CN209885454U - Helium compression purification system - Google Patents
Helium compression purification system Download PDFInfo
- Publication number
- CN209885454U CN209885454U CN201920379096.5U CN201920379096U CN209885454U CN 209885454 U CN209885454 U CN 209885454U CN 201920379096 U CN201920379096 U CN 201920379096U CN 209885454 U CN209885454 U CN 209885454U
- Authority
- CN
- China
- Prior art keywords
- oil
- scroll compressor
- loop
- pipeline
- gas separator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000001307 helium Substances 0.000 title claims abstract description 124
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 124
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 123
- 230000006835 compression Effects 0.000 title claims abstract description 25
- 238000007906 compression Methods 0.000 title claims abstract description 25
- 238000000746 purification Methods 0.000 title claims abstract description 16
- 239000007789 gas Substances 0.000 claims abstract description 266
- 238000001816 cooling Methods 0.000 claims abstract description 51
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 25
- 238000009423 ventilation Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 230000017525 heat dissipation Effects 0.000 abstract description 4
- 229910000831 Steel Inorganic materials 0.000 description 6
- 239000010959 steel Substances 0.000 description 6
- 230000000670 limiting effect Effects 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000007921 spray Substances 0.000 description 4
- 238000003466 welding Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 150000002371 helium Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 238000005211 surface analysis Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Images
Landscapes
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
The utility model discloses a helium compression purification system, which belongs to the technical field of helium compression, wherein three pipelines at the inlet end of a scroll compressor of a gas circuit loop, a cooling loop and an oil return loop are combined into one pipeline and are arranged at the non-central position at the top of the scroll compressor; the outlet end pipeline of the scroll compressor of the cooling loop is arranged at the bottom of the scroll compressor; the inlet end pipeline of the oil-gas separator of the oil return loop is arranged at the top of the oil-gas separator; and an outlet end pipeline of the oil-gas separator of the oil return loop is arranged at the top of the oil-gas separator and extends into the bottom of the oil-gas separator. The utility model discloses a helium compression clean system, simple structure, low in manufacturing cost, heat dissipation are good, safe and reliable.
Description
Technical Field
The utility model belongs to the technical field of the helium compression, specifically speaking relates to a helium compression clean system.
Background
Cryopumps are vacuum pumps that condense gases using cryogenic surfaces, also known as condensate pumps. The cryopump can obtain clean vacuum with the maximum pumping speed and the minimum limiting pressure, and is widely applied to the research and production of semiconductors and integrated circuits, the research and production of molecular beams, vacuum coating equipment, vacuum surface analysis instruments, ion implanters, space simulation devices and the like.
The cold plate is arranged in the cryopump and is cooled to the extremely low temperature by liquid helium or a refrigerator. It condenses the gas and keeps the vapor pressure of the condensate below the limit pressure of the pump, thus achieving the pumping action. The main functions of cryogenic pumping are cryogenic condensation, cryogenic adsorption and cryogenic capture.
Helium gas compression devices, which are an important component of cryopumps, provide pure helium gas to a refrigerator. How to make this helium compression equipment simple structure, low in manufacturing cost, heat dissipation good, safe and reliable still needs to solve urgently.
SUMMERY OF THE UTILITY MODEL
The utility model aims at the above-mentioned weak point provide a helium compression clean system, aim at solving how to make helium compression equipment simple structure, low in manufacturing cost, the good, safe and reliable's of heat dissipation problem. In order to achieve the above object, the utility model provides a following technical scheme:
a helium compression purification system comprises a gas circuit loop and a double-oil circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; the double-oil-way loop comprises a cooling loop and an oil return loop; the cooling loop is formed by connecting a scroll compressor 1 and a heat exchanger 2 in series and in a closed loop through pipelines at least; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines and are arranged at the non-central position of the top of the scroll compressor 1; the outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3.
According to the structure, in the air circuit loop: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines, so that the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of ensuring the stability of the original performance; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines and are arranged at the non-central position of the top of the scroll compressor 1; oil and helium gas enter the clearance position of the moving and static turbines, and the oil can fully cool and lubricate the scroll compressor 1.
Further, a first branch 8 and a second branch 9 are arranged on a pipeline between the balance tank 6 and the scroll compressor 1; the first branch 8 and the second branch 9 are connected to a pipeline between the oil-gas separator 3 and the adsorber 4; an electromagnetic valve 81 is arranged on the first branch 8; an overflow valve 91 is arranged on the second branch 9, and a safety valve is arranged on the oil-gas separator 3. According to the structure, when the pressure difference between the balance tank 6 and the oil-gas separator 3 is too large, the overflow valve 91 is opened, so that helium in the balance tank 6 and the oil-gas separator 3 flows, and the pressure difference is reduced; the electromagnetic valve 81 is closed when the scroll compressor 1 operates, and is opened when the scroll compressor 1 does not operate, so that the pressure is equalized. The safety valve prevents the pressure in the oil-gas separator 3 from being too high.
Further, an oil quantity controller 11 and an oil filter 12 are arranged on the cooling loop; an oil quantity controller 11 is also arranged on a pipeline from the oil-gas separator 3 to the scroll compressor 1 in the oil return loop, and the oil quantity controller 11 is a valve with a hole structure. With the above structure, the oil filter 12 can filter impurities to keep the oil clean; the oil quantity controller 11 is used for limiting the oil flow of the pipeline, so that the oil flow is controllable. The valve mode through foraminiferous structure limits the pipeline oil flow, simple structure, and the current-limiting is effectual.
Furthermore, bellows 7 are arranged on the pipeline connected with the scroll compressor 1 in the gas circuit loop, the cooling circuit and the oil return circuit, and the outside of the bellows 7 is wrapped by a steel wire mesh. According to the structure, the scroll compressor 1 can generate certain vibration in work, and if the pipeline is directly welded, the pipeline and each module can be stably connected with each other; the bellows 7 has a certain flexibility, which can avoid the vibration problem that the rigid connection can not solve. The steel wire mesh is wrapped outside the corrugated pipe 7, so that the capacity of bearing high pressure of the corrugated pipe 7 can be improved, and the corrugated pipe can be applied to a high-pressure helium medium environment.
Further, the heat exchanger 2 comprises an oil heat exchanger and an oil-gas heat exchanger; a water inlet joint 21 and a water outlet joint 22 are arranged on the heat exchanger 2; and a water pressure protection relay 23 is arranged on the water inlet joint 21. According to the structure, the oil-gas heat exchanger is passed by the gas circuit loop, and the oil heat exchanger is passed by the cooling loop; cold water is introduced into the water inlet joint 21 and then flows out of the water outlet joint 22 to take away heat of the air circuit loop and the cooling loop; the water pressure protective relay 23 prevents the introduced water pressure from being too high, and protects the heat exchanger 2.
Further, temperature sensors 24 are arranged on a pipeline from the heat exchanger 2 to the scroll compressor 1 and a pipeline from the heat exchanger 2 to the oil-gas separator 3. According to the structure, whether the temperature of the gas circuit loop and the cooling loop reaches the standard after passing through the heat exchanger 2 can be monitored, if the temperature exceeds the set upper limit, the scroll compressor 1 is stopped, and the safety of equipment is ensured.
Further, pressure gauges are arranged on a pipeline from the balance tank 6 to the scroll compressor 1 and a pipeline from the oil-gas separator 3 to the adsorber 4; and a pressure sensor is arranged on a pipeline from the scroll compressor 1 to the adsorber 4 of the gas circuit loop. According to the structure, the pressure can be monitored in real time conveniently.
Further, an inner cylinder 33, a filter element 31, an outer cylinder 32, an upper cover 35 and a lower cover 34 are arranged inside the oil-gas separator 3; the inner cylinder 33 is communicated with an inlet end pipeline of an oil-gas separator 3 of the oil return loop; the inner barrel 33 is sleeved with a filter element 31; the outer cylinder 32 is sleeved outside the filter element 31; the inner barrel 33 and the outer barrel 32 are both provided with a plurality of small holes for ventilation; the upper cover 35 and the lower cover 34 are respectively clamped at the upper end and the lower end of the inner cylinder 33 and the upper end and the lower end of the outer cylinder 32; the upper cover 35 is fixed on an inlet end pipeline of the oil-gas separator 3 of the oil return loop. According to the structure, the helium and oil-gas mixed gas enters the inner cylinder 33 from the inlet end pipeline of the oil-gas separator 3 of the oil return loop, enters the filter element 31 from the small hole in the outer wall of the inner cylinder 33, flows out from the small hole in the outer wall of the outer cylinder 32, the oil liquid flows downwards, and the helium is discharged out of the oil-gas separator 3 upwards. The inner cylinder 33 avoids direct impact of helium and oil-gas mixed gas on the filter element 31, and the service life of the oil-gas separator 3 is prolonged.
The utility model has the advantages that:
1. the utility model discloses a helium compression purification system, the inlet end pipeline of the scroll compressor of the gas circuit loop, the cooling loop and the oil return loop is combined into a pipeline by three pipelines and is arranged at the non-central position of the top of the scroll compressor; the outlet end pipeline of the scroll compressor of the cooling loop is arranged at the bottom of the scroll compressor; the inlet end pipeline of the oil-gas separator of the oil return loop is arranged at the top of the oil-gas separator; and an outlet end pipeline of the oil-gas separator of the oil return loop is arranged at the top of the oil-gas separator and extends into the bottom of the oil-gas separator. The utility model discloses a helium compression clean system, simple structure, low in manufacturing cost, heat dissipation are good, safe and reliable.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic structural diagram of the oil-gas separator of the present invention;
in the drawings: 1-a scroll compressor, 2-a heat exchanger, 3-an oil-gas separator, 4-an absorber, 5-a refrigerator, 6-a balance tank, 7-a corrugated pipe, 8-a branch I, 9-a branch II, 81-an electromagnetic valve, 91-an overflow valve, 11-an oil mass controller and 12-an oil filter, 21-a water inlet joint, 22-a water outlet joint, 23-a water pressure protective relay, 24-a temperature sensor, 31-a filter element, 32-an outer cylinder, 33-an inner cylinder, 34-a lower cover, 35-an upper cover, 36-an outlet end pipeline of an oil-gas separator (3) of an oil return loop, 37-an inlet end pipeline of the oil-gas separator (3) of the oil return loop and 38-an outlet end pipeline of the oil-gas separator (3) of an air circuit loop.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments, but the present invention is not limited to the following embodiments.
The first embodiment is as follows:
see figure 1. A helium compression purification system comprises a gas circuit loop and a double-oil circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; the double-oil-way loop comprises a cooling loop and an oil return loop; the cooling loop is formed by connecting a scroll compressor 1 and a heat exchanger 2 in series and in a closed loop through pipelines at least; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines and are arranged at the non-central position of the top of the scroll compressor 1; the outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3.
According to the structure, in the air circuit loop: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines, so that the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of ensuring the stability of the original performance; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines and are arranged at the non-central position of the top of the scroll compressor 1; oil and helium gas enter the clearance position of the moving and static turbines, and the oil can fully cool and lubricate the scroll compressor 1.
Example two:
see figure 1. A helium compression purification system comprises a gas circuit loop and a double-oil circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; the double-oil-way loop comprises a cooling loop and an oil return loop; the cooling loop is formed by connecting a scroll compressor 1 and a heat exchanger 2 in series and in a closed loop through pipelines at least; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines and are arranged at the non-central position of the top of the scroll compressor 1; the outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3.
According to the structure, in the air circuit loop: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop is combined into one pipeline by three pipelines, the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of stability of the original performance is guaranteed.
And corrugated pipes 7 are arranged on pipelines connected with the scroll compressor 1 in the gas circuit loop, the cooling loop and the oil return loop. According to the structure, the scroll compressor 1 can generate certain vibration in work, and if the pipeline is directly welded, the pipeline and each module can be stably connected with each other; the bellows 7 has a certain flexibility, which can avoid the vibration problem that the rigid connection can not solve.
And a steel wire mesh is wrapped outside the corrugated pipe 7. According to the structure, the steel wire mesh is wrapped outside the corrugated pipe 7, the capacity of bearing high pressure of the corrugated pipe 7 can be improved, and the corrugated pipe can be applied to a high-pressure helium medium environment.
Example three:
see figures 1-2. A helium compression purification system comprises a gas circuit loop and a double-oil circuit loop; the gas circuit loop is formed by connecting a scroll compressor 1, a heat exchanger 2, an oil-gas separator 3, an adsorber 4, a refrigerator 5 and a balance tank 6 in series and in a closed loop through pipelines at least; the double-oil-way loop comprises a cooling loop and an oil return loop; the cooling loop is formed by connecting a scroll compressor 1 and a heat exchanger 2 in series and in a closed loop through pipelines at least; the oil return loop is formed by connecting a scroll compressor 1, a heat exchanger 2 and an oil-gas separator 3 in series and in a closed loop through pipelines at least; the inlet end pipelines of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines and are arranged at the non-central position of the top of the scroll compressor 1; the outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; and an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3.
According to the structure, in the air circuit loop: the high-temperature low-pressure helium in the refrigerator 5 is led to the balance tank 6 through a pipeline, and a cavity is formed in the balance tank 6, so that the high-temperature low-pressure helium which is not subjected to pressure equalization is buffered, balanced and equalized in the balance tank 6; the high-temperature low-pressure helium gas in the balancing tank 6 is led to the scroll compressor 1 through a pipeline, and the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; in order to further purify the helium, the low-temperature high-pressure helium output by the oil-gas separator 3 is led to the adsorber 4 through a pipeline and then led to the refrigerator 5 to provide the low-temperature high-pressure pure helium for the refrigerator 5; the gas circuit is continuously circulated after that, so that the helium is continuously recycled. In the cooling loop, the scroll compressor 1 generates heat in the working process, and the interior of the scroll compressor 1 is cooled and lubricated by oil injection; an outlet end pipeline of the scroll compressor 1 of the cooling loop is arranged at the bottom of the scroll compressor 1, and after oil is sprayed to take away heat of the scroll compressor 1, the outlet end pipeline sinks to the bottom of the scroll compressor 1; the helium automatically extrudes oil at the bottom of the scroll compressor 1, the oil flows through the heat exchanger 2 through a pipeline to cool the oil, and then the oil returns to the top of the scroll compressor 1 to continuously spray oil, so that the inside of the scroll compressor 1 is cooled and lubricated. In the oil return loop, the scroll compressor 1 outputs the input high-temperature low-pressure helium gas into high-temperature high-pressure helium gas; the high-temperature high-pressure helium gas is led to the heat exchanger 2 through a pipeline, and the low-temperature high-pressure helium gas is output; because the scroll compressor 1 is internally provided with oil, the low-temperature high-pressure helium gas carries oil gas to the oil-gas separator 3; the oil-gas separator 3 separates the low-temperature high-pressure helium gas from the carried oil gas; the separated oil gas sinks to the bottom of the oil-gas separator 3; the inlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3; an outlet end pipeline of the oil-gas separator 3 of the oil return loop is arranged at the top of the oil-gas separator 3 and extends into the bottom of the oil-gas separator 3; the pipeline is arranged at the top of the oil-gas separator 3, so that the manufacturing cost is low, and the modules are convenient to install and combine; the helium automatically presses out the oil at the bottom of the oil-gas separator 3 and flows back to the scroll compressor 1 through a pipeline; the inlet end pipeline of the scroll compressor 1 of the gas circuit loop, the cooling loop and the oil return loop is combined into one pipeline by three pipelines, the situation that the top cover welding pipeline is cut again on the purchased scroll compressor 1 is avoided, and the performance of the scroll compressor 1 is improved on the basis of stability of the original performance is guaranteed.
And corrugated pipes 7 are arranged on pipelines connected with the scroll compressor 1 in the gas circuit loop, the cooling loop and the oil return loop. According to the structure, the scroll compressor 1 can generate certain vibration in work, and if the pipeline is directly welded, the pipeline and each module can be stably connected with each other; the bellows 7 has a certain flexibility, which can avoid the vibration problem that the rigid connection can not solve.
And a steel wire mesh is wrapped outside the corrugated pipe 7. According to the structure, the steel wire mesh is wrapped outside the corrugated pipe 7, the capacity of bearing high pressure of the corrugated pipe 7 can be improved, and the corrugated pipe can be applied to a high-pressure helium medium environment.
A first branch 8 and a second branch 9 are arranged on a pipeline between the balance tank 6 and the scroll compressor 1; the first branch 8 and the second branch 9 are connected to a pipeline between the oil-gas separator 3 and the adsorber 4; an electromagnetic valve 81 is arranged on the first branch 8; and an overflow valve 91 is arranged on the second branch 9. According to the structure, when the pressure difference between the balance tank 6 and the oil-gas separator 3 is too large, the overflow valve 91 is opened, so that helium in the balance tank 6 and the oil-gas separator 3 flows, and the pressure difference is reduced; the electromagnetic valve 81 is closed when the scroll compressor 1 operates, and is opened when the scroll compressor 1 does not operate, so that the pressure is equalized.
And a safety valve is arranged on the oil-gas separator 3. With the above configuration, the excessive pressure in the gas-oil separator 3 is avoided.
An oil quantity controller 11 and an oil filter 12 are arranged on the cooling loop; and an oil quantity controller 11 is also arranged on a pipeline from the oil-gas separator 3 to the scroll compressor 1 in the oil return loop. With the above structure, the oil filter 12 can filter impurities to keep the oil clean; the oil quantity controller 11 is used for limiting the oil flow of the pipeline, so that the oil flow is controllable.
The oil quantity controller 11 is a valve with a hole structure. According to the structure, the oil flow of the pipeline is limited in a valve mode of the structure with the holes, the structure is simple, and the flow limiting effect is good.
The heat exchanger 2 comprises an oil heat exchanger and an oil-gas heat exchanger; a water inlet joint 21 and a water outlet joint 22 are arranged on the heat exchanger 2; and a water pressure protection relay 23 is arranged on the water inlet joint 21. According to the structure, the oil-gas heat exchanger is passed by the gas circuit loop, and the oil heat exchanger is passed by the cooling loop; cold water is introduced into the water inlet joint 21 and then flows out of the water outlet joint 22 to take away heat of the air circuit loop and the cooling loop; the water pressure protective relay 23 prevents the introduced water pressure from being too high, and protects the heat exchanger 2.
And temperature sensors 24 are arranged on the pipeline from the heat exchanger 2 to the scroll compressor 1 and the pipeline from the heat exchanger 2 to the oil-gas separator 3. According to the structure, whether the temperature of the gas circuit loop and the cooling loop reaches the standard after passing through the heat exchanger 2 can be monitored, if the temperature exceeds the set upper limit, the scroll compressor 1 is stopped, and the safety of equipment is ensured.
Pressure gauges are arranged on a pipeline from the balance tank 6 to the scroll compressor 1 and a pipeline from the oil-gas separator 3 to the adsorber 4; and a pressure sensor is arranged on a pipeline from the scroll compressor 1 to the adsorber 4 of the gas circuit loop. According to the structure, the pressure can be monitored in real time conveniently.
The inner cylinder 33, the filter element 31, the outer cylinder 32, the upper cover 35 and the lower cover 34 are arranged in the oil-gas separator 3; the inner cylinder 33 is communicated with an inlet end pipeline of an oil-gas separator 3 of the oil return loop; the inner barrel 33 is sleeved with a filter element 31; the outer cylinder 32 is sleeved outside the filter element 31; the inner barrel 33 and the outer barrel 32 are both provided with a plurality of small holes for ventilation; the upper cover 35 and the lower cover 34 are respectively clamped at the upper end and the lower end of the inner cylinder 33 and the upper end and the lower end of the outer cylinder 32; the upper cover 35 is fixed on an inlet end pipeline of the oil-gas separator 3 of the oil return loop. According to the structure, the helium and oil-gas mixed gas enters the inner cylinder 33 from the inlet end pipeline of the oil-gas separator 3 of the oil return loop, enters the filter element 31 from the small hole in the outer wall of the inner cylinder 33, flows out from the small hole in the outer wall of the outer cylinder 32, the oil liquid flows downwards, and the helium is discharged out of the oil-gas separator 3 upwards. The inner cylinder 33 avoids direct impact of helium and oil-gas mixed gas on the filter element 31, and the service life of the oil-gas separator 3 is prolonged.
The above only is the preferred embodiment of the present invention, not limiting the scope of the present invention, all the equivalent structures or equivalent flow changes made by the contents of the specification and the drawings, or directly or indirectly applied to other related technical fields, are included in the same way in the protection scope of the present invention.
Claims (8)
1. A helium compression purification system, characterized by: the device comprises a gas circuit loop and a double-oil circuit loop; the gas circuit loop is formed by connecting a scroll compressor (1), a heat exchanger (2), an oil-gas separator (3), an adsorber (4), a refrigerator (5) and a balance tank (6) in series and in a closed loop through pipelines at least; the double-oil-way loop comprises a cooling loop and an oil return loop; the cooling loop is formed by at least serially connecting a scroll compressor (1) and a heat exchanger (2) in a closed loop through pipelines; the oil return loop is formed by at least serially connecting a scroll compressor (1), a heat exchanger (2) and an oil-gas separator (3) in a closed loop mode through pipelines; the inlet end pipelines of the scroll compressor (1) of the gas circuit loop, the cooling loop and the oil return loop are combined into one pipeline by three pipelines and are arranged at the non-central position of the top of the scroll compressor (1); the outlet end pipeline of the scroll compressor (1) of the cooling loop is arranged at the bottom of the scroll compressor (1); an inlet end pipeline of the oil-gas separator (3) of the oil return loop is arranged at the top of the oil-gas separator (3); an outlet end pipeline of the oil-gas separator (3) of the oil return loop is arranged at the top of the oil-gas separator (3) and extends into the bottom of the oil-gas separator (3).
2. A helium compression purification system as claimed in claim 1, wherein: a first branch (8) and a second branch (9) are arranged on a pipeline between the balance tank (6) and the scroll compressor (1); the branch I (8) and the branch II (9) are connected to a pipeline between the oil-gas separator (3) and the adsorber (4); an electromagnetic valve (81) is arranged on the branch I (8); an overflow valve (91) is arranged on the second branch (9), and a safety valve is arranged on the oil-gas separator (3).
3. A helium compression purification system as claimed in claim 1, wherein: an oil quantity controller (11) and an oil filter (12) are arranged on the cooling loop; an oil quantity controller (11) is also arranged on a pipeline from the oil-gas separator (3) to the scroll compressor (1) in the oil return loop, and the oil quantity controller (11) is a valve with a hole structure.
4. A helium compression purification system as claimed in claim 1, wherein: bellows (7) are equipped with on the pipeline that links to each other with scroll compressor (1) in gas circuit return circuit, cooling circuit and the return oil return circuit, bellows (7) outside is wrapped up in the wire net.
5. A helium compression purification system as claimed in claim 1, wherein: the heat exchanger (2) comprises an oil heat exchanger and an oil-gas heat exchanger; a water inlet joint (21) and a water outlet joint (22) are arranged on the heat exchanger (2); and a water pressure protection relay (23) is arranged on the water inlet joint (21).
6. A helium compression purification system as claimed in claim 1, wherein: and temperature sensors (24) are arranged on a pipeline from the heat exchanger (2) to the scroll compressor (1) and a pipeline from the heat exchanger (2) to the oil-gas separator (3).
7. A helium compression purification system as claimed in any one of claims 1 to 6, wherein: pressure gauges are arranged on a pipeline from the balance tank (6) to the scroll compressor (1) and a pipeline from the oil-gas separator (3) to the adsorber (4); and a pressure sensor is arranged on a pipeline from the scroll compressor (1) to the adsorber (4) of the gas circuit loop.
8. A helium compression purification system as claimed in any one of claims 1 to 6, wherein: an inner cylinder (33), a filter element (31), an outer cylinder (32), an upper cover (35) and a lower cover (34) are arranged in the oil-gas separator (3); the inner cylinder (33) is communicated with an inlet end pipeline of an oil-gas separator (3) of the oil return loop; a filter element (31) is sleeved outside the inner cylinder (33); an outer cylinder (32) is sleeved outside the filter element (31); the inner cylinder (33) and the outer cylinder (32) are both provided with a plurality of small holes for ventilation; the upper cover (35) and the lower cover (34) are respectively clamped at the upper end and the lower end of the inner cylinder (33) and the upper end and the lower end of the outer cylinder (32); the upper cover (35) is fixed on an inlet end pipeline of an oil-gas separator (3) of the oil return loop.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920379096.5U CN209885454U (en) | 2019-03-25 | 2019-03-25 | Helium compression purification system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920379096.5U CN209885454U (en) | 2019-03-25 | 2019-03-25 | Helium compression purification system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209885454U true CN209885454U (en) | 2020-01-03 |
Family
ID=69017619
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920379096.5U Expired - Fee Related CN209885454U (en) | 2019-03-25 | 2019-03-25 | Helium compression purification system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209885454U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113731170A (en) * | 2021-09-27 | 2021-12-03 | 四川远丰森泰能源集团股份有限公司 | Integrated system for bog helium extraction process |
-
2019
- 2019-03-25 CN CN201920379096.5U patent/CN209885454U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113731170A (en) * | 2021-09-27 | 2021-12-03 | 四川远丰森泰能源集团股份有限公司 | Integrated system for bog helium extraction process |
| CN113731170B (en) * | 2021-09-27 | 2023-10-31 | 四川远丰森泰能源集团股份有限公司 | Integrated system for bog helium extraction process |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106949655B (en) | A kind of cryogenic system | |
| CN109269136B (en) | Air conditioning system | |
| AU2007353615A1 (en) | Refrigerating device and method for circulating a refrigerating fluid associated with it | |
| CN209885454U (en) | Helium compression purification system | |
| CN209960802U (en) | Helium compression double-oil-way system | |
| CN114484911A (en) | Refrigerating system and double-layer one-to-two high-low temperature test box comprising same | |
| CN102466376A (en) | Screw-type refrigerating system and control method thereof | |
| CN202284874U (en) | Cold water unit system of parallelly-connected structure | |
| CN209848550U (en) | Helium compression gas circuit system | |
| JP2009228976A (en) | Refrigerating cycle device | |
| CN206917855U (en) | Vapor screw compressor unit | |
| CN201885488U (en) | Screw type cooling system and control method thereof | |
| CN208238390U (en) | Helium gas compression purifier group system | |
| CN215260633U (en) | Modularized magnetic suspension centrifugal vapor compression circulation cold water heat pump unit | |
| CN205580029U (en) | Heat pump set | |
| CN101762107A (en) | Double-compressor parallel-screw flooded-type water chilling unit system | |
| CN211400347U (en) | Outdoor low-temperature vortex parallel air-cooled condensation compressor unit with liquid spray | |
| CN210035929U (en) | Outdoor low-temperature vortex parallel air-cooled condensation compressor unit with air supply and enthalpy increase functions | |
| CN209295330U (en) | The cold air-conditioning of the list of distributed arrangement | |
| CN208952455U (en) | A kind of multiple terminals refrigeration system that refrigerant securely and reliably flows back | |
| RU2244205C1 (en) | Gas filling station | |
| CN207515285U (en) | A kind of New Refrigerating condenser and refrigeration system | |
| CN215724256U (en) | Overlapping unit | |
| CN212902076U (en) | Circulating refrigerating system | |
| CN210512240U (en) | Refrigeration system combined with evaporative refrigeration mode |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210222 Address after: No.12, unit 1, building 5, No.2 Lidu Road, Wuhou District, Chengdu, Sichuan 610000 Patentee after: Zhong Min Address before: No. 502, building a, high tech entrepreneurship service center, No. 1 Keyuan 2nd Road, high tech Zone, Chengdu, Sichuan 610041 Patentee before: CHENGDU GOLDEN PLACE VACUUM TECHNICAL DEVELOPMENT Co.,Ltd. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20200103 |