CN209927980U - Quantum chip detection device - Google Patents
Quantum chip detection device Download PDFInfo
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- CN209927980U CN209927980U CN201920558779.7U CN201920558779U CN209927980U CN 209927980 U CN209927980 U CN 209927980U CN 201920558779 U CN201920558779 U CN 201920558779U CN 209927980 U CN209927980 U CN 209927980U
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Abstract
The utility model discloses a quantum chip detection device, which belongs to the field of detection equipment and comprises a probe card slot box, a probe device and a detection device, wherein the probe card slot box comprises a bottom plate, a cover plate and a connector, and the bottom plate is provided with a plurality of clamping slots for placing quantum chips; the cover plate is detachably covered on the surface of the bottom plate, which is provided with the clamping grooves, and through holes are formed in the positions, opposite to the clamping grooves on the bottom plate, of the cover plate; each connector is detachably mounted in each through hole on the cover plate, one end of each connector is provided with a probe joint, and the other end of each connector is provided with a pair of contact pins; the probe device comprises a probe seat, a probe and a probe moving device, wherein the probe is fixed on the probe moving device and is driven by the probe moving device to move to the upper part of the probe card groove box to be connected with a probe joint; the detection device is electrically connected with the probe; the utility model discloses can avoid adopting the mode of mobile probe and quantum chip surface polar plate direct contact to detect quantum chip, it is safer, stable to quantum chip's detection.
Description
Technical Field
The utility model belongs to the check out test set field, especially a quantum chip detection device.
Background
The quantum chip is a basic constituent unit of a quantum computer, and is a processor which takes a superposition effect of quantum states as a principle and takes quantum bits as a carrier for information processing, wherein the quantum chip mainly comprises a superconducting quantum chip, a semiconductor quantum chip, a quantum dot chip, an ion trap, an NV (diamond) color center and the like.
In the previously filed patent, there is provided a quantum chip testing device comprising a quantum chip placing table, a probe device and a detection device; the surface of the quantum chip placing table is provided with a plurality of clamping grooves for placing quantum chips; the probe device comprises a probe seat for mounting the quantum chip placing table, at least one pair of probes and a probe moving device, wherein the probes are fixed on the probe moving device and are driven by the probe moving device to move to the upper part of the clamping groove and contact with the quantum chip placed in the clamping groove; the detection device is electrically connected with the probe; the detection is carried out by moving the probe so that the probe is directly contacted with a polar plate of the quantum chip.
The problem of the prior art lies in, through the direct polar plate contact with quantum chip of removal probe, because the contact of probe is less, and the contact position with the quantum chip polar plate is more slight, and is not stable enough with the surface contact of quantum chip to the contact pressure on probe and quantum chip surface is not controlled well, if too big can cause structural damage to the quantum chip, simultaneously, naked quantum chip receives external environment's interference easily.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a quantum chip detection device to solve not enough among the prior art, it can avoid adopting the mode of mobile probe and quantum chip surface polar plate direct contact to detect quantum chip, and is safer, stable to quantum chip's detection.
A quantum chip detection device comprises a probe card slot box, a probe device and a detection device;
the probe card slot box comprises a bottom plate, a cover plate and a connector, wherein a plurality of slots for placing quantum chips are formed in the bottom plate; the cover plate is detachably covered on the surface of the bottom plate, which is provided with the clamping grooves, and through holes are formed in the positions, opposite to the clamping grooves on the bottom plate, of the cover plate; each connector is detachably mounted in each through hole in the cover plate, a probe joint is arranged at one end, away from the bottom plate, of each connector, a pair of contact pins are arranged at one end, close to the bottom plate, of each connector, and each contact pin is in contact with and electrically connected with a positive plate and a negative plate of the quantum chip placed in the clamping groove after the cover plate is covered on the bottom plate;
the probe device comprises a probe seat for mounting the probe card slot box, a probe and a probe moving device, wherein the probe is fixed on the probe moving device and is driven by the probe moving device to move to the upper part of the probe card slot box to be connected with the probe joint;
the detection device is electrically connected with the probe.
Furthermore, each clamping groove is a rectangular sinking groove.
Further, each of the slots on the bottom plate is uniformly arranged on the surface of the bottom plate in a plurality of rows and columns, wherein: the distance between two adjacent card slots in each row is equal, and the distance between two adjacent card slots in each column is equal.
Further, each of the card slots is obliquely arranged with respect to an arrangement direction of each row of the card slots or each column of the card slots.
Further, the probe apparatus further includes an automatic feeding device, the automatic feeding device includes a driving device, a first direction moving device and a second direction moving device, the driving device drives the first direction moving device to move along a first direction, the driving device drives the second direction moving device to move along a second direction, wherein: the first direction and the second direction are both horizontal directions parallel to the surface of the bottom plate of the probe card slot box;
the probe card slot box is installed on the automatic feeding device through the probe seat, wherein: the first direction moving device drives the probe card slot box to move along a first direction, the second direction moving device drives the probe card slot box to move along a second direction, and the first direction is crossed with the second direction.
Further, the first direction and the second direction are perpendicular.
Further, the detection device is a capacitance detection device for detecting the capacitance of the quantum chip or a resistance detection device for detecting the resistance of the quantum chip.
Furthermore, the quantum chip detection device also comprises a display device, and the display device is connected with the detection device.
Furthermore, a hollow cavity is arranged inside the bottom plate, a first air hole is formed in the surface, far away from the clamping grooves, of the bottom plate, a second air hole is formed in the bottom of each clamping groove in the bottom plate, and the first air hole and the second air hole are communicated with the cavity;
the quantum chip detection device further comprises an air suction device, the air suction device comprises an air suction pipe, and an air inlet of the air suction pipe is communicated with the first air hole in the outer portion of the probe card groove box.
Furthermore, the air suction device also comprises a vacuum pump and an electromagnetic valve, wherein the vacuum pump is connected with an air outlet of the air suction pipe, and the electromagnetic valve is installed on the air suction pipe.
Compared with the prior art, the utility model provides a quantum chip detection device, through setting up the probe card groove box, set up the draw-in groove of placing the quantum chip on the bottom plate, the draw-in groove can be better to carry on spacing to the quantum chip, set up the apron above the bottom plate, the apron lid closes on the bottom plate, the interference of external environment can be avoided in the closed box body to the quantum chip, set up the through-hole in the relative position of draw-in groove on the apron, install the connector in the through-hole, a pair of contact pin on the connector and positive plate and negative plate contact conduction of the said quantum chip, when detecting the quantum chip, only need to put through the probe joint of the connector, compare the contact polar plate of direct use probe and quantum chip surface easier, the contact pressure when having avoided using the probe to directly contact positive plate and negative plate of the quantum chip causes the damage to the quantum chip surface simultaneously, the utility model discloses a probe mobile device drive the probe remove and with the probe joint of connector connects, can detect quantum chip, has avoided the direct contact on probe and quantum chip surface to protect quantum chip not receive the pressure destruction, improved the stability and the security that detect.
Drawings
Fig. 1 is a schematic perspective view of a quantum chip detection device according to an embodiment of the present invention;
FIG. 2 is a schematic perspective view of the probe card pod of FIG. 1;
fig. 3 is a structural view illustrating an opened state of the cover plate in the probe card pocket case of fig. 2.
Detailed Description
The embodiments described below by referring to the drawings are exemplary only for explaining the present invention, and should not be construed as limiting the present invention.
Example 1
With reference to fig. 1, 2 and 3, embodiment 1 of the present invention provides a quantum chip inspection apparatus, including a probe card slot box 100, a probe apparatus 200 and an inspection apparatus (not shown); the probe card slot box 100 comprises a bottom plate 110, a cover plate 120 and a connector 130, wherein a plurality of slots 111 for placing quantum chips are formed on the bottom plate 110; the cover plate 120 is detachably covered on the surface of the bottom plate 110, on which the card slots 111 are formed, and through holes 121 are formed in the positions of the cover plate 120, which are opposite to the card slots 111 of the bottom plate 110; each connector 130 is detachably mounted in each through hole 121 on the cover plate 120, a probe connector 131 is disposed at one end of the connector 130 away from the bottom plate 110, a pair of contact pins 132 is disposed at one end close to the bottom plate 110, and each contact pin 132 contacts and electrically connects with a positive plate and a negative plate of the quantum chip placed in the card slot 111 after the cover plate 120 is covered on the bottom plate 110; the probe device 200 comprises a probe seat 210 for mounting the probe card slot box 100, a probe 220 and a probe moving device 230, wherein the probe 220 is fixed on the probe moving device 230 and moves to the upper part of the probe card slot box 100 under the driving of the probe moving device 230 to be connected with the probe connector 131; the detection device is electrically connected to the probe 220.
Compared with the prior art, the utility model provides a quantum chip detection device, through setting up the probe card groove box, set up the draw-in groove of placing the quantum chip on the bottom plate, the draw-in groove can be better to carry on spacing to the quantum chip, set up the apron above the bottom plate, the apron lid closes on the bottom plate, the interference of external environment can be avoided in the closed box body to the quantum chip, set up the through-hole in the relative position of draw-in groove on the apron, install the connector in the through-hole, a pair of contact pin on the connector and positive plate and negative plate contact conduction of the said quantum chip, when detecting the quantum chip, only need to put through the probe joint of the connector, compare the contact polar plate of direct use probe and quantum chip surface easier, the contact pressure when having avoided using the probe to directly contact positive plate and negative plate of the quantum chip causes the damage to the quantum chip surface simultaneously, the utility model discloses a probe mobile device drive the probe remove and with the probe joint of connector connects, can detect quantum chip, has avoided the direct contact on probe and quantum chip surface to protect quantum chip not receive the pressure destruction, improved the stability and the security that detect.
Example 2
With reference to fig. 1, fig. 2 and fig. 3, in this embodiment 2, a quantum chip detection device is provided, which is based on embodiment 1, and further, the card slot 111 is a rectangular sinking slot, and considering that the current quantum chip is mostly rectangular, the rectangular sinking slot can be configured to better limit the quantum chip, so as to improve the accurate positioning of the contact pin 132 on the connector 130 and the contact point on the quantum chip.
Furthermore, the card slots 111 on the bottom plate 110 are uniformly arranged on the surface of the bottom plate 110 in a plurality of rows and columns, wherein: two neighbours in every one the distance between draw-in groove 111 equals, two neighbours in every row the distance between draw-in groove 111 equals, so set up, on one hand improve the ability that bottom plate 110 holds quantum chip quantity, on the other hand even interval be convenient for when later stage installs automation equipment additional probably better control removal feed, on the other hand reduce the cost of manufacture.
Furthermore, as shown in fig. 1, each of the card slots 111 is obliquely arranged with respect to the arrangement direction of each row of the card slots 111 or each column of the card slots 111, and by the oblique arrangement, the quantum chips can be conveniently put in and taken out compared with the case that the card slots 111 are arranged in parallel along the side edges.
Example 3
With reference to fig. 1, fig. 2 and fig. 3, this embodiment 3 provides a quantum chip detecting apparatus, which is based on embodiment 2, and further includes an automatic feeding apparatus, where the automatic feeding apparatus includes a driving apparatus 240, a first direction moving apparatus 250 and a second direction moving apparatus 260, the driving apparatus drives the first direction moving apparatus to move in a first direction, and the driving apparatus drives the second direction moving apparatus to move in a second direction, where: the first direction and the second direction are both horizontal directions parallel to the surface of the bottom plate of the probe card slot box;
the probe card slot case 100 is mounted on the automatic feeding apparatus through the probe holder 210, wherein: the first direction moving device drives the probe card slot box 100 to move along a first direction, the second direction moving device drives the probe card slot box 100 to move along a second direction, and the first direction is crossed with the second direction.
It should be noted that, the driving device 240 may use, but is not limited to, an air cylinder, a motor, etc., and the first direction moving device 250 and the second direction moving device 260 may use a guide rail rod, a lead screw, etc., for example, the driving device 240 may be configured as a pair of air cylinders, a first air cylinder and a second air cylinder, and then the first direction moving device 250 and the second direction moving device 260 are respectively configured as a first guide rail rod and a second guide rail rod corresponding to the first air cylinder and the second air cylinder, a probe card slot box 100 is mounted on the first guide rail rod, and the first guide rail rod and the first air cylinder are mounted on the second guide rail rod together, and the first air cylinder drives the first guide rail rod to move back and forth along the first direction, so that the probe card slot box 100 moves back and forth along the first direction under the driving of the first guide rail rod, the second cylinder drives the second guide rail rod to reciprocate along the second direction, and then the probe card slot box 100 and the first guide rail rod reciprocate along the second direction under the drive of the second guide rail rod, and it should be noted that the driving device may also be connected with a control device in a matching manner, and the control device may be a plc control device, and controls the driving device to move according to preset parameters through preset parameters of the plc control device, which are conventional prior art, and are not described herein again.
Further, the first direction and the second direction are perpendicular to each other, which is advantageous in that, when the card slots 11 are uniformly arranged on the bottom plate 110 of the probe card slot case 100, the card slots 111 can be rapidly moved to a predetermined position by the driving device 240 for a testing operation.
Example 4
Combine attached figure 1, fig. 2 and fig. 3, the utility model provides an embodiment 4 provides a quantum chip detection device, on embodiment 1's basis, it is preferred, detection device is for being used for detecting the electric capacity detection device of quantum chip electric capacity or being used for detecting the resistance detection device of quantum chip resistance, is convenient for detect quantum chip's electric capacity or resistance.
Furthermore, the quantum chip detection device further comprises a display device, and the display device 300 is connected with the detection device and is used for displaying the detected value of the capacitance or resistance of the detected quantum chip.
Example 5
With reference to fig. 1, fig. 2 and fig. 3, in this embodiment 5, on the basis of embodiment 4, further, a hollow cavity (not shown) is disposed inside the bottom plate 110, a first air hole (not shown) is formed on a surface of the bottom plate 110 away from the card slot 111, a second air hole 112 is formed at a bottom of each card slot 111 on the bottom plate 110, and both the first air hole and the second air hole 112 are communicated with the cavity;
the quantum chip detection apparatus further includes an air suction device (not shown), the air suction device includes an air suction pipe, and an air inlet of the air suction pipe is communicated with the first air hole 112 outside the probe card slot box 100.
By adopting the technical scheme of the embodiment, after quantum chips are placed on the probe card slot box 100 in batch, the air suction device is started to suck air from the inside of the probe card slot box 100, and negative pressure is formed inside the probe card slot box 100, so that the quantum chips can be better adsorbed and fixed in the clamping groove 111.
Preferably, the air suction device further comprises a vacuum pump (not shown) and an electromagnetic valve (not shown), the vacuum pump is connected with an air outlet of the air suction pipe, the electromagnetic valve is installed on the air suction pipe, and the air suction pipe can be opened and closed conveniently and quickly through the electromagnetic valve.
The structure, features and effects of the present invention have been described in detail above according to the embodiment shown in the drawings, and the above description is only the preferred embodiment of the present invention, but the present invention is not limited to the implementation scope shown in the drawings, and all changes made according to the idea of the present invention or equivalent embodiments modified to the same changes should be considered within the protection scope of the present invention when not exceeding the spirit covered by the description and drawings.
Claims (10)
1. The utility model provides a quantum chip detection device which characterized in that: the probe card comprises a probe card slot box, a probe device and a detection device;
the probe card slot box comprises a bottom plate, a cover plate and a connector, wherein a plurality of slots for placing quantum chips are formed in the bottom plate; the cover plate is detachably covered on the surface of the bottom plate, which is provided with the clamping grooves, and through holes are formed in the positions, opposite to the clamping grooves on the bottom plate, of the cover plate; each connector is detachably mounted in each through hole in the cover plate, a probe joint is arranged at one end, away from the bottom plate, of each connector, a pair of contact pins are arranged at one end, close to the bottom plate, of each connector, and each contact pin is in contact with and electrically connected with a positive plate and a negative plate of the quantum chip placed in the clamping groove after the cover plate is covered on the bottom plate;
the probe device comprises a probe seat for mounting the probe card slot box, a probe and a probe moving device, wherein the probe is fixed on the probe moving device and is driven by the probe moving device to move to the upper part of the probe card slot box to be connected with the probe joint;
the detection device is electrically connected with the probe.
2. The quantum chip detection device of claim 1, wherein: each clamping groove is a rectangular sinking groove.
3. The quantum chip detection device according to claim 2, wherein: each clamping groove on the bottom plate is uniformly arranged on the surface of the bottom plate in a plurality of rows and columns, wherein: the distance between two adjacent card slots in each row is equal, and the distance between two adjacent card slots in each column is equal.
4. The quantum chip detection device of claim 3, wherein: the card slots are obliquely arranged relative to the arrangement direction of each row of card slots or each column of card slots.
5. The quantum chip detection device of claim 1, wherein:
the probe device further comprises an automatic feeding device, the automatic feeding device comprises a driving device, a first direction moving device and a second direction moving device, the driving device drives the first direction moving device to move along a first direction, the driving device drives the second direction moving device to move along a second direction, wherein: the first direction and the second direction are both horizontal directions parallel to the surface of the bottom plate of the probe card slot box;
the probe card slot box is installed on the automatic feeding device through the probe seat, wherein: the first direction moving device drives the probe card slot box to move along a first direction, the second direction moving device drives the probe card slot box to move along a second direction, and the first direction is crossed with the second direction.
6. The quantum chip detection device of claim 5, wherein: the first direction and the second direction are perpendicular.
7. The quantum chip detection device of claim 1, wherein: the detection device is a capacitance detection device for detecting the capacitance of the quantum chip or a resistance detection device for detecting the resistance of the quantum chip.
8. The quantum chip detection device of claim 1, wherein: the quantum chip detection device further comprises a display device, and the display device is connected with the detection device.
9. The quantum chip detection device of claim 1, wherein: a hollow cavity is arranged in the bottom plate, a first air hole is formed in the surface, far away from the clamping grooves, of the bottom plate, a second air hole is formed in the bottom of each clamping groove in the bottom plate, and the first air hole and the second air hole are communicated with the cavity;
the quantum chip detection device further comprises an air suction device, the air suction device comprises an air suction pipe, and an air inlet of the air suction pipe is communicated with the first air hole in the outer portion of the probe card groove box.
10. The quantum chip detection device of claim 9, wherein: the air suction device further comprises a vacuum pump and an electromagnetic valve, the vacuum pump is connected with an air outlet of the air suction pipe, and the electromagnetic valve is installed on the air suction pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920558779.7U CN209927980U (en) | 2019-04-23 | 2019-04-23 | Quantum chip detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920558779.7U CN209927980U (en) | 2019-04-23 | 2019-04-23 | Quantum chip detection device |
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| Publication Number | Publication Date |
|---|---|
| CN209927980U true CN209927980U (en) | 2020-01-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920558779.7U Active CN209927980U (en) | 2019-04-23 | 2019-04-23 | Quantum chip detection device |
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| CN (1) | CN209927980U (en) |
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- 2019-04-23 CN CN201920558779.7U patent/CN209927980U/en active Active
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