CN209979788U - Semiconductor wafer detection equipment - Google Patents
Semiconductor wafer detection equipment Download PDFInfo
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- CN209979788U CN209979788U CN201920450078.1U CN201920450078U CN209979788U CN 209979788 U CN209979788 U CN 209979788U CN 201920450078 U CN201920450078 U CN 201920450078U CN 209979788 U CN209979788 U CN 209979788U
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Abstract
The utility model discloses a semiconductor wafer detection device, which comprises an installation machine case, a loading platform, a warning lamp, a support plate, a movable clamping and positioning component, an auxiliary detection component and a detection calculation component, wherein the loading platform is fixedly installed on one side of the installation machine case, a through groove is arranged on the side wall of the installation machine case close to the top end of the loading platform, the warning lamp is fixedly installed on the top of the installation machine case, the support plate is fixedly installed inside the installation machine case, the semiconductor wafer detection device can automatically move, clamp and position a wafer through the arranged movable clamping and positioning component, and is matched with the auxiliary detection component and the detection calculation component for detection, the detection of the wafer can be automatically completed, the automation process is high, the detection in the wafer production and processing process is greatly facilitated, meanwhile, the wafer is automatically positioned and clamped without moving the wafer, the abrasion of the wafer is avoided, and the accuracy of wafer detection is effectively improved.
Description
Technical Field
The utility model relates to a wafer detection art field specifically is a semiconductor wafer check out test set.
Background
Semiconductor wafers are silicon wafers made of silicon semiconductor integrated circuits, which are called wafers because of their circular shape, and various circuit device structures can be fabricated on the silicon wafers, thereby forming integrated circuit products with specific electrical functions.
After a manufacturing process of a semiconductor wafer is completed, the semiconductor wafer needs to be detected to determine whether a product is qualified, and a common method is that when the front side of the semiconductor wafer is detected, the semiconductor wafer is directly moved by moving a wafer ring and a scribing film under a microscope, so that most of the existing wafer detection equipment is inconvenient to detect, the automation degree is low, meanwhile, in the process of detecting the wafer, the wafer is easy to shift to influence the detection, and the wafer is easy to wear due to the movement of the wafer to influence the quality of the wafer, so that great inconvenience is brought to the detection.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a semiconductor wafer check out test set to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a semiconductor wafer check out test set, includes installation machine case, shipment platform, warning light, backup pad, activity centre gripping locating component, supplementary determine module and detection calculation subassembly, installation machine case one side fixed mounting has the shipment platform, and installs quick-witted lateral wall and offer the logical groove that runs through near the position on shipment platform top, warning light fixed mounting is at the top of installation machine case, backup pad fixed mounting is in installation machine incasement portion, and is provided with activity centre gripping locating component in the backup pad, supplementary determine module is located activity centre gripping locating component one side, detection calculation subassembly fixed mounting is at installation machine incasement.
Preferably, the movable clamping and positioning component comprises a mechanical arm, a rotary platform, three-jaw fixtures, a clamping cylinder, two lifting cylinders, two connecting plates, a connecting rod, a vertical rod, a fixed plate and a suction component, the mechanical arm is fixedly penetrated in the supporting plate, one end of the mechanical arm can penetrate through the through groove, the two connecting rods are symmetrically arranged and are slidably penetrated through the supporting plate, the rotary platform is positioned at the top of the supporting plate, the rotary platform is fixedly arranged at the top end of the connecting rod, the three-jaw fixtures are equidistantly distributed at the outer side of the rotary platform, the three-jaw fixtures are fixedly connected with the rotary platform through the clamping cylinder, the connecting plates are positioned at the bottom of the connecting rods, the connecting rods are fixedly connected with the bottom ends of the two connecting rods, the two vertical rods are symmetrically arranged and are fixedly arranged at the bottom of the supporting plate, the fixed plate is fixedly arranged at one end of, and the output end of the lifting cylinder is fixedly connected with the connecting plate, an air hole groove is formed in the rotating platform, the air suction assembly is positioned in the installing machine case, and the air suction assembly is connected with the air hole groove through a pipeline.
Preferably, the air suction assembly comprises an air suction pump and an air pressure valve, the air suction pump is fixedly installed at the bottom in the installation case, the air pressure valve is fixedly installed on the outer side of the installation case, one end of the air pressure valve is connected with the air suction pump through a pipeline, and the other end of the air pressure valve is connected with the air hole groove through a pipeline.
Preferably, the auxiliary detection assembly comprises a slotting tool module, a test slotting tool, a movable sliding table, a crystal slag receiving cylinder, a cylinder fixing seat, a crystal slag receiving box, a light source, a camera and a microscope assembly, the movable sliding table is fixedly arranged at the top of a supporting plate, the slotting tool module is fixedly arranged at the top of the movable sliding table, the test slotting tool is fixedly arranged at one end of the slotting tool module close to the rotating platform, the cylinder fixing seat is positioned at one side of the slotting tool module, the cylinder fixing seat is fixedly arranged at the top of the supporting plate, the crystal slag receiving cylinder is fixedly arranged at the top of the cylinder fixing seat, the crystal slag receiving box is fixedly arranged at the output end of the crystal slag receiving cylinder, the camera and the microscope assembly are fixedly arranged in a fixing plate in a penetrating manner, a penetrating detection groove is formed in the supporting plate, and, the light source is positioned at the top of the camera and microscope component and is fixedly installed inside the installation case.
Preferably, the detection and calculation assembly comprises a computer display screen and an industrial personal computer, the industrial personal computer is fixedly installed at the bottom in the installation case, the computer display screen is movably installed outside the installation case through a movable arm, and the computer display screen is electrically connected with the industrial personal computer.
Preferably, a first observation door is movably mounted on one side of the mounting case through a hinge, a first maintenance door is movably mounted on the side wall of the mounting case close to the bottom of the first observation door through a hinge, a second observation door is movably mounted on the other side of the mounting case through a hinge, and a second maintenance door is movably mounted on the side wall of the mounting case close to the bottom of the second observation door through a hinge.
Preferably, a plurality of heat dissipation vents are formed in the outer wall of the mounting case, the first maintenance door and the second maintenance door.
Preferably, a plurality of self-positioning universal wheels are symmetrically and fixedly mounted at the bottom of the mounting case.
Preferably, an emergency stop button is fixedly mounted on one side wall of the mounting case close to the shipping platform.
Compared with the prior art, the beneficial effects of the utility model are that:
1. the utility model discloses, through the activity centre gripping locating component that sets up for can remove the centre gripping location to the wafer automatically, and the cooperation is assisted detection subassembly and is detected the calculation subassembly and detect, can accomplish the detection to the wafer automatically, and the automation is high, has greatly made things convenient for the detection of wafer production course of working, simultaneously, and to wafer automatic positioning centre gripping, and need not remove the wafer, has avoided the wearing and tearing of wafer, has effectively improved the accuracy that the wafer detected.
2. The utility model discloses, through the subassembly of breathing in, can be convenient fix the wafer, avoid wafer skew wearing and tearing, avoid excessive centre gripping to cause the wafer damaged simultaneously, and through the first observation door that sets up, the second observation door, first maintenance door and second maintenance door, then made things convenient for the real-time observation and the maintenance to the device, through the heat dissipation vent that sets up, then can carry out effectual ventilation cooling to the device, avoid the too high temperature of installation machine incasement portion to cause the harm to the device, thereby avoid influencing device normal use, and through the self-align universal wheel that sets up in installation machine bottom of the case portion, then guaranteed the holistic flexibility of device, be convenient for remove the use, at last emergency stop button through setting, when the in-process that detects the wafer appears unexpected, can stop equipment immediately, avoid causing the damage to equipment and wafer.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
fig. 2 is a schematic rear view of the present invention;
FIG. 3 is a schematic view of a portion of the structure of FIG. 2 according to the present invention;
FIG. 4 is a schematic view of a portion of the structure of FIG. 3 according to the present invention;
FIG. 5 is a schematic view of a portion of the structure of FIG. 4 according to the present invention;
FIG. 6 is a schematic top view of the structure of FIG. 5 according to the present invention;
FIG. 7 is a schematic view of a portion of the structure of FIG. 6 according to the present invention;
fig. 8 is a schematic view of the structure of the manipulator of the present invention.
In the figure: 1, installing a case; 2-a shipping table; 3-a warning light; 4-a support plate; 5-movable clamping and positioning components; 6-an auxiliary detection component; 7-detecting a computing component; 8-through grooves; 9-a manipulator; 10-a rotating platform; 11-a three-jaw clamp; 12-a clamping cylinder; 13-a lifting cylinder; 14-connecting plates; 15-a connecting rod; 16-upright stanchion; 17-fixing the plate; 18-a getter assembly; 19-air hole groove; 20-a getter pump; 21-a pneumatic valve; 22-a slotting tool module; 23-test slotting tool; 24-moving the slide; 25-a crystal slag receiving cylinder; 26-cylinder fixing seat; 27-a crystal slag receiving box; 28-camera and microscope assembly; 29-detection tank; 30-a computer display screen; 31-an industrial personal computer; 32-a first observation door; 33-a first maintenance door; 34-a second observation door; 35-second dimension repairing; 36-a heat dissipation vent; 37-self-positioning universal wheels; 38-scram button; 39-light source.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-8, the present invention provides a technical solution: a semiconductor wafer detection device comprises an installation case 1, a loading and transporting platform 2, a warning lamp 3, a supporting plate 4, a movable clamping and positioning component 5, an auxiliary detection component 6 and a detection calculation component 7, wherein the loading and transporting platform 2 is fixedly installed on one side of the installation case 1, a through groove 8 penetrating through the side wall of the installation case 1 close to the top end of the loading and transporting platform 2 is formed in the side wall of the installation case, the warning lamp 3 is fixedly installed at the top of the installation case 1, the supporting plate 4 is fixedly installed inside the installation case 1, the movable clamping and positioning component 5 is arranged in the supporting plate 4, the auxiliary detection component 6 is located on one side of the movable clamping and positioning component 5, the detection calculation component 7 is fixedly installed inside the installation case 1, when in use, a wafer is placed at the top of the loading and transporting platform 2, and can be automatically, the wafer detection device is matched with the auxiliary detection component 6 and the detection calculation component 7 to detect, can automatically complete the detection of wafers, is high in automation degree, greatly facilitates the detection of the wafer production and machining process, meanwhile, automatically positions and clamps the wafers without moving the wafers, avoids the abrasion of the wafers, effectively improves the accuracy of wafer detection, gives an alarm in real time through the warning lamp 3, and can rapidly remind workers to make a response when an abnormality occurs.
The movable clamping and positioning component 5 comprises a manipulator 9, a rotary platform 10, three-jaw clamps 11, clamping cylinders 12, a lifting cylinder 13, a connecting plate 14, connecting rods 15, upright rods 16, a fixing plate 17 and an air suction component 18, wherein the manipulator 9 is fixedly penetrated in the supporting plate 4, one end of the manipulator 9 can penetrate through the through groove 8, the two connecting rods 15 are symmetrically arranged, the two connecting rods 15 are respectively and slidably penetrated through the supporting plate 4, the rotary platform 10 is positioned at the top of the supporting plate 4, the rotary platform 10 is fixedly arranged at the top end of the connecting rod 15, the three-jaw clamps 11 are equidistantly distributed outside the rotary platform 10, the three-jaw clamps 11 are respectively and fixedly connected with the rotary platform 10 through the clamping cylinders 12, the connecting plate 14 is positioned at the bottom of the connecting rod 15, the connecting rod 15 is fixedly connected with the bottom ends of the two connecting rods 15, the upright rods 16 are symmetrically arranged, and the two upright rods 16, fixed plate 17 fixed mounting is in the one end that backup pad 4 was kept away from to pole setting 16, lift cylinder 13 fixed mounting is at fixed plate 17 top, and lift cylinder 13 output and even board 14 fixed connection, gas pocket slot 19 has been seted up in rotary platform 10, subassembly 18 of breathing in is located installation machine case 1, and subassembly 18 of breathing in passes through the pipeline and is connected with gas pocket slot 19, through activity centre gripping locating component 5 for can remove the centre gripping location to the wafer automatically, simultaneously, and to wafer automatic positioning centre gripping, and need not remove the wafer, avoid the wearing and tearing of wafer, effectively improved the accuracy that the wafer detected.
The subassembly 18 of breathing in includes aspirator pump 20 and pneumatic valve 21, aspirator pump 20 fixed mounting is in installation machine case 1 bottom, pneumatic valve 21 fixed mounting is in the installation machine case 1 outside, pneumatic valve 21 one end is passed through the pipeline and is connected with aspirator pump 20, and the pneumatic valve 21 other end passes through the pipeline and is connected with gas pocket slot 19, and through the subassembly 18 of breathing in, can be convenient fix the wafer, avoid wafer skew wearing and tearing, avoid excessive centre gripping to cause the wafer damaged simultaneously.
The auxiliary detection assembly 6 comprises a slotting tool module 22, a test slotting tool 23, a movable sliding table 24, a crystal slag receiving cylinder 25, a cylinder fixing seat 26, a crystal slag receiving box 27, a light source 39 and a camera and microscope assembly 28, the movable sliding table 24 is fixedly arranged at the top of a supporting plate 4, the slotting tool module 22 is fixedly arranged at the top of the movable sliding table 24, the test slotting tool 23 is fixedly arranged at one end of the slotting tool module 22 close to the rotary platform 10, the cylinder fixing seat 26 is positioned at one side of the slotting tool module 22, the cylinder fixing seat 26 is fixedly arranged at the top of the supporting plate 4, the crystal slag receiving cylinder 25 is fixedly arranged at the top of the cylinder fixing seat 26, the crystal slag receiving box 27 is fixedly arranged at the output end of the crystal slag receiving cylinder 25, the camera and the microscope assembly 28 penetrate through the fixed mounting in the fixing plate 17, a through, the top of the camera and microscope assembly 28 penetrates through the detection groove 29 to be located at the top of the support plate 4, the light source 39 is located at the top of the camera and microscope assembly 28, the light source 39 is fixedly installed inside the installation case 1, the wafer can be automatically detected simply and conveniently through the auxiliary detection assembly 6, the automation process is high, and the wafer production and processing process is greatly facilitated to detect.
The detection and calculation assembly 7 comprises a computer display screen 30 and an industrial personal computer 31, the industrial personal computer 31 is fixedly installed at the bottom in the installation case 1, the computer display screen 30 is movably installed outside the installation case 1 through a movable arm, the computer display screen 30 is electrically connected with the industrial personal computer 31, and the detection and calculation assembly 7 is used for conveniently and efficiently detecting the wafer.
A plurality of heat dissipation vents 36 have all been seted up to installation machine case 1 outer wall, first dimension door 33 and second dimension door 35, through heat dissipation vent 36, then can carry out effectual ventilation cooling to the device, avoid installation machine case 1 inside high temperature to cause the harm to the device to avoid influencing device normal use.
A plurality of self-positioning universal wheels 37 are symmetrically and fixedly mounted at the bottom of the mounting case 1, and the whole flexibility of the device is ensured through the self-positioning universal wheels 37, so that the device is convenient to move and use.
The side wall of one side of the installation case 1 close to the loading and transporting table 2 is fixedly provided with an emergency stop button 38, and through the emergency stop button 38, when an accident occurs in the process of detecting the wafer, the equipment can be stopped immediately, and the damage to the equipment and the wafer is avoided.
When the device is used, firstly, the mechanical arm 9 carries a wafer from a Loadport2 device, then the mechanical arm 9 carries the wafer onto the three-jaw clamp 11, the mechanical arm 9 is retracted, then the three-jaw clamp 11 is controlled by the bottom lifting cylinder 13, the clamping and releasing of the three-jaw clamp 11 are controlled by the clamping cylinder 12, the three-jaw clamp 11 has the function of positioning the position of the wafer so that the wafer does not deviate from the center of the rotary platform 10, then the lifting cylinder 13 descends to place the wafer on the rotary platform 10, the three-jaw clamp 11 is opened to position the wafer, meanwhile, the suction pump 20 is arranged to work, the wafer is sucked through the air hole groove 19, at the moment, the camera at the bottom and the microscope assembly 28 take an image to observe whether the state of the wafer to be detected meets the requirement of an insert sheet, if the state of the insert knife module 22 works to insert the test insert knife 23 into the wafer, if the state does not meet the requirement, the rotary platform 10, judging again until the conditions are met, inserting the testing slotting tool 23 into the wafer through the slotting tool module 22, opening the crystal slag receiving cylinder 25 while inserting the testing slotting tool 23, extending the crystal slag receiving box 27 to the lower part of the wafer, retracting the crystal slag receiving box 27 after the testing slotting tool 23 is inserted in place, starting image taking by the camera and microscope assembly 28 at the bottom, calculating by related image software, extending the crystal slag receiving box 27 into the wafer again after the calculation is finished, retracting the testing slotting tool 23 at the moment, retracting the crystal slag receiving box 27 to reset after the testing slotting tool 23 is retracted in place, loosening the three-jaw clamp 11, closing the air suction function, lifting the lifting cylinder 13 to lift the wafer, lifting the manipulator 9 to grab the wafer deeply, then putting the wafer back to the designated position, and carrying out the next action to finish automatic detection of the wafer.
The utility model discloses, the preferred SC63 model of centre gripping cylinder 12, the preferred DSBC model of lift cylinder 13, the preferred MX200 model of aspirator pump 20, the preferred SCJ40 model of brilliant sediment receiving cylinder 25, the circuit operation is current conventional circuit, the utility model discloses in circuit and the control that relate to be prior art, do not carry out too much repeated description here.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (9)
1. The utility model provides a semiconductor wafer check out test set, includes installation machine case (1), shipment platform (2), warning light (3), backup pad (4), activity centre gripping locating component (5), supplementary detecting element (6) and detection computing element (7), its characterized in that: installation machine case (1) one side fixed mounting has shipment platform (2), and the position that installation machine case (1) lateral wall is close to shipment platform (2) top sets up logical groove (8) that runs through, warning light (3) fixed mounting is at the top of installation machine case (1), backup pad (4) fixed mounting is inside installation machine case (1), and is provided with movable centre gripping locating component (5) in backup pad (4), supplementary detecting component (6) are located movable centre gripping locating component (5) one side, detect calculating component (7) fixed mounting in installation machine case (1).
2. The apparatus of claim 1, wherein: the movable clamping and positioning assembly (5) comprises a mechanical arm (9), a rotary platform (10), three-jaw fixtures (11), a clamping cylinder (12), a lifting cylinder (13), a connecting plate (14), a connecting rod (15), a vertical rod (16), a fixing plate (17) and an air suction assembly (18), wherein the mechanical arm (9) is fixedly penetrated in a supporting plate (4), one end of the mechanical arm (9) can penetrate through a through groove (8), the two connecting rods (15) are symmetrically arranged, the two connecting rods (15) are respectively penetrated through the supporting plate (4) in a sliding manner, the rotary platform (10) is positioned at the top of the supporting plate (4), the rotary platform (10) is fixedly arranged at the top end of the connecting rod (15), the three-jaw fixtures (11) are equidistantly distributed at the outer side of the rotary platform (10), the three-jaw fixtures (11) are fixedly connected with the rotary platform (10) through the clamping cylinder (12), and the connecting plate (14) is positioned at the bottom of the, and the equal fixed connection in bottom of connecting rod (15) and two connecting rods (15), pole setting (16) symmetry is equipped with two, and two equal fixed mounting in backup pad (4) bottoms in pole setting (16), the one end of backup pad (4) is kept away from in pole setting (16) to fixed plate (17) fixed mounting, lift cylinder (13) fixed mounting is at fixed plate (17) top, and lift cylinder (13) output and even board (14) fixed connection, seted up gas pocket slot (19) in rotary platform (10), subassembly (18) of breathing in is located installation machine case (1), and subassembly (18) of breathing in is connected with gas pocket slot (19) through the pipeline.
3. The semiconductor wafer inspection apparatus of claim 2, wherein: the air suction assembly (18) comprises an air suction pump (20) and an air pressure valve (21), wherein the air suction pump (20) is fixedly installed at the bottom in the installation case (1), the air pressure valve (21) is fixedly installed at the outer side of the installation case (1), one end of the air pressure valve (21) is connected with the air suction pump (20) through a pipeline, and the other end of the air pressure valve (21) is connected with the air hole groove (19) through a pipeline.
4. The semiconductor wafer inspection apparatus of claim 2, wherein: the auxiliary detection assembly (6) comprises a slotting tool module (22), a test slotting tool (23), a movable sliding table (24), a crystal slag receiving cylinder (25), a cylinder fixing seat (26), a crystal slag receiving box (27), a light source (39) and a camera and microscope assembly (28), the movable sliding table (24) is fixedly installed at the top of the supporting plate (4), the slotting tool module (22) is fixedly installed at the top of the movable sliding table (24), the test slotting tool (23) is fixedly installed at one end, close to the rotating platform (10), of the slotting tool module (22), the cylinder fixing seat (26) is located on one side of the slotting tool module (22), the cylinder fixing seat (26) is fixedly installed at the top of the supporting plate (4), the crystal slag receiving cylinder (25) is fixedly installed at the top of the cylinder fixing seat (26), and the crystal slag receiving box (27) is fixedly installed at the output end of the crystal slag receiving cylinder (25), the camera and microscope assembly (28) penetrates through and is fixedly installed in the fixing plate (17), a penetrating detection groove (29) is formed in the supporting plate (4), the top of the camera and microscope assembly (28) penetrates through the detection groove (29) and is located at the top of the supporting plate (4), the light source (39) is located at the top of the camera and microscope assembly (28), and the light source (39) is fixedly installed inside the installation case (1).
5. The apparatus of claim 1, wherein: detect calculation subassembly (7) including computer display screen (30) and industrial computer (31), bottom in installation machine case (1) industrial computer (31) fixed mounting, computer display screen (30) are in installation machine case (1) outside through digging arm movable mounting, and computer display screen (30) and industrial computer (31) electric connection.
6. The apparatus of claim 1, wherein: install quick-witted case (1) one side and have first observation door (32) through hinge movable mounting, and install the position that quick-witted case (1) lateral wall is close to first observation door (32) bottom and have first maintenance door (33) through hinge movable mounting, install quick-witted case (1) opposite side and have second observation door (34) through hinge movable mounting, and install quick-witted case (1) lateral wall and have second maintenance door (35) through hinge movable mounting near the position of second observation door (34) bottom.
7. The apparatus of claim 1, wherein: a plurality of heat dissipation vents (36) are formed in the outer wall of the installation case (1), the first maintenance door (33) and the second maintenance door (35).
8. The apparatus of claim 1, wherein: a plurality of self-positioning universal wheels (37) are symmetrically and fixedly mounted at the bottom of the mounting case (1).
9. The apparatus of claim 1, wherein: an emergency stop button (38) is fixedly arranged on the side wall of one side, close to the loading and transporting platform (2), of the installation case (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920450078.1U CN209979788U (en) | 2019-04-04 | 2019-04-04 | Semiconductor wafer detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920450078.1U CN209979788U (en) | 2019-04-04 | 2019-04-04 | Semiconductor wafer detection equipment |
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| CN209979788U true CN209979788U (en) | 2020-01-21 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946579A (en) * | 2019-04-04 | 2019-06-28 | 杭州载力科技有限公司 | A kind of semiconductor wafer detecting device |
| CN113013082A (en) * | 2021-03-01 | 2021-06-22 | 晋美玉 | Fixture mechanism for wafer detection |
-
2019
- 2019-04-04 CN CN201920450078.1U patent/CN209979788U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109946579A (en) * | 2019-04-04 | 2019-06-28 | 杭州载力科技有限公司 | A kind of semiconductor wafer detecting device |
| CN113013082A (en) * | 2021-03-01 | 2021-06-22 | 晋美玉 | Fixture mechanism for wafer detection |
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Address after: 1st Floor, Block D, No. 8-2, Keji Avenue, Yuhang Street, Yuhang District, Hangzhou City, Zhejiang Province, 311100 Patentee after: Zhejiang Zaili Technology Co.,Ltd. Address before: 311121 first floor, block D, 8-2 Keji Avenue, Yuhang street, Yuhang District, Hangzhou City, Zhejiang Province Patentee before: HANGZHOU ZAILI SCIENCE AND TECHNOLOGY Co.,Ltd. |
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