CN209974960U - Lifting device for heater of single crystal furnace - Google Patents
Lifting device for heater of single crystal furnace Download PDFInfo
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- CN209974960U CN209974960U CN201920353274.7U CN201920353274U CN209974960U CN 209974960 U CN209974960 U CN 209974960U CN 201920353274 U CN201920353274 U CN 201920353274U CN 209974960 U CN209974960 U CN 209974960U
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Abstract
The utility model relates to the technical field of machinery, concretely relates to single crystal growing furnace heater hoisting device. Comprises a servo motor; the servo motor is connected with the input end of a speed reducer, the speed reducer is installed on a speed reducer support, and the output end of the speed reducer is connected with the lifting device; the commutator is fixed on the bottom plate, one end of the commutator is connected with the output end of the speed reducer, and the other end of the commutator is connected with the lower end of the screw rod; the screw rod is provided with a screw rod nut, and the screw rod nut is connected with the sealing device through a supporting plate; the upper end of the screw rod is connected with a fixed plate, a furnace bottom plate is arranged on the fixed plate, and a heater is arranged on the furnace bottom plate; the sealing seat is connected with the supporting plate, and the lower end of the lifting rod is arranged in the sealing seat; the lift bar upper end passes the bottom plate of a furnace and is connected with the heater, the utility model discloses the drawback that main furnace room heater can't promote in the single crystal growing furnace equipment before having improved can guarantee again with the whole leakproofness between the single crystal growing furnace. The heater is lifted along with the crucible, so that the heat transferred to the crucible is more uniform, and the energy loss is reduced.
Description
Technical Field
The utility model relates to the technical field of machinery, concretely relates to single crystal growing furnace heater hoisting device.
Background
A single crystal furnace, namely a full-automatic czochralski crystal growing furnace, is equipment for melting polycrystalline materials such as polycrystalline silicon and the like by a graphite heater in an inert gas environment and growing dislocation-free single crystals by a czochralski method.
The single crystal furnace is necessary equipment in the process of converting polycrystalline silicon into monocrystalline silicon, and the monocrystalline silicon is a basic raw material in photovoltaic power generation and semiconductor industries. Monocrystalline silicon is one of the most important monocrystalline materials in the world as a key supporting material of the modern information society, and not only is the main functional material for developing computers and integrated circuits, but also the main functional material for photovoltaic power generation and solar energy utilization.
The main furnace chamber of the crystal pulling furnace is a cylindrical furnace body and comprises an inner cylinder and an outer cylinder, the outer cylinder is sleeved outside the inner cylinder, and a graphite heater is arranged in the inner cylinder of the middle furnace body to provide a thermal field. In the prior art, the heater is immovable, and the crucible rises continuously in the crystal pulling process, so that part of heat of the heater cannot be radiated to the crucible, energy waste is caused, and the heater is lifted along with the crucible, so that heating is more uniform.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects in the prior art and provide a lifting device for a heater of a single crystal furnace.
The utility model discloses the technical scheme who adopts does:
the lifting device of the heater of the single crystal furnace comprises a power device, a lifting device and a sealing device;
the power device comprises a servo motor and a speed reducer; the servo motor is connected with the input end of a speed reducer, the speed reducer is installed on a speed reducer support, and the output end of the speed reducer is connected with the lifting device;
the lifting device comprises a bottom plate, a commutator and a screw rod; the commutator is fixed on the bottom plate, one end of the commutator is connected with the output end of the speed reducer, and the other end of the commutator is connected with the lower end of the screw rod; the screw rod is provided with a screw rod nut, and the screw rod nut is connected with the sealing device through a supporting plate; the upper end of the screw rod is connected with a fixed plate, a furnace bottom plate is arranged on the fixed plate, and a heater is arranged on the furnace bottom plate;
the sealing device comprises a sealing seat, the sealing seat is connected with the supporting plate, and the lower end of the lifting rod is arranged in the sealing seat; the upper end of the lifting rod penetrates through the furnace bottom plate and is connected with the heater, the corrugated pipe is sleeved outside the lifting rod, and the top end of the corrugated pipe is connected with the furnace bottom plate. When the corrugated pipe moves along with the extension and contraction of the sealing seat, the integral sealing performance between the sealing device and the single crystal furnace body can be ensured.
As an improvement, the lifting devices are provided with a plurality of groups and are connected by connecting rods to realize synchronous movement.
As an improvement, the corrugated pipe is a stainless steel corrugated pipe and can bear high temperature of more than 100 ℃.
As an improvement, the lifting rod is a ceramic lifting rod, which can resist high temperature and ensure insulation when the heater is connected.
As an improvement, the corrugated pipe is connected with the furnace bottom plate through an upper flange, and an O-shaped ring is arranged between the upper flange and the furnace bottom plate for sealing.
As an improvement, the lower end of the corrugated pipe is connected with the sealing seat through a lower flange, and an O-shaped ring is arranged between the lower flange and the sealing seat for sealing.
Compared with the prior art, the beneficial effects of the utility model are that:
the defect that a main furnace chamber heater in the prior single crystal furnace equipment cannot be lifted is overcome, and the tightness between the heater and the whole single crystal furnace can be ensured in the process of controlling the lifting of the heater. The heater is lifted along with the crucible, so that the heat transferred to the crucible is more uniform, and the energy loss is reduced.
Drawings
Fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of a partial structure of the sealing device of the present invention.
Labeled as: 1-a servo motor; 2, a speed reducer; 3, a speed reducer support; 4-a bottom plate; 5, a commutator; 6, connecting rods; 7-screw rod nut; 8-a screw rod; 9-a support plate; 10-a sealing seat; 11-a fixed plate; 12-a furnace floor; 13-a bellows; 14-a lifting bar; 15-a heater.
Detailed Description
In order to more clearly illustrate the technical solution implemented by the present invention, the following detailed description is made on the specific embodiments of the present invention with reference to the accompanying drawings:
the lifting device of the heater of the single crystal furnace shown in figure 1 comprises a power device, a lifting device and a sealing and fixing device, and is used for controlling the automatic lifting of the heater 15 in the main furnace chamber of the single crystal furnace. The power device comprises a servo motor 1 and a speed reducer 2; the servo motor 1 is connected with the input end of a speed reducer 2, the speed reducer 2 is arranged on a speed reducer support 3, and the output end of the speed reducer 2 is connected with a lifting device;
the lifting devices are provided with two groups and are connected by a connecting rod 6; the lifting device comprises a bottom plate 4, a commutator 5 and a screw rod 8; the commutator 5 is fixed on the bottom plate 4, one end of the commutator 5 is connected with the output end of the speed reducer 2, and the other end is connected with the lower end of the screw rod 8; a screw rod nut 7 is arranged on the screw rod 8, and the screw rod nut 7 is connected with the sealing device through a supporting plate 9; the upper end of the screw rod 8 is connected with a fixed plate 11, a furnace bottom plate 12 is arranged on the fixed plate, and a heater 15 is arranged on the furnace bottom plate 12;
the sealing device comprises a sealing seat 10, the sealing seat 10 is connected with the supporting plate 9, and the lower end of the lifting rod 14 is arranged in the sealing seat 10; the lifting rod 14 is a ceramic lifting rod which can resist high temperature and ensure insulation when being connected with the heater 15. The upper end of the lifting rod 14 penetrates through the furnace bottom plate 12 and is connected with the heater 15, the corrugated pipe 13 is sleeved outside the lifting rod 14, and the top end of the corrugated pipe 13 is connected with the furnace bottom plate 12. The corrugated pipe 13 is connected with the furnace bottom plate 12 through an upper flange, and an O-shaped ring is arranged between the upper flange and the furnace bottom plate 12 for sealing. The lower end of the corrugated pipe 13 is connected with the sealing seat 10 through a lower flange, and an O-shaped ring is arranged between the lower flange and the sealing seat 10 for sealing. The bellows 13 is a stainless steel bellows capable of withstanding high temperatures of greater than 100 c. When the corrugated pipe 13 moves with the extension and contraction of the sealing seat 10, the integral sealing performance between the sealing device and the single crystal furnace body can be ensured.
The utility model discloses a working process does:
the single crystal furnace heater lifting device controls the heater 15 to automatically lift in the crystal pulling process, wherein the servo motor 1 provides movement power, the movement power is changed by the commutator 5 to drive the screw rod 8 to move, the screw rod 8 moves to drive the sealing seat 10 to lift, the sealing seat 10 lifts to compress the corrugated pipe 13, and meanwhile, the heater 15 fixed on the sealing seat 10 also lifts along with the lifting of the sealing seat 10.
Finally, it should be noted that the above-mentioned embodiments illustrate only specific embodiments of the invention. Obviously, the present invention is not limited to the above embodiments, and many variations exist. All modifications which can be derived or suggested by the person skilled in the art from the disclosure of the invention should be considered as within the scope of the invention.
Claims (6)
1. A lifting device of a heater of a single crystal furnace is characterized by comprising a power device, a lifting device and a sealing device;
the power device comprises a servo motor and a speed reducer; the servo motor is connected with the input end of a speed reducer, the speed reducer is installed on a speed reducer support, and the output end of the speed reducer is connected with the lifting device;
the lifting device comprises a bottom plate, a commutator and a screw rod; the commutator is fixed on the bottom plate, one end of the commutator is connected with the output end of the speed reducer, and the other end of the commutator is connected with the lower end of the screw rod; the screw rod is provided with a screw rod nut, and the screw rod nut is connected with the sealing device through a supporting plate; the upper end of the screw rod is connected with a fixed plate, a furnace bottom plate is arranged on the fixed plate, and a heater is arranged on the furnace bottom plate;
the sealing device comprises a sealing seat, the sealing seat is connected with the supporting plate, and the lower end of the lifting rod is arranged in the sealing seat; the upper end of the lifting rod penetrates through the furnace bottom plate and is connected with the heater, the corrugated pipe is sleeved outside the lifting rod, and the top end of the corrugated pipe is connected with the furnace bottom plate.
2. The apparatus of claim 1, wherein the lifting devices are provided in multiple groups and are connected by links to achieve synchronous movement.
3. The apparatus of claim 1, wherein the bellows is a stainless steel bellows.
4. The apparatus of claim 1, wherein the lifting rod is a ceramic lifting rod that is both temperature resistant and ensures insulation when the heater is connected.
5. The apparatus of claim 1, wherein the bellows is connected to the furnace floor via an upper flange, and an O-ring is provided between the upper flange and the furnace floor for sealing.
6. The device of claim 1, wherein the lower end of the corrugated pipe is connected with the sealing seat through a lower flange, and an O-shaped ring is arranged between the lower flange and the sealing seat for sealing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920353274.7U CN209974960U (en) | 2019-03-20 | 2019-03-20 | Lifting device for heater of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920353274.7U CN209974960U (en) | 2019-03-20 | 2019-03-20 | Lifting device for heater of single crystal furnace |
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| Publication Number | Publication Date |
|---|---|
| CN209974960U true CN209974960U (en) | 2020-01-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920353274.7U Active CN209974960U (en) | 2019-03-20 | 2019-03-20 | Lifting device for heater of single crystal furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109881245A (en) * | 2019-03-20 | 2019-06-14 | 浙江晶盛机电股份有限公司 | A kind of single crystal furnace heater lifting device |
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2019
- 2019-03-20 CN CN201920353274.7U patent/CN209974960U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109881245A (en) * | 2019-03-20 | 2019-06-14 | 浙江晶盛机电股份有限公司 | A kind of single crystal furnace heater lifting device |
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