CN209878824U - Flexible electronic device electromigration detection device and variable curvature platform thereof - Google Patents
Flexible electronic device electromigration detection device and variable curvature platform thereof Download PDFInfo
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- CN209878824U CN209878824U CN201920571206.8U CN201920571206U CN209878824U CN 209878824 U CN209878824 U CN 209878824U CN 201920571206 U CN201920571206 U CN 201920571206U CN 209878824 U CN209878824 U CN 209878824U
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Abstract
A flexible electronic device electromigration detection device and a variable curvature platform thereof. Mainly solve current electromigration check out test set and can't realize the electromigration detection under different curvature radius to flexible electron device. The method is characterized in that: the two supporting panels are connected with each other through the flexible rubber, and an adsorption structure for tightly attaching the flexible electronic device to the supporting panels is further arranged. The flexible electronic device has the advantages that the two supporting panels are connected through the flexible rubber, so that when the supporting panels are bent relatively, the flexible rubber can be stretched and compressed along with the flexible rubber, the change of the curvature radius is realized, the flexible electronic device is tightly attached to the supporting panels, the curvature radius of the flexible rubber in bending is the curvature radius of the flexible electronic device in the same bending state, the change and adjustment of the curvature radius of the flexible electronic device can be realized by changing the position of the supporting panels, and the electromigration detection of the flexible electronic device under different curvature radii is realized.
Description
Technical Field
The utility model relates to a crooked test fixture, concretely relates to be suitable for detection device and variable camber platform of flexible electron device electromigration.
Background
The flexible electronics is a technology for forming a circuit by depositing an electronic device on a flexible substrate, has the electrical property of the traditional microelectronics, endows the electronic device with the characteristics of extensibility, wearability, light weight, transparency and the like, has the characteristics of simple manufacturing process and low cost, is widely applied to the fields of flexible display, thin-film solar cells, biomedicine and the like, and is one of the current popular research and frontier science. Good flexibility, which is mainly achieved by suitable substrates such as plastics and PET films, and good conductivity, which depends mainly on the characteristics of the deposited materials on the substrate and the manufacturing accuracy of the patterns, are two most important features of flexible electronic devices. Flexible electronic devices have significant price advantages and mass production potential, which have revolutionary impact on conventional integrated circuit processes.
With the continuous development of flexible electronics, especially the application of nanotechnology, the variety of flexible electronic devices is increasing, and the feature size of the electronic devices is also shrinking, which also poses more serious challenges to the reliability of the devices. How to reduce the failure rate of the flexible electronic device, so that the flexible electronic device can adapt to more complex application environments, and improving the working reliability of the flexible electronic device has become an important subject of the development of the current flexible electronic industry. There are three main aspects of current reliability research on flexible electronic devices: (1) electromigration (2) stress migration (3) thermal fatigue. Electromigration, the most prominent failure mode of flexible circuits, is an important research goal for improving device reliability.
Electromigration is a physical phenomenon in which metal atoms in a thin metal wire are pushed by electron wind at a certain current density. When metal atoms migrate, corresponding holes and hillocks appear in the wire, and as the holes are continuously enlarged, the circuit is broken, so that the circuit fails. Since flexible electronic devices are often in a bent state during operation, the electromigration reliability of the devices in the bent state needs to be studied. When the device is bent, the bending state is irregular and diversified. In order to study the reliability of electromigration of devices in different bending states, it is necessary to achieve bending of the devices in different states.
In order to solve the above problems, the applicant has devised a device (CN 106093753B) for detecting the electrical conductivity of a flexible electronic device, which controls the rotation state of a motor through a controller, so as to control a displacement stage and a bending mechanism, so as to meet the requirements of bending times and angles required by detection, image the state of an object to be detected and transmit the detected data to the controller in real time through a microscope and a probe, and finally form the required data and images in a display, thereby obtaining a determination parameter when electromigration failure occurs, and finally effectively implementing prediction and control of electromigration failure.
In the device, after a flexible electronic device to be detected is placed on a bending mechanism, two ends of the flexible electronic device are pressed through a pressing sheet and fixed through screws, so that the mounting operation is troublesome, only two ends of the flexible electronic device are fixed, the flexible electronic device cannot be completely attached to the plane of the bending mechanism in the bending process, deformation is easily caused, the required bending degree cannot be achieved, and the detection is inaccurate.
In the above patent, the bending mechanism is basically as shown in fig. 4, and a common hinge structure is adopted, that is, two support planes 11 realize relative rotation movement through a hinge shaft 12, and during the test, when the two support planes 11 rotate relatively, the flexible electronic can be bent.
Because the two supporting planes 11 are hinged through the hinge shaft 12, the curvature radius of the middle hinged part is not changed along with the rotation of the two supporting planes 11, and because the flexible electronic device is tightly attached to the two supporting planes 11 during detection, the curvature radius of the middle connecting section is consistent with that of the hinge shaft 12, the middle section of the flexible electronic device is always kept unchanged under different bending angles, the curvature radius of the flexible electronic device cannot be accurately adjusted, and the electromigration of the flexible electronic device cannot be accurately detected.
SUMMERY OF THE UTILITY MODEL
In order to overcome the not enough of background art, the utility model provides a flexible electron device electromigration detection device and variable camber platform thereof.
The utility model discloses the technical scheme who adopts: a variable curvature platform of a flexible electronic device electromigration detection device comprises a base, linear rails, a substrate and a support panel, wherein the linear rails are fixedly arranged on the base, two substrates are arranged on the base and are correspondingly arranged at two ends of the linear rails, and at least one substrate is in sliding fit with the linear rails and is connected with a driving mechanism for driving the substrate to slide along the linear rails; the two support panels are arranged, one ends of the two support panels are connected with each other through flexible rubber, and the other ends of the two support panels are respectively hinged with the two substrates; and the two support panels are also provided with adsorption structures for tightly attaching the flexible electronic device to the support panels.
The supporting panel is provided with a plurality of through holes which are evenly distributed, and the base is also provided with an air pump which can correspond to the through holes.
The supporting panel is at least provided with two elastic clamps which are correspondingly arranged.
The two bases are in sliding fit with the linear track and are respectively connected with a group of driving mechanisms.
The driving mechanism comprises a motor base, a motor, a gear and a rack, the motor base is arranged on one side of the base, the motor is installed on the motor base and drives the motor to be connected with the gear, the rack is arranged in parallel with the linear track and matched with the motor base in a linear sliding mode, the rack is meshed with the gear, and one end of the rack is fixedly connected with the base.
The two linear rails are arranged in parallel.
A flexible electronic device electromigration detection device comprises the variable curvature platform, a probe detection mechanism and a microscope detection mechanism; the probe detection mechanism comprises a probe frame and a probe, wherein one end of the probe is hinged with the probe frame, and the other end of the probe can correspond to the supporting panel and is connected with a source meter; the microscope detection mechanism comprises a microscope frame and a microscope, the microscope frame is arranged in the middle of the rear side of the base, and the microscope is mounted on the microscope frame and corresponds to the position of the flexible rubber.
The utility model has the advantages that: by adopting the scheme, the two supporting panels are connected through the flexible rubber, so when the supporting panels are bent relatively, the flexible rubber can be stretched and compressed along with the flexible rubber, the change of the curvature radius is realized, and because the flexible electronic device is tightly attached to the supporting panels, the curvature radius of the flexible rubber in bending is the curvature radius of the flexible electronic device in the same bending state, so that the change and adjustment of the curvature radius of the flexible electronic device can be realized by changing the position of the supporting panels, and the electromigration detection of the flexible electronic device under different curvature radii is realized.
Drawings
Fig. 1 is a schematic structural view of an electromigration detection apparatus for a flexible electronic device according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a variable curvature platform according to an embodiment of the present invention.
Fig. 3 is a schematic structural view of the support panel and the flexible rubber according to the embodiment of the present invention.
Fig. 4 is a schematic view showing a structure of a support plane at different rotation angles along a hinge shaft in the prior art.
Detailed Description
The embodiments of the present invention will be further explained with reference to the accompanying drawings:
as shown in FIG. 1, the electromigration detection device for the flexible electronic device comprises a variable curvature platform, a probe detection mechanism 8 and a microscope detection mechanism 9.
As shown in fig. 1-3, the curvature-variable platform includes a base 1, two linear rails 2, a substrate 3, and two support panels 4, wherein the two linear rails 2 are arranged in parallel on the base 1, the two substrates 3 are correspondingly arranged at two ends of the linear rails 2, the substrate 3 is in sliding fit with the linear rails 2 and is respectively connected with a driving mechanism 7 for driving the substrate to slide along the linear rails 2, the two support panels 4 are arranged, one end of each of the two support panels 4 is connected with each other through a flexible rubber 5, and the other end is hinged to the two substrates 3; and the two support panels 4 are also provided with adsorption structures for tightly attaching the flexible electronic device to the support panels 4.
Wherein, actuating mechanism 7 includes motor cabinet 71, motor 72, gear 73, rack 74, motor cabinet 71 sets up the one side at base 1, motor 72 installs on motor cabinet 71 to drive connection gear 73, rack 74 and linear rail 2 parallel arrangement, and with motor cabinet 71 straight line cooperation of sliding, rack 74 meshes with gear 73 mutually, and rack 74 one end and basement 3 fixed connection, start motor 72, and motor 72 can drive gear 73 and rotate, and gear 73 can drive rack 74 linear motion, and positive and negative rotation through motor 72 realizes the reciprocal slip of rack, thereby drives basement 3 and slides along linear rail 2 straight line is reciprocal.
The adsorption structure is a plurality of through holes 41 evenly arranged on the supporting panel 4, the base 1 is further provided with an air pump corresponding to the through holes 41, when the flexible electronic device is placed on the supporting panel 4, the through holes 41 are vacuumized through the air pump, and the flexible electronic device is stably attached to the supporting panel 4 in a vacuum adsorption mode.
The adsorption structure can also adopt the structure of an elastic clamp 6, the elastic clamp is provided with two parts and is correspondingly arranged, the elastic clamp 6 adopts a metal piece with certain elasticity, one end of the metal piece is fixed through a pin shaft, when the flexible electronic device is fixed, the elastic clamp 6 is completely upwards, the flexible electronic device is placed below the elastic clamp 6, then the elastic clamp 6 is elastically reset, and the flexible electronic device is clamped by the elastic force of the elastic clamp.
Of course, vacuum adsorption and an elastic clamp can be arranged at the same time and are combined for use, so that the fixing effect is better.
The probe detection mechanism 8 comprises a probe frame 81 and a probe 82, one end of the probe 82 is hinged to the probe frame 81, the other end of the probe 82 can correspond to the supporting panel 4, the probe 82 is hinged to the probe frame, so that adaptability adjustment can be performed on different bending degrees of the flexible electronic device, the probe 82 is further connected with a source meter, the source meter represents a direct current power supply and a voltmeter, and when the probe 82 contacts the flexible electronic device adsorbed on the supporting panel 4, detection of internal resistance of the flexible electronic device in a bending state can be achieved.
The microscope detection mechanism 9 comprises a microscope stand 91 and a microscope 92, the microscope stand 91 is arranged in the middle of the rear side of the base 1, and the microscope 92 is installed on the microscope stand 91, corresponds to the position of the flexible rubber 5 and is used for observing the appearance change of the flexible electronic device in the bending detection process in real time.
When detecting, closely laminate flexible electron device on support panel 4 through adsorption structure, then order about basement 3 through actuating mechanism and slide along 2 sharp of linear orbit, basement 3 slides and drives support panel 4 and bend along middle flexible rubber 5, support panel 4 can drive the flexible electron device bending on its surface simultaneously, under the crooked state of difference, detect the observation through probe detection mechanism 8 and microscope detection mechanism 9, realize the electromigration detection of flexible electron device.
Because the supporting panel 4 is connected through the flexible rubber 5, when the supporting panel 4 is bent relatively, the flexible rubber 5 can be stretched and compressed along with the supporting panel 4, so that the change of the curvature radius is realized, and because the flexible electronic device is tightly attached to the supporting panel 4 through the adsorption structure, the curvature radius of the flexible rubber 5 in bending is the curvature radius of the flexible electronic device in the same bending state, so that the change and adjustment of the curvature radius of the flexible electronic device can be realized by changing the position of the supporting panel 4, and the electromigration detection of the flexible electronic device under different curvature radii is realized.
Through the variable curvature platform, = can realize the bending of flexible electron device under different curvature radius, can simulate the crooked operational environment of flexible electron device really, based on this variable curvature platform, can realize studying the electromigration reliability of device under different curvature radius, to reducing the failure rate of flexible electron device, make it can adapt to more complicated application environment, improve the reliability of its work and have important using meaning.
In the description of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.
The skilled person should understand that: although the present invention has been described in accordance with the above embodiments, the inventive concept is not limited to this embodiment, and any modification of the inventive concept will be included in the scope of the patent claims.
Claims (7)
1. A variable curvature platform of a flexible electronic device electromigration detection device comprises a base (1), linear rails (2), substrates (3) and a support panel (4), wherein the linear rails (2) are fixedly arranged on the base (1), the substrates (3) are provided with two blocks and correspondingly arranged at two ends of the linear rails (2), at least one substrate (3) is in sliding fit with the linear rails (2) and is connected with a driving mechanism (7) for driving the substrates to slide along the linear rails (2);
the method is characterized in that: the number of the supporting panels (4) is two, one ends of the two supporting panels (4) are connected with each other through flexible rubber (5), and the other ends of the two supporting panels are hinged with the two substrates (3) respectively; and the two support panels (4) are also provided with adsorption structures for tightly attaching the flexible electronic device to the support panels (4).
2. The variable curvature platform of an electromigration detection apparatus for a flexible electronic device as set forth in claim 1, wherein: the supporting panel (4) is provided with a plurality of through holes (41) which are uniformly distributed, and the base (1) is also provided with an air pump which can correspond to the through holes (41).
3. The variable curvature platform of an electromigration detection apparatus for a flexible electronic device as set forth in claim 1, wherein: the supporting panel (4) is at least provided with two elastic clamps (6) which are correspondingly arranged.
4. The variable curvature platform of an electromigration detection apparatus for a flexible electronic device as set forth in claim 1, wherein: the two bases (3) are in sliding fit with the linear track (2) and are respectively connected with a group of driving mechanisms (7).
5. The variable curvature platform of an electromigration detection apparatus for a flexible electronic device as set forth in claim 4, wherein: actuating mechanism (7) include motor cabinet (71), motor (72), gear (73), rack (74), motor cabinet (71) set up the one side at base (1), motor (72) are installed on motor cabinet (71) to drive connection gear (73), rack (74) and linear rail (2) parallel arrangement to with motor cabinet (71) straight line cooperation of sliding, rack (74) and gear (73) mesh mutually, and rack (74) one end and basement (3) fixed connection.
6. The variable curvature platform of an electromigration detection apparatus for a flexible electronic device as set forth in claim 1, wherein: the two linear rails (2) are arranged in parallel.
7. The utility model provides a flexible electron device electromigration detection device which characterized in that: comprising a variable curvature platform according to any one of claims 1-6 and a probe detection mechanism (8), a microscope detection mechanism (9); the probe detection mechanism (8) comprises a probe frame (81) and a probe (82), one end of the probe (82) is hinged with the probe frame (81), and the other end of the probe (82) can correspond to the supporting panel (4) and is connected with a source meter; the microscope detection mechanism (9) comprises a microscope stand (91) and a microscope (92), the microscope stand (91) is arranged in the middle of the rear side of the base (1), and the microscope (92) is installed on the microscope stand (91) and corresponds to the position of the flexible rubber (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920571206.8U CN209878824U (en) | 2019-04-25 | 2019-04-25 | Flexible electronic device electromigration detection device and variable curvature platform thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920571206.8U CN209878824U (en) | 2019-04-25 | 2019-04-25 | Flexible electronic device electromigration detection device and variable curvature platform thereof |
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| CN209878824U true CN209878824U (en) | 2019-12-31 |
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| CN201920571206.8U Expired - Fee Related CN209878824U (en) | 2019-04-25 | 2019-04-25 | Flexible electronic device electromigration detection device and variable curvature platform thereof |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111948426A (en) * | 2020-09-04 | 2020-11-17 | 中国科学院深圳先进技术研究院 | Curvature obtaining method, curvature testing equipment and curvature adjusting device |
| CN113285203A (en) * | 2021-05-24 | 2021-08-20 | 中国人民解放军国防科技大学 | Arc array antenna support |
| CN113391154A (en) * | 2021-06-21 | 2021-09-14 | 电子科技大学 | Real-time electrical performance monitoring equipment for continuous bending of flexible electronic component |
| WO2022077528A1 (en) * | 2020-10-13 | 2022-04-21 | 江苏仕邦柔性电子研究院有限公司 | Flexible electronic element suction table |
| CN116666277A (en) * | 2023-08-01 | 2023-08-29 | 内蒙古工业大学 | Flexible electronic device performance test experimental equipment |
-
2019
- 2019-04-25 CN CN201920571206.8U patent/CN209878824U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111948426A (en) * | 2020-09-04 | 2020-11-17 | 中国科学院深圳先进技术研究院 | Curvature obtaining method, curvature testing equipment and curvature adjusting device |
| CN111948426B (en) * | 2020-09-04 | 2024-03-01 | 中国科学院深圳先进技术研究院 | Curvature acquisition method, curvature test equipment and curvature adjusting device |
| WO2022077528A1 (en) * | 2020-10-13 | 2022-04-21 | 江苏仕邦柔性电子研究院有限公司 | Flexible electronic element suction table |
| CN113285203A (en) * | 2021-05-24 | 2021-08-20 | 中国人民解放军国防科技大学 | Arc array antenna support |
| CN113391154A (en) * | 2021-06-21 | 2021-09-14 | 电子科技大学 | Real-time electrical performance monitoring equipment for continuous bending of flexible electronic component |
| CN116666277A (en) * | 2023-08-01 | 2023-08-29 | 内蒙古工业大学 | Flexible electronic device performance test experimental equipment |
| CN116666277B (en) * | 2023-08-01 | 2023-10-03 | 内蒙古工业大学 | Flexible electronic device performance test experimental equipment |
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Granted publication date: 20191231 Termination date: 20210425 |