CN209816258U - Physical vapor deposition nozzle for large-size component - Google Patents
Physical vapor deposition nozzle for large-size component Download PDFInfo
- Publication number
- CN209816258U CN209816258U CN201920413933.1U CN201920413933U CN209816258U CN 209816258 U CN209816258 U CN 209816258U CN 201920413933 U CN201920413933 U CN 201920413933U CN 209816258 U CN209816258 U CN 209816258U
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- China
- Prior art keywords
- cavity
- distribution plate
- nozzle
- vapor deposition
- physical vapor
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- 238000005240 physical vapour deposition Methods 0.000 title claims abstract description 18
- 238000009826 distribution Methods 0.000 claims abstract description 44
- 238000005192 partition Methods 0.000 claims abstract description 24
- 238000000576 coating method Methods 0.000 abstract description 13
- 239000011248 coating agent Substances 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 4
- 238000000265 homogenisation Methods 0.000 abstract description 4
- 238000001771 vacuum deposition Methods 0.000 abstract description 4
- 239000000463 material Substances 0.000 abstract description 3
- 239000012530 fluid Substances 0.000 abstract description 2
- 238000002347 injection Methods 0.000 abstract description 2
- 239000007924 injection Substances 0.000 abstract description 2
- 238000000151 deposition Methods 0.000 abstract 1
- 230000008021 deposition Effects 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 10
- 238000005507 spraying Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007888 film coating Substances 0.000 description 2
- 238000009501 film coating Methods 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a large-size component physical vapor deposition nozzle, which consists of an inlet section (1) and a nozzle seat (2), wherein the nozzle seat (2) consists of a distribution layer (3), a first cavity (4), a distribution plate (5), a second cavity (6) and an outlet section (7), the distribution layer (3) consists of a plurality of partition plates (8), one end of each partition plate (8) is gathered at the joint of the inlet section (1) and the nozzle seat (2), and the other end of each partition plate (8) is diverged outwards; a plurality of small holes (9) are formed in the distribution plate (5), and the distribution plate (5) is arranged between the first cavity (4) and the second cavity (6); the outlet section (7) is a long narrow slit. The utility model discloses can reach the effect of deposition fluid homogenization to increase even coating film success rate, reduce the industry consumptive material, can play the homogenization and improve injection efficiency's effect at jumbo size component vacuum coating's in-process.
Description
Technical Field
The utility model relates to a nozzle for jumbo size component coating film process, especially a jumbo size component physical vapor deposition nozzle belongs to vacuum coating equipment technical field.
Background
At present, devices for coating films by physical vapor deposition are widely used in the actual operation fields of camera lenses, mobile phone film coating, vehicle body film coating and the like. With the increasing demand, the physical vapor deposition coating system for large-sized components has been developed and practically used in the production process, however, even though the physical vapor deposition has been widely used for coating large-sized components, it still has certain limitations and applicability. In the process of coating by using the original nozzle, the outlet speed characteristic shows that the edge part has good uniformity, the middle speed is higher, so that the central coating thickness is larger than the edge part in the coating process, the non-uniform coating reduces the availability of materials, and the defects of more waste of industrial consumables, high defective rate and the like are caused. In order to improve the application range of physical vapor deposition in the coating of large-size components, the limitation of uniform coating becomes a problem to be solved in the first place.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a jumbo size component physical vapor deposition nozzle to improve jumbo size component coating process homogenization, overcome above-mentioned prior art not enough.
In order to solve the technical problem, the utility model discloses a following technical scheme:
a kind of large-scale structural component physical vapor deposition nozzle, it is formed by entrance section and nozzle holder, the said nozzle holder is made up of distribution layer, first cavity, distributor plate, second cavity and outlet section, the said distribution layer is formed by many baffles, one end of the baffle is assembled in the entrance section and junction of the nozzle holder, another end of the baffle is dispersed outwardly; the distribution plate is in a cuboid shape, a plurality of small holes are formed in the distribution plate, and the distribution plate is arranged between the first cavity and the second cavity; the outlet section is a long narrow slit and is positioned below the second cavity.
In the physical vapor deposition nozzle for large-size components, the inlet section can be a circular or square-section duct as a preferable scheme.
In the above-mentioned large-size member physical vapor deposition nozzle, the partition of the distribution layer may be a linear or curved partition, as a preferable mode.
As a preferable scheme, the small holes on the distribution plate are distributed more densely at two ends of the distribution plate and more dispersedly at the center of the distribution plate.
In the physical vapor deposition nozzle for large-sized components, the shape of the small holes on the distribution plate can be round, square or triangular as a preferred scheme.
The utility model has the advantages that: the utility model discloses a change the outside and the inner structure of nozzle, improve the injection mode of nozzle during operation, reach deposit fluid homogenization effect to increase even coating film success rate, reduce the industry consumptive material, improve actual vacuum coating's enforceability.
Compared with the prior art, the utility model has the advantages of it is following:
1. solves the problem that large-size components are difficult to spray evenly.
2. The nozzle is simple in structure and convenient to process.
3. The transition from a round pipe to a square nozzle is realized, and the using amount of refractory materials is saved.
4. The gas reaches the sonic speed and the supersonic speed from the low speed, and the spraying efficiency and the adhesive strength are improved.
5. The nozzle can be used in a large-scale vacuum coating device, and can play the roles of homogenizing and improving the spraying efficiency.
Drawings
Fig. 1 is a schematic structural diagram of the present invention;
FIG. 2 is a schematic view of the distributor plate of the present invention;
FIG. 3 is a schematic view of the structure of the partition board of the present invention;
fig. 4 is another schematic structural diagram of the separator of the present invention.
The present invention will be further described with reference to the accompanying drawings and the detailed description.
Detailed Description
As shown in fig. 1, the large-size member pvd nozzle of the present invention mainly comprises an inlet section 1 and a nozzle holder 2, wherein the inlet section 1 may be a pipe with a circular or square cross section, the nozzle holder 2 comprises a distribution layer 3, a first cavity 4, a distribution plate 5, a second cavity 6 and an outlet section 7, the distribution layer 3 comprises a plurality of partitions 8, the partitions 8 may be linear (as shown in fig. 3) or curved partitions (as shown in fig. 4), one end of each partition 8 is converged at the joint of the inlet section 1 and the nozzle holder 2, and the other end of each partition 8 is outwardly divergent; as shown in fig. 2, the distribution plate 5 is a rectangular parallelepiped, the length of the distribution plate is equal to the width of the inner wall, a plurality of small holes 9 are formed in the distribution plate 5, the small holes 9 are round, square, triangular or other shapes, the small holes 9 are densely distributed at two ends of the distribution plate 5 and are distributed at the center of the distribution plate 5, and the distribution plate 5 is disposed between the first cavity 4 and the second cavity 6; the outlet section 7 is a long narrow slit, and the outlet section 7 is positioned below the second cavity 6.
The working principle is as follows: the gas introduced into the nozzle holder 2 from the inlet section 1 first enters the distribution layer 3, and in the distribution layer 3, the gas flows through the gaps between the respective partitions 8 in the direction in which the partitions 8 point, thereby increasing the width of the gas flowing therethrough. After passing through the distribution layer 3, the gas enters the first cavity 4, and the isolation phenomenon between the gases is relieved through free flow, so that the next shunting process is prepared. After being shunted by the distributing plate 5, the gas enters the second cavity 6, the gas flows freely, the phenomenon that the gas is too dispersed is relieved, and the gas finally reaches the effect of uniform spraying through the outlet section 7.
Example 1: the nozzle inlet section 1 adopts a circular tube with the diameter of 40 mm; the distribution layer 3 consists of 5 layers of partition boards 8, and the thickness of each partition board 8 is 1 mm; the thickness of the first cavity 4 is 50 mm; the distribution plate 5 is provided with 20 small holes in total; the shape of the small hole is circular, and the diameter of the small hole is 10 mm; the thickness of the second cavity 6 is 60 mm; the slit width of the outlet section 7 was 4 mm.
Implementation 2: the nozzle inlet section 1 adopts a circular tube with the diameter of 30 mm; the distribution layer 3 consists of 10 layers of partition boards 8, and the thickness of each partition board 8 is 1 mm; the thickness of the first cavity 4 is 60 mm; the distribution plate 5 is provided with 16 small holes in total; the shape of the small hole is square, and the side length is 5 mm; the thickness of the second cavity 6 is 60 mm; the slit width of the outlet section 7 was 3 mm.
Implementation 3: the nozzle inlet section 1 adopts a square long pipe, and the side length is 45 mm; the distribution layer 3 consists of 12 layers of partition boards 8, and the thickness of each partition board 8 is 2 mm; the thickness of the first cavity 4 is 70 mm; the distribution plate 5 is provided with 24 small holes in total; the shape of the small hole is triangular, and the side length is 4 mm; the thickness of the second cavity 6 is 65 mm; the slit width of the outlet section 7 is 5 mm.
The embodiments of the present invention are not limited to the above embodiments, and various changes made without departing from the spirit and scope of the present invention are within the scope of the present invention.
Claims (5)
1. A large-size component physical vapor deposition nozzle is composed of an inlet section (1) and a nozzle seat (2), and is characterized in that: the nozzle seat (2) consists of a distribution layer (3), a first cavity (4), a distribution plate (5), a second cavity (6) and an outlet section (7), the distribution layer (3) consists of a plurality of partition plates (8), one ends of the partition plates (8) are converged at the joint of the inlet section (1) and the nozzle seat (2), and the other ends of the partition plates (8) are outwards diffused; the distribution plate (5) is in a cuboid shape, small holes (9) are formed in the distribution plate (5), and the distribution plate (5) is arranged between the first cavity (4) and the second cavity (6); the outlet section (7) is a long and narrow slit, and the outlet section (7) is positioned below the second cavity (6).
2. The large size component physical vapor deposition nozzle of claim 1, wherein: the inlet section (1) is a pipe with a circular or square section.
3. The large size component physical vapor deposition nozzle of claim 1, wherein: the partition plates (8) of the distribution layer (3) are linear or curved partition plates.
4. The large size component physical vapor deposition nozzle of claim 1, wherein: the small holes (9) on the distribution plate (5) are densely distributed at two ends of the distribution plate (5) and are dispersedly distributed at the center of the distribution plate (5).
5. The large size component physical vapor deposition nozzle of claim 1, wherein: the shape of the small holes (9) on the distribution plate (5) is round, square or triangular.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920413933.1U CN209816258U (en) | 2019-03-29 | 2019-03-29 | Physical vapor deposition nozzle for large-size component |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920413933.1U CN209816258U (en) | 2019-03-29 | 2019-03-29 | Physical vapor deposition nozzle for large-size component |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209816258U true CN209816258U (en) | 2019-12-20 |
Family
ID=68877828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920413933.1U Active CN209816258U (en) | 2019-03-29 | 2019-03-29 | Physical vapor deposition nozzle for large-size component |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209816258U (en) |
-
2019
- 2019-03-29 CN CN201920413933.1U patent/CN209816258U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210616 Address after: 311800 309, 111 Gen TA Xi Lu, Taozhu street, Zhuji City, Shaoxing City, Zhejiang Province Patentee after: Shaoxing Taibu aiweita Intelligent Technology Co.,Ltd. Address before: Room 301, No.42, Lane 99, Hulin Road, Baoshan District, Shanghai 200431 Patentee before: Li Shicheng |
|
| TR01 | Transfer of patent right |