CN210073762U - Lining grounding device and reaction chamber - Google Patents
Lining grounding device and reaction chamber Download PDFInfo
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- CN210073762U CN210073762U CN201921169003.2U CN201921169003U CN210073762U CN 210073762 U CN210073762 U CN 210073762U CN 201921169003 U CN201921169003 U CN 201921169003U CN 210073762 U CN210073762 U CN 210073762U
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Abstract
The utility model provides a lining grounding device, which is used for electrically connecting the lining and a base; the elastic grounding piece comprises a connecting part, an extending part and a bending part; connecting portion are used for being connected with the inside lining, and the portion of extending flatly extends along the axial of inside lining, and the kink is for the axial slope of inside lining and flatly extends to the direction of base, and the kink is used for producing elastic deformation and keeps laminating in order to keep the electric conductance with the target surface between messenger's inside lining and the base. The utility model provides a lining earthing device and reaction cavity can improve the stability of lining ground connection.
Description
Technical Field
The utility model relates to a semiconductor equipment technical field specifically, relates to a inside lining earthing device and reaction cavity.
Background
In the semiconductor etching process, a large number of parameters of the plasma reaction chamber must be strictly controlled to maintain a high-quality etching result, and the internal structure of the reaction chamber plays a decisive role in the process performance and the process etching result, wherein the internal structure of the reaction chamber influences the state of the radio frequency loop, and the state of the radio frequency loop plays a decisive role in the stability of the plasma.
At present, an etching machine generally has an upper electrode and a lower electrode, wherein the upper electrode is mainly composed of a coil, a radio frequency generated by the upper electrode is mainly used for exciting a plasma to generate, the lower electrode is composed of a planar polar plate, the radio frequency generated by the lower electrode is mainly used for attracting the plasma to bombard a wafer, and the upper end and the lower end of a liner arranged in a reaction chamber are generally grounded, so that the radio frequency entering the reaction chamber forms a radio frequency loop through the liner.
However, because the lower end of the liner is far away from the grounding point, a grounding part needs to be arranged between the lower end of the liner and the grounding point, the grounding part is usually in a bent shape so as to be capable of adapting to the condition that the liner moves up and down in the working process, and usually, a plurality of places on the bent grounding part have arcs, when radio-frequency current flows through the arcs of the grounding part, vortex current can be generated at the arcs, so that an induced magnetic field is generated at the places, which causes instability of a radio-frequency loop, and because the deformation of the arcs is inconsistent, the symmetry of the distribution of the radio-frequency loop can be affected, which also causes instability of the radio-frequency loop, thereby causing instability of grounding of the liner.
SUMMERY OF THE UTILITY MODEL
The utility model discloses aim at solving one of the technical problem that exists among the prior art at least, provide a inside lining earthing device and reaction cavity, its stability that can improve inside lining ground connection.
In order to achieve the purpose of the utility model, the lining grounding device is used for electrically conducting the lining and the base; the elastic grounding piece comprises a connecting part, an extending part and a bending part; the connecting portion are used for being connected with the inside lining, the extension portion is along the axial of inside lining is extended flatly, the kink is for the axial slope of inside lining and to the direction of base is extended flatly, the kink is used for producing elastic deformation and keeps laminating with the target face, makes the inside lining with keep the electric conductance between the base.
Preferably, the lining ground device further comprises an intermediate ground piece, the intermediate ground piece is in electrical contact with the pedestal, and the target surface is arranged on the intermediate ground piece; the bent portion is in electrical contact with the intermediate ground member when elastically deformed.
Preferably, a target surface of the intermediate ground member in electrical contact with the bent portion is an inclined surface inclined with respect to an axial direction of the liner, and an inclination angle of the bent portion with respect to the axial direction of the liner is set to be: and when the bent part generates elastic deformation, the surface of the bent part, which is in contact with the target surface, is completely attached to the target surface.
Preferably, when the bent portion is not elastically deformed, an inclination angle of the bent portion with respect to the axial direction of the liner is greater than an inclination angle of the target surface with respect to the axial direction of the liner, and a sum of the inclination angle of the bent portion with respect to the axial direction of the liner and the inclination angle of the target surface with respect to the axial direction of the liner is greater than 180 °.
Preferably, the contact surface between the intermediate grounding member and the base is a flat surface.
Preferably, the contact surface between the connecting part and the lining is a flat surface.
Preferably, each of the contact surfaces is covered with a conductive layer.
Preferably, the surfaces of the intermediate ground and the resilient ground exposed to the chamber environment are covered with an anti-corrosion layer.
Preferably, the target surface is disposed on the base, the target surface is a horizontal surface on the base, or the target surface is an inclined surface on the base, the inclined surface being inclined with respect to an axial direction of the liner, and an inclination angle of the bent portion with respect to the axial direction of the liner is set as: and when the bent part generates elastic deformation, the surface of the bent part, which is in contact with the target surface, is completely attached to the target surface.
For realizing the utility model discloses a purpose still provides a reaction cavity, be in including cavity and setting base, inside lining and inside lining earthing device in the cavity, the upper end of inside lining is passed through cavity ground connection, inside lining earthing device adopts if the utility model discloses a inside lining earthing device, inside lining earthing device will the lower extreme of inside lining with the base electric conductance is led to, and passes through base ground connection.
The utility model discloses following beneficial effect has:
the lining grounding device provided by the utility model is connected with the lining by the connecting part of the elastic grounding piece, the bending part generates elastic deformation to keep fit with the target surface, the extension part is connected with the connecting part and the bending part to lead the current in the lining to the target surface, thereby realizing the electric conduction between the lining and the base, and the bending part of the elastic grounding piece inclines relative to the axial direction of the lining and extends flatly towards the direction of the base, the extension part extends flatly along the axial direction of the lining, so that the bending part and the extending part form an angle-shaped bending without forming an arc shape, and the extending part and the bending part extend smoothly without forming an arc shape, so that no vortex current is formed in the process of flowing current from the lining to the base along the elastic grounding piece, thereby improving the stability of electric conduction between the lining and the base and further improving the stability of grounding of the lining.
The utility model provides a reaction chamber, including cavity and base, inside lining and the inside lining earthing device of setting in the cavity, cavity ground connection is passed through to the upper end of inside lining, and inside lining earthing device adopts if the utility model provides a inside lining earthing device, inside lining earthing device communicate the lower extreme and the base electric conductance of inside lining, and pass through base ground connection. The utility model provides a reaction cavity, with the help of the utility model provides a inside lining earthing device can improve the stability of inside lining ground connection.
Drawings
Fig. 1 is a schematic structural diagram of a lining grounding device according to a first embodiment of the present invention;
fig. 2 is a schematic structural diagram of a lining grounding device according to a first embodiment of the present invention;
fig. 3 is a schematic structural diagram of a lining grounding device according to a first embodiment of the present invention;
fig. 4 is a schematic structural diagram of a lining grounding device according to a second embodiment of the present invention;
fig. 5 is a schematic structural diagram of a lining grounding device according to a second embodiment of the present invention;
fig. 6 is a schematic structural diagram of a lining grounding device according to a second embodiment of the present invention;
description of reference numerals:
11-a connecting portion; 12-a bending part; 13-an extension; 2-lining; 3-intermediate ground; 4-a base; 5-a cavity; 6-target surface.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the lining grounding device and the reaction chamber provided by the present invention are described in detail below with reference to the accompanying drawings.
As shown in fig. 1-6, the present embodiment provides a liner grounding device for electrically connecting a liner 2 and a base 4, comprising an elastic grounding member, wherein the elastic grounding member comprises a connecting portion 11, an extending portion 13 and a bent portion 12, the connecting portion 11 is used for connecting with the liner 2, the extending portion 13 extends along an axial direction of the liner 2 smoothly, the bent portion 12 is inclined relative to the axial direction of the liner 2 and extends smoothly in a direction of the base 4, and the bent portion 12 is used for generating elastic deformation to maintain fit with a target surface 6, so as to maintain electrical conduction between the liner 2 and the base 4.
The liner grounding device provided by the embodiment is connected with the liner 2 by virtue of the connecting part 11 of the elastic grounding piece, the bending part 12 generates elastic deformation to be attached to the target surface 6, the extending part 13 is connected with the connecting part 11 and the bending part 12 to lead the current in the liner 2 into the target surface 6, so as to realize the electric conduction between the liner 2 and the base 4, moreover, the bending part 12 of the elastic grounding piece inclines relative to the axial direction of the liner 2 and flatly extends towards the direction of the base 4, the extending part 13 flatly extends along the axial direction of the liner 2, so that an included angle shaped bending is formed between the bending part 12 and the extending part 13, an arc shape cannot be formed, the extending part 13 and the bending part 12 both flatly extend and an arc shape cannot be formed, so that in the process that the current flows from the liner 2 to the base 4 along the elastic grounding piece, no vortex current is formed, and the stability of the electric conduction between the, thereby improving the stability of grounding of the liner 2.
In this embodiment, the liner 2 and the susceptor 4 are both located in the cavity 5 of the reaction chamber, wherein the susceptor 4 is located below the liner 2 and is grounded through the cavity 5, the upper end of the liner 2 is grounded through the cavity 5, and the lower end is electrically conducted with the susceptor 4 through the liner grounding device, thereby achieving grounding of the lower end of the liner 2. Specifically, a through hole is formed in the wall of the cavity 5, and the upper end of the liner 2 penetrates through the through hole to achieve grounding. Because the sealing ring for sealing the through hole is arranged in the through hole, when the reaction chamber is subjected to a process and the cavity 5 needs to be vacuumized, the sealing ring can deform, so that the lining 2 descends, and when the reaction chamber does not vacuumize the cavity 5, the sealing ring is restored, and the lining 2 ascends. Therefore, in the liner grounding device connected with the lower end of the liner 2, a bending part 12 capable of generating elastic deformation is required, the bending part 12 is in contact with the target surface 6 when the liner 2 is not lowered, so that the lower end of the liner 2 is electrically conducted with the base 4, when the liner 2 is lowered, the bending part 12 generates elastic deformation so as to be attached to the target surface 6, so that the liner 2 is electrically conducted with the base 4, and the damage of the liner grounding device caused by the liner 2 pressing the liner grounding device downwards in the process of lowering the liner 2 is avoided, when the liner 2 is raised, the elastic deformation of the bending part 12 is reduced so as to keep the contact with the base 4, and the problem that the lower end of the liner 2 cannot be grounded after being raised is avoided.
In the present embodiment, the elastic ground is made of an elastic metal, but the present invention is not limited thereto, and any conductor having elasticity may be used.
In this embodiment, all parts of the elastic grounding member 1 are planes or bending angles, specifically, the connecting portion 11 of the elastic grounding member extends flatly along the radial direction of the liner 2, the extending portion 13 extends flatly along the axial direction of the liner, the bending portion 12 inclines relative to the axial direction of the liner 2 and extends flatly toward the direction of the base 4, a right angle is formed between the connecting portion 11 and the extending portion 13, and a bending angle is formed between the bending portion 12 and the extending portion 13, which is an included angle bending, wherein the bending portion 12 of the elastic grounding member forms an included angle bending before and after the elastic deformation and does not have an arc state, so as to avoid the current from forming a vortex current and generating an induced magnetic field during the current flows through the elastic grounding member due to the vortex current caused by the arc, thereby improving the stability of the ground of the liner 2.
In this embodiment, the elastic grounding members are disposed in a plurality of positions around the circumference of the liner 2, so that the lower end of the liner 2 has a plurality of grounding points, thereby improving the grounding effect of the liner 2.
As shown in fig. 1-3, in the first embodiment of the present invention, the lining ground device further includes an intermediate ground member 3, the intermediate ground member 3 is electrically contacted with the base 4, the target surface 6 is disposed on the intermediate ground member 3, and the bending portion 12 is electrically contacted with the intermediate ground member 3 when generating elastic deformation.
Specifically, connecting portion 11 and inside lining 2 of elastic grounding spare are connected, kink 12 is with middle ground connection spare 3 electrical contact when not producing type elastic deformation, laminate with the target surface 6 of middle ground connection spare 3 when producing elastic deformation, middle ground connection spare 3 and base 4 electrical contact, promptly, inside lining 2 passes through elastic grounding spare and middle ground connection spare 3 and base 4 electrical conductance to realize ground connection, the electric current in inside lining 2 loops through elastic grounding spare and middle ground connection spare 3 and flows to base 4. However, the manner in which the liner 2 is electrically conducted with the base 4 is not limited.
As shown in fig. 4-6, in the second embodiment of the present invention, the liner grounding device does not include the intermediate grounding member 3, i.e., the liner 2 is directly electrically connected to the base 4 through the elastic grounding member, in the second embodiment, as shown in fig. 4 and 5, the connecting portion 11 of the elastic grounding member is connected to the liner 2, the bending portion 12 is electrically contacted to the base 4, as shown in fig. 6, the bending portion 12 of the elastic grounding member is connected to the liner 2, and the connecting portion 11 is electrically contacted to the base 4.
In the first embodiment of the present invention, the target surface 6 of the intermediate ground member 3 in electrical contact with the bent portion 12 is an inclined surface inclined relative to the axial direction of the inner liner 2, and the inclination angle of the bent portion 12 relative to the axial direction of the inner liner 2 is set as: when the bent portion 12 is elastically deformed, the bent portion 12 completely abuts against the target surface 6.
Specifically, when the bent portion 12 is not elastically deformed, the bent portion 12 is electrically contacted with the target surface 6 of the intermediate ground member 3, and when the liner 2 descends and the bent portion 12 is elastically deformed, the bent portion 12 slides along the target surface 6 and elastically deforms. Set up target surface 6 with intermediate ground spare 3 and the electrical contact of kink 12 to the inclined plane of axial slope for inside lining 2, this compares with the axial vertically plane for inside lining 2, and the decline and the elastic deformation of kink 12 can be more smooth and easy, avoids the damage of kink 12, or avoids the unable elastic deformation in surface of kink 12 and the electrical contact of target surface 6 to laminate completely with target surface 6 to improve the stability of inside lining 2 ground connection. Moreover, when the bent portion 12 is elastically deformed, the bent portion 12 is completely attached to the target surface 6, so that the contact area between the elastic grounding member and the intermediate grounding member 3 can be increased, the grounding stability of the elastic grounding member is improved, and the grounding stability of the lining grounding device is further improved.
In the first embodiment of the present invention, fig. 1 and 2 compare with fig. 3, the inclination direction of the bent portion 12 relative to the axial direction of the liner 2 is opposite, and the inclination direction of the target surface 6 of the intermediate ground piece 3 relative to the axial direction of the liner 2 is also opposite, so that the bent portion 12 and the target surface 6 can be completely attached, wherein in fig. 1 and 2, the bent portion 12 is inclined relative to the axial direction of the liner 2 toward the direction close to the cavity 5, and in fig. 3, the bent portion 12 is inclined relative to the axial direction of the liner 2 toward the direction away from the cavity 5.
In the first embodiment of the present invention, when the bending portion 12 is not elastically deformed, the inclination angle of the bending portion 12 relative to the axial direction of the liner 2 is greater than the inclination angle of the target surface 6 relative to the axial direction of the liner 2, and the sum of the inclination angle of the bending portion 12 relative to the axial direction of the liner 2 and the inclination angle of the target surface 6 relative to the axial direction of the liner 2 is greater than 180 °.
Specifically, in the process of lowering the liner 2 and elastically deforming the bent portion 12, the inclination angle of the bent portion 12 with respect to the axial direction of the liner 2 gradually decreases, and finally the inclination angle of the bent portion 12 with respect to the target surface 6 completely fits the target surface 6, and when the bent portion 12 completely fits the target surface 6, the sum of the inclination angle of the bent portion 12 with respect to the axial direction of the liner 2 and the inclination angle of the target surface 6 with respect to the axial direction of the liner 2 is equal to 180 °, so that when the liner 2 is not lowered, the sum of the inclination angle of the bent portion 12 with respect to the axial direction of the liner 2 and the inclination angle of the target surface 6 with respect to the axial direction of the liner 2 is greater than 180 °, and when the bent portion 12 is not elastically deformed, the inclination angle of the.
The utility model discloses a in the first embodiment, the contact surface between intermediate ground spare 3 and base 4 is for leveling the surface, namely, be surface contact between intermediate ground spare 3 and the base 4, form the arc with the surface between intermediate ground spare 3 and base 4, thereby avoid forming vortex current, and increase the area of electrical contact between intermediate ground spare 3 and the base 4, thereby improve the effect and the stability of intermediate ground spare 3 and base 4 electric conductance, improve the ground effect and the stability of intermediate ground spare 3, and then improve the ground effect and the stability of inside lining 2.
The utility model discloses a in first embodiment and second embodiment, the contact surface between connecting portion 11 and inside lining 2 is the smooth surface, namely, be surface contact between connecting portion 11 and the inside lining 2 of elasticity ground connection spare, in order to avoid forming the arc between connecting portion 11 and inside lining 2, thereby avoid forming vortex current, and increase the area of electrical contact between inside lining 2 and the elasticity ground connection spare, thereby improve inside lining 2 and 4 electrically conductive effects and stability of base, improve the ground connection effect and the stability of inside lining 2, and then the ground connection effect and the stability of inside lining 2.
The utility model discloses a first embodiment and second embodiment, it has the conducting layer to cover on every contact surface to improve the electric conductive property between each part, thereby improve inside lining earthing device's electric conductive property and electrically conductive stability.
Specifically, in the first embodiment of the present invention, nickel plating is performed on the contact surface between the connection portion 11 of the elastic grounding member and the liner 2, the contact surface between the bent portion 12 of the elastic grounding member and the target surface 6 of the intermediate grounding member 3, and the contact surface between the intermediate grounding member 3 and the base 4. In the second embodiment of the present invention, nickel plating is performed on both the contact surface between the elastic grounding member and the liner 2 and the contact surface between the elastic grounding member and the base 4. However, the form of the conductive layer is not limited to the nickel plating treatment.
The utility model discloses a in the first embodiment, the surface that exposes in the cavity environment of middle ground connection piece 3 and elasticity ground connection piece covers has the anticorrosion coating, improves the corrosion resistance of middle ground connection piece 3 and elasticity ground connection piece to increase the life of middle ground connection piece 3 and elasticity ground connection piece, and improve inside lining earthing device's electrically conductive stability.
Specifically, in the first embodiment of the present invention, the surfaces of the intermediate ground member 3 and the elastic ground member exposed to the chamber atmosphere are made of hard anodized metal. In a second embodiment of the present invention, the surface of the resilient grounding member exposed to the chamber environment is comprised of a hard anodized metal. However, the form of the corrosion resistant layer is not limited to being composed of a hard anodized metal.
In the second embodiment of the present invention, the target surface 6 is provided on the base 4, the target surface 6 is a horizontal surface on the base 4, or the target surface 6 is an inclined surface on the base 4 inclined relative to the axial direction of the lining 2, and the inclination angle of the bent portion 12 relative to the axial direction of the lining 2 is set as: when the bent portion 12 is elastically deformed, the surface of the bent portion 12 in contact with the target surface 6 completely abuts against the target surface 6.
Specifically, in the second embodiment of the present invention, since the lining grounding device does not include the intermediate grounding member 3, the lining 2 is directly electrically conducted to the base 4 through the elastic grounding member, and therefore, the target surface 6 can be disposed on the base 4, so that the bending portion 12 is directly contacted or attached to the target surface 6, thereby achieving the electrical conduction between the lining 2 and the base 4.
The embodiment further provides a reaction chamber, which includes a cavity 5, and a pedestal 4, a liner 2 and a liner grounding device disposed in the cavity 5, wherein the upper end of the liner 2 is grounded through the cavity 5, the liner grounding device adopts the liner grounding device provided in the first embodiment or the second embodiment, and the liner grounding device electrically connects the lower end of the liner 2 to the pedestal 4 and is grounded through the pedestal 4.
The reaction chamber provided by this embodiment can improve the grounding stability of the liner 2 by using the liner grounding device provided by this embodiment.
In summary, the liner grounding device and the reaction chamber provided in the present embodiment can improve the grounding stability of the liner 2.
It is to be understood that the above embodiments are merely exemplary embodiments that have been employed to illustrate the principles of the present invention, and that the present invention is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A liner grounding device for electrically connecting a liner to a base; the elastic grounding piece is characterized by comprising an elastic grounding piece, wherein the elastic grounding piece comprises a connecting part, an extending part and a bending part; the connecting portion are used for being connected with the inside lining, the extension portion is along the axial of inside lining is extended flatly, the kink is for the axial slope of inside lining and to the direction of base is extended flatly, the kink is used for producing elastic deformation and keeps laminating with the target face, makes the inside lining with keep the electric conductance between the base.
2. The liner grounding device of claim 1, further comprising an intermediate grounding member in electrical contact with the pedestal, the target surface being disposed on the intermediate grounding member; the bent portion is in electrical contact with the intermediate ground member when elastically deformed.
3. The lining grounding device of claim 2, wherein a target surface of the intermediate grounding member in electrical contact with the bent portion is a slope inclined with respect to an axial direction of the lining, and an inclination angle of the bent portion with respect to the axial direction of the lining is set to: and when the bent part generates elastic deformation, the surface of the bent part, which is in contact with the target surface, is completely attached to the target surface.
4. The lining grounding device of claim 3, wherein the inclination angle of the bent portion with respect to the axial direction of the lining is greater than the inclination angle of the target surface with respect to the axial direction of the lining when the bent portion is not elastically deformed, and the sum of the inclination angle of the bent portion with respect to the axial direction of the lining and the inclination angle of the target surface with respect to the axial direction of the lining is greater than 180 °.
5. The liner grounding device of claim 2, wherein the contact surface between the intermediate grounding member and the pedestal is a flat surface.
6. The liner grounding device of claim 1, wherein the interface between the coupling portion and the liner is a flat surface.
7. The liner grounding device of claim 5 or 6, wherein each of the contact surfaces is covered with a conductive layer.
8. The liner grounding arrangement of claim 5, wherein surfaces of the intermediate ground and the resilient ground exposed to the chamber environment are covered with an anti-corrosion layer.
9. The liner grounding device of claim 1, wherein the target surface is disposed on the base, the target surface is a horizontal surface on the base, or the target surface is an inclined surface on the base inclined with respect to an axial direction of the liner, and an inclination angle of the bent portion with respect to the axial direction of the liner is set as: and when the bent part generates elastic deformation, the surface of the bent part, which is in contact with the target surface, is completely attached to the target surface.
10. A reaction chamber comprising a chamber and a susceptor, a liner and a liner grounding means disposed in the chamber, an upper end of the liner being grounded through the chamber, wherein the liner grounding means employs the liner grounding means of any one of claims 1 to 9, the liner grounding means electrically connecting a lower end of the liner to the susceptor and being grounded through the susceptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921169003.2U CN210073762U (en) | 2019-07-24 | 2019-07-24 | Lining grounding device and reaction chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921169003.2U CN210073762U (en) | 2019-07-24 | 2019-07-24 | Lining grounding device and reaction chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210073762U true CN210073762U (en) | 2020-02-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921169003.2U Active CN210073762U (en) | 2019-07-24 | 2019-07-24 | Lining grounding device and reaction chamber |
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| Country | Link |
|---|---|
| CN (1) | CN210073762U (en) |
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2019
- 2019-07-24 CN CN201921169003.2U patent/CN210073762U/en active Active
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