CN206339380U - A kind of radial rigidity measurement apparatus of the Aerostatic Spindle - Google Patents
A kind of radial rigidity measurement apparatus of the Aerostatic Spindle Download PDFInfo
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- CN206339380U CN206339380U CN201720017444.5U CN201720017444U CN206339380U CN 206339380 U CN206339380 U CN 206339380U CN 201720017444 U CN201720017444 U CN 201720017444U CN 206339380 U CN206339380 U CN 206339380U
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- aerostatic spindle
- displacement transducer
- aerostatic
- spindle
- loading device
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- 238000005259 measurement Methods 0.000 title claims abstract description 36
- 238000006073 displacement reaction Methods 0.000 claims abstract description 62
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 3
- 239000000725 suspension Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 description 5
- 238000003754 machining Methods 0.000 description 4
- 230000003068 static effect Effects 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000002706 hydrostatic effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
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- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The utility model provides a kind of radial rigidity measurement apparatus of the Aerostatic Spindle, and equal-sized radial direction bearing capacity is uniformly applied to the upper and lower ends of the Aerostatic Spindle rotor by force loading device A and force loading device B by described device；The radial direction bearing capacity for the upper and lower ends for being applied to the Aerostatic Spindle rotor is read by force snesor A and force snesor B again；The Aerostatic Spindle air film radial clearance variable quantity is read by displacement transducer A and displacement transducer B afterwards, the radial-deformation of the Aerostatic Spindle is read by displacement transducer C；It is the ratio between radial direction air film gap variable quantity actual caused by the variable quantity for the bearing capacity being applied on the Aerostatic Spindle and the variable quantity of bearing capacity to calculate the Aerostatic Spindle rigidity.The device can realize efficiently separating for the Aerostatic Spindle radial deformation error in measurement process, so as to improve the Aerostatic Spindle radial rigidity measurement accuracy.
Description
Technical field
The utility model belongs to Technology of Precision Measurement field, and in particular to a kind of radial rigidity measurement of the Aerostatic Spindle
Device.
Background technology
Ultraprecision Machining is built as manufacturing process extremely crucial in sophisticated technology product to military technology and economy
If all having particularly important application value.Ultra precision cutting lathe as process unit most crucial in Ultra-precision Turning, its
The performance of supporting member the Aerostatic Spindle directly restricts the lifting of Ultra-precision machining precision.The Aerostatic Spindle has essence
Degree is high, without abrasion and the advantages of long lifespan, is widely used in ultra precision cutting lathe.It is fast with Ultraprecision Machining
Speed development, to the rigidity requirement of the Aerostatic Spindle also more and more higher, wherein axial rigidity characteristic determines that ultra precision cutting adds
The anti-vibration characteristic of work lathe, so as to directly affect the surface figure accuracy of processing workpiece.Therefore the Aerostatic Spindle is carried out axially firm
Degree measurement is for promoting Ultraprecision Machining fast development tool significance.
The definition of the Aerostatic Spindle rigidity is the variable quantity and bearing capacity of the bearing capacity being applied on the Aerostatic Spindle
Variable quantity caused by air film gap variable quantity between ratio.According to bearing capacity applying mode and the difference of position, air
The air film variation pattern of hydrostatic spindle and position are also different.Accordingly, the rigidity of the Aerostatic Spindle can be further refined as axial direction
Rigidity and radial rigidity, wherein radial rigidity are used to characterize the difficulty or ease journey that bearing capacity makes air film produce radially uniform gap change
Degree.The Aerostatic Spindle radial rigidity test device is mainly made up of force loading device, force snesor and displacement transducer.Wherein
Force loading device is used for the radial direction bearing capacity for changing the Aerostatic Spindle；Force snesor is used for the change for measuring radial direction bearing capacity
Amount；Displacement transducer is used for the variable quantity for measuring radial direction air film gap.
In the measurement process of the Aerostatic Spindle radial rigidity, the increase of axial bearing capacity will cause static air pressure master
Axle produces radial deformation, and this radial deformation will increase the radial direction air film gap variable quantity that displacement sensor is obtained, from
And cause larger measurement error.Therefore need effectively to divide the radial deformation of the Aerostatic Spindle in measurement process
From so that it is guaranteed that the radial rigidity value of measurement is accurately and reliably.
Chinese patent literature storehouse is disclosed《A kind of kinetic measurement method of bearing radial rigidity and axial rigidity》（Application
Number：201210354382.9）、《The measuring method and device of rigidity of special-shape bearing》（Application number：200910065393.3）、《Axle
Hold device for testing stiffness》（Application number：200810137157.3）Etc. patent, the application pair for the apparatus and method that above-mentioned patent is related to
As for contact bearing, being not particularly suited for the stiffness measurement of the Aerostatic Spindle.Newest surveys on the Aerostatic Spindle rigidity
The patent of examination technology has disclosed in Chinese patent literature storehouse《The air bearing stiffness and bearing capacity examination of a kind of three coordinate measuring machine
Device》（Application number：201420532122.0）, the patent describe the survey of a kind of the Aerostatic Spindle axial rigidity and bearing capacity
Device is measured, but the device cannot be used for the measurement of radial rigidity, can not realize efficiently separating for measurement error.
Currently, a kind of radial rigidity measurement apparatus of the Aerostatic Spindle is needed badly, the device can use error separate side
Method is removed in measurement process due to radial measurement error caused by the radial deformation of the Aerostatic Spindle.
The content of the invention
Technical problem to be solved in the utility model is to provide a kind of radial rigidity measurement apparatus of the Aerostatic Spindle.
The radial rigidity measurement apparatus of the Aerostatic Spindle of the present utility model, is characterized in, described radial rigidity is surveyed
Measuring device includes support, force loading device B, force snesor B, the Aerostatic Spindle, force loading device A, force snesor A, displacement
Sensors A, displacement transducer C, displacement transducer B；
Its annexation is：Described support is placed on vibrating isolation foundation；The Aerostatic Spindle is fixed on support vertically,
The Aerostatic Spindle rotor suspension of the Aerostatic Spindle is in the Aerostatic Spindle shell, the Aerostatic Spindle rotor and air
Gap between hydrostatic spindle shell is the Aerostatic Spindle air film of compressed air formation, the bottom of the Aerostatic Spindle shell
It is fixed on support；Described force snesor B is fixed on after the force loading device B of horizontal positioned front end, force loading device B
End is fixed on support, and force snesor B and force loading device B are fixedly mounted on the bottom of the Aerostatic Spindle, static air pressure master
Top correspondence mounting structure the identical force snesor A and force loading device A of axle；Displacement transducer is installed on described support
A, displacement transducer C and displacement transducer B, displacement transducer A measure the radial clearance variable quantity △ of the Aerostatic Spindle air film
HA, the radial clearance variable quantity △ H of displacement transducer B measurement the Aerostatic Spindle air filmsB, displacement transducer C measurement static air pressures
The deflection △ H of main shaftC。
Described displacement transducer A, displacement transducer C and displacement transducer B displacement sensitive direction are horizontal direction, point
Resolution is 0.1 μm.
The drift angle of described force loading device B and force loading device A center line and horizontal direction is less than or equal to 0.5 °.
Described force snesor B and force snesor A power sensitive direction are horizontal direction, and resolution ratio is less than or equal to 1N.
The radial rigidity measurement apparatus of the Aerostatic Spindle of the present utility model passes through force loading device A and power respectively first
Equal-sized radial direction bearing capacity is uniformly applied to the upper and lower ends of the Aerostatic Spindle rotor by loading device B；Then, respectively
The radial direction bearing capacity for the upper and lower ends for being applied to the Aerostatic Spindle rotor is read by force snesor A and force snesor B；So
Afterwards, the radial clearance variable quantity △ H of the Aerostatic Spindle air film are read by displacement transducer A and displacement transducer B respectivelyAWith
△HB, the deflection △ H of the Aerostatic Spindle are read by displacement transducer CC.Due to being passed in identical power loading environment bottom offset
Sensor A and displacement transducer B reading should be identical, therefore, and actual radial direction air film gap variable quantity is displacement transducer A or position
Displacement sensor B reading subtracts displacement transducer C reading.Finally, the Aerostatic Spindle rigidity is calculated quiet to be applied to air
Between actual radial direction air film gap variable quantity caused by the variable quantity of bearing capacity and the variable quantity of bearing capacity on pressure main shaft
Ratio.
The radial rigidity measurement apparatus of the Aerostatic Spindle of the present utility model can realize static air pressure master in measurement process
Axial and radial distortion inaccuracy is efficiently separated, so as to improve the Aerostatic Spindle radial rigidity measurement accuracy.
Brief description of the drawings
Fig. 1 is the structural representation of the radial rigidity measurement apparatus of the Aerostatic Spindle of the present utility model；
In figure, the force loading device A 6. of 1. support, 2. force loading device B, 3. force snesor B, 4. the Aerostatic Spindles 5.
The displacement transducer B of 7. displacement transducer A of force snesor A, 8. displacement transducer C 9..
Embodiment
The utility model is described in more detail with reference to the accompanying drawings and examples.
Loaded as shown in figure 1, the radial rigidity measurement apparatus of the Aerostatic Spindle of the present utility model includes support 1, power
Device B2, force snesor B3, the Aerostatic Spindle 4, force loading device A5, force snesor A6, displacement transducer A7, displacement sensing
Device C8, displacement transducer B9；
Its annexation is：Described support 1 is placed on vibrating isolation foundation；The Aerostatic Spindle 4 is fixed on support 1 vertically
On, the Aerostatic Spindle rotor suspension of the Aerostatic Spindle 4 in the Aerostatic Spindle shell, the Aerostatic Spindle rotor and
Gap between the Aerostatic Spindle shell is the Aerostatic Spindle air film of compressed air formation, the Aerostatic Spindle shell
Bottom is fixed on support 1；Described force snesor B3 is fixed on the force loading device B2 of horizontal positioned front end, power loading dress
The rear end for putting B2 is fixed on support 1, and force snesor B3 and force loading device B2 are fixedly mounted under the Aerostatic Spindle 4
Portion, top correspondence mounting structure the identical force snesor A6 and force loading device A5 of the Aerostatic Spindle 4；Described support 1
On displacement transducer A7, displacement transducer C8 and displacement transducer B9 be installed, displacement transducer A7 measurement the Aerostatic Spindles
The radial clearance variable quantity △ H of air filmA, the radial clearance variable quantity △ H of displacement transducer B9 measurement the Aerostatic Spindle air filmsB,
Displacement transducer C8 measures the deflection △ H of the Aerostatic Spindle 3C。
Described displacement transducer A7, displacement transducer C8 and displacement transducer B9 displacement sensitive direction are level side
To resolution ratio is 0.1 μm.
The drift angle of described force loading device B2 and force loading device A5 center line and horizontal direction is less than or equal to 0.5 °.
Described force snesor B3 and force snesor A6 power sensitive direction are horizontal direction, and resolution ratio is less than or equal to 1N.
During measurement, the Aerostatic Spindle to be measured is placed on support 1, force loading device A5 and force loading device is used
B2 uniformly applies equal-sized radial direction bearing capacity F in the upper and lower ends of the Aerostatic Spindle rotor respectivelyAAnd FB, exerting a force
Cheng Zhong, it is ensured that the center line of line of force and force loading device A5 and force loading device B2 is coaxial, center line and horizontal direction
Drift angle is less than or equal to 0.5 °；Bearing capacity F is read by force snesor A6 and force snesor B3 respectively againAAnd FB, pass through displacement sensing
Device A7 and displacement transducer B9 reads the radial clearance variable quantity △ H of the Aerostatic Spindle air filmAWith △ HB, pass through displacement sensing
Device C8 reads the deflection △ H of the Aerostatic SpindleC；
Should be identical in the reading of identical power loading environment bottom offset sensors A and displacement transducer B, i.e.,：
(1)
Actual radial direction air film gap variable quantity subtracts displacement sensing for displacement transducer A or displacement transducer B reading
Device C reading, i.e.,：
(2)
Actual the Aerostatic Spindle radial rigidity is the variable quantity for the bearing capacity being applied on the Aerostatic Spindle and held
The ratio between radial direction air film gap variable quantity actual caused by the variable quantity of power is carried, i.e.,：
(3)
In formula（3）In, △ F be force snesor A and force snesor B radial direction bearing capacity change amount sums, i.e.,：
(4)。
Claims (4)
1. a kind of radial rigidity measurement apparatus of the Aerostatic Spindle, it is characterised in that described radial rigidity measurement apparatus bag
Include support（1）, force loading device B（2）, force snesor B（3）, the Aerostatic Spindle（4）, force loading device A（5）, force snesor
A（6）, displacement transducer A（7）, displacement transducer C（8）, displacement transducer B（9）；
Its annexation is：Described support（1）It is placed on vibrating isolation foundation；The Aerostatic Spindle（4）It is fixed on support vertically
（1）On, the Aerostatic Spindle（4）The Aerostatic Spindle rotor suspension in the Aerostatic Spindle shell, the Aerostatic Spindle
Gap between rotor and the Aerostatic Spindle shell is the Aerostatic Spindle air film of compressed air formation, the Aerostatic Spindle
The bottom of shell is fixed on support（1）On；Described force snesor B（3）It is fixed on the force loading device B of horizontal positioned（2）'s
Front end, force loading device B（2）Rear end be fixed on support（1）On, force snesor B（3）With force loading device B（2）It is fixedly mounted
In the Aerostatic Spindle（4）Bottom, the Aerostatic Spindle（4）Top correspondence mounting structure identical force snesor A（6）With
Force loading device A（5）；Described support（1）On displacement transducer A is installed（7）, displacement transducer C（8）And displacement transducer
B（9）, displacement transducer A（7）Radial clearance variable quantity △ H for measuring the Aerostatic Spindle air filmA, displacement transducer B
（9）Radial clearance variable quantity △ H for measuring the Aerostatic Spindle air filmB, displacement transducer C（8）It is quiet for measuring air
Press main shaft（4）Deflection △ HC。
2. a kind of radial rigidity measurement apparatus of the Aerostatic Spindle according to claim 1, it is characterised in that：Described
Displacement transducer A（7）, displacement transducer C（8）With displacement transducer B（9）Displacement sensitive direction be horizontal direction, resolution ratio
For 0.1 μm.
3. a kind of radial rigidity measurement apparatus of the Aerostatic Spindle according to claim 1, it is characterised in that：Described
Force loading device B（2）With force loading device A（5）Center line and horizontal direction drift angle be less than or equal to 0.5 °.
4. a kind of radial rigidity measurement apparatus of the Aerostatic Spindle according to claim 1, it is characterised in that：Described
Force snesor B（3）With force snesor A（6）Power sensitive direction be horizontal direction, resolution ratio be less than or equal to 1N.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720017444.5U CN206339380U (en) | 2017-01-09 | 2017-01-09 | A kind of radial rigidity measurement apparatus of the Aerostatic Spindle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720017444.5U CN206339380U (en) | 2017-01-09 | 2017-01-09 | A kind of radial rigidity measurement apparatus of the Aerostatic Spindle |
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| Publication Number | Publication Date |
|---|---|
| CN206339380U true CN206339380U (en) | 2017-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720017444.5U Expired - Fee Related CN206339380U (en) | 2017-01-09 | 2017-01-09 | A kind of radial rigidity measurement apparatus of the Aerostatic Spindle |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769047A (en) * | 2017-01-09 | 2017-05-31 | 中国工程物理研究院机械制造工艺研究所 | A kind of radial rigidity measurement apparatus of the Aerostatic Spindle |
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2017
- 2017-01-09 CN CN201720017444.5U patent/CN206339380U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106769047A (en) * | 2017-01-09 | 2017-05-31 | 中国工程物理研究院机械制造工艺研究所 | A kind of radial rigidity measurement apparatus of the Aerostatic Spindle |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170718 |
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| CF01 | Termination of patent right due to non-payment of annual fee |