CN210037564U - Attenuated total reflection device for Fourier transform spectrometer - Google Patents
Attenuated total reflection device for Fourier transform spectrometer Download PDFInfo
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- CN210037564U CN210037564U CN201920534013.5U CN201920534013U CN210037564U CN 210037564 U CN210037564 U CN 210037564U CN 201920534013 U CN201920534013 U CN 201920534013U CN 210037564 U CN210037564 U CN 210037564U
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Abstract
An attenuated total reflection device for a Fourier transform spectrometer comprises a first plane reflector, a first off-axis parabolic reflector, a second off-axis parabolic reflector, an ATR crystal, a third off-axis parabolic reflector, a fourth off-axis parabolic reflector, a second plane reflector, a third plane reflector and a fourth plane reflector which are arranged in sequence along the direction of an optical path. The utility model utilizes the off-axis parabolic mirror to realize the light beam convergence and the light spot size control, and improves the output luminous flux utilization rate of the spectrometer through the symmetrical arrangement mode of the double off-axis parabolic mirror relative to the ATR crystal, thereby ensuring the detection sensitivity and the signal-to-noise ratio; the utility model has the characteristics of the compactness is easily integrated to be applicable to simple batch production. The utility model discloses have wide application prospect in fields such as physics, chemistry, material, geology, biomedicine.
Description
Technical Field
The utility model belongs to spectral analysis and photonics field, in particular to an Attenuation Total Reflection (ATR) device for Fourier transform spectrometer.
Background
Fourier Transform Infrared (FTIR) spectrometers consist of a broadband light source, an interferometer (usually of the michelson type, whose basic structure comprises a fixed mirror, a moving mirror and a beam splitter), a photodetector, electronic controls and an inverse Fourier Transform. The interferometer fourier modulates the broadband light, and the detector therefore records a time-varying interferogram signal, which is inverse fourier transformed to a spectrum. In general, a sample chamber is disposed between the output light of the interferometer and the detector, and by placing a suitable transmission and reflection testing device in the sample chamber and fixing the sample appropriately, the measurement of transmission spectrum and reflection spectrum can be easily realized. Due to the performance characteristics of multiple channels, full flux, high resolution and particular suitability for infrared bands, the FTIR spectrometer has incomparable competitive advantages compared with the traditional dispersion type (based on prism light splitting and grating light splitting) spectrometer in the aspect of trace high-sensitivity spectral analysis of gas, solid and liquid samples, and has ever-increasing huge application requirements in the fields of electronics, chemical engineering, biomedicine, environmental protection, safety inspection and the like.
Attenuated Total Reflection (ATR) is a highly sensitive optical signal testing technique, and its core generally includes a light introduction part, an ATR crystal, and a light extraction part. ATR extracts effective spectral information by measuring a reflected signal from the surface of a sample, simplifies the sample preparation process, greatly expands the application range of spectroscopy, and has been widely used in the surface component analysis of polymer products such as fibers, plastics, coatings, rubbers, adhesives, and the like.
The ATR and the FTIR spectrometer are combined, so that the advantages of the ATR and the FTIR spectrometer are exerted, and the ATR and the FTIR spectrometer can be applied to more occasions and can obtain better spectral test sensitivity, signal to noise ratio and sample material properties. In theory, ATR spectrometry analysis can be achieved by placing the ATR device into the FTIR spectrometer sample compartment. However, in practical application, difficulties such as optical path matching between the ATR device and the FTIR spectrometer, coupling mode/efficiency between the optical signal and the ATR crystal and the like exist, and application popularization and use effect of the ATR spectrum are severely restricted. To this end, the prior ATR-related patent publication does not suggest an effective solution:
US2001/0030288A1 discloses detecting between emitter and ATR body and between ART body and diode lineAn ATR probe with a cylindrical lens between the devices. The lens may be introduced by the material used for the lens (e.g., CaF)2ZnSe, etc.) limits the applicable band range. It is not described as matching the FTIR spectrometer optical path and integration.
CN101889195A discloses an ATR probe, which is characterized in that the area of the receiving light guide assembly for receiving light coming out of the ATR body is larger than the area of the emitting light guide assembly for inputting light into the ATR body, so as to improve the coupling effect of the light signal and the ATR crystal. The principle of action of the light guide is, however, that the light propagating therein is transmitted from one end to the other by multiple reflections, which in itself results in a severe attenuation of the light intensity. At a high reflectivity of 95%, even 10 reflections from a single tube will result in a loss of 40% of the optical signal, considering the ratio of the light pipe diameters, not to mention the more actual reflections, the double tube and the coupling into and out of the light pipe. In addition. Nor is it described in relation to the integration of FTIR spectrometers.
CN103398948B discloses an ATR probe for fourier transform infrared spectrometer, which adopts a hollow light tube with a large aperture and internally plated with an infrared high-reflectivity film as a light introduction component. It has similar optical signal loss problems as CN 101889195A.
CN104062009A discloses a high-luminous-flux infrared ATR probe, which also uses a large-caliber hollow light tube internally plated with an infrared high-reflectivity film as a light-guiding-in part and a light-guiding-out part, and uses a lens to implement light convergence. The optical signal loss problem similar to CN101889195A and CN103398948B exists, and simultaneously, the application waveband range is limited due to the introduction of two lenses, and the usable optical signal intensity is further reduced.
CN207908347U discloses an ATR reflection accessory of a Fourier transform infrared spectrometer, which is characterized in that the problem that the pressure of a sample in contact with an ATR crystal cannot be accurately known when a traditional ATR reflection accessory is used for experimental tabletting is solved, and the pressure of a pressure head is observed through a pressure gauge so that the pressure of the sample in contact with the ATR crystal can be measured. However, the difficulties of matching the optical path of the ATR device and the FTIR spectrometer and coupling mode/efficiency of the optical signal and the ATR crystal are not involved.
SUMMERY OF THE UTILITY MODEL
To the above problem, the present invention provides an ATR device for fourier transform spectrometer, which is easily matched with FTIR spectrometer optical path, has high efficiency of optical signal coupling mode, and is suitable for simple batch production.
The utility model discloses an ATR device for detecting medium optical property utilizes off-axis parabolic mirror to realize light beam convergence and facula size control, and improves the spectrometer through two off-axis parabolic mirrors for ATR crystal symmetry arrangement mode and exports luminous flux utilization ratio to guarantee detectivity and SNR; the optical path of the detector of the Fourier transform spectrometer is optimized and matched by combining the plane reflector and the off-axis parabolic mirror, and is optimized and matched by combining the off-axis parabolic mirror and the three-plane reflector, so that the optical path of the detector of the Fourier transform spectrometer is compact and easy to integrate.
The utility model discloses have wide application prospect in fields such as physics, chemistry, material, geology, biomedicine.
The technical solution of the utility model is as follows:
a compact high-throughput ATR device for fourier transform spectrometers, characterized by: the device comprises an incident light matching module, an ATR reflection module and an emergent light matching module; the incident light matching module comprises a first plane reflector and a first off-axis parabolic reflector; the ATR reflecting module comprises a second off-axis parabolic reflector, an ATR crystal and a third off-axis parabolic reflector; the emergent light matching module comprises a fourth off-axis parabolic reflector, a second plane reflector, a third plane reflector and a fourth plane reflector, and the first plane reflector, the first off-axis parabolic reflector, the second off-axis parabolic reflector, the ATR crystal, the third off-axis parabolic reflector, the fourth off-axis parabolic reflector, the second plane reflector, the third plane reflector and the fourth plane reflector are sequentially arranged along the light path direction.
By selecting the clear aperture size and the effective focal length of the first off-axis parabolic reflector, the matching with the characteristics of light beams from the interferometer in different sample bins of the Fourier transform spectrometer can be realized; and transmits the beam collimated by the first off-axis parabolic mirror to a second off-axis parabolic mirror of the ATR reflector module.
The ATR crystal is made of any one of diamond, ZnSe or Ge and the like, has a triangular prism shape, has a horizontal plane as a sample testing plane, and has two side surfaces which are respectively opposite to the second off-axis parabolic reflector and the third off-axis parabolic reflector; the second off-axis parabolic reflector converges the collimated light from the first off-axis parabolic reflector to one side surface of the ATR crystal, the collimated light is totally reflected by the horizontal surface of the ATR crystal and then is emitted to the third off-axis parabolic reflector from the other side surface of the ATR crystal, and the light beam is collimated and transmitted to the fourth off-axis parabolic reflector by the third off-axis parabolic reflector.
The second off-axis parabolic mirror is used for realizing light beam convergence and light spot size control, and the utilization rate of the output light flux of the spectrometer is improved through the symmetrical arrangement mode of the second off-axis parabolic mirror and the third off-axis parabolic mirror relative to the ATR crystal and the optimal setting of the clear aperture and the effective focal length of the second off-axis parabolic mirror and the third off-axis parabolic mirror, so that the spectral detection sensitivity and the signal-to-noise ratio are guaranteed.
And the fourth off-axis parabolic reflector converges the collimated light beam from the third off-axis parabolic reflector and outputs the collimated light beam to a light detector of the FTIR spectrometer through the second plane reflector, the third plane reflector and the fourth plane reflector in sequence. The size of the clear aperture and the effective focal length of the fourth off-axis parabolic reflector are selected to ensure that the fourth off-axis parabolic reflector can be matched with the diameters of light beams on the light path of different Fourier transform spectrometer detectors and the number of F/# numbers, and meanwhile, the second plane reflector, the third plane reflector and the fourth plane reflector are used for realizing the compactness of the geometric dimension of the device.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the combination of the plane reflector and the off-axis parabolic reflector is adopted, so that the serious loss of optical signals caused by the hollow light tube serving as an incident and emergent light conducting part is avoided; the use of optical lenses is avoided by using the beam collimating/converging function of the off-axis parabolic mirror, thereby eliminating the band limitation. The utility model discloses ATR device has the characteristics of light flux height, light energy loss are little, applicable wave band is wide.
2. The incident light matching module combining the plane reflector and the off-axis parabolic reflector is adopted to realize the matching and the non-collimation conversion of the output light beam of the interferometer of the FTIR spectrometer, and the simple and efficient integration of the FTIR spectrometer is ensured. Not only enhances the practicability of the ATR device, but also expands the functions of the FTIR spectrometer and improves the utilization efficiency of the FTIR spectrometer.
3. Adopt the ATR reflection module of two off-axis parabolic mirror and ATR crystal combinations, realize that the convergence of FTIR spectrum appearance interference light beam is presented to ATR crystal and coupling ATR crystal emergent light and output collimated light beam, guarantee that two sides of FTIR spectrum appearance interference light high efficiency through ATR to the maximize extracts ATR light signal. Both can select off-axis parabolic mirror clear aperture and effective focal length to the size demand of ATR crystal horizontal plane contact sample area, also show the luminous flux and the ATR spectral detection sensitivity SNR that promote the ATR device, therefore show and enlarge the utility model discloses ATR device's applicable sample scope.
4. Adopt the emergent light matching module of off-axis parabolic mirror and (many) plane mirror combination, realize with the photo detector light path matching and collimation-non-collimation conversion of FTIR spectrum appearance, both guaranteed to pick up with the high efficiency of the simple and easy integration and the light signal of FTIR spectrum appearance, show again and reduce the utility model discloses the space size requirement of ATR device makes it be suitable for built-in FTIR spectrum appearance sample storehouse and uses. The operation process is simplified, the use difficulty is reduced, the application field is obviously expanded, and the simple batch production is facilitated.
Drawings
Figure 1 shows a schematic diagram of a compact high throughput ATR device for a fourier transform spectrometer according to the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings, which should not be construed as limiting the scope of the invention.
Fig. 1 shows a block diagram of a compact high-throughput ATR device for a fourier transform spectrometer of the present invention. As can be seen from the figure, the compact high-flux ATR device for fourier transform spectroscopy of the present invention comprises an incident light matching module 1, an ATR reflection module 2 and an emergent light matching module 3; the incident light matching module 1 comprises a first plane mirror M1 and a first off-axis parabolic mirror PM 2; the ATR reflection module 2 comprises a second off-axis parabolic mirror PM3, an ATR crystal and a third off-axis parabolic mirror PM 4; the outgoing light matching module 3 comprises a fourth off-axis parabolic mirror PM5, a second plane mirror M6, a third plane mirror M7 and a fourth plane mirror M8, and the first plane mirror M1, the first off-axis parabolic mirror PM2, the second off-axis parabolic mirror PM3, an ATR crystal ATR0, the third off-axis parabolic mirror PM4, the fourth off-axis parabolic mirror PM5, the second plane mirror M6, the third plane mirror M7 and the fourth plane mirror M8 are arranged along the optical path direction in sequence.
In the figure, the right horizontal left arrow represents the interferometrically modulated non-collimated beam exiting the interferometer of the FTIR spectrometer that impinges on the plane mirror M1.
The first planar mirror M1 is oriented in a position to ensure that the beam reflected therefrom impinges exactly on the first off-axis parabolic mirror PM2 with a beam spot centered thereon; the first off-axis parabolic mirror PM2 is oriented to ensure that the collimated beam reflected therefrom impinges exactly on the second off-axis parabolic mirror PM 3.
The second off-axis parabolic reflector PM3 is oriented to ensure that the collimated light beam transmitted by the first off-axis parabolic reflector PM2 is reflected and converged to irradiate the front side of the ATR crystal ATR0, penetrates into the crystal to irradiate the horizontal plane of the crystal, and is reflected by the interface between the plane and the sample to be measured to irradiate the other side of the ATR crystal and emit non-collimated light.
The third off-axis parabolic reflector PM4 is oriented to ensure that the uncollimated light exiting the side of the ATR crystal exactly covers its mirror surface and reflects a collimated beam out through it to the fourth off-axis parabolic reflector PM 5.
The fourth off-axis parabolic mirror PM5 is oriented to ensure that the collimated beam exiting the ATR module exactly covers its mirror surface and reflects the converging beam out through it onto the second planar mirror M6.
The orientation of the second planar mirror M6 is set to ensure that the light beam reflected therefrom impinges exactly on the third planar mirror M7; the orientation of the third plane mirror M7 is set to ensure that the light beam reflected by it just shines on the fourth plane mirror M8; the positions of the second plane mirror M6, the third plane mirror M7 and the fourth plane mirror M8 are set to ensure that the convergent light output by the fourth off-axis parabolic mirror PM5 is matched with the aperture size and the number of F/# of the optical path of the optical detector of the FTIR spectrometer; the orientation of the fourth flat mirror M8 ensures that its non-collimated output beam is coaxial as indicated by the left horizontal arrow in the figure with the interferometrically modulated beam from the FTIR spectrometer as indicated by the right horizontal arrow in the figure.
Adjustment the utility model discloses the light aperture and the effective focal length that lead to of incident light matching module 1 and the plane mirror size of emergent light matching module 3, off-axis parabolic mirror of ATR device can be matched with the FTIR spectrum appearance of different light aperture and/or F/# numbers so that conveniently realize the utility model discloses the test in built-in spectrum appearance sample storehouse of ATR device.
The horizontal plane and the effective reflection/light transmission faces of the two side faces of the ATR reflection module 2 are changed, and the light transmission apertures and the number of F/# of the off-axis parabolic reflectors PM3 and PM4 are adjusted in a matching manner, so that the requirements of different sample contact face sizes and/or ATR signal intensity can be met.
According to the present preferred construction of the present invention, all the plane mirrors and off-axis parabolic mirrors of the three modules are fixed in a suitable mechanical support manner to meet the different requirements of the spatial positions of the aforementioned mirrors; three-dimensional adjustment mechanisms are provided as necessary to ensure accurate placement of the aforementioned specific orientations of the mirrors.
Claims (2)
1. An attenuated total reflection apparatus for a fourier transform spectrometer, comprising: the device comprises an incident light matching module (1), an ATR reflection module (2) and an emergent light matching module (3); the incident light matching module (1) comprises a first plane mirror (M1) and a first off-axis parabolic mirror (PM 2); the ATR reflection module (2) comprises a second off-axis parabolic mirror (PM3), an ATR crystal (ATR0) and a third off-axis parabolic mirror (PM 4); the emergent light matching module (3) comprises a fourth off-axis parabolic mirror (PM5), a second plane mirror (M6), a third plane mirror (M7) and a fourth plane mirror (M8), wherein the first plane mirror (M1), the first off-axis parabolic mirror (PM2), the second off-axis parabolic mirror (PM3), an ATR crystal (ATR0), the third off-axis parabolic mirror (PM4), the fourth off-axis parabolic mirror (PM5), the second plane mirror (M6), the third plane mirror (M7) and the fourth plane mirror (M8) are sequentially arranged along the light path direction.
2. The attenuated total reflection apparatus for a fourier transform spectrometer of claim 1, wherein: the ATR crystal (ATR0) is made of diamond, ZnSe or Ge material and has a triangular prism shape, the horizontal plane of the ATR crystal is a sample testing plane, during testing, a test sample is placed on the horizontal plane, and two side surfaces of the ATR crystal are respectively opposite to the second off-axis parabolic reflector and the second off-axis parabolic reflector.
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| CN201920534013.5U CN210037564U (en) | 2019-04-19 | 2019-04-19 | Attenuated total reflection device for Fourier transform spectrometer |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975209A (en) * | 2019-04-19 | 2019-07-05 | 荧飒光学科技（上海）有限公司 | Decaying for Fourier transform spectrometer, is all-trans injection device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109975209A (en) * | 2019-04-19 | 2019-07-05 | 荧飒光学科技（上海）有限公司 | Decaying for Fourier transform spectrometer, is all-trans injection device |
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