CN209910585U - White light interference experimental instrument - Google Patents
White light interference experimental instrument Download PDFInfo
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- CN209910585U CN209910585U CN201920981440.8U CN201920981440U CN209910585U CN 209910585 U CN209910585 U CN 209910585U CN 201920981440 U CN201920981440 U CN 201920981440U CN 209910585 U CN209910585 U CN 209910585U
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Abstract
The utility model discloses a white light interference experiment appearance, include white light source, semiconductor laser, first spectroscope, second spectroscope, surveyed plane, reference mirror and imaging mechanism, white light source, semiconductor laser set up respectively the adjacent both sides of first spectroscope, the light that white light source and semiconductor laser sent is through have the same light path behind the first spectroscope, the light path is the light process the second spectroscope falls into two bundles of processes respectively surveyed plane, reference mirror back process once more take place to interfere and enter behind the second spectroscope imaging mechanism by imaging mechanism shows. The utility model discloses utilize semiconductor laser to carry out each component position adjustment, it is big to solve the direct white light adjustment degree of difficulty that relies on, is difficult to obtain the problem of interference fringe, reduces the experiment degree of difficulty, improves success probability.
Description
Technical Field
The utility model relates to an interference experiment appearance especially relates to a white light interference experiment appearance.
Background
A white light interferometer is used as one of the interferometers and is used for measuring the surfaces of various precise devices in a nanometer scale, the white light interferometer takes a white light interference technology as a principle, under the condition of equal optical path of a reference mirror and a measured plane, light emitted by a light source is divided into two beams through a beam splitter, the two beams are respectively reflected by the reference mirror and the measured plane and interfere with each other, the appearance characteristics of the measured plane are converted into interference fringe signals, and the appearance of the measured plane is obtained by measuring the change of the fringe signals.
The existing white light interference experiment instrument is provided with a white light source, a spectroscope, a reference mirror, a measured plane and an image sensing display device, and the white light interference length is extremely short, the white light source with a wide spectrum has a coherence length of even about 10 micrometers, so that when the white light interference is adjusted, the length difference between two arms (the reference mirror to the spectroscope is the reference arm, and the measured plane to the spectroscope is the signal arm) of the interferometer is adjusted to be about 10 micrometers, otherwise, the interference signal cannot come out. In addition, the angle between the two arms needs to be very small, otherwise the white light interference signal will be submerged in the background white light. Therefore, the white light interference generation condition must satisfy two conditions at the same time: the length error of the two arms is less than 10 microns, and the included angle of the two arms is very small and is preferably coaxial. Usually, the spectroscope and the measured plane are fixed and maintained, and the angle of the reference mirror and the distance from the reference mirror to the spectroscope are adjusted to meet the requirement of white light interference. The two white light interference generating conditions must be satisfied at the same time, and the error requirements of the two white light interference generating conditions are smaller. Therefore, in the actual adjusting process, it is likely that the angle of the reference mirror does not satisfy the condition, no white light interference signal is obtained no matter how the distance from the reference mirror to the spectroscope is adjusted, the distance from the reference mirror to the spectroscope also exceeds the allowable range, and the angle of the reference mirror is also adjusted no matter how the angle of the reference mirror is adjusted. This imposes extremely high requirements on the laboratory operator, making the experiment difficult to complete, even requiring some fortune components to obtain a white light interference signal.
In addition, in order to improve the illumination uniformity of the light source, the prior art generally adopts a frosted glass or frosted plastic PC material added behind the light emitting surface of the LED. The divergence angle and uniformity of such improved white light sources are still not good enough. Because the number of reflections inside the ground glass is still limited, the optical field distribution is still seen to be uneven in many cases. For experiment, a collimation light path and a shaping light path must be added later, and the light spot can meet the requirement of the interference experiment.
SUMMERY OF THE UTILITY MODEL
To the defect of above-mentioned prior art, the utility model provides a white light interference experiment appearance solves and is difficult to make its problem that satisfies the experiment requirement through the angle of artifical regulation reference mirror and the distance of reference mirror to spectroscope in the experimentation, reduces the experiment degree of difficulty, improves experimental efficiency.
The utility model discloses technical scheme as follows: the utility model provides a white light interference experiment appearance, includes white light source, semiconductor laser, first spectroscope, second spectroscope, measured plane, reference mirror and imaging mechanism, white light source, semiconductor laser set up respectively adjacent both sides of first spectroscope, the light that white light source and semiconductor laser sent has the same light path behind the first spectroscope, the light path is the light process the second spectroscope divides into two bundles of processes respectively measured plane, reference mirror back process once more take place to interfere and enter behind the second spectroscope imaging mechanism by imaging mechanism shows.
Further, the semiconductor laser is a red light source.
Further, in order to solve the uniformity of the white light source and avoid the problem that the too complicated collimation shaping light path causes more troubles to the experiment adjustment operation, the white light source comprises an LED white light source, a focusing lens, an incident light optical fiber head, a multimode optical fiber, an emergent light optical fiber head and a collimating lens which are arranged in sequence, and light emitted by the LED white light source forms uniform parallel white light after the focusing lens, the incident light optical fiber head, the multimode optical fiber, the emergent light optical fiber head and the collimating lens.
Further, the multimode optical fiber is bent and wound into a plurality of turns. Mutual light mixing among a plurality of modes is realized by bending and winding the multimode optical fiber, and the uniformity of light spots is further improved.
Further, the on-line screen storage device comprises a base, the base is equipped with transverse guide, semiconductor laser, first spectroscope, measured plane and reference mirror set up in transverse guide can follow transverse guide removes, transverse guide's side is equipped with the stand, second spectroscope and imaging mechanism set up in the stand can be followed the vertical removal of stand, measured plane set up in under the second spectroscope, imaging mechanism set up in directly over the second spectroscope.
Furthermore, an electric displacement platform is arranged on the transverse guide rail, the reference mirror is arranged on the electric displacement platform, and the reference mirror transversely moves through the electric displacement platform.
Furthermore, a plurality of sliding blocks are arranged on the transverse guide rail, the semiconductor laser and the first spectroscope are respectively connected with the sliding blocks through angle adjusting supports, and the plane to be measured is connected with the sliding blocks through a longitudinal moving platform.
Further, the reference mirror is connected to the electric displacement platform through an angle adjusting bracket.
Further, the imaging mechanism comprises a controller, the imaging mechanism comprises a CCD sensor and a display screen, the controller is connected with the electric displacement platform in a transverse moving mode and the display screen, and the CCD sensor is connected with the display screen.
Furthermore, handles are respectively arranged on two sides of the base, so that the white light interferometer can be conveniently moved integrally.
The utility model provides a technical scheme's advantage lies in:
the advantages of good collimation and good optical monochromaticity of the semiconductor laser are utilized. The red light emitted by the semiconductor laser is incident on the first beam splitter and then reflected, and passes through the imaging interference system. The positions and the deflection angles of the white light source and the red light are adjusted, so that the two beams of light are coaxial and have no deviation. The optical path of the semiconductor laser then represents the optical path of the white light spot. The angle of the reference mirror is adjusted by utilizing the interference of red light emitted by the semiconductor laser to obtain red light interference fringes, then the semiconductor laser is closed, and the distance between the reference mirror and the second spectroscope is further adjusted, so that white light interference can be easily obtained.
The method can change the process of searching interference fringes without purpose into the process of firstly determining the included angle of the two arms within a minimum range, then adjusting the reference arm, firstly reducing the adjustment range and then accurately adjusting, and the interference fringes come out when the reference arm and the signal arm are equal, thereby greatly reducing the experiment difficulty and improving the experiment efficiency.
The method that a focusing lens and a multimode fiber are coupled is adopted at the tail end of an LED white light source, light is coupled and input into the multimode fiber from the LED, in addition, mutual light mixing among a plurality of modes is realized by utilizing the bending and winding of the multimode fiber, the uniformity of output light spots is finally good, an output collimator is added at the output end of the fiber, the collimation of the light spots reaches 1.0mrad, and white light interference is more favorably obtained.
Drawings
Fig. 1 is a schematic structural diagram of the white light interference experimental instrument of the present invention.
Fig. 2 is a schematic view of the backside structure of the white light interferometer of the present invention.
Fig. 3 is a schematic structural diagram of a white light source.
Fig. 4 is a schematic diagram of the light path of the white light interference experimental instrument of the present invention.
Detailed Description
The present invention is further described in connection with the following examples, which are intended to illustrate the invention and not to limit the scope of the invention, which, after reading the present invention, are intended to cover modifications of the invention in its various equivalent forms by those skilled in the art, which fall within the scope of the appended claims.
Referring to fig. 1 to 3, a white light interferometer according to the present embodiment includes a base 1 and various optical elements, where the optical elements include a white light source 2, a semiconductor laser 3, a first beam splitter 4, a second beam splitter 5, a measured plane 6, a reference mirror 7 and an imaging mechanism 8. The base 1 is a punching flat plate, so that various components can be conveniently installed. The both sides of base 1 are connected with handle 9, and the experiment operating personnel of being convenient for grip handle 9 back integral movement white light interference experiment appearance. A transverse guide rail 10 is fixedly connected to the base 1, and a first sliding block 11, a second sliding block 12, a third sliding block 13 and a fourth sliding block 14 are respectively arranged on the transverse guide rail 10 from left to right. An electric displacement platform 15 which moves transversely is fixedly arranged on the first sliding block 11, an angle adjusting bracket 16 is fixedly arranged on a movable platform of the electric displacement platform 15, and the reference mirror 7 is clamped by the angle adjusting bracket 16. A longitudinal moving platform 17 is fixed on the second sliding block 12, the longitudinal moving platform 17 is a manual adjusting platform, and a measured plane 6 which is horizontally arranged is fixedly installed on a movable platform of the longitudinal moving platform 17. Another angle adjusting bracket 18 is fixedly mounted on the third slider 13, and the first spectroscope 4 is held by the angle adjusting bracket 18. A further angle adjusting bracket 19 is fixedly mounted on the fourth slider 14, and the semiconductor laser 3 is held by the angle adjusting bracket 19.
On the base 1, be provided with vertical stand 20 at the rear side of transverse guide 10, vertical stand 20 mainly used fixes second spectroscope 5 and imaging mechanism 8, and imaging mechanism includes CCD sensor 8a and display screen 8 b. The vertical column 20 is sequentially connected with the second spectroscope 5, the CCD sensor 8a and the display screen 8b from bottom to top. Wherein second spectroscope 5 is fixed connection with vertical stand 20, and CCD sensor 8a is for the convenience of clear interference fringe of catching, and it is connected and vertical stand 20 through adjustable mechanism 21 from top to bottom, and display screen 8b is fixed connection and is connected with CCD sensor 8a with vertical stand 20 for show the signal that CCD sensor 8a obtained. The second beam splitter 5 is disposed between the first beam splitter 4 and the reference mirror 7 while being positioned directly above the plane 6 to be measured. The semiconductor laser 3, the first beam splitter 4, the second beam splitter 5, and the reference mirror 7 are arranged at the same height.
The white light source 2 is fixedly arranged on the base 1 and is positioned at the rear side of the transverse guide rail 10. The white light source 2 sequentially comprises an LED white light source 2a, a focusing lens 2b, an incident optical fiber head 2c, a multimode optical fiber 2d, an emergent optical fiber head 2e and a collimating lens 2f, and the collimating lens 2f is also clamped by an angle adjusting frame. Light emitted by the LED white light source 2a forms parallel white light after passing through the focusing lens 2b, the light-in optical fiber head 2c, the multimode optical fiber 2d, the light-out optical fiber head 2e and the collimating lens 2 f. The multimode fiber 2d is wound into a plurality of annular rings, light emitted by the LED white light source 2a is coupled into the multimode fiber 2d, and light is mixed among a plurality of modes in the multimode fiber 2d, so that the uniformity of output light spots is good, the light spots reach the collimation of 1.0mrad after passing through the collimating lens 2f, and the experimental adjustment is facilitated. Parallel white light is incident from the rear side of the first beam splitter 4, and the semiconductor laser 3 selects red light to be incident from the right side of the first beam splitter 4.
The main regulation of the experimental device is manually controlled by a controller, a terminal 22 of the controller is installed on the bottom plate 1 and is positioned on the front side of the transverse guide rail 10, the controller is respectively connected with the display screen 8b and the electric displacement platform 15, and an experimenter enables the electric displacement platform 15 to act through the operation of the terminal 22 of the controller so as to adjust the distance between the reference mirror 7 and the second spectroscope 5. Referring to fig. 4, the specific steps of the experimental apparatus for white light interference experiment are as follows:
the LED white light source 2a is turned on, and the light is coupled and mixed by the focusing lens 2b, the light-in optical fiber head 2c, the multimode optical fiber 2d, the light-out optical fiber head 2e and the collimating lens 2f, and then enters from the rear side of the first spectroscope 4. The semiconductor laser 3 is turned on to emit red light incident from the right side of the first beam splitter 4. The reference mirror 7 is removed, so that the white light and the red light passing through the second spectroscope 5 project light spots on a plane far away from the white light interferometer (generally about 2m to 5 m), and the angle adjusting frames clamping the collimating lens 2f and the semiconductor laser 3 are respectively adjusted to enable the light spots formed by the two to be coaxial as much as possible. After the reference mirror 7 is installed, the vertical distance between the measured plane 6 and the second spectroscope 5 is fixed to be approximately equal, the angle of the reference mirror is adjusted through operation and control 16, interference fringes are adjusted on the display screen, and the interference fringes are as wide as possible. The red laser is closed, then the electric displacement platform 15 moves to adjust the horizontal distance between the reference mirror 7 and the second spectroscope 5 through the terminal 22 of the operation controller, the white light interference fringes captured by the CCD sensor 8a are observed through the display screen 8b, the vertical distance between the measured plane 6 and the second spectroscope 5 and the horizontal distance between the reference mirror 7 and the second spectroscope 5 are basically equal, and the white light interference fringes are obtained by carefully adjusting the horizontal distance between the reference mirror 7 and the second spectroscope 5.
Claims (10)
1. A white light interferometer is characterized in that: including white light source, semiconductor laser, first spectroscope, second spectroscope, measured plane, reference mirror and imaging mechanism, white light source, semiconductor laser set up respectively adjacent both sides of first spectroscope, the light that white light source and semiconductor laser sent has the same light path behind the first spectroscope, the light path is the light process the second spectroscope falls into the two bundles and passes through respectively measured plane, reference mirror back process once more take place to interfere and enter behind the second spectroscope imaging mechanism by imaging mechanism shows.
2. The white-light interferometer of claim 1, wherein the semiconductor laser is a red light source.
3. The white light interference experiment instrument according to claim 1, wherein the white light source comprises an LED white light source, a focusing lens, an incident optical fiber head, a multi-mode optical fiber, an emergent optical fiber head and a collimating lens, which are sequentially arranged, and light emitted by the LED white light source forms parallel white light after passing through the focusing lens, the incident optical fiber head, the multi-mode optical fiber, the emergent optical fiber head and the collimating lens.
4. The white-light interferometer of claim 3, wherein the multimode fiber is bent and wound in a plurality of turns.
5. The white light interference experiment instrument according to claim 1, comprising a base, wherein the base is provided with a transverse guide rail, the semiconductor laser, the first spectroscope, the measured plane and the reference mirror are arranged on the transverse guide rail and can move along the transverse guide rail, a column is arranged on a side of the transverse guide rail, the second spectroscope and the imaging mechanism are arranged on the column and can move vertically along the column, the measured plane is arranged right below the second spectroscope, and the imaging mechanism is arranged right above the second spectroscope.
6. The interferometer according to claim 5, wherein the lateral guide is provided with an electromotive displacement stage, the reference mirror is provided on the electromotive displacement stage, and the reference mirror is laterally moved by the electromotive displacement stage.
7. The white light interferometer according to claim 5, wherein a plurality of sliders are disposed on the transverse guide rail, the semiconductor laser and the first beam splitter are respectively connected to the sliders through angle adjusting brackets, and the plane to be measured is connected to the sliders through a longitudinal moving platform.
8. The interferometer of claim 6, wherein the reference mirror is coupled to the motorized stage via an angular adjustment bracket.
9. The white light interferometer of claim 6, comprising a controller, wherein the imaging mechanism comprises a CCD sensor and a display screen, the controller is connected with the display screen and the electric displacement platform moves transversely, and the CCD sensor is connected with the display screen.
10. The interferometer of claim 5, wherein the base has handles on two sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920981440.8U CN209910585U (en) | 2019-06-27 | 2019-06-27 | White light interference experimental instrument |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920981440.8U CN209910585U (en) | 2019-06-27 | 2019-06-27 | White light interference experimental instrument |
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| CN209910585U true CN209910585U (en) | 2020-01-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114413758A (en) * | 2022-01-24 | 2022-04-29 | 中国工程物理研究院机械制造工艺研究所 | Laser transmission positioning accuracy detection assembly |
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2019
- 2019-06-27 CN CN201920981440.8U patent/CN209910585U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114413758A (en) * | 2022-01-24 | 2022-04-29 | 中国工程物理研究院机械制造工艺研究所 | Laser transmission positioning accuracy detection assembly |
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