CN209919948U

CN209919948U - Adjusting device based on cutting of thin blade

Info

Publication number: CN209919948U
Application number: CN201920172748.8U
Authority: CN
Inventors: 刘勇辉; 谢海龙; 周福海; 张志攀; 余俊华; 张红江; 高云峰
Original assignee: Han s Laser Technology Industry Group Co Ltd
Current assignee: Shenzhen Hans Semiconductor Equipment Technology Co Ltd
Priority date: 2019-01-30
Filing date: 2019-01-30
Publication date: 2020-01-10
Anticipated expiration: 2029-01-30

Abstract

The utility model provides an adjusting device based on thin blade cutting, include: the device comprises a gantry, a fixed table, a movable table, a bearing plate, a blade and an adjusting assembly; the fixed table is fixed on the gantry, the movable table reciprocates up and down relative to the fixed table through the driving assembly, the bearing plate is connected with the movable table through a support bearing, a clamp is fixed on the bearing plate, and the clamp clamps the blade; the adjusting assembly is arranged on the movable table and comprises a first driving motor, a first lead screw nut and an adjusting piece, the first driving motor is fixed on the movable table, the first driving motor drives the first lead screw to rotate, the first lead screw nut is in threaded connection with the first lead screw, one end of the adjusting piece is connected with the first lead screw nut, a groove is formed in the bearing plate, and the other end of the adjusting piece is limited in the groove. By adopting the technical scheme, the problems of poor cutting quality and low cutting efficiency caused by too long time of the tool changing and adjusting process due to poor mounting precision of the blade of the cutting device are solved.

Description

Adjusting device based on cutting of thin blade

Technical Field

The utility model relates to a technical field of semiconductor micromachining, concretely relates to adjusting device based on thin blade cutting.

Background

In the micro-machining process, particularly in the semiconductor industry, the size of a product to be machined is required to be very precise and even required to be in a micron order. How to package small-sized chips has become an important issue in recent years. Taking the development of LED chip materials as an example, the optimization of light structure and packaging technology, the higher the power of a single chip, the better and better the light efficiency and cost performance of the chip, and the miniaturization of LED chips has become a trend under the support of such background.

In the chip packaging process, the chips are arranged in an array and are generally connected with each other by using a glue layer or a resin material, so that the chips are suitable for being processed by using a blade cutting mode. But the width between the chips is about 0.5mm generally, the deviation difference of the cutting position compared with the ideal cutting path at the center is required to be less than 10 microns during cutting, so that the product is not cut, and the size of the core particles is ensured to be uniform; the whole product is arranged on the plane carrying platform, and the whole product is required to be cut off in the vertical direction and cannot be adhered. In accordance with these requirements, a thin blade is generally used for cutting, and the cutting devices in the prior art mainly have the following two problems: the method comprises the following steps that firstly, poor cutting of a product is caused due to the problem of blade mounting accuracy, and the phenomenon that the product cannot be completely cut off due to the fact that a cutting position deviates from a cutting path is reflected; secondly, because the cutting blade adopts the thin blade, therefore easy deformation and damage need often to change, but it is difficult to guarantee the blade installation accuracy after every change. The cutter changing and adjusting affect the cutting efficiency, and the problem of the mounting precision of the blade also affects the product yield.

SUMMERY OF THE UTILITY MODEL

The utility model aims to provide an adjusting device based on thin blade cutting to solve the problem that the cutting quality that cutting device among the prior art arouses because of the installation accuracy of blade is bad is poor and the cutting efficiency that the tool changing accent sword process time is too long and arouses is low.

In order to achieve the aim, the utility model provides a cutting adjusting device based on a thin blade, which comprises a gantry, a fixed table, a movable table, a bearing plate, a blade and an adjusting component; the fixed table is fixed on the gantry, the movable table reciprocates up and down relative to the fixed table through a driving assembly, the bearing plate is connected with the movable table through a support bearing, a clamp is fixed on the bearing plate, and the clamp clamps and fixes the blade; the adjusting component is arranged on the movable table and comprises a first driving motor, a first lead screw nut and an adjusting piece, the first driving motor is fixed on the movable table, the first driving motor drives the first lead screw to rotate, the first lead screw nut is in threaded connection with the first lead screw, one end of the adjusting piece is connected with the first lead screw nut, a groove is formed in the bearing plate, and the other end of the adjusting piece is limited in the groove.

Further, both sides of the support bearing are provided with the adjusting assemblies, and the two adjusting pieces are symmetrically arranged relative to the central axis of the support bearing.

Further, the extending axes of the two adjusting pieces and the central axis of the supporting bearing are positioned in the same horizontal plane.

Furthermore, the adjusting part comprises a fixed seat and a roller connected with the fixed seat, the fixed seat is fixedly connected with the first lead screw nut, a wheel shaft of the roller is fixedly connected with the fixed seat, and an outer ring of the roller can rotate.

Furthermore, the adjusting assembly further comprises a first guide rail and a first sliding block matched with the first guide rail, the first guide rail is fixed on the movable table, and the first sliding block is fixedly connected with the fixed seat.

Furthermore, the adjusting assembly further comprises a connecting plate and a guide rail, the guide rail is arranged on the movable table, a sliding block which moves in a matched mode with the guide rail is arranged on the connecting plate, the connecting plate is fixedly connected with an inner ring of the supporting bearing, and an outer ring of the supporting bearing is fixedly connected with the bearing plate.

Further, adjusting device based on thin blade cutting still includes first clamping ring and second clamping ring, first clamping ring is used for supporting tightly support bearing's outer lane, the second clamping ring is used for supporting tightly support bearing's inner circle.

Further, its characterized in that, the regulating assembly still includes response mechanism, response mechanism includes response piece and symmetric distribution is in the photoelectric switch of response piece both sides, the response piece with the fixing base is connected, photoelectric switch sets up on the movable table.

Furthermore, the gantry comprises a cross beam and two cross beam bases supported at two ends of the cross beam, adjusting blocks are fixed on the cross beam bases and located on two sides of the cross beam, adjusting holes are formed in the adjusting blocks, adjusting bolts are arranged in the adjusting holes, and the two opposite adjusting bolts abut against the cross beam tightly.

Further, the driving assembly comprises a second driving motor, a second lead screw nut and a second guide rail, and the second driving motor is fixed on the fixed table; the second lead screw is arranged on the fixed table, the second lead screw nut is fixedly connected with the movable table, second guide rails are arranged on two sides of the second lead screw, and the movable table is provided with a second sliding block which moves in a matched mode with the second guide rails.

Compared with the prior art, the beneficial effects of the utility model reside in that: the bearing plate is connected with the movable table through the support bearing, so that the bearing plate can move up and down and rotate circumferentially; the blade is connected with the bearing plate through the clamp, namely the blade can move up and down to cut a product to be processed, and the parallelism between the cutting edge of the blade and the product to be processed can also be kept through circumferential rotation; in order to improve the adjusting precision and speed of the blade, the adjusting assembly is arranged on the movable table and comprises a first driving motor, a first lead screw nut and an adjusting piece, the first driving motor is fixed on the movable table and drives the first lead screw to rotate, the first lead screw nut is in threaded connection with the first lead screw, one end of the adjusting piece is connected with the first lead screw nut, a groove is formed in the bearing plate, and the other end of the adjusting piece is limited in the groove; according to the technical scheme, the levelness of the blade edge is finely adjusted by driving the adjusting piece to do up-and-down micro-motion through the transmission of the first screw rod according to the advantage that the transmission precision of the screw rod is high, and the problems that the cutting quality of the cutting device is poor and the cutting efficiency is low due to the fact that the installation precision of the blade is poor and the time of the cutter changing and adjusting process is too long are solved.

Drawings

The accompanying drawings, which form a part of the present application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the invention and not to limit the invention. In the drawings:

fig. 1 is a schematic structural diagram of an embodiment of an adjusting device based on thin blade cutting according to the present invention;

fig. 2 is a partial schematic structural view of an embodiment of an adjusting device based on thin blade cutting according to the present invention;

fig. 3 is a partial schematic structural view of an embodiment of an adjusting device based on thin blade cutting according to the present invention;

fig. 4 is a partial schematic structural view of an embodiment of an adjusting device based on thin blade cutting according to the present invention;

fig. 5 is a partial schematic structural view of an embodiment of an adjusting device based on thin blade cutting according to the present invention;

FIG. 6 is a cross-sectional view taken at angle A-A of FIG. 5;

fig. 7 is a partial schematic structural view of an embodiment of an adjusting device based on thin blade cutting according to the present invention;

fig. 8 is a partial schematic structural diagram of an embodiment of an adjusting device based on thin blade cutting according to the present invention.

Wherein the figures include the following reference numerals:

1. a gantry; 11. a cross beam; 12. a beam base; 121. a waist-shaped hole; 13. an adjusting block; 14. adjusting the bolt; 2. a fixed table; 3. a movable table; 41. a carrier plate; 411. a groove; 42. a support bearing; 421. a first pressure ring; 422. a second pressure ring; 51. a blade; 52. a clamp; 521. a fixing plate; 522. a clip; 61. a first drive motor; 611. a first motor base; 62. a first lead screw; 621. a first lead screw base; 631. a fixed seat; 632. a roller; 64. a first guide rail; 65. a connecting plate; 66. a guide rail; 671. an induction sheet; 672. a photoelectric switch; 673. a switch base; 68. a first coupling; 71. a second drive motor; 711. a second motor base; 72. a second lead screw; 721. a second lead screw base; 73. a second guide rail; 74. a second coupling; 81. a grating scale; 82. a reading head; 91. a drag chain mounting plate.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.

Now, the details of the present invention will be described below by way of example with reference to fig. 1 to 6, and an adjustment device based on thin blade cutting includes: the device comprises a gantry 1, a fixed table 2, a movable table 3, a bearing plate 41, a blade 51 and an adjusting assembly; the fixed table 2 is fixed on the gantry 1, the movable table 3 reciprocates up and down relative to the fixed table 2 through a driving assembly, the bearing plate 41 is connected with the movable table 3 through a supporting bearing 42, a clamp 52 is fixed on the bearing plate 41, and the clamp 52 clamps the fixed blade 51; the adjusting assembly is arranged on the movable table 3 and comprises a first driving motor 61, a first lead screw 62, a first lead screw nut and an adjusting piece, the first driving motor 61 is fixed on the movable table 3, the first driving motor 61 drives the first lead screw 62 to rotate, the first lead screw nut is in threaded connection with the first lead screw 62, one end of the adjusting piece is connected with the first lead screw 62 nut, a groove 411 is formed in the bearing plate 41, and the other end of the adjusting piece is limited in the groove 411.

The bearing plate 41 is connected with the movable table 3 through the support bearing 42, so that the bearing plate 41 is ensured to move up and down and rotate in the circumferential direction; the blade 51 is connected with the bearing plate 41 through the clamp 52, namely the blade 51 can move up and down to cut a product to be processed, and the parallelism between the cutting edge of the blade 51 and the product to be processed can be maintained through circumferential rotation; in order to improve the adjustment precision and speed of the blade 51, the adjustment assembly is arranged on the movable table 3 and comprises a first driving motor 61, a first lead screw 62, a first lead screw nut and an adjustment piece, the first driving motor 61 is fixed on the movable table 3, the first driving motor 61 drives the first lead screw 62 to rotate, the first lead screw nut is in threaded connection with the first lead screw 62, one end of the adjustment piece is connected with the first lead screw nut, a groove 411 is formed in the bearing plate 41, and the other end of the adjustment piece is limited in the groove 411; first driving motor 61 is fixed on movable table 3 through first motor base 611, and first lead screw 62 is then connected with first driving motor 61's power take off end through first shaft coupling 68, and preferably, first lead screw 62's both ends all set up on movable table 3 through first lead screw base 621, have guaranteed the stability of first lead screw 62 operation. This technical scheme drives the adjusting part through the transmission of first lead screw 62 and moves the levelness that comes the accurate adjustment blade 51 blade up-and-down according to the high advantage of lead screw transmission precision, has solved the poor and too long problem of cutting efficiency that arouses of tool changing accent sword process time of cutting device cutting quality because of the installation accuracy of blade 51 is bad.

Referring to fig. 1, the adjusting device adjusts the parallelism of the cutting edge of the blade 51 and the product to be cut, that is, the adjusting components are only arranged at the left and right sides of the supporting bearing 42 to horizontally adjust the blade 51, in order to ensure the stability of the device, the two sides of the supporting bearing 42 are both provided with the adjusting components, and the two adjusting components independently move and are symmetrically arranged relative to the central axis of the supporting bearing 42. At this time, the extending axes of the two adjusting members are located in the same horizontal plane, and are not located in the same horizontal plane as the central axis of the support bearing 42; alternatively, the extending axes of the two adjusting members are located in the same horizontal plane as the central axis of the support bearing 42. Preferably, the extending axes of the two adjusting members in the present embodiment are located in the same horizontal plane with the central axis of the supporting bearing 42, and as shown in fig. 1, the parallelism of the blade 51 and the cutting path can be adjusted by only adjusting any one set of adjusting assembly.

The adjusting part comprises a fixed seat 631 and a roller 632 connected with the fixed seat 631, the fixed seat 631 is fixedly connected with the first lead screw nut, a wheel shaft of the roller 632 is fixedly connected with the fixed seat 631, and an outer ring of the roller 632 is rotatable. Meanwhile, the adjusting assembly further comprises a first guide rail 64 and a first sliding block matched with the first guide rail 64, the first guide rail 64 is fixed on the movable table 3, and the first sliding block is fixedly connected with the fixed seat 631. When the blade 51 is adjusted, the first lead screw 62 rotates to drive the fixing base 631 to move upwards or downwards, the first guide rail 64 and the first slider provide stable guidance for the fixing base 631, at this time, the bearing plate 41 is horizontally adjusted along with the upward or downward movement of the roller 632, and the outer ring of the roller 632 can rotate, so that the friction force between the roller 632 and the bearing plate 41 is reduced.

As shown in fig. 5 and 6, the adjusting assembly further includes a connecting plate 65 and a guide rail 66, the guide rail 66 is disposed on the movable table 3, a slider moving in cooperation with the guide rail 66 is disposed on the connecting plate 65, the connecting plate 65 is fixedly connected to an inner ring of the support bearing 42, and an outer ring of the support bearing 42 is fixedly connected to the bearing plate 41. The adjusting device based on the cutting of the thin blade 51 further comprises a first pressing ring 421 and a second pressing ring 422, wherein the first pressing ring 421 is used for abutting against an outer ring of the supporting bearing 42, and the second pressing ring 422 is used for abutting against an inner ring of the supporting bearing 42. The first pressing ring 421 and the second pressing ring 422 respectively ensure the axial positioning of the inner ring and the outer ring of the support bearing 42; and simultaneously, the dust-proof and sealing functions are realized on the support bearing 42, so that the normal work of the support bearing is ensured.

The adjusting assembly further comprises an induction mechanism, the induction mechanism comprises an induction sheet 671 and photoelectric switches 672 symmetrically distributed on two sides of the induction sheet 671, the induction sheet 671 is connected with the fixing seat 631, and the photoelectric switches 672 are arranged on the movable table 3 through the switch base 673. The area where the sensor sheet 671 moves between the two symmetrical photoelectric switches 672 is used as positive and negative limit for the up-and-down movement of the roller 632.

Referring to fig. 7, the gantry 1 comprises a beam 11 and two beam bases 12 supported at two ends of the beam 11, the beam 11 is made of granite, and the grinding flatness of the mounting surface is high; the crossbeam base 12 is fixed with an adjusting block 13, the adjusting block 13 is positioned on two sides of the crossbeam 11, an adjusting hole is formed on the adjusting block 13, an adjusting bolt 14 is arranged in the adjusting hole, and the two opposite adjusting bolts 14 are abutted against the crossbeam 11; meanwhile, the support end of the base of the cross beam 11 is provided with the waist-shaped hole 121, so that the cross beam 11 can be adjusted conveniently before being locked by the screw, namely the adjusting bolt 14 is screwed, the position of the cross beam 11 is adjusted, the blade edge of the blade 51 is ensured to be parallel to the cutting path of the product, and then the cross beam 11 is locked by the screw through the waist-shaped hole 121.

Referring to fig. 2, the driving assembly includes a second driving motor 71, a second lead screw 72, a second lead screw nut, and a second guide rail 73, the second driving motor 71 is fixed on the fixed platform 2 through a second motor base 711, a power output end of the second driving motor 71 is connected with the second lead screw 72 through a second coupling 74, the second lead screw 72 is disposed on the fixed platform 2 through a second lead screw base 721, the second lead screw nut is screwed on the second lead screw 72 and is fixedly connected with the movable platform 3, the second guide rail 73 is disposed on both sides of the second lead screw 72, and the movable platform 3 is provided with a second slider that moves in cooperation with the second guide rail 73. Preferably, the number of the second guide rails 73 is two, and the two second guide rails 73 are symmetrically arranged on two sides of the second lead screw 72; the two second sliding blocks are symmetrically arranged on two sides of the second lead screw nut and correspond to the second guide rails 73 one by one.

Preferably, the adjusting device based on the cutting of the thin blade 51 further comprises a detector, the detector comprises a grating scale 81 and a reading head 82, the grating scale 81 is fixed on the fixed table 2, the reading head 82 is fixed with the movable table 3, the relative position of the grating scale 81 is fed back, and the adjusting device has micrometer-scale repeated positioning accuracy. Meanwhile, the adjusting device further comprises a drag chain and a drag chain mounting plate 91 for mounting the drag chain, the movable table 3 and the adjusting piece in the adjusting device do up-and-down reciprocating motion in the process of continuously cutting and adjusting products, and the drag chain can play a role in dragging and protecting cables.

The fixture 52 comprises a fixing plate 521 and a clamping piece 522, one side of the fixing plate 521 is fixed on the bearing plate 41, the other side of the fixing plate 521 is connected with the clamping piece 522 to clamp the blade 51, the clamping surface is finely ground to ensure that the blade 51 is not deformed after being clamped, the blade 51 is made of high-strength tungsten steel, the blade edge is sharp and has no notch, and the straightness is less than 10 microns.

The utility model discloses a lead screw drive's principle comes 3 relative fixed stations 2 of control movable table to do up-and-down motion, and blade 51 is fixed through anchor clamps 52 and loading board 41, and loading board 41 then is connected with movable table 3 and realizes blade 51 up-and-down motion in order to treat the processing product and cut. In the technical scheme, the bearing plate 41 is connected with the movable table 3 through the supporting bearing 42, the adjusting components are arranged on two sides of the supporting bearing 42, the adjusting components rotate through the first lead screw 62 to gradually drive the roller 632 to move so as to adjust the blade 51, meanwhile, the adjusting bolt 14 can be screwed to move the movable beam 11 so as to align the blade 51 and the cutting channel, so that the cutting device is guaranteed to cut off a to-be-processed product, the cutting quality is improved, and the time required by the tool changing and adjusting process is shortened so as to improve the cutting efficiency.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

The above is only a preferred embodiment of the present invention, and is not intended to limit the present invention, and various modifications and changes will occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. An adjustment device based on thin blade cutting, comprising: the device comprises a gantry (1), a fixed table (2), a movable table (3), a bearing plate (41), a blade (51) and an adjusting assembly;

the fixed table (2) is fixed on the gantry (1), the movable table (3) reciprocates up and down relative to the fixed table (2) through a driving assembly, the bearing plate (41) is connected with the movable table (3) through a support bearing (42), a clamp (52) is fixed on the bearing plate (41), and the clamp (52) clamps and fixes the blade (51); the adjusting part is arranged on the movable table (3), the adjusting part comprises a first driving motor (61), a first lead screw (62), a first lead screw nut and an adjusting piece, the first driving motor (61) is fixed on the movable table (3), the first driving motor (61) drives the first lead screw (62) to rotate, the first lead screw nut is in threaded connection with the first lead screw (62), one end of the adjusting piece is connected with the first lead screw nut, a groove (411) is formed in the bearing plate (41), and the other end of the adjusting piece is limited in the groove (411).

2. Adjustment device based on thin blade cutting, according to claim 1, characterized in that the support bearing (42) is provided with the adjustment assembly on both sides, both of the adjustment pieces being arranged symmetrically with respect to the central axis of the support bearing (42).

3. Adjustment device based on thin blade cutting according to claim 2, characterized in that the extension axes of both adjustment members are in the same horizontal plane as the central axis of the support bearing (42).

4. The adjusting device based on thin blade cutting as claimed in claim 3, characterized in that the adjusting member comprises a fixed seat (631) and a roller (632) connected with the fixed seat (631), the fixed seat (631) is fixedly connected with the first lead screw nut, the axle of the roller (632) is fixedly connected with the fixed seat (631), and the outer ring of the roller (632) can rotate.

5. The thin blade cutting-based adjusting device according to claim 4, characterized in that the adjusting assembly further comprises a first guide rail (64) and a first sliding block matched with the first guide rail (64), the first guide rail (64) is fixed on the movable table (3), and the first sliding block is fixedly connected with the fixed seat (631).

6. The adjusting device based on thin blade cutting as claimed in claim 5, characterized in that the adjusting assembly further comprises a connecting plate (65) and a guide rail (66), the guide rail (66) is arranged on the movable table (3), a slide block which is matched with the guide rail (66) to move is arranged on the connecting plate (65), the connecting plate (65) is fixedly connected with the inner ring of the supporting bearing (42), and the outer ring of the supporting bearing (42) is fixedly connected with the bearing plate (41).

7. The thin blade cutting-based adjusting device according to claim 6, further comprising a first pressing ring (421) and a second pressing ring (422), wherein the first pressing ring (421) is used for abutting against the outer ring of the supporting bearing (42), and the second pressing ring (422) is used for abutting against the inner ring of the supporting bearing (42).

8. The thin blade cutting-based adjusting device according to any one of claims 4-7, wherein the adjusting assembly further comprises a sensing mechanism, the sensing mechanism comprises a sensing piece (671) and photoelectric switches (672) symmetrically distributed on two sides of the sensing piece (671), the sensing piece (671) is connected with the fixed seat (631), and the photoelectric switches (672) are arranged on the movable table (3).

9. The adjusting device based on thin blade cutting as claimed in claim 1, wherein the gantry (1) comprises a beam (11) and two beam bases (12) supported at two ends of the beam (11), the beam bases (12) are fixed with adjusting blocks (13), the adjusting blocks (13) are located at two sides of the beam (11), adjusting holes are formed in the adjusting blocks (13), adjusting bolts (14) are arranged in the adjusting holes, and two opposite adjusting bolts (14) abut against the beam.

10. The adjustment device based on thin blade cutting according to claim 1, characterized in that the driving assembly comprises a second driving motor (71), a second lead screw (72), a second lead screw nut and a second guide rail (73), the second driving motor (71) is fixed on the fixed table (2); the second lead screw (72) is arranged on the fixed table (2), a second lead screw nut is fixedly connected with the movable table (3), second guide rails (73) are arranged on two sides of the second lead screw (72), and a second sliding block which moves in a matched mode with the second guide rails (73) is arranged on the movable table (3).