CN208238390U - Helium gas compression purifier group system - Google Patents
Helium gas compression purifier group system Download PDFInfo
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- CN208238390U CN208238390U CN201820708286.2U CN201820708286U CN208238390U CN 208238390 U CN208238390 U CN 208238390U CN 201820708286 U CN201820708286 U CN 201820708286U CN 208238390 U CN208238390 U CN 208238390U
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Abstract
The utility model relates to helium compression technique areas, a kind of helium gas compression purifier group system is disclosed, including low-pressure balance device and absorber, between low-pressure balance device and absorber and connects at least two groups compression and just separate unit, compression and first separation unit include scroll compressor, oil gas cooler and gs-oil separator, low-pressure balance device gas outlet one is connect by the road with compressor inlet, compressor outlet two is connect by the road with oil gas cooler air inlet, oil gas cooler gas outlet three is connect by the road with gs-oil separator air inlet, gs-oil separator gas outlet four is connect by the road with absorber air inlet, compressor oil outlet five is connect by the road with oil gas cooler oil inlet, oil gas cooler oil outlet six is connect by the road with compressor inlet, gs-oil separator oil outlet seven is connect by the road with compressor inlet, pipeline Four installation check valves.Air demand is big, and adaptability is good, and temperature can reach requirement, easy for installation, and gas supply is stablized, and reduces costs.
Description
Technical field
The utility model relates to helium compression technique area, in particular to a kind of helium gas compression purifier group system.
Background technique
In recent years, science and technology is being constantly updated, the fields technology such as electronic manufacturing field, liquid crystal display panel manufacture, aerospace military scientific research
Constantly upgrading, vacuum requirement become high, and vacuum chamber also becomes greatly, the work of its performance of the vaccum-pumping equipment based on cryogenic pump
Be it is huge, other vacuum equipments are unable to satisfy the minimum cleaning vacuum of limiting pressure, and cryogenic pump is cold using low-temperature surface
The vacuum pump of solidifying gas, also known as condenser pump；Electronic manufacturing field, liquid crystal display panel manufacture, military research etc. use small-sized at present
Cryogenic pump has been unable to satisfy use, and small-sized cryogenic pump vacuum obtains limited.Production efficiency is concentrated in new era each field, it is small-sized
Cryogenic pump can not obtain bigger vacuum environment, and therefore, large-scale vacuum initially enters the experimental study stage.
As the helium gas compression purifier group of one important component of cryogenic pump, clean helium is provided for refrigeration machine.
Common helium gas compression purifier group air demand is limited on the market at present, such as: a helium gas compression purifier group can only be for three
The cryogenic pump or two ten cun of cryogenic pump or one 16 cun of cryogenic pump that eight cun of platform use, and then can for larger cryogenic pump
Occur for situations such as unsaturated vapor, temperature are unable to reach 10K absolute temperature, thermal load capacity is poor, on a large-scale low-temperature pump
Two even three refrigeration machines are commonly provided with, two to three group helium gas compression purifier groups need to be matched when use, and often exist and occupy
Space is big, gas supply cannot keep consistent problem；
Meanwhile in electronic manufacturing field, a board just has eight cun of cryogenic pumps of 7-8 platform, mating helium gas compression purifier group
Three groups are needed, and uses three sets of components, such as: three sets of helium pipelines, power supply, station, circulating water lines；Moreover, compression
Not in same floor when unit and cryogenic pump use, increase a set of components often lead to cost float it is larger.
Therefore, the application proposes a kind of helium gas compression purifier group system.
Utility model content
The goal of the invention of the utility model is: in view of the above problems, providing a kind of helium gas compression purifier group
System, air demand is bigger, can effectively adapt to large-scale cryogenic pump or greater number of small-sized cryogenic pump, guarantees temperature energy
Enough reach design requirement, meanwhile, it is easy for installation, stable and consistent is supplied, land occupation is small with space, has saved station, has reduced equipment
Cost and installation cost.
The technical solution adopted in the utility model is such that helium gas compression purifier group system, including low-pressure balance device
And absorber, at least two groups compression is connected between the low-pressure balance device and absorber side by side and just separates unit, every group of institute
It states compression and just separation unit includes scroll compressor, oil gas cooler and gs-oil separator, the gas outlet of low-pressure balance device
It is connect with the air inlet of scroll compressor by pipeline one, the gas outlet of scroll compressor and the air inlet of oil gas cooler
It is connected by pipeline two, the gas outlet of oil gas cooler and the air inlet of gs-oil separator are connected by pipeline three, Oil-gas Separation
The air inlet of the gas outlet of device and absorber is connected by pipeline four, the oil outlet of scroll compressor and oil gas cooler into
Hydraulic fluid port is connected by pipeline five, and the oil outlet of oil gas cooler and the air inlet of scroll compressor are connected by pipeline six, oil
The oil outlet of gas separating device and the air inlet of scroll compressor are connected by pipeline seven, close to the absorption on the pipeline four
The position of device is equipped with check valve, and the check valve can only be opened to absorber direction.By above-mentioned setting, the confession of entire unit
Tolerance is bigger, can effectively adapt to large-scale cryogenic pump or greater number of small-sized cryogenic pump, guarantees that temperature can reach and sets
Meter requires, meanwhile, easy for installation, the high-pressure helium of each compression and first separation unit uniformly enters same absorber, then by same
Absorber enters cryogenic pump, supplies stable and consistent, and land occupation is small with space, has saved station, reduces equipment cost and is mounted to
This, each compression and just separation unit can all enable according to needs are specifically used or several groups enable or single group opens simultaneously
It can prevent the high-pressure helium for enabling unit from flowing backward to the unit of shutdown with, check valve.
Helium gas compression purifier group system described in the utility model, the pipeline one and pipeline two are mounted on pressure
Table corresponds to the pressure value of pipeline for real-time display, and the pipeline two is also equipped with pressure sensor, for detecting simultaneously dispatch tube
The pressure value on road two, when pressure value is more than setting value, the scroll compressor of unit where control, which powers off, is shut down；The vortex
Cover, pipeline six and the pipeline two of formula compressor are separately installed with temperature sensor, for detecting and transmitting corresponding position
Temperature value, when temperature value is more than setting value, the scroll compressor of unit where control, which powers off, is shut down.Pass through corresponding position
The setting of pressure gauge, pressure sensor and temperature sensor, operator can convenient field observation pressure value, while to key
The pressure value and temperature value at position are monitored and feed back, when the pressure value or temperature value that monitor position are more than setting value,
The motor stopping that scroll compressor can be interlocked, plays the role of safeguard protection.
Helium gas compression purifier group system described in the utility model, the gs-oil separator top are connected with pipeline eight,
Eight another end of pipeline is connected with two bye-passes, and the another end of two bye-passes is connect with the pipeline one, wherein on a bye-pass
Overflow valve is installed, solenoid valve one is installed on another bye-pass, solenoid valve one is used for the scroll compressor when place unit
When shutdown, bye-pass where connection, so that the pipeline one is connected to gs-oil separator.Overflow valve is for keeping gs-oil separator
In pressure stablize, prevent its internal pressure excessively high, namely keep gas discharge pipe system pressure, prevent hypertonia；Electromagnetism
Valve one is normally open solenoid valve, follows the starting of the scroll compressor of place unit and closes, and then cut off place bye-pass, protects
Normal compression process is demonstrate,proved, when the scroll compressor of place unit, which powers off, shuts down, solenoid valve one is opened, so that the pipe of low pressure
Road one is connected to the gs-oil separator of high pressure, so that high-low pressure gas balance, so that in pressure inside entire machine set system
The state of dynamic balance, meanwhile, when compression purifier group is dispatched from the factory, the amount of helium in unit is certain, and pressure is certain, scroll compressor
After shutdown, when needing to judge the amount of helium variation in unit, need the show value by observing pressure gauge come when comparing factory
Pressure value, at this moment just need to be connected to high-voltage end and low-pressure end by solenoid valve one, so that being same pressure in entire unit
Value, can just show true amount of helium in unit.
Helium gas compression purifier group system described in the utility model is equipped with return filter on the pipeline five, institute
It states and is sequentially installed with solenoid valve two and small ports valve by oil return direction on pipeline six, solenoid valve two is used for the vortex when place unit
When compressor shutdown, the pipeline six is cut off, small ports valve is also installed, small ports valve is for limiting oil return stream on the pipeline seven
Amount.Solenoid valve two is normally closed solenoid valve, follows the starting of the scroll compressor of place unit and opens, and then connecting pipeline
Six, so that oil return process is unobstructed, after a certain compressor emergency shutdown, the solenoid valve two for interlocking this unit is closed, so set, mainly
Because the pipeline one of each group unit is connect with same low-pressure balance device, if not set solenoid valve two cuts off pipeline six, other groups
Scroll compressor chance in work forms swabbing action to the pipeline one, pipeline six and pipeline five of shutting down unit, causes to be vortexed
The oil of formula compression motor spindle continues to be back to scroll compressor arrival end, causes a large amount of aggregations of oil, is unfavorable for next starting,
Because the air inflow and oil inlet quantity of arrival end all strictly match, excessive oil in the scroll compressor course of work
It is abnormal that amount will lead to scroll compressor work, influences its service life, more notably, oil vapour may suck-back return pipe road one
In low-pressure balance device, the unit in other work is traveled further into, causes to shut down the oil mass in unit and reduces, other units
Oil mass increases, and is unfavorable for trouble free service；Small ports valve is used to limit the return flow of scroll compressor arrival end, guarantees compressor
It works normally.
Helium gas compression purifier group system described in the utility model is equipped with solenoid valve three, electromagnetism on the pipeline three
Valve three is used to cut off the pipeline three when the scroll compressor of place unit is shut down.Solenoid valve three is normally closed solenoid valve, with
It is opened with the starting of the scroll compressor of place unit, and then connecting pipeline three, so that exhaust flow path is unobstructed, when a certain machine
After group is shut down, the solenoid valve three for interlocking this unit is closed, so set, be primarily due to the pipeline one of each group unit with it is same low
Pressure balancer connection, if not set solenoid valve three cuts off pipeline three, the scroll compressor chance in other work is to shutdown
Pipeline one, pipeline eight, gs-oil separator, pipeline three and the pipeline two of unit form swabbing action, and the oil in pipeline two is caused to steam
Vapour is sucked back in low-pressure balance device, travels further into the unit in other work, is caused to shut down the oil mass in unit and is reduced,
He increases the oil mass of unit, is unfavorable for trouble free service.
Helium gas compression purifier group system described in the utility model, the low-pressure balance device, absorber and each group compression
And the common integrated installation of unit is just separated in a cabinet.So set, making the globality of entire machine set system more preferable, it is convenient for
Installation and transportation.
Helium gas compression purifier group system described in the utility model, the air inlet and air outlet of the absorber are respectively mounted
Have a self-sealing joint, and the quantity of the self-sealing joint of the self-sealing joint and gas outlet of air inlet respectively with the compression and
Just the group number of separation unit is identical, and gas high pressure protective relay is equipped on the self-sealing joint of air inlet；The low pressure is flat
The air inlet of weighing apparatus is also equipped with self-sealing joint, and with the compression and just to separate the group number of unit identical for its quantity；And it inhales
The self-sealing joint of adnexa gas outlet and the self-sealing joint of low-pressure balance device air inlet both pass through and are fixedly installed in the case
On the side panel of body.So set, make low-pressure balance device air inlet connection and absorber outlet connection it is more convenient can
It leans on, more standardizes.
Helium gas compression purifier group system described in the utility model connects side by side between the low-pressure balance device and absorber
Unit is compressed and just separated described in being connected to two groups.So set, two groups of units can be for five eight cun of pumps, three ten cun of pumps, two
16 cun of platform pumps, 22 cun of pump etc. use.
Helium gas compression purifier group system described in the utility model, the oil gas cooler includes oil cooler and air cooling
But device, the lower part of the oil gas cooler is equipped with water supply connector, upper end is equipped with water outlet connector.
In conclusion by adopting the above-described technical solution, the beneficial effects of the utility model are: the utility model supplies
Amount is bigger, can effectively adapt to large-scale cryogenic pump or greater number of small-sized cryogenic pump, guarantees that temperature can reach design
It is required that meanwhile, it is easy for installation, stable and consistent is supplied, land occupation is small with space, has saved station, has reduced equipment cost and installation
Cost.
Detailed description of the invention
Fig. 1 is utility model diagram.
Marked in the figure: 1 is low-pressure balance device, 2 be absorber, and 3 be scroll compressor, and 4 be oil gas cooler, and 5 be oil
Gas separating device, 6 be pipeline one, and 7 be pipeline two, and 8 be pipeline three, and 9 be pipeline four, and 10 be pipeline five, and 11 be pipeline six, and 12 be pipe
Road seven, 13 be check valve, and 14 be pipeline eight, and 15 be bye-pass, and 16 be overflow valve, and 17 be solenoid valve one, and 18 be return filter,
19 be solenoid valve two, and 20 be small ports valve, and 21 be solenoid valve three, and 22 be self-sealing joint, and 23 be water supply connector, and 24 connect for water outlet
Head.
Specific embodiment
With reference to the accompanying drawing, the utility model is described in detail.
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
As shown in Figure 1, helium gas compression purifier group system, including low-pressure balance device 1 and absorber 2,1 He of low-pressure balance device
At least two groups compression is connected between absorber 2 side by side and just separates unit, is specifically configured to two groups herein, every group of compression and just
Separating unit includes scroll compressor 3, oil gas cooler 4 and gs-oil separator 5, is equipped at the top of gs-oil separator 5
The gas outlet of safety valve, low-pressure balance device 1 is connect with the air inlet of scroll compressor 3 by pipeline 1, scroll compressor
3 gas outlet is connect with the air inlet of oil gas cooler 4 by pipeline 27, the gas outlet of oil gas cooler 4 and gs-oil separator
5 air inlet is connected by pipeline 38, and oil gas cooler 4 includes oil cooler and Gas Cooler, the lower part of oil gas cooler 4
Water supply connector 23 is installed, upper end is equipped with water outlet connector 24, the air inlet of the gas outlet of gs-oil separator 5 and absorber 2 is logical
The connection of pipeline 49 is crossed, the oil outlet of scroll compressor 3 is connect with the oil inlet of oil gas cooler 4 by pipeline 5 10, oil gas
The oil outlet of cooler 4 and the air inlet of scroll compressor 3 connects by pipeline 6 11, the oil outlet of gs-oil separator 5 and
The air inlet of scroll compressor 3 is connected by pipeline 7 12, and the position on pipeline 49 close to absorber 2 is equipped with check valve
13, check valve 13 can only be opened to 2 direction of absorber.
Specifically, low-pressure balance device 1, absorber 2 and each group compression and the first separation common integrated installation of unit are in a cabinet
Interior, the air inlet and air outlet of absorber 2 are mounted on self-sealing joint 22, and the self-sealing joint 22 of air inlet and gas outlet
The quantity of self-sealing joint 22 separate that the group number of unit is identical with compression and just respectively, on the self-sealing joint 22 of air inlet
Gas high pressure protective relay is installed；The air inlet of low-pressure balance device 1 is also equipped with self-sealing joint 22, and its quantity and pressure
The group number of contracting and just separation unit is identical；And 1 air inlet of self-sealing joint 22 and low-pressure balance device of 2 gas outlet of absorber from
Seal nipple 22 is both passed through and is fixedly installed on the side panel of cabinet.
Further, pipeline 1 and pipeline 27 are mounted on pressure gauge, and the pressure value of pipeline is corresponded to for real-time display,
Pipeline 27 is also equipped with pressure sensor, for detecting the pressure value of simultaneously delivery line 27, when pressure value is more than setting value,
The scroll compressor 3 of unit where control, which powers off, shuts down；Cover, pipeline 6 11 and the pipeline 27 of scroll compressor 3 are divided equally
Temperature sensor is not installed, for detecting and transmitting the temperature value of corresponding position, when temperature value is more than setting value, controls institute
It powers off and shuts down in the scroll compressor 3 of unit；Pipeline 8 14, the connection of 8 14 another end of pipeline are connected at the top of gs-oil separator 5
There are two bye-passes 15, the another end of two bye-passes 15 is connect with pipeline 1, wherein being equipped with overflow valve on a bye-pass 15
16, solenoid valve 1 is installed, solenoid valve 1 is used to shut down when the scroll compressor 3 of place unit on another bye-pass 15
When, bye-pass 15 where connection, so that pipeline 1 is connected to gs-oil separator 5, solenoid valve 1 is normally open solenoid valve, is followed
The starting of the scroll compressor 3 of place unit and close, and then cut off where bye-pass 15, guarantee normal compression process.
Return filter 18 is installed on pipeline 5 10, the contaminant filter in oil return is fallen, so that returning to scroll compressor
The oil of machine 3 is clean, is sequentially installed with solenoid valve 2 19 and small ports valve 20 by oil return direction on pipeline 6 11, solenoid valve 2 19 is used for
When the scroll compressor 3 of place unit is shut down, pipeline 6 11 is cut off, small ports valve 20, aperture are also installed on pipeline 7 12
Valve 20 is normally closed solenoid valve for limiting return flow, solenoid valve 2 19, the starting of the scroll compressor 3 of unit where following
And open, and then connecting pipeline 6 11, so that oil return process is unobstructed.
Solenoid valve 3 21 is installed, solenoid valve 3 21 is used to shut down when the scroll compressor 3 of place unit on pipeline 38
When, pipeline 38 is cut off, solenoid valve 3 21 is normally closed solenoid valve, follows the starting of the scroll compressor 3 of place unit and beats
It opens, and then connecting pipeline 38, so that exhaust flow path is unobstructed.
When work, each road helium enters low-pressure balance device 1 simultaneously by each self-sealing joint 22 of 1 air inlet of low-pressure balance device
It after balancing pressure, then is compressed respectively by the pipeline 1 of each unit into corresponding scroll compressor 3, after compression
A large amount of heat can be generated, under the oil return cooling effect of 3 air inlet of scroll compressor, a large amount of heat of absorption, generated oil,
The mixture of oil vapour and helium completes point oil for the first time in casing, and the oil separated is through the connection of 3 bottom of scroll compressor
After carrying out cooling in the entrance oil gas cooler 4 of pipeline 5 10, then by pipeline 6 11 into the air inlet of scroll compressor 3, such as
This circulation oil return is cooling；Compressed air-fuel mixture gas enters oil gas cooler 4, air-fuel mixture gas quilt by pipeline 27
After being fully cooled, mixed gas composed by oil vapour and helium enters gs-oil separator 5 by pipeline 38, in Oil-gas Separation
Second of Oil-gas Separation is completed in device 5, and the oil after separation liquefaction is fed again into scroll compressor 3 by pipeline 7 12
Air inlet, each group helium is imported in same absorber 2 by respective pipeline 49 from respective gs-oil separator 5, in absorber
Integral filter is carried out in 2 again, i.e., after third time Oil-gas Separation, by the helium after the completion of filtering by absorber 2 it is each from
Seal nipple 22 is sent to each cryogenic pump, is recycled with this.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (9)
1. helium gas compression purifier group system, it is characterised in that: including low-pressure balance device (1) and absorber (2), the low pressure is flat
At least two groups compression is connected between weighing apparatus (1) and absorber (2) side by side and just separates unit, compression described in every group and just separation
Unit includes scroll compressor (3), oil gas cooler (4) and gs-oil separator (5), the gas outlet of low-pressure balance device (1) with
The air inlet of scroll compressor (3) is connected by pipeline one (6), the gas outlet of scroll compressor (3) and oil gas cooler
(4) air inlet is connected by pipeline two (7), and the gas outlet of oil gas cooler (4) and the air inlet of gs-oil separator (5) pass through
The gas outlet of pipeline three (8) connection, gs-oil separator (5) is connect with the air inlet of absorber (2) by pipeline four (9), is vortexed
The oil outlet of formula compressor (3) is connect with the oil inlet of oil gas cooler (4) by pipeline five (10), oil gas cooler (4)
Oil outlet is connect with the air inlet of scroll compressor (3) by pipeline six (11), the oil outlet and vortex of gs-oil separator (5)
The air inlet of formula compressor (3) is connected by pipeline seven (12), close to the position of the absorber (2) on the pipeline four (9)
It is equipped with check valve (13), the check valve (13) can only open to absorber (2) direction.
2. helium gas compression purifier group system according to claim 1, it is characterised in that: the pipeline one (6) and pipeline
Two (7) are mounted on pressure gauge, and the pressure value of pipeline is corresponded to for real-time display, and the pipeline two (7) is also equipped with pressure biography
Sensor, for detecting the pressure value of simultaneously delivery line two (7), when pressure value is more than setting value, the vortex of unit where control
Formula compressor (3) power-off is shut down；Cover, pipeline six (11) and the pipeline two (7) of the scroll compressor (3) are installed respectively
There is temperature sensor, for detecting and transmitting the temperature value of corresponding position, when temperature value is more than setting value, unit where control
Scroll compressor (3) power off shut down.
3. helium gas compression purifier group system according to claim 2, it is characterised in that: gs-oil separator (5) top
Portion is connected with pipeline eight (14), and pipeline eight (14) another end is connected with two bye-passes (15), and the another end of two bye-passes (15) is equal
It connect with the pipeline one (6), wherein being equipped with overflow valve (16) on a bye-pass (15), is equipped on another bye-pass (15)
Solenoid valve one (17), solenoid valve one (17) are used for when the scroll compressor (3) of place unit is shut down, bye-pass where connection
(15), so that the pipeline one (6) is connected to gs-oil separator (5).
4. helium gas compression purifier group system according to claim 1, it is characterised in that: installed on the pipeline five (10)
Have return filter (18), is sequentially installed with solenoid valve two (19) and small ports valve by oil return direction on the pipeline six (11)
(20), solenoid valve two (19) is used to cut off the pipeline six (11), institute when the scroll compressor (3) of place unit is shut down
It states and is also equipped on pipeline seven (12) small ports valve (20), small ports valve (20) is for limiting return flow.
5. helium gas compression purifier group system according to claim 1, it is characterised in that: installed on the pipeline three (8)
There is solenoid valve three (21), solenoid valve three (21) is used to cut off the pipeline when the scroll compressor (3) of place unit is shut down
Three (8).
6. helium gas compression purifier group system according to claim 1, it is characterised in that: the low-pressure balance device (1) is inhaled
Adnexa (2) and each group compression and just the separation common integrated installation of unit are in a cabinet.
7. helium gas compression purifier group system according to claim 6, it is characterised in that: the air inlet of the absorber (2)
Mouth and gas outlet are mounted on self-sealing joint (22), and the self-sealing joint of self-sealing joint (22) and gas outlet of air inlet
(22) quantity separates that the group number of unit is identical with the compression and just respectively, installs on the self-sealing joint (22) of air inlet
There is gas high pressure protective relay；The air inlet of the low-pressure balance device (1) is also equipped with self-sealing joint (22), and its quantity
With the compression and just to separate the group number of unit identical；And the self-sealing joint (22) and low-pressure balance of absorber (2) gas outlet
The self-sealing joint (22) of device (1) air inlet is both passed through and is fixedly installed on the side panel of the cabinet.
8. helium gas compression purifier group system according to claim 1, it is characterised in that: the low-pressure balance device (1) and
Unit is compressed and just separated described in being connected with two groups side by side between absorber (2).
9. helium gas compression purifier group system according to claim 1, it is characterised in that: oil gas cooler (4) packet
Oil cooler and Gas Cooler are included, the lower part of the oil gas cooler (4) is equipped with water supply connector (23), upper end is equipped with water outlet
Connector (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820708286.2U CN208238390U (en) | 2018-05-14 | 2018-05-14 | Helium gas compression purifier group system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820708286.2U CN208238390U (en) | 2018-05-14 | 2018-05-14 | Helium gas compression purifier group system |
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| CN208238390U true CN208238390U (en) | 2018-12-14 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110487024A (en) * | 2018-05-14 | 2019-11-22 | 成都黄金地真空技术开发有限公司 | Helium gas compression purifier group system |
-
2018
- 2018-05-14 CN CN201820708286.2U patent/CN208238390U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110487024A (en) * | 2018-05-14 | 2019-11-22 | 成都黄金地真空技术开发有限公司 | Helium gas compression purifier group system |
| CN110487024B (en) * | 2018-05-14 | 2024-04-16 | 成都智合芯电科技开发有限公司 | Helium compression purification unit system |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200901 Address after: No.37, 9 / F, unit 2, building 14, No.366 jucui street, Wuhou District, Chengdu, Sichuan 610000 Patentee after: Chen Yong Address before: 610041 High-tech Enterprise Service Center Building 502, No. 1, Keyuan No. 2 Road, Chengdu High-tech Zone, Sichuan Province Patentee before: CHENGDU GOLDEN PLACE VACUUM TECHNICAL DEVELOPMENT Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230111 Address after: 610041 No. 1109, floor 11, building 8, No. 388, north section of Yizhou Avenue, high tech Zone, Chengdu, Sichuan Patentee after: Chengdu zhihexin Electric Technology Development Co.,Ltd. Address before: No. 37, floor 9, unit 2, building 14, No. 366 jucui street, Wuhou District, Chengdu, Sichuan 610000 Patentee before: Chen Yong |