CN209927102U - Optical element in-place surface shape detection device with any posture - Google Patents
Optical element in-place surface shape detection device with any posture Download PDFInfo
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- CN209927102U CN209927102U CN201921157295.8U CN201921157295U CN209927102U CN 209927102 U CN209927102 U CN 209927102U CN 201921157295 U CN201921157295 U CN 201921157295U CN 209927102 U CN209927102 U CN 209927102U
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Abstract
The utility model discloses an optical element on-site surface shape detection device with any posture, which has a flexible structure, and an industrial robot replaces various supporting and adjusting platforms and devices of an interferometer, so that the position and the posture of the interferometer can be adjusted more conveniently, and meanwhile, an optical element supporting mechanism is simplified, so that the optical element supporting mechanism does not need to have a freedom degree adjusting function; the method is novel, and the dynamic interferometer is combined with the industrial robot, so that the problem of in-place surface shape measurement under the gravity inclined posture is solved; the application range is wide, and the surface shape measurement problem under various postures can be simultaneously met; the environment adaptability is good, and the interference measurement can be expanded to various measurement environments by using the dynamic interferometer, and the measurement precision and the repeatability are ensured; the measurement is simple and efficient, an interference fringe monitoring system is introduced, automatic adjustment of interference fringes is achieved, and the measurement efficiency is improved.
Description
Technical Field
The utility model relates to an optical element interferometry technical field, concretely relates to arbitrary gesture optical element shape of face detection device on throne.
Background
The optical element has wide application in the fields of astronomy, space optics, military, energy and the like, the surface shape detection of the optical element is an essential link in workshop detection and optical engineering, and the interferometer measurement is used as a reliable optical surface shape measurement detection means and has wide application. However, the conventional interferometer measurement is easily affected by environmental factors such as vibration and air disturbance, and has strict requirements on the detection environment and the detection platform. Therefore, the conventional interferometer has only two measurement postures, namely a vertical posture and a horizontal posture, and the surface shape measurement under the gravity inclined posture is very difficult to be completed. It is urgent to solve the above problems.
SUMMERY OF THE UTILITY MODEL
For solving traditional interferometry flexibility not enough, can't satisfy the technical problem that the shape of face detected the demand in position under the multiple slope gesture simultaneously, the utility model provides an arbitrary gesture optical element shape of face detection device in position.
The technical scheme is as follows:
the utility model provides an arbitrary gesture optical element shape of face detection device in place which the main points lie in: including industrial robot, dynamic interferometer and interference fringe monitored control system, the dynamic interferometer is installed on industrial robot through connecting frock detachably, is provided with the transmission standard mirror at the front end of this dynamic interferometer, interference fringe monitored control system is including the interference fringe display that can carry out data transmission with the dynamic interferometer and can carry out data transmission's image monitor with industrial robot, the interference fringe display is used for showing the interference fringe picture that the dynamic interferometer gathered, the image monitor is used for monitoring the interference fringe picture that interference fringe display shows.
By adopting the structure, the dynamic interferometer reduces the strict requirement of the interferometric measurement on environmental factors, so that the measurement of the interferometer does not depend on the shockproof performance of a measurement platform any more, the application environment of the interferometric measurement is expanded, the measurement time is shortened, and the increasingly diverse and strict requirements of workshop detection and optical engineering are met; in addition, the dynamic interferometer can also dynamically record the change process of the wavefront, and can improve the collimation and aberration adjustment efficiency of the optical system. The position and posture (pose for short) adjusting mechanism of the industrial robot is more simple and flexible in pose adjustment through multi-axis operation of the industrial robot, and the adjusting requirements of various poses can be met easily. The interference fringe monitoring system is combined with an industrial robot to achieve real-time monitoring and automatic adjustment of interference fringes and improve the measuring efficiency. Therefore, the utility model provides a traditional interferometric flexibility not enough, can't satisfy the technical problem that the shape of face detected the demand in position under the multiple slope gesture simultaneously.
Preferably, the method comprises the following steps: the transmission standard mirror is arranged at the front end of the dynamic interferometer through a two-dimensional adjusting mirror frame. By adopting the structure, the position of the transmission standard mirror can be simply, conveniently and reliably adjusted.
Preferably, the method comprises the following steps: the image monitor is a dynamic high-definition camera. By adopting the structure, the method is stable and reliable, and can accurately identify the interference fringe pattern displayed on the image monitor.
Preferably, the method comprises the following steps: the upper end face, the lower end face and the rear end face of the dynamic interferometer can be connected with the connecting tool. The structure more than adopting can be connected with industrial robot's terminal ring flange in a flexible way to improve interferometry's flexibility, satisfy the in-position shape of face detection demand under the multiple slope gesture.
Preferably, the method comprises the following steps: an optical element supporting mechanism is arranged beside the industrial robot. The structure is adopted, so that the optical element is convenient to position.
Compared with the prior art, the beneficial effects of the utility model are that:
the optical element in-place surface shape detection device with any posture adopting the technical scheme has the following advantages:
1. the structure is flexible, the industrial robot replaces various supporting and adjusting platforms and devices of the interferometer, so that the position and the posture of the interferometer can be adjusted more conveniently, and meanwhile, the optical element supporting mechanism is simplified, so that the interferometer does not need to have a freedom degree adjusting function;
2. the method is novel, and the dynamic interferometer is combined with the industrial robot, so that the problem of in-place surface shape measurement under the gravity inclined posture is solved;
3. the application range is wide, and the surface shape measurement problem under various postures can be simultaneously met;
4. the environment adaptability is good, and the interference measurement can be expanded to various measurement environments by using the dynamic interferometer, and the measurement precision and the repeatability are ensured;
5. the measuring is simple and efficient, an interference fringe monitoring system is introduced, automatic adjustment of interference fringes can be achieved by combining a control system of an industrial robot, and the measuring efficiency is improved.
Drawings
FIG. 1 is a schematic diagram of the apparatus of the present invention measuring a vertically placed mirror to be measured;
FIG. 2 is a schematic diagram of the apparatus of the present invention for measuring a horizontally disposed reflector to be measured;
fig. 3 is a schematic diagram of the device of the present invention for measuring the reflector to be measured placed in an inclined manner.
Detailed Description
The present invention will be further described with reference to the following examples and accompanying drawings.
As shown in fig. 1-3, an optical element in-place surface shape detection device with any posture mainly comprises an industrial robot 1, a dynamic interferometer 2 and an interference fringe monitoring system 8.
The end of the industrial robot 1 is adjustable in six degrees of freedom (x, y, z, Rx, Ry, Rz), wherein x, y, z represents a position component and Rx, Ry, Rz represents a pose component rotating around the x, y, z direction. The end of the industrial robot 1 is provided with a flange 1a, and the dynamic interferometer 2 is detachably mounted on the industrial robot 1 through a connecting tool 3, that is, the connecting tool 3 can be detachably mounted on the flange 1 a. So that the industrial robot 1 can adjust the position and attitude of the dynamic interferometer 2 in six degrees of freedom.
The dynamic interferometer 2 is preferably adopted in the embodiment, and the appearance and commercialization of the dynamic interferometer 2 reduce the strict requirements of the interferometric measurement on environmental factors, so that the measurement of the interferometer does not depend on the shockproof performance of a measurement platform any more, the application environment of the interferometric measurement is expanded, the measurement time is shortened, and the increasingly diverse and strict requirements of workshop detection and optical engineering are met; in addition, the dynamic interferometer 2 can also dynamically record the change process of the wavefront, and can improve the collimation and aberration adjustment efficiency of the optical system.
A transmission standard mirror 5 is arranged at the front end of the dynamic interferometer 2, and specifically, the transmission standard mirror 5 is mounted at the front end of the dynamic interferometer 2 through a two-dimensional adjusting mirror frame 4. The two-dimensional adjusting frame 4 can adjust the two degrees of freedom of deflection and pitching. The dynamic interferometer 2 can fix the measurement cavity length between the transmission standard mirror 5 and the reflector 6 to be measured, realize the surface shape measurement of the designated surface (the front surface or the rear surface of the optical element to be measured), and reduce the surface treatment requirements (such as coating or rear surface roughening) of the optical element to be measured. When the dynamic interferometer 2 is used for surface shape measurement, multiple times of measurement averaging is needed to reduce the interference of environmental factors.
Referring to fig. 1 to fig. 3, the upper end surface, the lower end surface, and the rear end surface of the dynamic interferometer 2 can be connected to the connection tool 3. Specifically, the connecting tool 3 can bear the weight of the used dynamic interferometer 2 without deformation; the connecting tool 3 has a certain protection effect on the dynamic interferometer 2; the connecting tool 3 can have various structural schemes according to the stress condition allowed by the shell of the dynamic interferometer 2. Referring to fig. 1, the end of an industrial robot 1 is connected to the top plane of a dynamic interferometer 2, enabling the dynamic interferometer 2 to be used in a "suspended" state. Referring to fig. 2, the end of the industrial robot 1 is connected to the back (tail) plane of the dynamic interferometer 2, enabling the dynamic interferometer 2 to be used in an "extended" state. Referring to fig. 3, the end of the industrial robot 1 is connected to the bottom plane of the dynamic interferometer 2, enabling the dynamic interferometer 2 to be used in a "lifted" state.
An optical component support mechanism 7 is provided next to the industrial robot 1, and the optical component support mechanism 7 can mount and place the mirror to be measured 6 and the standard mirror. In this embodiment, since the dynamic interferometer 2 is carried by the industrial robot 1, the optical element support mechanism 7 does not need a dimension adjustment function such as displacement and angle, and only needs to reliably ensure the installation stability of the mirror to be measured 6 and the standard mirror.
Referring to fig. 1 to 3, the interference fringe monitoring system 8 includes an interference fringe display 8a capable of data transmission with the dynamic interferometer 2 and an image monitor 8b capable of data transmission with the industrial robot 1. The interference fringe display 8a is used for displaying the interference fringe image collected by the dynamic interferometer 2, and the image monitor 8b is used for monitoring the interference fringe image displayed by the interference fringe display 8 a. Further, the image monitor 8b is a dynamic high-definition camera. The interference fringe pattern that developments high definition digtal camera real time monitoring interference fringe display 8a shows through data feedback, makes industrial robot 1 can carry out adaptability's regulation automatically, and the gesture of accurate control dynamic interferometer 2 has realized the automatic adjustment of interference fringe, has improved measurement of efficiency. Specifically, the interference fringe monitoring system 8 is internally provided with an algorithm module, and the algorithm module is used for identifying the number and the direction of the interference fringes and transmitting data information to the control system of the industrial robot 1, so that the industrial robot 1 can automatically perform adaptive adjustment and accurately control the posture of the dynamic interferometer 2.
A method for detecting an in-place surface shape of an optical element with any posture is carried out according to the following steps:
s1: calibrating a dynamic interferometer 2
The two-dimensional adjusting mirror frame 4 is adjusted to make the transmission standard mirror 5 perpendicular to the optical axis of the dynamic interferometer 2.
S2: the reflecting mirror 6 to be measured is installed on an optical element supporting mechanism 7, the industrial robot 1 automatically adjusts the pose of the dynamic interferometer 2 according to the feedback of the interference fringe monitoring system 8, so that the emergent light beam emitted by the dynamic interferometer 2 is reflected by the reflecting mirror 6 to be measured and returns to the dynamic interferometer 2, the number of interference fringes measured by the dynamic interferometer 2 is minimum, and the dynamic interferometer 2 is used for carrying out interference measurement on the reflecting mirror 6 to be measured after the interference fringe monitoring is completed.
Specifically, the step S2 is performed according to the following steps:
s21: coarse adjustment of the pose of the dynamic interferometer 2
According to the position and the posture of the reflector 6 to be measured, the posture of the industrial robot 1 is adjusted, the emergent light beam emitted by the dynamic interferometer 2 returns to the dynamic interferometer 2 after being reflected by the reflector 6 to be measured, the light beam emitted by the dynamic interferometer 2 covers the effective aperture of the reflector 6 to be measured as far as possible, and in the whole process, the dynamic interferometer 2 is guaranteed not to be in contact collision with other objects in the moving process.
S22: fine tuning of the pose of the dynamic interferometer 2
The industrial robot 1 automatically adjusts the pose of the dynamic interferometer 2 according to the feedback of the interference fringe monitoring system 8, so that the number of interference fringes measured by the dynamic interferometer 2 is minimum. Specifically, the image monitor 8b monitors the interference fringe pattern displayed by the interference fringe display 8a in real time, feeds back the number and direction of the identified interference fringes to the control system of the industrial robot 1, automatically adjusts the terminal attitude of the industrial robot 1, changes the included angle between the transmission standard mirror 5 and the reflector 6 to be measured, and finally obtains the number of the interference fringes as small as possible.
S23: performing dynamic measurements
And carrying out interference measurement on the reflector 6 to be measured by using the dynamic interferometer 2. Further, a plurality of interferometric measurements are performed on the mirror 6 to be measured, and an average value W1 is obtained for the results of the plurality of measurements. It is noted that the number of averaged measurements is related to the disturbance of the air flow in the environment. To reduce the effect of random airflow disturbance, a fan or other device may be used in the measurement to uniformly interfere with the airflow in the chamber, or the length of the interference chamber may be reduced to reduce the amount of random error caused by the airflow disturbance.
S3: measuring the surface shape of a standard reflector
Installing a standard reflector on the optical element supporting mechanism 7, enabling the posture of the standard reflector to be the same as that of the reflector 6 to be measured in the step S2, automatically adjusting the posture of the dynamic interferometer 2 by the industrial robot 1 according to the feedback of the interference fringe monitoring system 8, enabling an emergent beam emitted by the dynamic interferometer 2 to return to the dynamic interferometer 2 after being reflected by the standard reflector, enabling the number of interference fringes measured by the dynamic interferometer 2 to be minimum, carrying out interference measurement on the standard reflector by using the dynamic interferometer 2 after the interference measurement is completed, and enabling a measurement result to be used as a system error. Further, a plurality of interferometric measurements are made on the standard mirror, and the results of the plurality of measurements are averaged as the systematic error W0.
S4: and subtracting the system error obtained in the step S3 from the measurement result in the step S2, and obtaining a surface shape measurement result W of the to-be-measured mirror 6 in the posture, which is W1-W0, as the surface shape measurement result of the to-be-measured mirror 6 in the posture.
Finally, it should be noted that the above description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and the scope of the present invention.
Claims (5)
1. An optical element in-place surface shape detection device with any posture is characterized in that: including industrial robot (1), dynamic interferometer (2) and interference fringe monitored control system (8), install on industrial robot (1) through connecting frock (3) detachably dynamic interferometer (2), be provided with transmission standard mirror (5) at the front end of this dynamic interferometer (2), interference fringe monitored control system (8) are including interference fringe display (8a) that can carry out data transmission with dynamic interferometer (2) and can carry out data transmission's image monitor (8b) with industrial robot (1), interference fringe display (8a) are used for showing the interference fringe picture that dynamic interferometer (2) gathered, image monitor (8b) are used for monitoring the interference fringe picture that interference fringe display (8a) show.
2. The arbitrary-posture optical element on-site surface shape detection device according to claim 1, wherein: the transmission standard mirror (5) is arranged at the front end of the dynamic interferometer (2) through a two-dimensional adjusting mirror frame (4).
3. The arbitrary-posture optical element on-site surface shape detection device according to claim 1, wherein: the image monitor (8b) is a dynamic high-definition camera.
4. The arbitrary-posture optical element on-site surface shape detection device according to claim 1, wherein: the upper end face, the lower end face and the rear end face of the dynamic interferometer (2) can be connected with the connecting tool (3).
5. The arbitrary-posture optical element on-site surface shape detection device according to claim 1, wherein: an optical element support mechanism (7) is arranged beside the industrial robot (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921157295.8U CN209927102U (en) | 2019-07-22 | 2019-07-22 | Optical element in-place surface shape detection device with any posture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921157295.8U CN209927102U (en) | 2019-07-22 | 2019-07-22 | Optical element in-place surface shape detection device with any posture |
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| CN209927102U true CN209927102U (en) | 2020-01-10 |
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| CN201921157295.8U Expired - Fee Related CN209927102U (en) | 2019-07-22 | 2019-07-22 | Optical element in-place surface shape detection device with any posture |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110332905A (en) * | 2019-07-22 | 2019-10-15 | 中国工程物理研究院激光聚变研究中心 | Any attitude optical element surface shape detection apparatus in place and method |
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2019
- 2019-07-22 CN CN201921157295.8U patent/CN209927102U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110332905A (en) * | 2019-07-22 | 2019-10-15 | 中国工程物理研究院激光聚变研究中心 | Any attitude optical element surface shape detection apparatus in place and method |
| CN110332905B (en) * | 2019-07-22 | 2024-05-07 | 中国工程物理研究院激光聚变研究中心 | Device and method for detecting in-situ surface shape of optical element in any posture |
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