vibration isolation base plate, the base is triangular, and the base is connected with three upright posts respectively positioned at three corners of the base through screws.
Adopting a thread feeding device to carry out macroscopic adjustment, uniformly applying force on the upper surface of the air floating cushion through a pressing plate to enable the air floating cushion to be in close contact with the base, and recording the initial position S of the air floating cushion by a displacement sensor0Recording the initial preload force F applied to the air bearing pad0When the air floating cushion is supplied with air, an initial gap is formed between the air floating cushion and the base due to the action of air buoyancy, namely the thickness of the air film is marked as h0And the current position S of the air-bearing cushion is recorded by the displacement sensor1And the current value F of the dynamometer1(ii) a Therefore, the air film gaps and the corresponding bearing capacity can be calculated, the voltage of the piezoelectric ceramic is changed, the displacement of the air floating cushion is adjusted, the second group of air film gaps and the corresponding bearing capacity are obtained, and the method is repeated to obtain rigidity values under different air film gaps.
The utility model has the advantages that: the utility model discloses the device can effectively measure the rigidity value of air supporting under different air film clearances, simple structure, and easily operation provides the guidance for the manufacturing and designing of ultra-precision machine tool.
Drawings
The following further explains the embodiments of the present invention with reference to the drawings.
Fig. 1 is a schematic structural diagram of a device for measuring the stiffness of an air bearing pad of an ultra-precision machine tool of the utility model.
Detailed Description
With reference to fig. 1, the utility model discloses a rigidity testing arrangement of air supporting pad of ultra-precision machine tool includes base 1, stand 2, air supporting pad 3, clamp plate 4, S type pressure sensor 5, screw adapter 6, piezoelectric actuator 7, displacement sensor 8, coarse adjusting screw 9, upper cover 10, top cap 11, handle 12.
The base 1 is placed on the vibration isolation base plate and connected with the three upright posts 2 through screws, the upper ends of the upright posts 2 are connected with the upper cover 10, the cylindrical surface of the top cover 11 is connected with the rough adjusting screw 9 through screws, the handle 12 is fixed on the top cover 11, and the rough adjusting screw 9 is connected with the thread guide seat of the upper cover 10 through threads; the upper end of the piezoelectric actuator 7 is connected with a coarse adjustment screw rod 9, the other end of the piezoelectric actuator is connected with the S-shaped pressure sensor 4 through a threaded adapter 6, the piezoelectric actuator 7 is electrified at an opening on the side surface of the threaded guide seat of the upper cover 10, and the lower end of the S-shaped pressure sensor 5 is connected with the pressing plate 4.
Firstly, the thread feeding device is macroscopically adjusted through the handle 12, force is uniformly applied to the upper surface of the air floatation pad 3 through the pressing plate 4, the air floatation pad 3 is in close contact with the base 1, in the force application process, the force action line is ensured to be coaxial with the center lines of the rough adjustment screw rod 9 and the piezoelectric driver 7, and the displacement sensor 8 is perpendicular to the base 1.
The initial position S of the air bearing pad 3 is recorded by a displacement sensor 8 (capacitive displacement sensor, laser displacement sensor, etc.)0Recording the initial preload F applied to the air bearing pad 30When air is supplied to the air cushion 3, an initial gap, namely the thickness of the air film, is marked as h, is formed between the air cushion 3 and the base 1 under the action of the air buoyancy0And the current position S of the air bearing cushion 3 is recorded by the displacement sensor 81And the current value F of the dynamometer1；
At this time, the air film gap of the air bearing pad 3 is:
h0＝S1-S0
the corresponding bearing capacity of the air film gap is as follows:
the voltage of the piezoelectric actuator 7 is changed to drive the piezoelectric actuatorThe air-bearing cushion 3 is driven by the device 7 to move down by 1 μm, and the current value F is obtained by the dynamometer2At this time, the air film gap is expressed as:
h1＝h0-1
the corresponding bearing capacity of the air film gap is as follows:
the air supply quantity and the voltage of the piezoelectric driver 7 are repeatedly adjusted to obtain the bearing capacity of the air floating pad 3 under different air film gaps
And calculating to obtain rigidity values under different air film gaps.
In the previous description, numerous specific details were set forth in order to provide a thorough understanding of the invention. The foregoing description is only illustrative of the preferred embodiments of the invention, which can be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. All the contents that do not depart from the technical solution of the present invention, any simple modification, equivalent change and modification made to the above embodiments according to the technical substance of the present invention all still belong to the protection scope of the technical solution of the present invention.
Claims (10)
1. The utility model provides a device for measuring ultra-precision machine tool air supporting pad rigidity which characterized in that: including base, stand, air supporting pad, clamp plate, S type pressure sensor, screw thread adapter, piezoelectric actuator, displacement sensor, coarse adjusting screw rod, upper cover, top cap and handle, be equipped with displacement sensor, stand and air supporting pad on the base, set up the clamp plate on the air supporting pad, the clamp plate links to each other with S type pressure sensor 'S bottom, and piezoelectric actuator passes through screw thread adapter and links to each other with S type pressure sensor' S upper end, piezoelectric actuator links to each other with the upper cover, and the upper cover setting is in the stand top, and the coarse adjusting screw rod sets up on the upper cover, and the handle is fixed on the top cap, and handle control coarse adjusting screw rod removes.
2. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the displacement sensor measures the air film gap between the air floatation cushion and the base, and the S-shaped pressure sensor measures the numerical value of the bearing capacity of the air floatation cushion.
3. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the displacement sensitive direction of the displacement sensor is a vertical direction, and the resolution is 0.1 mu m.
4. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the force sensing direction of the S-shaped pressure sensor is a vertical direction, and the resolution is less than or equal to 1N.
5. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the upper cover is connected with the upright post through a screw, a thread guide seat with inner threads is arranged on the upper cover, the cylindrical surface of the top cover is connected with a coarse adjustment screw rod through a screw, and the coarse adjustment screw rod is connected with the thread guide seat of the upper cover through a thread; the coarse adjustment screw rod and the thread guide seat form a thread feeding device for macroscopic adjustment, and the coarse adjustment screw rod moves along the thread guide seat in the vertical direction through the handle.
6. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 5, wherein: the side of the thread guide seat is provided with an opening, and the piezoelectric driver is powered by an external power supply through the opening.
7. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the center lines of the coarse tuning screw and the piezoelectric actuator are coaxial.
8. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the displacement sensor is perpendicular to the base.
9. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the displacement sensor comprises a capacitance displacement sensor or a laser displacement sensor.
10. The device for measuring the stiffness of the air bearing pad of the ultra-precision machine tool as claimed in claim 1, wherein: the base is connected with three upright posts respectively positioned at three corners of the base through screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920693195.0U CN210139189U (en) | 2019-05-15 | 2019-05-15 | Device for measuring rigidity of air floatation pad of ultra-precision machine tool |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920693195.0U CN210139189U (en) | 2019-05-15 | 2019-05-15 | Device for measuring rigidity of air floatation pad of ultra-precision machine tool |
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| CN210139189U true CN210139189U (en) | 2020-03-13 |
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| CN201920693195.0U Expired - Fee Related CN210139189U (en) | 2019-05-15 | 2019-05-15 | Device for measuring rigidity of air floatation pad of ultra-precision machine tool |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109986367A (en) * | 2019-05-15 | 2019-07-09 | 南京艾提瑞精密机械有限公司 | It is a kind of for measuring the device of ultra-precision machine tool floating cushion rigidity |
-
2019
- 2019-05-15 CN CN201920693195.0U patent/CN210139189U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109986367A (en) * | 2019-05-15 | 2019-07-09 | 南京艾提瑞精密机械有限公司 | It is a kind of for measuring the device of ultra-precision machine tool floating cushion rigidity |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211222 Address after: 215300 room 301-h, 3rd floor, science and Technology Plaza building, Qianjin East Road, Kunshan Development Zone, Suzhou, Jiangsu Patentee after: Suzhou zhirun Precision Technology Co.,Ltd. Address before: 211316 1 1 of ancient Tan Road, Gaochun Economic Development Zone, Nanjing, Jiangsu. Patentee before: NANJING AITIRUI PRECISION MACHINERY Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200313 |