CN209803004U - Device for simultaneously carrying out optical detection on front surface and back surface of object - Google Patents
Device for simultaneously carrying out optical detection on front surface and back surface of object Download PDFInfo
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- CN209803004U CN209803004U CN201920262992.3U CN201920262992U CN209803004U CN 209803004 U CN209803004 U CN 209803004U CN 201920262992 U CN201920262992 U CN 201920262992U CN 209803004 U CN209803004 U CN 209803004U
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- angle prism
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Abstract
The utility model provides a carry out optical detection's device to two positive and negative surfaces of object simultaneously, include: the device comprises a transparent objective table, a right-angle prism arranged on one side of the transparent objective table, and a light source, a telecentric imaging lens and a camera which are arranged on the other side of the transparent objective table; the inclined plane of the right-angle prism faces the transparent objective table and is parallel to the transparent objective table; the right-angle prism, the telecentric imaging lens and the camera are coaxial. The utility model discloses mainly adopt right angle prism's secondary reflection to realize detecting when the front and the reverse side of same object that awaits measuring, adopt machine vision telecentric optics imaging lens to obtain enough big depth of field simultaneously for the clear formation of image of the positive and negative surface homoenergetic of object that awaits measuring. The utility model discloses the scheme utilizes camera of a light source can realize the detection to two faces of the object that awaits measuring, under the prerequisite of guaranteeing efficiency, greatly reduced detect the cost, and simple structure, easily installation and debugging have very high practicality and spreading value.
Description
Technical Field
The utility model belongs to optical detection and machine vision field especially relate to a carry out optical detection's device to two positive and negative surfaces of object simultaneously.
Background
Machine vision is a device that uses a machine to measure and judge instead of a human eye. Conventional machine vision optical automatic detection devices use a camera and a light source to detect a surface of an object to be detected. If multiple surfaces need to be inspected, a machine vision optical inspection device containing multiple sets of cameras is required. Performing the detection task in this manner has cost and reliability disadvantages.
As shown in fig. 1, in the field of machine vision, a set of conventional optical inspection devices mainly includes a camera, a lens, a coaxial light source, image processing software, an object to be inspected, and the like. The object is illuminated by a light source, the object is imaged on the surface of a CCD detector through an optical lens, the image is transmitted to a computer through an image acquisition card and an A-D conversion module, finally, required image information is obtained through a digital image processing technology, and the size, the shape and the color are distinguished and measured according to information such as pixel distribution, brightness, color and the like, so that the field equipment operation is controlled.
If will detect two faces of single object simultaneously, present general detection method all is that a camera occupies a station and detects a face, if need detect two sides or even multiaspect, just need adopt a plurality of cameras to occupy a plurality of stations and detect, just so causes the installation space of mechanism very big, needs many sets of mechanism installation modules simultaneously, and many sets of circuit module increase installation complexity leads to the reliability poor.
SUMMERY OF THE UTILITY MODEL
The utility model discloses not enough to prior art exists, the utility model discloses consider to design one kind and only adopt the scheme of a camera, a camera lens and a light source to realize carrying out optical detection to two positive and negative surfaces of object simultaneously. The utility model places a secondary reflection right-angle prism under the object to be measured, and part of the light source directly illuminates the front side of the object to be measured and images the front side; meanwhile, the other part of light enters from the hypotenuse face of the right-angle prism, illuminates the bottom face (back face) of the object to be detected through the secondary reflection of the two right-angle faces, and images the back face, so that the front face and the back face (bottom face) of the same object are detected simultaneously. It can conveniently and quickly detect the upper and lower surfaces of the same object (such as a semiconductor refrigeration device crystal grain) at the same time. The detection technical scheme has the advantages of low cost, high detection speed, simplicity in installation and the like.
The utility model discloses specifically adopt following technical scheme:
an apparatus for optically inspecting both front and back surfaces of an object, comprising: the device comprises a transparent objective table, a right-angle prism arranged on one side of the transparent objective table, and a light source, a telecentric imaging lens and a camera which are arranged on the other side of the transparent objective table; the inclined plane of the right-angle prism faces the transparent objective table and is parallel to the transparent objective table; the right-angle prism, the telecentric imaging lens and the camera are coaxial.
Preferably, the projection of the inclined plane of the right-angle prism on the transparent object stage comprises two symmetrical half areas, wherein one half area is set as an object placing area.
preferably, the equivalent geometric optical path difference of the imaging optical path with the object surface as the front and back surfaces of the object to be measured is smaller than the depth of field of the telecentric imaging lens.
preferably, the light source and the telecentric imaging lens are integrally arranged to coaxially illuminate the telecentric imaging lens.
Preferably, the light source is a coaxial light source or an annular light source or a bar light source.
Preferably, the material of the transparent object stage is glass.
the utility model discloses mainly adopt right angle prism's secondary reflection to realize detecting when the front and the reverse side of same object that awaits measuring, adopt machine vision telecentric optics imaging lens to obtain enough big depth of field simultaneously for the clear formation of image of the positive and negative surface homoenergetic of object that awaits measuring.
The utility model discloses the scheme utilizes camera of a light source can realize the detection to two faces of the object that awaits measuring, under the prerequisite of guaranteeing efficiency, greatly reduced detect the cost, and simple structure, easily installation and debugging have very high practicality and spreading value.
Drawings
The invention will be described in further detail with reference to the following drawings and detailed description:
FIG. 1 is a schematic diagram of a prior art apparatus to which the present invention is directed in an improved manner;
Fig. 2 is a schematic view of the overall structure of embodiment 1 of the present invention;
Fig. 3 is a schematic view of the overall structure of embodiment 2 of the present invention;
In the figure: 100-a camera; 200-lens; 201-coaxial illumination telecentric imaging lens; 202-telecentric imaging lens; 300-coaxial light source; 301-built-in coaxial light source; 302-a light source; 400-the test object; 500-transparent stage; 600-right angle prism.
Detailed Description
in order to make the features and advantages of this patent more comprehensible, 2 embodiments accompanied with figures are described in detail below:
As shown in fig. 1, in the field of machine vision, a conventional set of optical inspection apparatus in the prior art mainly includes a camera 100, a lens 200, and a coaxial light source 300, and the apparatus can only perform one-side inspection on an object 400 to be inspected.
As shown in fig. 2, in a first embodiment of the present invention, the integrated device includes: the system comprises a transparent objective table 500, a right-angle prism 600 arranged on one side of the transparent objective table 500, and a coaxial illumination telecentric imaging lens 201 and a camera 100 which are arranged on the other side of the transparent objective table 500; the inclined plane of the right-angle prism 600 faces the transparent stage 500 and is parallel to the transparent stage 500; the right-angle prism 600, the coaxial illumination telecentric imaging lens 201 and the camera 100 are coaxial. The transparent stage 500 is made of glass. The coaxial illumination telecentric imaging lens 201 comprises a built-in coaxial light source 301.
The projection of the inclined plane of the right-angle prism 600 on the transparent stage 500 includes two symmetrical half areas, wherein one half area is set as the placement area of the object 400 to be measured.
In the device of this embodiment, the equivalent geometric optical path difference of the imaging optical path using the front and back surfaces of the object 400 as the object plane is smaller than the depth of field of the coaxial illumination telecentric imaging lens 201, otherwise, it is not possible to ensure that the front and back surfaces can clearly image.
The corresponding optical detection method comprises the following steps:
step A1: a transparent object stage 500 is arranged in the direction vertical to the optical axis of a shooting device consisting of the camera 100 and the coaxial illumination telecentric imaging lens 201;
Step A2: a right-angle prism 600 is coaxially arranged on the other side of the transparent object stage 500 and is perpendicular to the optical axis; the inclined plane of the right-angle prism 600 faces the transparent stage 500 and is parallel to the transparent stage 500;
Step A3: dividing the projection of the inclined plane of the right-angle prism 600 on the transparent object stage 500 into two symmetrical half areas, and setting one half area as an object 400 placement area to be measured for determining the boundary of the size of the object 400 in the horizontal direction; the depth of field of the coaxial illumination telecentric imaging lens 201 is used as the limit of the equivalent geometric optical path difference of the imaging optical paths of the front surface and the back surface of the object to be measured 400;
Step A4: the object 400 is placed in the object-placing region of the transparent stage 500, and one of the front and back surfaces of the object 400 to be tested that needs to be optically tested faces downward.
As shown in fig. 3, in the second embodiment of the present invention, the difference from the first embodiment is that the light source 302 is not integrated with the telecentric imaging lens 202, but an external light source 302 is adopted, wherein the light source 302 can be a ring light source or a coaxial light source or a bar light source, and the main point is that the body does not affect the detection light path.
the corresponding optical detection method comprises the following steps:
Step B1: a transparent object stage 500 is arranged in the direction vertical to the optical axis of a shooting device consisting of the camera 100 and the telecentric imaging lens 202;
step B2: a right-angle prism 600 is coaxially arranged on the other side of the transparent object stage 500 and is perpendicular to the optical axis; the inclined plane of the right-angle prism 600 faces the transparent stage 500 and is parallel to the transparent stage 500;
Step B3: a light source 302 is arranged between the telecentric imaging lens 202 and the transparent object stage 500;
step B4: dividing the projection of the inclined plane of the right-angle prism 600 on the transparent object stage 500 into two symmetrical half areas, and setting one half area as an object 400 placement area to be measured for determining the boundary of the size of the object 400 in the horizontal direction; the depth of field of the telecentric imaging lens 202 is used as the limit of the equivalent geometric optical path difference of the imaging of the front surface and the back surface of the object 400 to be measured;
step B5: the object 400 is placed in the object-placing region of the transparent stage 500, and one of the front and back surfaces of the object 400 to be tested that needs to be optically tested faces downward.
the scheme provided according to the embodiment is used for simultaneously detecting the upper surface and the lower surface of the semiconductor refrigeration crystal grain: the shape of the semiconductor refrigeration crystal grain to be tested is a cuboid, and the typical size is 2.10 × 1.32 mm. The detection accuracy is required to be within +/-0.02 mm. According to the requirements, a secondary reflection right-angle prism with the hypotenuse length of 3.6 mm is selected for illuminating the bottom surface of the object to be measured and realizing the turning of an imaging light path for the bottom surface. The EM-MV120C video camera is adopted in the experiment, the pixel size of the camera is 3.75um, the size of the CCD target surface is 1/3', and the resolution is 1280 x 960. Meanwhile, a large-depth-of-field telecentric imaging lens with model 65035TH5M supplied by Fujian Hao blue light power is selected. The depth of field of the lens is 7.4mm, and the detection requirement can be met. By using the experimental device, static detection experiments are respectively carried out on a plurality of groups of qualified and unqualified crystal grain samples. Each group of grain samples was 20. Experimental results show that the double-sided image obtained by the method is clear and distinguishable, has high contrast and well meets the requirements of subsequent image processing.
The present invention is not limited to the above preferred embodiments, and other various devices for optically detecting the front and back surfaces of an object can be obtained by anyone who can benefit from the present invention.
Claims (6)
1. an apparatus for optically inspecting both front and back surfaces of an object, comprising: the device comprises a transparent objective table, a right-angle prism arranged on one side of the transparent objective table, and a light source, a telecentric imaging lens and a camera which are arranged on the other side of the transparent objective table; the inclined plane of the right-angle prism faces the transparent objective table and is parallel to the transparent objective table; the right-angle prism, the telecentric imaging lens and the camera are coaxial.
2. The apparatus of claim 1, wherein the apparatus further comprises: the projection of the inclined plane of the right-angle prism on the transparent objective table comprises two symmetrical half areas, wherein one half area is set as an object placing area to be measured.
3. The apparatus of claim 2, wherein the apparatus further comprises: the depth of field of the telecentric imaging lens is larger than the equivalent geometric optical path difference of an imaging optical path taking the front surface and the back surface of the object to be measured as object surfaces.
4. The apparatus of claim 3, wherein the apparatus further comprises: the light source and the telecentric imaging lens are integrally arranged into a coaxial illumination telecentric imaging lens.
5. The apparatus of claim 3, wherein the apparatus further comprises: the light source is a coaxial light source or an annular light source or a strip light source.
6. the apparatus of claim 1, wherein the apparatus further comprises: the transparent object stage is made of glass.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920262992.3U CN209803004U (en) | 2019-03-01 | 2019-03-01 | Device for simultaneously carrying out optical detection on front surface and back surface of object |
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| CN201920262992.3U CN209803004U (en) | 2019-03-01 | 2019-03-01 | Device for simultaneously carrying out optical detection on front surface and back surface of object |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109765234A (en) * | 2019-03-01 | 2019-05-17 | 泉州师范学院 | Two surfaces positive and negative to object carry out the device and method of optical detection simultaneously |
| CN111044524A (en) * | 2019-12-26 | 2020-04-21 | 泉州师范学院 | Optical detection device and method for realizing equal optical path imaging of two opposite surfaces of semiconductor crystal grain |
| CN111443040A (en) * | 2020-05-14 | 2020-07-24 | 成都德图福思科技有限公司 | Imaging system and method for laser coding etching mark on surface of light-reflecting and light-transmitting composite material |
| CN113091657A (en) * | 2021-04-07 | 2021-07-09 | 广东九联科技股份有限公司 | Flatness tester |
| CN115128099A (en) * | 2022-08-29 | 2022-09-30 | 苏州高视半导体技术有限公司 | Wafer defect detection method, wafer defect detection equipment and shooting device thereof |
| CN115144404A (en) * | 2022-09-01 | 2022-10-04 | 茉丽特科技（深圳）有限公司 | Vision measuring instrument based on telecentric optics technology |
| CN115561128A (en) * | 2022-12-06 | 2023-01-03 | 泉州师范学院 | Device and method for realizing asynchronous imaging detection of two end faces of semiconductor crystal grain |
-
2019
- 2019-03-01 CN CN201920262992.3U patent/CN209803004U/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109765234A (en) * | 2019-03-01 | 2019-05-17 | 泉州师范学院 | Two surfaces positive and negative to object carry out the device and method of optical detection simultaneously |
| CN111044524A (en) * | 2019-12-26 | 2020-04-21 | 泉州师范学院 | Optical detection device and method for realizing equal optical path imaging of two opposite surfaces of semiconductor crystal grain |
| CN111044524B (en) * | 2019-12-26 | 2023-08-11 | 泉州师范学院 | Optical detection device and method for realizing equal optical path imaging of two opposite surfaces of semiconductor crystal grain |
| CN111443040A (en) * | 2020-05-14 | 2020-07-24 | 成都德图福思科技有限公司 | Imaging system and method for laser coding etching mark on surface of light-reflecting and light-transmitting composite material |
| CN113091657A (en) * | 2021-04-07 | 2021-07-09 | 广东九联科技股份有限公司 | Flatness tester |
| CN115128099A (en) * | 2022-08-29 | 2022-09-30 | 苏州高视半导体技术有限公司 | Wafer defect detection method, wafer defect detection equipment and shooting device thereof |
| CN115144404A (en) * | 2022-09-01 | 2022-10-04 | 茉丽特科技（深圳）有限公司 | Vision measuring instrument based on telecentric optics technology |
| CN115561128A (en) * | 2022-12-06 | 2023-01-03 | 泉州师范学院 | Device and method for realizing asynchronous imaging detection of two end faces of semiconductor crystal grain |
| CN115561128B (en) * | 2022-12-06 | 2023-03-24 | 泉州师范学院 | Device and method for realizing asynchronous imaging detection of two end faces of semiconductor crystal grain |
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