CN209979707U

CN209979707U - Probe card

Info

Publication number: CN209979707U
Application number: CN201920440227.6U
Authority: CN
Inventors: 何雪纯; 侯天宇; 周杰
Original assignee: Huaian Imaging Device Manufacturer Corp
Current assignee: Huaian Imaging Device Manufacturer Corp
Priority date: 2019-04-02
Filing date: 2019-04-02
Publication date: 2020-01-21
Anticipated expiration: 2029-04-02

Abstract

The utility model relates to a semiconductor manufacturing technology field especially relates to a probe card. The probe card includes: the circuit board is provided with a through hole which penetrates through the circuit board along a direction vertical to the circuit board; the lens is positioned in the through hole; the protection component is arranged in the circuit board in a clamping mode and comprises at least one blade, and the blade can move towards the through hole to cover the light incident surface of the lens. The utility model discloses avoided when clearing up the probe in the probe card, the particulate matter drops the income plain noodles of camera lens.

Description

Probe card

Technical Field

The utility model relates to a semiconductor manufacturing technology field especially relates to a probe card.

Background

With the development of mobile terminals such as smart phones and tablet computers towards miniaturization, intellectualization and energy conservation, the chip has obvious high-performance and integration trend, so that chip manufacturing enterprises are prompted to actively adopt advanced processes, and the pursuit of manufacturing faster and more power-saving chips is more and more intense. Especially, the main components of many wireless communication devices need advanced semiconductor technology and process below 40nm, so the demand for advanced process capacity is significantly increased compared to the past, which drives the integrated circuit manufacturers to continuously improve the process technology level, improve the chip performance and reliability by reducing the feature size in the horizontal and vertical directions of the wafer, and realize the improvement of silicon integration by using non-geometric process technology such as 3D structure modification and the application of new materials to influence the electrical performance of the wafer, so as to meet the market demand. However, these technological innovations and improvements are based on the creation and fabrication of wafers.

The wafer is a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because it has a circular shape. Various circuit element structures can be processed and fabricated on silicon wafers, and are referred to as integrated circuit products with specific electrical functions.

The probe card is an important testing device in the semiconductor manufacturing process, and is mainly used for online circuit testing, functional testing and the like of wafer surface components. The probe card typically includes probes for electrical performance testing and lenses for image testing. In order to ensure the accuracy of the test result, the probes need to be periodically cleaned and maintained offline. However, during the process of cleaning the probe by using a device such as a brush, the particles adhered to the surface of the probe are easily swept to the surface of the lens. At the moment, if the lens adhered with the particles is used for carrying out image test on the wafer, the particles can block incident light, so that deviation and even errors occur in an image test result.

Therefore, how to ensure the cleanness of the lens in the probe card and avoid the deviation of the image test result is a technical problem to be solved at present.

SUMMERY OF THE UTILITY MODEL

The utility model provides a probe card for solve current probe card and carry out the lower problem of test result reliability when image test.

In order to solve the above problem, the present invention provides a probe card, including:

the circuit board is provided with a through hole which penetrates through the circuit board along a direction vertical to the circuit board;

the lens is positioned in the through hole;

the protection component is arranged in the circuit board in a clamping mode and comprises at least one blade, and the blade can move towards the through hole to cover the light incident surface of the lens.

Preferably, the protection assembly comprises a fixed ring and a plurality of blades symmetrically distributed around the fixed ring; every the tip of blade with gu fixed ring connects, and can surround it with gu fixed ring's tie point is at first preset angle within range internal rotation, in order to cover jointly the income plain noodles of camera lens.

Preferably, the blade comprises a first apex, a second apex and a third apex; the vanes are connected to the retaining ring at the first apex.

Preferably, the protection assembly further comprises a driving ring and a plurality of connecting rods corresponding to the plurality of blades one to one; one end of the connecting rod is connected with the second vertex of the blade, and the other end of the connecting rod is connected with the driving ring; the driving ring can rotate in a second preset angle range to drive the connecting rod to drive the blades to rotate.

Preferably, the drive ring comprises an annular body and a plurality of connecting blocks located in the annular body; the connecting blocks are connected with the connecting rods in a one-to-one correspondence mode and are arranged along the annular body at equal intervals.

Preferably, the protective assembly further comprises an endless track; the driving ring is connected with the annular track and can rotate along the annular track.

Preferably, the protection assembly further comprises a driver disposed outside the circuit board; the driver is connected with the driving ring and used for driving the driving ring to rotate along the annular track.

Preferably, the inner wall of the through hole is provided with an annular groove, and the driving ring and the fixing ring are arranged in the annular groove.

The utility model provides a probe card has the protection subassembly of blade through setting up, and makes the blade can realize the blade to the hiding of camera lens income plain noodles towards the through-hole motion that is provided with the camera lens, has avoided when clearing up the probe to the probe card in, and the particulate matter drops the income plain noodles of camera lens has ensured the cleanness of camera lens income plain noodles has prevented that the deviation from appearing in the image test result, has improved the reliability of wafer test.

Drawings

Fig. 1 is a schematic structural diagram of a probe card according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a protection assembly according to an embodiment of the present invention when a lens is not covered by a blade;

fig. 3 is a schematic structural diagram of a protective assembly according to an embodiment of the present invention when a lens is covered by a blade.

Detailed Description

The following describes in detail a specific embodiment of a probe card according to the present invention with reference to the accompanying drawings.

This embodiment provides a probe card, and fig. 1 is the utility model discloses the structure schematic diagram of probe card among the embodiment, and fig. 2 is the utility model discloses structure schematic diagram when blade among the protection component does not cover the camera lens among the embodiment, and fig. 3 is the utility model discloses structure schematic diagram when blade among the protection component covers the camera lens among the embodiment.

As shown in fig. 1, 2 and 3, the probe card according to the present embodiment includes:

the circuit board 10, the circuit board 10 has a through hole penetrating through the circuit board in a direction perpendicular to the circuit board 10;

the lens 11 is positioned in the through hole;

the protection component is arranged in the circuit board 10 in a clamping mode and comprises at least one blade 23, and the blade 23 can move towards the through hole to cover the light incident surface of the lens 11.

Specifically, the circuit board 10 further has a plurality of probes 12, and the plurality of probes 12 are disposed around the periphery of the lens 11. In the process of using the probe card to perform image detection on a wafer, light emitted by the light source is irradiated to the wafer to be detected through the light incident surface of the lens 11. When the probes 12 in the probe card are periodically cleaned and maintained, the blades in the protection assembly can move towards the direction of the through holes to cover the light incident surface of the lens 11, so that particles are prevented from falling to the light incident surface of the lens 11 in the cleaning process of the probes 12, the deviation of an image test result is avoided, and the reliability of the test of the probe card is improved. In addition, since the protection member is interposed in the circuit board 10, the protection member is not visible from the surface of the probe card in the blade-open state (i.e., the state in which the lens 11 is not covered by the blades) shown in fig. 1, so that the probe 12 can be prevented from being affected.

This embodiment passes through the blade 23 is right the covering of camera lens 11 income plain noodles has avoided probe 12 clearance in-process particulate matter drops to the income plain noodles of camera lens 11. And the particles generated in the probe cleaning process may fall on the surface of the blade 23 deviating from the light incident surface of the lens 11, and at this time, in order to further ensure the cleanness of the light incident surface of the lens 11, a gas purging tool or a brush may be used to remove the particles on the surface of the blade 23 before the blade 23 is opened and the light incident surface of the lens 11 is exposed.

In this embodiment, the blade may move towards the through hole in a translational motion or a rotational motion manner, and a person skilled in the art may select the blade according to actual needs as long as the blade covers the light incident surface of the lens 11 through the movement. When the blade covers the light incident surface of the lens 11 in a rotating manner, a person skilled in the art may set a position of a rotating shaft around which the blade rotates according to actual needs, for example, an axis passing through a connection point between the blade 23 and the circuit board in a direction perpendicular to the blade 23 may be used as the rotating shaft, which is not limited in this embodiment as long as the blade 23 can cover the light incident surface of the lens 11 by rotating and can expose the light incident surface again in a test process. The shape of the blade 23 is not limited in this embodiment, as long as the light incident surface of the lens 11 can be covered by the translational motion or the rotational motion toward the through hole.

Preferably, the protection assembly comprises a fixed ring 22 and a plurality of said blades 23 symmetrically distributed around said fixed ring 22; each of the end portions of the blades 23 is connected to the fixing ring 22, and can rotate around the connection point of the blade and the fixing ring 22 within a first preset angle range so as to cover the light incident surface of the lens 11 together.

Preferably, the vane 23 comprises a first vertex, a second vertex and a third vertex; the blade 23 is connected to the fixing ring 22 at the first apex.

Specifically, the blades 23 may be triangular blades or quadrangular blades, and those skilled in the art can select the blades according to actual needs. Regardless of the shape of the blade 23, it comprises at least three vertices that are not located on the same line. By providing the fixing ring 22 and the plurality of vanes 23 symmetrically distributed about the center of the fixing ring 22, each of the vanes 23 can rotate about an axis passing through a connection point of the vane 23 and the fixing ring 22. Through the rotation of the plurality of blades 23 along the first direction, the plurality of blades 23 can cover or match each other to cover the light incident surface of the lens 11, so as to present the state shown in fig. 3; through the rotation of the plurality of blades 23 in the second direction opposite to the first direction, the distance between the plurality of blades 23 is increased, the whole light incident surface of the lens 11 is exposed, so that a normal image test can be performed, and the state shown in fig. 2 is presented. At this time, a structure similar to an aperture is formed by the fixing ring 22 and the plurality of blades 23.

Preferably, the protection assembly further comprises a drive ring 20 and a plurality of connecting rods 21 corresponding to the plurality of blades 23 one to one; one end of the connecting rod 21 is connected with the second vertex of the blade 23, and the other end is connected with the driving ring 20; the driving ring 20 can rotate within a second preset angle range to drive the connecting rod 21 to rotate the blades.

Preferably, the drive ring 20 comprises an annular body 201 and a plurality of connection blocks 202 located in the annular body 201; the plurality of connecting blocks 202 are connected with the plurality of connecting rods 21 in a one-to-one correspondence manner, and are arranged at equal intervals along the annular body 201.

Preferably, the protective assembly further comprises an endless track; the drive ring 20 is connected to the endless track and is capable of rotating along the endless track.

Preferably, the protection assembly further comprises a driver disposed outside the circuit board; the driver is connected to the drive ring for driving the drive ring 20 to rotate along the annular track.

Specifically, a switch 24 is disposed on the outer side of the driving ring 20, and the fixing ring 22 is nested in the driving ring 20. The drive may be, but is not limited to, a motor. When the user pulls the switch 24 in the direction of the arrow in fig. 2, the driver drives the driving ring 20 to rotate along the circular orbit; the rotation of the driving ring 20 drives the rotation of the connecting rod 21 connected thereto. Because the first vertex of the blade 23 is connected with the fixing ring 22, the second vertex is connected with the connecting rod 21, and the fixing ring 22 is fixed, the rotation of the connecting rod 21 drives the blade 23 to rotate around the connecting point of the blade and the fixing ring 22, so that the blades 23 are close to and gathered together, and finally, the state shown in fig. 3 is presented, and the covering of the whole light incident surface of the lens 11 is realized. On the contrary, when the user pulls the switch 24 in the direction of the arrow in fig. 3, the driver drives the driving ring to rotate in the opposite direction along the ring-shaped track, so that the plurality of blades 23 are separated and separated, and finally, the state shown in fig. 2 is presented, and the light incident surface of the lens 11 is completely exposed. Wherein the inner side of the drive ring 20 refers to the side of the drive ring 20 facing the fixed ring 22, and the outer side of the drive ring 20 refers to the side of the drive ring 20 facing away from the fixed ring 22 and opposite to the inner side.

The driving ring 20 of this embodiment is provided with a plurality of connecting blocks 202 at equal intervals to facilitate the control of the synchronous movement of the plurality of blades 23.

Preferably, the inner wall of the through hole has an annular groove, and the driving ring 20 and the fixing ring 22 are disposed in the annular groove.

According to the probe card provided by the embodiment of the invention, the protection assembly with the blades is arranged, and the blades can move towards the through hole provided with the lens, so that the blades cover the light incident surface of the lens, particles are prevented from falling on the light incident surface of the lens when probes in the probe card are cleaned, the cleanness of the light incident surface of the lens is ensured, the deviation of an image test result is prevented, and the reliability of wafer test is improved.

The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. A probe card, comprising:

the lens is positioned in the through hole;

2. The probe card of claim 1, wherein the protective assembly comprises a retaining ring and a plurality of the blades symmetrically distributed around the retaining ring; every the tip of blade with gu fixed ring connects, and can surround it with gu fixed ring's tie point is at first preset angle within range internal rotation, in order to cover jointly the income plain noodles of camera lens.

3. The probe card of claim 2, wherein the blade comprises a first apex, a second apex, and a third apex; the vanes are connected to the retaining ring at the first apex.

4. The probe card of claim 3, wherein the protective assembly further comprises a drive ring and a plurality of connecting rods in one-to-one correspondence with the plurality of blades; one end of the connecting rod is connected with the second vertex of the blade, and the other end of the connecting rod is connected with the driving ring; the driving ring can rotate in a second preset angle range to drive the connecting rod to drive the blades to rotate.

5. The probe card of claim 4, wherein the drive ring includes an annular body and a plurality of connection blocks in the annular body; the connecting blocks are connected with the connecting rods in a one-to-one correspondence mode and are arranged along the annular body at equal intervals.

6. The probe card of claim 4, wherein the protective assembly further comprises an annular track; the driving ring is connected with the annular track and can rotate along the annular track.

7. The probe card of claim 6, wherein the protective assembly further comprises a driver disposed outside the circuit board; the driver is connected with the driving ring and used for driving the driving ring to rotate along the annular track.

8. The probe card of claim 4, wherein the inner wall of the through hole has an annular groove, and the drive ring and the retainer ring are disposed in the annular groove.