CN206556610U - A kind of vertical scanning measures white light interference gauge head - Google Patents
A kind of vertical scanning measures white light interference gauge head Download PDFInfo
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- CN206556610U CN206556610U CN201720263953.6U CN201720263953U CN206556610U CN 206556610 U CN206556610 U CN 206556610U CN 201720263953 U CN201720263953 U CN 201720263953U CN 206556610 U CN206556610 U CN 206556610U
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- 238000005286 illumination Methods 0.000 claims abstract description 68
- 230000000712 assembly Effects 0.000 claims abstract description 37
- 238000000429 assembly Methods 0.000 claims abstract description 37
- 238000006073 displacement reaction Methods 0.000 claims abstract description 34
- 238000005259 measurement Methods 0.000 claims abstract description 32
- 230000004888 barrier function Effects 0.000 claims description 21
- 239000011521 glass Substances 0.000 claims description 19
- 239000000919 ceramic Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 5
- 230000001360 synchronised effect Effects 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012876 topography Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000000847 optical profilometry Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 238000004441 surface measurement Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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Abstract
White light interference gauge head, including white light micro-interference device, vertical movement device, double-raster displacement metering device, image capturing system, signal processing system and computer control system are measured the utility model discloses a kind of vertical scanning;White light micro-interference device includes illumination path, micro-interference component and ccd image pickup component, vertical movement device includes vertical motion assemblies, its inner platform drives Mirau interference microscopes to carry out vertical scanning to measured workpiece, inner platform drives the dynamic grating movement of double-raster displacement metering device simultaneously, occur re-diffraction through quiet grating and produce interference fringe, photelectric receiver receives interference fringe, and the inner platform real-time displacement of vertical motion assemblies is obtained after being handled through signal processing circuit.Computer processing system by handling vertical scanning during white light interference image and vertical motion assemblies inner platform displacement, can obtain the three-dimensional appearance of measured surface.The features such as the utility model has compact conformation, measurement accuracy is high.
Description
Technical field
The utility model is related to measurement apparatus technical field, concretely relates to a kind of vertical scanning measurement white light interference
Gauge head, the gauge head can be used for wide range vertical scanning 3 d surface topography optical profilometry instrument.
Background technology
With the development of science and technology with progress, requirement to piece surface precision measure also more and more higher, advanced inspection
Survey technology is paid much attention to and extensive use by every country.Measuring surface form can be with according to whether contact with testee
It is divided into contact and contactless two major class.Vertical scanning white light interferometric method is a kind of highly important measuring surface form
Method, has the advantages that noncontact, wide range, and can carry out three-dimensional measurement, there is quite varied answer in surface measurement field
With.
A kind of white light interference profile meter is disclosed in the prior art, the drawbacks of it is present be, the optical profilometer knot
Structure is extremely complex, and gauge head is separated with vertical scanning measurement apparatus and displacement measurement device, and therefore, measurement accuracy is relatively low;
Further, since it uses Linnik type interference microscopes, vibration interference and the influence of air-flow to external world is more sensitive, anti-interference
Property is poor.
Utility model content
The purpose of this utility model is, a kind of vertical scanning measurement is provided in vain to solve problems of the prior art
Interference of light gauge head, the gauge head carries vertical movement member and displacement measurement system, and structure is simpler compact, can reach higher
Measurement accuracy.
To achieve the above object, the technical scheme that the utility model is used is:A kind of vertical scanning measures white light interference
At gauge head, including white light micro-interference device, vertical movement device, double-raster displacement metering device, image capturing system, signal
Reason system and computer control system;
The white light micro-interference device includes being used to send the illumination path of light beam, for receiving light beam and producing interference
The micro-interference component of striped and the ccd image pickup component for imaging and can show white light interference image;It is micro- dry
Relating to component includes Mirau interference microscopes, after white light interference image is gathered through image capturing system, is delivered to computer control system
System;
The vertical movement device include vertical motion assemblies, it include outer platform be arranged in outer platform being capable of edge
The inner platform of micromotion is made in the direction parallel with workpiece for measurement surface, and Mirau interference microscopes are fixedly connected with inner platform;Vertically
Piezoelectric ceramics is additionally provided with moving parts, piezoelectric ceramics can drive interior under the driving of piezo-ceramic micro displacement unit driving power supply
Platform makees micromotion, so as to drive Mirau interference microscopes to move, completes to measure the vertical scanning of workpiece surface to be measured, pressure
Electroceramics micro positioner driving power supply is by computer control system control;The double-raster displacement metering device is fixed with inner platform
Connection, double-raster displacement metering device produces the interference fringe of cycle movement under the driving of inner platform and transmitted to signal transacting
System, signal processing system obtains the real-time displacement of the inner platform of vertical motion assemblies after being handled, and transmits to computer
Control system;
Computer control system is treated by handling the displacement of the inner platform of white light interference image and vertical motion assemblies
Survey the three-dimensional appearance of workpiece surface.
As a further improvement, the illumination path include white light source, light source bracket, the first illumination path lens barrel,
Second illumination path lens barrel, illumination path lens cone frame, illumination path support plate, lens group, aperture diaphragm, field stop,
One speculum and the first lens;The white light source is installed on light source bracket, light source bracket and the first illumination path lens barrel
One end is detachably fixed connection, and one end of the other end of the first illumination path lens barrel and the second illumination path lens barrel is detachably fixed
Connection, the other end of the second illumination path lens barrel is installed in illumination path lens cone frame, and illumination path lens cone frame is installed in
On illumination path support plate, the side of illumination path lens cone frame offers through hole A, and lens group is arranged on the first illumination path mirror
In cylinder, aperture diaphragm and field stop are sequentially arranged in the second illumination path lens barrel from top to bottom, and the first speculum is arranged on
In illumination path lens cone frame, the first lens are arranged on inside illumination path lens cone frame close to through hole A position, illumination path
Support plate is arranged on vertical motion assemblies side.
As a further improvement, the micro-interference component also includes microscope stand, the second speculum and spectroscope,
Mirau interference microscopes are installed on microscope stand, and microscope stand is fixedly connected with inner platform, in Piezoelectric Ceramic
When platform is moved, microscope stand follows inner platform to be synchronized with the movement, so as to drive Mirau interference microscopes to move, completes to treat
Survey the vertical scanning measurement of workpiece surface;Rectangular channel is offered in the vertical motion assemblies, the second speculum is arranged on rectangle
Upper end inside groove, spectroscope is arranged on the lower end inside rectangular channel, and the optical axis of the first lens passes through spectroscopical central point.
As a further improvement, ccd image pickup component includes CCD camera, CCD camera frame, the second lens, the
Three speculums, image pickup light path lens barrel, image pickup light path lens cone frame and image pickup light path supporting plate, image pickup light
The side of road lens cone frame offers through hole B, and CCD camera is installed in one end of CCD camera frame, the other end of CCD camera frame with
One end of image pickup light path lens barrel is detachably fixed connection, and the other end of image pickup light path lens barrel is installed in image pickup light
In the lens cone frame of road, image pickup light path lens cone frame is installed in image pickup light path supporting plate, and lens are picked up installed in image
Take in light path lens barrel, the 3rd speculum is arranged in image pickup light path lens cone frame, the reflecting surface and second of the 3rd speculum
The reflecting surface of speculum is mounted opposite, and image pickup light path supporting plate is arranged on vertical motion assemblies opposite side.
As a further improvement, the double-raster displacement metering device include laser, magnifying glass, magnifying glass lens barrel,
It is quiet grating, quiet light barrier holder, quiet grating adjustment plate, dynamic grating, dynamic light barrier holder, dynamic grating motion connecting plate, speculum A, anti-
Penetrate mirror support A, speculum B, mirror support B, photelectric receiver and sensor box;Dynamic grating is arranged on dynamic light barrier holder,
Dynamic light barrier holder is fixed on dynamic grating motion connecting plate bottom, moves grating motion connecting plate bottom and the interior of vertical motion assemblies is put down
Platform is connected;Quiet grating is arranged on quiet light barrier holder, and quiet light barrier holder is arranged in quiet grating adjustment plate, quiet grating adjustment plate peace
Mounted in the inside of sensor box;Laser and magnifying glass lens barrel are installed in the top of sensor box and in opposite sides, amplification
Mirror is arranged in magnifying glass lens barrel, and speculum A is arranged on mirror support A, and mirror support A is arranged in sensor box
Portion, close to laser side, speculum B be arranged on mirror support B on, mirror support B be arranged on sensor box inside,
Close to the side of magnifying glass;
As a further improvement, in the state of the reflected mirror A reflections of light beam that laser is launched, light beam is sequentially passed through
Dynamic grating and quiet grating produce interference fringe after occurring diffraction, when the inner platform of vertical motion assemblies drives dynamic grating movement,
Photelectric receiver receives the interference fringe of cycle movement, and transmits to signal processing system, and signal processing system is handled
The real-time displacement of the inner platform of vertical motion assemblies is obtained afterwards, and is transmitted to computer control system.
As a further improvement, first speculum is from the horizontal by 45° angle, the 3rd speculum and horizontal direction
Angle at 45 °;Second speculum is arranged on the upper end inside rectangular channel, and from the horizontal by 45° angle, spectroscope is arranged on rectangle
Lower end inside groove, and from the horizontal by 45° angle;Mirror support A underface is from the horizontal by 45O angles, speculum
Support B underface is from the horizontal by 45O angles.
As a further improvement, the microscope stand side, which is provided with microscope, screws in cylinder, microscope screws in cylinder and set
Internal thread is equipped with, is threadedly coupled between one end of Mirau interference microscopes and microscope screw-in cylinder.
As a further improvement, the CCD camera frame bottom is provided with external screw thread, the top of image pickup light path lens barrel
Provided with internal thread, it is connected through a screw thread between CCD camera frame and image pickup light path lens barrel.
As a further improvement, the vertical motion assemblies are flexible hinge structure.
Compared with prior art, the beneficial effects of the utility model are:The gauge head carries vertical movement member and displacement meter
Amount system, it is simple and compact for structure, it can reach compared with high measurement accuracy, while also greatly reducing production cost.Further, since its
Using Mirau interference microscope types, influenceed smaller by extraneous vibration interference and air-flow, anti-interference is preferable.
Brief description of the drawings
Fig. 1 is the operating diagram of the utility model embodiment.
Fig. 2 is general structure schematic diagram of the present utility model.
Fig. 3 is optical schematic diagram of the present utility model.
Marked in figure:1st, double-raster displacement metering device, 101, laser, 102, magnifying glass, 103, magnifying glass lens barrel,
104th, quiet grating, 105, quiet light barrier holder, 106, quiet grating adjustment plate, 107, dynamic grating, 108, dynamic light barrier holder, 109, dynamic light
Grid move connecting plate, the 110, first speculum, the 111, first mirror support, the 112, second speculum, the 113, second speculum
Support, 114, photelectric receiver, 115, sensor box, 2, vertical movement device, 201, vertical motion assemblies, 202, piezoelectricity pottery
Porcelain, 3, white light micro-interference device, 4, illumination path, 401, white light source, 402, light source bracket, the 403, first illumination path mirror
Cylinder, the 404, second illumination path lens barrel, 405, illumination path lens cone frame, 406, illumination path support plate, 407, lens group,
408th, aperture diaphragm, 409, field stop, 410 first speculums, the 411, first lens, 5, micro-interference component, 501, Mirau
Interference microscope, 502, microscope stand, the 503, second speculum, 504, spectroscope, 6, ccd image pickup component, 601, CCD
Camera, 602, CCD camera frame, the 603, second lens, the 604, the 3rd speculum, 605, image pickup light path lens barrel, 606, image
Pick up light path lens cone frame, 607, image pickup light path supporting plate, 7, signal processing system, 8, computer control system, 9, figure
As acquisition system, 10, workpiece for measurement.
Embodiment
Below in conjunction with the accompanying drawings and specific embodiment the utility model is described in further detail.
As Figure 1-3, a kind of vertical scanning measurement white light interference gauge head, including it is double-raster displacement metering device 1, vertical
Telecontrol equipment 2, white light micro-interference device 3, image capturing system 9, signal processing system 7 and computer control system 8;White light
Micro-interference device 3 includes illumination path 4, micro-interference component 5 and ccd image pickup component 6, illumination path, micro-interference
Component and ccd image pickup member parallel layout.
Illumination path provides lighting source, and ccd image pickup component gathers the interference image of Mirau interference microscopes, hung down
Straight telecontrol equipment 2 carries out motion driving, double-raster displacement meter under control of the signal processing system 7 in computer control system 8
The signal of device 1 is measured after the processing of signal processing system 7, calculating is analyzed by computer 8, ccd image pickup component 6 is obtained
Interference image, is gathered by image capturing system 9 and gives computer analyzing and processing.
Illumination path 4 includes white light source 401, light source bracket 402, the first illumination path lens barrel 403, the second illumination path
Lens barrel 404, illumination path lens cone frame 405, illumination path support plate 406, lens group 407, aperture diaphragm 408, field stop
409th, the first speculum 410 and the first lens 411;The flexibility of white light source 401 is installed in one end of light source bracket 402, the
One illumination path lens barrel 403 is cylindrical, the threaded one end of the other end of light source bracket 402 and the first illumination path lens barrel 403
Connection, one end of the first illumination path lens barrel 403 is connected with the threaded one end of the second illumination path lens barrel 404, the second illumination light
The other end of road lens barrel 404 is by being threaded into illumination path lens cone frame 405, and illumination path lens cone frame 405 is installed in
On illumination path support plate 406, the side of illumination path lens cone frame 405 offers through hole A, and lens group 407 is arranged on first
In illumination path lens barrel 403, aperture diaphragm 408 and field stop 409 are sequentially arranged at the second illumination path lens barrel from top to bottom
In 404, the first speculum 410 is arranged in illumination path lens cone frame 405, and the first speculum 410 is from the horizontal by 45 °
Angle, the first lens 411 are arranged on the inside of illumination path lens cone frame 405 close to through hole A position;Second illumination path lens barrel one
Side offers otch, and the purpose is to convenient installation, adjustment aperture diaphragm and field stop.
In optical system, the diaphragm of thing Electrical imaging beam size is aperture diaphragm on limitation axle.One in optical system
As will be placed in object plane or image plane to limit areas imaging diaphragm turn into field stop.Aperture diaphragm is constrained to
As the aperture of light beam, that is, determine illumination, the resolution ratio of imaging;Field stop determine visual field, and image objects scope.
Micro-interference component 5 includes Mirau interference microscopes 501, microscope stand 502, the second speculum 503 and light splitting
Mirror 504, the side of microscope stand 502 is provided with microscope and screws in cylinder 5021, and microscope screws in cylinder 5021 and is provided with internal thread,
One end of Mirau interference microscopes 501 is threadedly coupled between screwing in cylinder 5021 with microscope.
Ccd image pickup component 6 includes CCD camera 601, CCD camera frame 602, the second lens 603, the 3rd speculum
604th, image pickup light path lens barrel 605, image pickup light path lens cone frame 606 and image pickup light path supporting plate 607, image is picked up
The side of light path lens cone frame 606 is taken to offer through hole, CCD camera 601 is installed in one end of CCD camera frame 602, CCD camera
The other end of frame 602 is connected with one end of image pickup light path lens barrel 605, and the other end of image pickup light path lens barrel 605 is fixed
In image pickup light path lens cone frame 606, image pickup light path lens cone frame 606 is installed in image pickup light path supporting plate
On 607, lens 603 are arranged in image pickup light path lens barrel 605, and the 3rd speculum 604 is arranged on image pickup light path lens barrel
In support 606, the 3rd speculum 604 is from the horizontal by 45° angle, the reflecting surface of the 3rd speculum 604 and the second speculum 503
Reflecting surface be mounted opposite;The bottom of CCD camera frame 602 is provided with external screw thread, and the top of image pickup light path lens barrel 605 is provided with interior spiral shell
Line, is connected through a screw thread between CCD camera frame 602 and image pickup light path lens barrel 605.
In the light beam that white light source 401 is sent, the focus that lens group 407 is imaged on after lens group 407, and it is completely covered
Aperture diaphragm 408, light beam passes through field stop 409 afterwards, and further passes through the first lens after the reflection of the first speculum 410
411, after enter Mirau interference microscopes 501 through spectroscope 504, light beam is in Mirau interference microscopes 501 by its beam splitting
Plate is divided into two beams, a branch of to transmit Mirau interference microscopes 501, and Mirau interference is reflected back by the measured surface of workpiece for measurement 10
Microscope 501, meets, two-beam is in aplanatism or optical path difference pole at its beam-splitting board with the another light beam by plane of reference reflection
Small position produces interference fringe, and wherein zero order interference fringe light intensity is most strong, and the correspondence some points of tested surface are in Mirau interference microscopes
Focussing plane on, the elevation information comprising measured point.Interference fringe is successively through the second speculum 503 and the first speculum 410
The first lens 411 are sent to after reflection, through the first lens 411 after show white light interference on the photosurface of CCD camera 601
Image, the white light interference image is delivered to after image capturing system 9 is acquired, and is further delivered to computer control system 8;
Vertical movement device 2 includes vertical motion assemblies 201, and vertical motion assemblies 201 are flexible hinge structure, and it includes
Outer platform and it is arranged in outer platform and can makees the inner platform of micromotion along the direction parallel with the surface of workpiece for measurement 10, vertically
Moving parts 201 are to be processed on one piece of steel spring plate using line cutting technology.Pressure is additionally provided with vertical motion assemblies 201
Electroceramics 202, piezoelectric ceramics 202 can drive inner platform to make micro- fortune under the driving of piezo-ceramic micro displacement unit driving power supply
Dynamic, piezo-ceramic micro displacement unit driving power supply offers rectangle in computer control system control, vertical motion assemblies 201
Groove, the second speculum 503 is arranged on the upper end inside rectangular channel, and from the horizontal by 45° angle, spectroscope 504 is arranged on square
Lower end inside shape groove, and from the horizontal by 45° angle, the optical axis of the first lens 411 passes through the central point of spectroscope 504;It is aobvious
The one end of micro mirror support 502 is fixedly connected with inner platform, and the mobile drive microscope stand 502 of inner platform is moved, so as to drive
Mirau interference microscopes 501 are moved, and complete to measure the vertical scanning of workpiece surface to be measured.When flat in vertical motion assemblies
When platform drive Mirau interference microscopes make vertical scan motion, each point of the surface different height of measured workpiece 10 passes sequentially through zero
The position of optical path difference, CCD camera obtains interference image, and double-raster displacement metering device records the reality of vertical motion assemblies inner platform
Shi Weiyi, measured workpiece surface topography information is just can obtain by the calculating processing of computer processing system 8.
Illumination path support plate 406 is arranged on the side of vertical motion assemblies 201, and image pickup light path supporting plate 607 is installed
In the opposite side of vertical motion assemblies 201.
Double-raster displacement metering device 1 includes laser 101, magnifying glass 102, magnifying glass lens barrel 103, quiet grating 104, quiet
Light barrier holder 105, quiet grating adjustment plate 106, dynamic grating 107, dynamic light barrier holder 108, dynamic grating motion connecting plate 109, first
Speculum 110, the first mirror support 111, the second speculum 112, the second mirror support 113, photelectric receiver 114 and biography
Sensor box 115;Dynamic grating 107 is arranged on dynamic light barrier holder 108, and dynamic light barrier holder 108 is fixed on dynamic grating motion connecting plate
109 bottoms, the dynamic grating motion bottom of connecting plate 109 is connected with the inner platform of vertical motion assemblies 201;Quiet grating 104 is installed
On quiet light barrier holder 105, quiet light barrier holder 105 is arranged in quiet grating adjustment plate 106, and quiet grating adjustment plate 106 is arranged on
The inside of sensor box 115;Quiet grating is pasted onto on light barrier holder, and quiet grating outward appearance is transparent glass-like, moves light
Grid are also such.By adjusting the position that quiet light barrier holder is arranged in the adjustment of quiet grating, dynamic grating, quiet grating can be adjusted
Between angle and distance, so as to adjust the width of interference fringe.
Laser 101 and magnifying glass lens barrel 103 are installed in the top of sensor box 115 and in opposite sides, magnifying glass
102 are arranged in magnifying glass lens barrel 103, and the first speculum 110 is arranged on the first mirror support 111, the first speculum branch
Frame 111 is arranged on inside sensor box 115, and close to the side of laser 101, the underface of the first mirror support 111 and water
Square into 45O angles, the second speculum 112 is arranged on the second mirror support 113, and the second mirror support 113 is arranged on
The side of close magnifying glass 102 in sensor box 115, the underface of the second mirror support 113 is from the horizontal by 45O
Angle;The light beam that laser 101 is launched changes 90 ° through the direction of the first speculum 110, impinges perpendicularly on dynamic grating 107, occurs just
Secondary diffraction, occurs re-diffraction through quiet grating 104 and produces interference fringe, when the inner platform of vertical motion assemblies drives dynamic grating
107 when moving in the vertical direction, and photelectric receiver 114 receives the interference fringe of cycle movement, and transmits to signal transacting system
Unite 7 handled after obtain vertical motion assemblies 201 inner platform real-time displacement.
Computer control system 8 is obtained by handling the displacement of the inner platform of white light interference image and vertical motion assemblies 201
To the three-dimensional appearance of the measured surface of workpiece for measurement.
The utility model obtains the white light interference image of measured surface using Mirau interference microscopes, when vertical movement group
When the inner platform drive Mirau interference microscopes of part make vertical scan motion, each point of measured workpiece surface different height is successively
By the position of zero optical path difference, CCD camera obtains interference image, double-raster displacement metering device record vertical motion assemblies motion block
Real-time displacement, by computer calculating processing just can obtain measured workpiece surface topography information.
Claims (9)
1. a kind of vertical scanning measures white light interference gauge head, it is characterised in that:Including white light micro-interference device(3), vertical fortune
Dynamic device(2), double-raster displacement metering device(1), image capturing system(9), signal processing system(7)System is controlled with computer
System(8);
The white light micro-interference device(3)Including the illumination path for sending light beam(4), for receiving light beam and producing dry
Relate to the micro-interference component of striped(5)Component is picked up with the ccd image for imaging and can show white light interference image
(6);Micro-interference component(5)Including Mirau interference microscopes(501), white light interference image is through image capturing system(9)Collection
Afterwards, it is delivered to computer control system(8);
The vertical movement device(2)Including vertical motion assemblies(201), it includes outer platform and the energy being arranged in outer platform
Enough edges and workpiece for measurement(10)Make the inner platform of micromotion, Mirau interference microscopes in the parallel direction in surface(501)With inner platform
It is fixedly connected;Vertical motion assemblies(201)On be additionally provided with piezoelectric ceramics(202), piezoelectric ceramics(202)In piezoelectric ceramics micro-displacement
Inner platform can be driven to make micromotion under the driving of device driving power supply, so as to drive Mirau interference microscopes(501)Motion, it is complete
Paired workpiece for measurement(10)The vertical scanning measurement on surface, piezo-ceramic micro displacement unit driving power supply is by computer control system
(8)Control;The double-raster displacement metering device(1)It is fixedly connected with inner platform, double-raster displacement metering device(1)Put down inside
Under the driving of platform the generation cycle move interference fringe and transmit to signal processing system(7), signal processing system(7)Located
Vertical motion assemblies are obtained after reason(201)Inner platform real-time displacement, and transmit to computer control system(8);
Computer control system(8)By handling white light interference image and vertical motion assemblies(201)Inner platform displacement, obtain
To workpiece for measurement(10)The three-dimensional appearance on surface.
2. a kind of vertical scanning measurement white light interference gauge head according to claim 1, it is characterised in that:The illumination path
(4)Including white light source(401), light source bracket(402), the first illumination path lens barrel(403), the second illumination path lens barrel
(404), illumination path lens cone frame(405), illumination path support plate(406), lens group(407), aperture diaphragm(408), regard
Field diaphragm(409), the first speculum(410)With the first lens(411);The white light source(401)It is installed in light source bracket
(402)On, light source bracket(402)With the first illumination path lens barrel(403)One end be detachably fixed connection, the first illumination path
Lens barrel(403)The other end and the second illumination path lens barrel(404)One end be detachably fixed connection, the second illumination path lens barrel
(404)The other end be installed in illumination path lens cone frame(405)On, illumination path lens cone frame(405)It is installed in illumination light
Road support plate(406)On, illumination path lens cone frame(405)Side offer through hole A, lens group(407)Installed in first
Illumination path lens barrel(403)It is interior, aperture diaphragm(408)And field stop(409)The second illumination light is sequentially arranged at from top to bottom
Road lens barrel(404)It is interior, the first speculum(410)It is arranged on illumination path lens cone frame(405)It is interior, the first lens(411)Install
In illumination path lens cone frame(405)The internal position close to through hole A, illumination path support plate(406)Installed in vertical movement
Component(201)Side.
3. a kind of vertical scanning measurement white light interference gauge head according to claim 2, it is characterised in that:The micro-interference
Component(5)Also include microscope stand(502), the second speculum(503)And spectroscope(504), Mirau interference microscopes
(501)It is installed in microscope stand(502)On, microscope stand(502)It is fixedly connected with inner platform, in piezoelectric ceramics(202)
When driving inner platform motion, microscope stand(502)Inner platform is followed to be synchronized with the movement, so as to drive Mirau interference microscopes
(501)Motion, is completed to workpiece for measurement(10)The vertical scanning measurement on surface;The vertical motion assemblies(201)On offer
Rectangular channel, the second speculum(503)Upper end inside rectangular channel, spectroscope(504)Under inside rectangular channel
End, the first lens(411)Optical axis pass through spectroscope(504)Central point.
4. a kind of vertical scanning measurement white light interference gauge head according to claim 3, it is characterised in that:The ccd image
Pick up component(6)Including CCD camera(601), CCD camera frame(602), the second lens(603), the 3rd speculum(604), image
Pick up light path lens barrel(605), image pickup light path lens cone frame(606)With image pickup light path supporting plate(607), image pickup
Light path lens cone frame(606)Side offer through hole B, CCD camera(601)It is installed in CCD camera frame(602)One end, CCD
Camera frame(602)The other end and image pickup light path lens barrel(605)One end be detachably fixed connection, image pickup light path mirror
Cylinder(605)The other end be installed in image pickup light path lens cone frame(606)On, image pickup light path lens cone frame(606)Gu
It is located at image pickup light path supporting plate(607)On, lens(603)Installed in image pickup light path lens barrel(605)It is interior, the 3rd reflection
Mirror(604)Installed in image pickup light path lens cone frame(606)It is interior, the 3rd speculum(604)Reflecting surface and the second speculum
(503)Reflecting surface be mounted opposite, image pickup light path supporting plate(607)Installed in vertical motion assemblies(201)Opposite side.
5. a kind of vertical scanning measurement white light interference gauge head according to claim 4, it is characterised in that:The double grating position
Move metering device(1)Including laser(101), magnifying glass(102), magnifying glass lens barrel(103), quiet grating(104), quiet grating branch
Frame(105), quiet grating adjustment plate(106), dynamic grating(107), dynamic light barrier holder(108), dynamic grating motion connecting plate(109)、
Speculum A(110), mirror support A(111), speculum B(112), mirror support B(113), photelectric receiver(114)With
Sensor box(115);Dynamic grating(107)Installed in dynamic light barrier holder(108)On, move light barrier holder(108)It is fixed on dynamic grating
Move connecting plate(109)Bottom, moves grating motion connecting plate(109)Bottom and vertical motion assemblies(201)Inner platform be connected;
Quiet grating(104)Installed in quiet light barrier holder(105)On, quiet light barrier holder(105)Installed in quiet grating adjustment plate(106)On,
Quiet grating adjustment plate(106)Installed in sensor box(115)Inside;Laser(101)With magnifying glass lens barrel(103)It is respectively mounted
In sensor box(115)Top and in opposite sides, magnifying glass(102)Installed in magnifying glass lens barrel(103)It is interior, speculum A
(110)Installed in mirror support A(111)On, mirror support A(111)Installed in sensor box(115)It is internal, close to swash
Light device(101)Side, speculum B(112)Installed in mirror support B(113)On, mirror support B(113)Installed in biography
Sensor box(115)Internal, close magnifying glass(102)Side;
In laser(101)The reflected mirror A of light beam of transmitting(110)In the state of reflection, light beam sequentially passes through dynamic grating(107)
With quiet grating(104)Interference fringe is produced after generation diffraction, dynamic grating is driven in the inner platform of vertical motion assemblies(107)It is mobile
When, photelectric receiver(114)The interference fringe of cycle movement is received, and is transmitted to signal processing system(7), signal transacting system
System(7)Vertical motion assemblies are obtained after being handled(201)Inner platform real-time displacement, and transmit to computer control system
(8).
6. a kind of vertical scanning measurement white light interference gauge head according to claim 5, it is characterised in that:First reflection
Mirror(410)From the horizontal by 45°Angle, the 3rd speculum(604)From the horizontal by 45° angle;Second speculum(503)Install
Upper end inside rectangular channel, and from the horizontal by 45°Angle, spectroscope(504)Lower end inside rectangular channel, and with
Horizontal direction is into 45°Angle;Mirror support A(111)Underface from the horizontal by 45OAngle, mirror support B(113)Just
Lower section is from the horizontal by 45OAngle.
7. a kind of vertical scanning measurement white light interference gauge head according to claim 6, it is characterised in that:The microscope branch
Frame(502)Side is provided with microscope and screws in cylinder(5021), microscope screw-in cylinder(5021)It is provided with internal thread, Mirau interference
Microscope(501)One end and microscope screw in cylinder(5021)Between be threadedly coupled.
8. a kind of vertical scanning measurement white light interference gauge head according to claim 7, it is characterised in that:The CCD camera
Frame(602)Bottom is provided with external screw thread, image pickup light path lens barrel(605)Top be provided with internal thread, CCD camera frame(602)With
Image pickup light path lens barrel(605)Between be connected through a screw thread.
9. a kind of vertical scanning measurement white light interference gauge head according to claim any one of 1-8, it is characterised in that:It is described
Vertical motion assemblies(201)For flexible hinge structure.
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109341518A (en) * | 2018-08-22 | 2019-02-15 | 深圳市斯尔顿科技有限公司 | OCT detection device and microscopic carvings equipment |
CN109397266A (en) * | 2018-11-13 | 2019-03-01 | 上海智殷自动化科技有限公司 | A kind of teaching machine device by visual programming |
-
2017
- 2017-03-17 CN CN201720263953.6U patent/CN206556610U/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109341518A (en) * | 2018-08-22 | 2019-02-15 | 深圳市斯尔顿科技有限公司 | OCT detection device and microscopic carvings equipment |
CN109341518B (en) * | 2018-08-22 | 2020-10-30 | 深圳市斯尔顿科技有限公司 | OCT detection device and micro-carving equipment |
CN109397266A (en) * | 2018-11-13 | 2019-03-01 | 上海智殷自动化科技有限公司 | A kind of teaching machine device by visual programming |
CN109397266B (en) * | 2018-11-13 | 2024-03-15 | 上海智殷自动化科技有限公司 | Demonstrator device through visual programming |
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