CN209848550U - Helium compression gas circuit system - Google Patents
Helium compression gas circuit system Download PDFInfo
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- CN209848550U CN209848550U CN201920379094.6U CN201920379094U CN209848550U CN 209848550 U CN209848550 U CN 209848550U CN 201920379094 U CN201920379094 U CN 201920379094U CN 209848550 U CN209848550 U CN 209848550U
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Abstract
The utility model discloses a helium gas compression gas circuit system, belonging to the technical field of helium gas compression, comprising a gas circuit loop; a pipeline for connecting a cooling loop and a pipeline for connecting an oil return loop are arranged on the inlet end pipeline of the scroll compressor of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor; the bottom of the scroll compressor is provided with an outlet end pipeline of the scroll compressor of a cooling loop; the top of the oil-gas separator is provided with an inlet pipeline of the oil-gas separator of the gas circuit loop and an outlet pipeline of the oil-gas separator of the oil return loop; and an outlet end pipeline of the oil-gas separator of the oil return loop extends into the bottom of the oil-gas separator. The utility model discloses a helium compression gas circuit system, simple structure, low in manufacturing cost, safe and reliable.
Description
Technical Field
The utility model belongs to the technical field of the helium compression, specifically speaking relates to a helium compression gas circuit system.
Background
Cryopumps are vacuum pumps that condense gases using cryogenic surfaces, also known as condensate pumps. The cryopump can obtain clean vacuum with the maximum pumping speed and the minimum limiting pressure, and is widely applied to the research and production of semiconductors and integrated circuits, the research and production of molecular beams, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like.
The cold plate is arranged in the cryopump and is cooled to the extremely low temperature by liquid helium or a refrigerator. It condenses the gas and keeps the vapor pressure of the condensate below the limit pressure of the pump, thus achieving the pumping action. The main functions of cryogenic pumping are cryogenic condensation, cryogenic adsorption and cryogenic capture.
Helium gas compression devices, which are an important component of cryopumps, provide pure helium gas to a refrigerator. How to make the compressed gas circuit system simple in structure, low in manufacturing cost, safe and reliable still needs to be solved urgently.
SUMMERY OF THE UTILITY MODEL
The utility model aims at the above-mentioned weak point provide a helium compression gas circuit system, aim at solving how to make compression gas circuit system simple structure, low in manufacturing cost, safe and reliable's problem. In order to achieve the above object, the utility model provides a following technical scheme:
a helium compression gas circuit system comprises a gas circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; a pipeline for connecting a cooling loop and a pipeline for connecting an oil return loop are arranged on an inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor 1; the bottom of the scroll compressor 1 is provided with an outlet end pipeline of the scroll compressor 1 of a cooling loop; the top of the oil-gas separator 3 is provided with an inlet pipeline of the oil-gas separator 3 of the gas circuit loop and an outlet pipeline of the oil-gas separator 3 of the oil return loop; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop extends into the bottom of the oil-gas separator 3.
According to the structure, the cooling circuit is formed by at least serially connecting the scroll compressor 1 and the heat exchanger 2 in a closed loop through pipelines; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; in the gas circuit: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines, so that the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of ensuring the stability of the original performance; a pipeline for connecting a cooling loop and a pipeline for connecting an oil return loop are arranged on an inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor 1; oil and helium gas enter the clearance position of the moving and static turbines, and the oil can fully cool and lubricate the scroll compressor 1.
Further, a first branch 8 and a second branch 9 are arranged on a pipeline between the balance tank 6 and the scroll compressor 1; the first branch 8 and the second branch 9 are connected to a pipeline between the oil-gas separator 3 and the adsorber 4; an electromagnetic valve 81 is arranged on the first branch 8; an overflow valve 91 is arranged on the second branch 9, and a safety valve is arranged on the oil-gas separator 3. According to the structure, when the pressure difference between the balance tank 6 and the oil-gas separator 3 is too large, the overflow valve 91 is opened, so that helium in the balance tank 6 and the oil-gas separator 3 flows, and the pressure difference is reduced; the electromagnetic valve 81 is closed when the scroll compressor 1 operates, and is opened when the scroll compressor 1 does not operate, so that the pressure is equalized. And a safety valve is arranged on the oil-gas separator 3. With the above configuration, the excessive pressure in the gas-oil separator 3 is avoided.
Furthermore, a corrugated pipe 7 is arranged on a pipeline connected with the scroll compressor 1 in the air circuit loop, and a steel wire mesh is wrapped outside the corrugated pipe 7. According to the structure, the scroll compressor 1 can generate certain vibration in work, and if the pipeline is directly welded, the pipeline and each module can be stably connected with each other; the bellows 7 has a certain flexibility, which can avoid the vibration problem that the rigid connection can not solve. The steel wire mesh is wrapped outside the corrugated pipe 7, so that the capacity of bearing high pressure of the corrugated pipe 7 can be improved, and the corrugated pipe can be applied to a high-pressure helium medium environment.
Further, a water inlet joint 21 and a water outlet joint 22 are arranged on the heat exchanger 2; and a water pressure protection relay 23 is arranged on the water inlet joint 21. According to the structure, the gas circuit loop passes through the heat exchanger 2; cold water is introduced into the water inlet joint 21 and then flows out of the water outlet joint 22 to take away heat of the gas circuit loop; the water pressure protective relay 23 prevents the introduced water pressure from being too high, and protects the heat exchanger 2.
Further, a pipeline from the heat exchanger 2 to the oil-gas separator 3 is provided with a temperature sensor 24. According to the structure, whether the temperature of the gas circuit loop reaches the standard after passing through the heat exchanger 2 can be monitored, if the temperature exceeds the set upper limit, the scroll compressor 1 is stopped, and the safety of equipment is guaranteed.
Further, pressure gauges are arranged on a pipeline from the balance tank 6 to the scroll compressor 1 and a pipeline from the oil-gas separator 3 to the adsorber 4; and a pressure sensor is arranged on a pipeline from the scroll compressor 1 to the adsorber 4 of the gas circuit loop. According to the structure, the pressure can be monitored in real time conveniently.
Further, an inner cylinder 33, a filter element 31, an outer cylinder 32, an upper cover 35 and a lower cover 34 are arranged inside the oil-gas separator 3; the inner cylinder 33 is communicated with an inlet end pipeline of the oil-gas separator 3 of the gas circuit loop; the inner barrel 33 is sleeved with a filter element 31; the outer cylinder 32 is sleeved outside the filter element 31; the inner barrel 33 and the outer barrel 32 are both provided with a plurality of small holes for ventilation; the upper cover 35 and the lower cover 34 are respectively clamped at the upper end and the lower end of the inner cylinder 33 and the upper end and the lower end of the outer cylinder 32; the upper cover 35 is fixed on an inlet end pipeline of the oil-gas separator 3 of the gas circuit loop. According to the structure, the helium and oil-gas mixed gas enters the inner cylinder 33 from the inlet end pipeline of the oil-gas separator 3 of the gas circuit, enters the filter element 31 from the small hole in the outer wall of the inner cylinder 33, flows out from the small hole in the outer wall of the outer cylinder 32, oil flows downwards, and helium is discharged upwards out of the oil-gas separator 3. The inner cylinder 33 avoids direct impact of helium and oil-gas mixed gas on the filter element 31, and the service life of the oil-gas separator 3 is prolonged.
The utility model has the advantages that:
1. the utility model discloses a helium gas compression gas circuit system, which comprises a gas circuit loop; the inlet end pipeline of the scroll compressor of the gas circuit loop is provided with two branches which are respectively used for connecting the cooling loop and the oil return loop, and the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor; the bottom of the scroll compressor is provided with an outlet end pipeline of the scroll compressor of a cooling loop; the top of the oil-gas separator is provided with an inlet pipeline of the oil-gas separator of the gas circuit loop and an outlet pipeline of the oil-gas separator of the oil return loop; and an outlet end pipeline of the oil-gas separator of the oil return loop extends into the bottom of the oil-gas separator. The utility model discloses a helium compression gas circuit system, simple structure, low in manufacturing cost, safe and reliable.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of a helium compression purification system for use with the present invention;
FIG. 3 is a schematic structural diagram of the oil-gas separator of the present invention;
in the drawings: 1-a scroll compressor, 2-a heat exchanger, 3-an oil-gas separator, 4-an absorber, 5-a refrigerator, 6-a balance tank, 7-a corrugated pipe, 8-a branch I, 9-a branch II, 81-an electromagnetic valve, 91-an overflow valve, 11-an oil mass controller and 12-an oil filter, 21-a water inlet joint, 22-a water outlet joint, 23-a water pressure protective relay, 24-a temperature sensor, 31-a filter element, 32-an outer cylinder, 33-an inner cylinder, 34-a lower cover, 35-an upper cover, 36-an outlet end pipeline of an oil-gas separator (3) of an oil return loop, 37-an inlet end pipeline of the oil-gas separator (3) of a gas circuit loop and 38-an outlet end pipeline of the oil-gas separator (3) of a gas circuit loop.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments, but the present invention is not limited to the following embodiments.
The first embodiment is as follows:
see figures 1-2. A helium compression gas circuit system comprises a gas circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; a pipeline for connecting a cooling loop and a pipeline for connecting an oil return loop are arranged on an inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor 1; the bottom of the scroll compressor 1 is provided with an outlet end pipeline of the scroll compressor 1 of a cooling loop; the top of the oil-gas separator 3 is provided with an inlet pipeline of the oil-gas separator 3 of the gas circuit loop and an outlet pipeline of the oil-gas separator 3 of the oil return loop; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop extends into the bottom of the oil-gas separator 3.
According to the structure, the cooling circuit is formed by at least serially connecting the scroll compressor 1 and the heat exchanger 2 in a closed loop through pipelines; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; in the gas circuit: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines, so that the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of ensuring the stability of the original performance; a pipeline for connecting a cooling loop and a pipeline for connecting an oil return loop are arranged on an inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor 1; oil and helium gas enter the clearance position of the moving and static turbines, and the oil can fully cool and lubricate the scroll compressor 1.
Example two:
see figures 1-2. A helium compression gas circuit system comprises a gas circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; a pipeline for connecting a cooling loop and a pipeline for connecting an oil return loop are arranged on an inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor 1; the bottom of the scroll compressor 1 is provided with an outlet end pipeline of the scroll compressor 1 of a cooling loop; the top of the oil-gas separator 3 is provided with an inlet pipeline of the oil-gas separator 3 of the gas circuit loop and an outlet pipeline of the oil-gas separator 3 of the oil return loop; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop extends into the bottom of the oil-gas separator 3.
According to the structure, the cooling circuit is formed by at least serially connecting the scroll compressor 1 and the heat exchanger 2 in a closed loop through pipelines; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; in the gas circuit: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop is combined into one pipeline by three pipelines, the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of stability of the original performance is guaranteed.
And a corrugated pipe 7 is arranged on a pipeline connected with the scroll compressor 1 in the gas circuit loop. According to the structure, the scroll compressor 1 can generate certain vibration in work, and if the pipeline is directly welded, the pipeline and each module can be stably connected with each other; the bellows 7 has a certain flexibility, which can avoid the vibration problem that the rigid connection can not solve.
And a steel wire mesh is wrapped outside the corrugated pipe 7. According to the structure, the steel wire mesh is wrapped outside the corrugated pipe 7, the capacity of bearing high pressure of the corrugated pipe 7 can be improved, and the corrugated pipe can be applied to a high-pressure helium medium environment.
Example three:
see figures 1-3. A helium compression gas circuit system comprises a gas circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; a pipeline for connecting a cooling loop and a pipeline for connecting an oil return loop are arranged on the inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor 1; the bottom of the scroll compressor 1 is provided with an outlet end pipeline of the scroll compressor 1 of a cooling loop; the top of the oil-gas separator 3 is provided with an inlet pipeline of the oil-gas separator 3 of the gas circuit loop and an outlet pipeline of the oil-gas separator 3 of the oil return loop; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop extends into the bottom of the oil-gas separator 3.
According to the structure, the cooling circuit is formed by at least serially connecting the scroll compressor 1 and the heat exchanger 2 in a closed loop through pipelines; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; in the gas circuit: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop is combined into one pipeline by three pipelines, the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of stability of the original performance is guaranteed.
And a corrugated pipe 7 is arranged on a pipeline connected with the scroll compressor 1 in the gas circuit loop. According to the structure, the scroll compressor 1 can generate certain vibration in work, and if the pipeline is directly welded, the pipeline and each module can be stably connected with each other; the bellows 7 has a certain flexibility, which can avoid the vibration problem that the rigid connection can not solve.
And a steel wire mesh is wrapped outside the corrugated pipe 7. According to the structure, the steel wire mesh is wrapped outside the corrugated pipe 7, the capacity of bearing high pressure of the corrugated pipe 7 can be improved, and the corrugated pipe can be applied to a high-pressure helium medium environment.
A first branch 8 and a second branch 9 are arranged on a pipeline between the balance tank 6 and the scroll compressor 1; the first branch 8 and the second branch 9 are connected to a pipeline between the oil-gas separator 3 and the adsorber 4; an electromagnetic valve 81 is arranged on the first branch 8; and an overflow valve 91 is arranged on the second branch 9. According to the structure, when the pressure difference between the balance tank 6 and the oil-gas separator 3 is too large, the overflow valve 91 is opened, so that helium in the balance tank 6 and the oil-gas separator 3 flows, and the pressure difference is reduced; the electromagnetic valve 81 is closed when the scroll compressor 1 operates, and is opened when the scroll compressor 1 does not operate, so that the pressure is equalized.
And a safety valve is arranged on the oil-gas separator 3. With the above configuration, the excessive pressure in the gas-oil separator 3 is avoided.
A water inlet joint 21 and a water outlet joint 22 are arranged on the heat exchanger 2; and a water pressure protection relay 23 is arranged on the water inlet joint 21. According to the structure, the gas circuit loop passes through the heat exchanger 2; cold water is introduced into the water inlet joint 21 and then flows out of the water outlet joint 22 to take away heat of the gas circuit loop; the water pressure protective relay 23 prevents the introduced water pressure from being too high, and protects the heat exchanger 2.
And a pipeline from the heat exchanger 2 to the oil-gas separator 3 is provided with a temperature sensor 24. According to the structure, whether the temperature of the gas circuit loop reaches the standard after passing through the heat exchanger 2 can be monitored, if the temperature exceeds the set upper limit, the scroll compressor 1 is stopped, and the safety of equipment is guaranteed.
Pressure gauges are arranged on a pipeline from the balance tank 6 to the scroll compressor 1 and a pipeline from the oil-gas separator 3 to the adsorber 4; and a pressure sensor is arranged on a pipeline from the scroll compressor 1 to the adsorber 4 of the gas circuit loop. According to the structure, the pressure can be monitored in real time conveniently.
The inner cylinder 33, the filter element 31, the outer cylinder 32, the upper cover 35 and the lower cover 34 are arranged in the oil-gas separator 3; the inner cylinder 33 is communicated with an inlet end pipeline of the oil-gas separator 3 of the gas circuit loop; the inner barrel 33 is sleeved with a filter element 31; the outer cylinder 32 is sleeved outside the filter element 31; the inner barrel 33 and the outer barrel 32 are both provided with a plurality of small holes for ventilation; the upper cover 35 and the lower cover 34 are respectively clamped at the upper end and the lower end of the inner cylinder 33 and the upper end and the lower end of the outer cylinder 32; the upper cover 35 is fixed on an inlet end pipeline of the oil-gas separator 3 of the gas circuit loop. According to the structure, the helium and oil-gas mixed gas enters the inner cylinder 33 from the inlet end pipeline of the oil-gas separator 3 of the gas circuit, enters the filter element 31 from the small hole in the outer wall of the inner cylinder 33, flows out from the small hole in the outer wall of the outer cylinder 32, oil flows downwards, and the helium is discharged out of the oil-gas separator 3 upwards. The inner cylinder 33 avoids direct impact of helium and oil-gas mixed gas on the filter element 31, and the service life of the oil-gas separator 3 is prolonged.
The above only is the preferred embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent flow changes made by the contents of the specification and the drawings, or directly or indirectly applied to other related technical fields, are included in the same way in the protection scope of the present invention.
Claims (7)
1. The utility model provides a helium compression gas circuit system which characterized in that: comprises a gas circuit loop; the gas circuit loop is formed by connecting a scroll compressor (1), a heat exchanger (2), an oil-gas separator (3), an adsorber (4), a refrigerator (5) and a balance tank (6) in series and in a closed loop through pipelines at least; a pipeline for connecting a cooling loop and a pipeline for an oil return loop are arranged on an inlet end pipeline of the scroll compressor (1) of the gas circuit loop, the three pipelines are combined into one pipeline and are arranged at the non-central position of the top of the scroll compressor (1); the bottom of the scroll compressor (1) is provided with an outlet end pipeline of the scroll compressor (1) of a cooling loop; the top of the oil-gas separator (3) is provided with an inlet pipeline of the oil-gas separator (3) of the gas circuit loop and an outlet pipeline of the oil-gas separator (3) of the oil return loop; and an outlet end pipeline of the oil-gas separator (3) of the oil return loop extends into the bottom of the oil-gas separator (3).
2. A helium compression gas circuit system as claimed in claim 1, wherein: a first branch (8) and a second branch (9) are arranged on a pipeline between the balance tank (6) and the scroll compressor (1); the branch I (8) and the branch II (9) are connected to a pipeline between the oil-gas separator (3) and the adsorber (4); an electromagnetic valve (81) is arranged on the branch I (8); an overflow valve (91) is arranged on the second branch (9), and a safety valve is arranged on the oil-gas separator (3).
3. A helium compression gas circuit system as claimed in claim 1, wherein: the air circuit loop is provided with a corrugated pipe (7) on a pipeline connected with the scroll compressor (1), and a steel wire mesh is wrapped outside the corrugated pipe (7).
4. A helium compression gas circuit system as claimed in claim 1, wherein: a water inlet joint (21) and a water outlet joint (22) are arranged on the heat exchanger (2); and a water pressure protection relay (23) is arranged on the water inlet joint (21).
5. A helium compression gas circuit system as claimed in claim 1, wherein: and a temperature sensor (24) is arranged on a pipeline from the heat exchanger (2) to the oil-gas separator (3).
6. A helium gas compression gas circuit system as claimed in any one of claims 1 to 5, wherein: pressure gauges are arranged on a pipeline from the balance tank (6) to the scroll compressor (1) and a pipeline from the oil-gas separator (3) to the adsorber (4); and a pressure sensor is arranged on a pipeline from the scroll compressor (1) to the adsorber (4) of the gas circuit loop.
7. A helium gas compression gas circuit system as claimed in any one of claims 1 to 5, wherein: an inner cylinder (33), a filter element (31), an outer cylinder (32), an upper cover (35) and a lower cover (34) are arranged in the oil-gas separator (3); the inner cylinder (33) is communicated with an inlet end pipeline of an oil-gas separator (3) of the gas circuit loop; a filter element (31) is sleeved outside the inner cylinder (33); an outer cylinder (32) is sleeved outside the filter element (31); the inner cylinder (33) and the outer cylinder (32) are both provided with a plurality of small holes for ventilation; the upper cover (35) and the lower cover (34) are respectively clamped at the upper end and the lower end of the inner cylinder (33) and the upper end and the lower end of the outer cylinder (32); the upper cover (35) is fixed on an inlet end pipeline of the oil-gas separator (3) of the gas circuit loop.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920379094.6U CN209848550U (en) | 2019-03-25 | 2019-03-25 | Helium compression gas circuit system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920379094.6U CN209848550U (en) | 2019-03-25 | 2019-03-25 | Helium compression gas circuit system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209848550U true CN209848550U (en) | 2019-12-27 |
Family
ID=68934640
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920379094.6U Expired - Fee Related CN209848550U (en) | 2019-03-25 | 2019-03-25 | Helium compression gas circuit system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209848550U (en) |
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2019
- 2019-03-25 CN CN201920379094.6U patent/CN209848550U/en not_active Expired - Fee Related
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191227 |
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| CF01 | Termination of patent right due to non-payment of annual fee |