CN209784551U - High-space-time resolution soft X-ray radiation flow quantitative measurement system - Google Patents
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Abstract
The utility model discloses a high space-time resolution soft X-ray radiation flow quantitative measurement system, the system is measured the light source and is arranged in two and grammed the incidence X-ray microscope the place ahead, and the X ray of light source transmission passes through two passageways of microscope respectively, and then on slotting scintillator, neutral attenuation piece, compound filter disc, image respectively on X-ray diode detector and X-ray stripe camera photocathode, produce the photoelectron, can carry out high space-time resolution to X-ray radiation flow and measure; compared with the prior art, the utility model discloses a glancing incidence X ray microscope replaces the pinhole to form images, has improved measurement system spatial resolution and sensitivity, and the stripe camera is measured with X ray diode detector contrast, realizes the stripe camera and flows quantitative measurement to X ray radiation, has improved the time resolution who flows the measurement. The utility model discloses can carry out the quantitative measurement of high space-time resolution to the energy flow of the soft X ray source radiation of nanosecond pulse, have extensive application prospect in pulse X ray radiation detection field.
Description
Technical Field
The utility model belongs to pulse X ray detection field, concretely relates to soft X ray radiation flow quantitative measurement system of high time-space resolution.
Background
In the prior art, pinhole imaging is adopted, a diaphragm with the diameter of 2mm is placed on an image surface, X-rays emitted by a specific area of a light source pass through the diaphragm, and X-rays emitted from a small hole of the diaphragm are measured by a flat response X-ray diode detector, so that quantitative measurement of area-resolved X-ray radiation flow can be realized (a space-resolved radiation flow detection device CN 105158789B and a local area soft quantitative X-ray radiation flow measurement device and measurement method CN 105204059B).
In the technology, the pinhole with the diameter of 80 ~ 100 mu m is adopted to image the X-ray radiated by the light source, the spatial resolution is equivalent to the size of the pinhole, the resolution is low, the technology detects the total radiation flow of a specific area with the diameter of 200 mu m of the light source, the real spatial resolution radiation flow measurement cannot be realized, and secondly, the system time resolution is generally about 100ps due to the limitation of the performance of an X-ray diode detector.
Still another technique is to use pinhole imaging with diameter of 10 ~ 30 μm, and to measure the soft X-ray radiation flow at the image plane by using an X-ray strip camera, and the strip camera can also realize the space-time resolved radiation flow measurement by using a transmissive Au cathode with flat response performance to the soft X-ray, and the space resolution can reach about 10 μm, and the time resolution can reach 10ps (a space-time resolved radiation flow diagnostic system, CN 106526654 a).
In the latter technique, the spatial resolution is generally about 10 μm, the light flux is small, and the sensitivity of the system is low, which is influenced by the size of the pinhole; secondly, no filter disc is arranged in front of the flat response photocathode, and the flat response photocathode is easily interfered by ultraviolet light; in addition, the spectral response of the X-ray strip camera is difficult to quantitatively calibrate, and the radiation flux intensity is difficult to quantitatively measure due to the unstable gain of the image intensifier.
In the two prior arts, both the cathode is provided with a perforated (or slotted) imaging plate in front of the cathode, the imaging plate, besides functioning as a diaphragm, is also used for measuring the image of the measured X-ray source, and further determining the observed area, after the experiment is completed, the imaging plate needs to be taken out from the measuring system, and under the offline condition, the reading and processing of the X-ray image are completed, which area of the measured target observed by the measuring system cannot be discriminated quickly on line, and the experiment efficiency is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims at the defects of the prior art, and provides a technical scheme of a high space-time resolution soft X-ray radiation flow quantitative measurement system, which adopts a glancing incidence reflection X-ray microscope to image X-rays, an X-ray diode detector is combined with an X-ray stripe camera, a CMOS camera shoots a target image displayed by a scintillator, the defects that in the technology of realizing the regional resolution radiation flow measurement by a pinhole trim response X-ray diode detector, the space resolution and the time resolution are low, and the observation position is difficult to determine on line are overcome; meanwhile, the defects of difficult intensity quantification, low sensitivity, easy ultraviolet interference and low spatial resolution in the technology of realizing the space-time resolution X-ray radiation flow measurement by combining pinhole imaging with an X-ray stripe camera are overcome.
The scheme is realized by the following technical measures:
A high-space-time resolution soft X-ray radiation flow quantitative measurement system comprises two grazing incidence reflection type X-ray microscopes (2), an online aiming assembly (3), a CMOS camera (4), a slotted or perforated scintillator (5), a neutral attenuation sheet (6), a composite filter sheet (7), an X-ray diode detector (8) and an X-ray stripe camera (9); the method comprises the following steps that a light source (1) to be detected is arranged in front of a grazing incidence reflection type X-ray microscope (2), X rays radiated by the light source (1) to be detected enter the grazing incidence reflection type X-ray microscope (2) in a grazing incidence mode in two paths, are reflected by a mirror surface and then sequentially pass through a slotted or perforated scintillator (5), a neutral attenuation sheet (6) and a composite filter sheet (7), and then are respectively imaged on cathodes of an X-ray stripe camera (9) and an X-ray diode detector (8) to generate photoelectrons which are detected; the grazing incidence reflection type X-ray microscope (2) carries out high-spatial resolution imaging on the X-ray emitted by the detected light source; the composite filter disc (7) is used for modifying the X-ray spectral response of the X-ray diode detector (8) and the X-ray fringe camera (9), so that the spectral response of the two detectors to the X-ray is flat, and the two detectors are suitable for measuring the X-ray radiant energy flow in a wide spectral range; the neutral attenuation sheet (6) is used for adjusting the intensity of X-ray radiation flow entering the X-ray stripe camera (9) and the X-ray diode detector (8) and preventing inaccurate measuring results caused by saturation of output signals of the detector; the slit or open scintillator (5) is used for displaying a light source image formed by the X-ray microscope (2) to the X-ray emitted by the light source (1) to be detected; the CMOS camera (4) is positioned in front of the slit or open-hole scintillator (5), and is used for shooting an X-ray light source image displayed by the slit or open-hole scintillator (5) and determining the areas observed by the X-ray stripe camera (9) and the X-ray diode detector (8); the X-ray stripe camera (9) and the X-ray diode detector (8) are used for contrast measurement, so that the X-ray stripe camera (9) has the capability of quantitatively measuring the X-ray radiation flow, and the time resolution of the radiation flow measurement is improved; the online aiming component (3) is positioned at the front end of the measuring system and shares the view field with the dual-channel grazing incidence reflection type X-ray microscope (2), so that the high-precision aiming of the measuring system to the measured light source (1) is realized; the two grazing incidence reflection type X-ray microscopes (2) have a common view field.
The scheme is preferably that the two grazing incidence reflection type X-ray microscopes (2) are of a Wolter type, a KB type or a KBA type, two channels are of the same type or a combination of the two types, the surface of the grazing incidence reflection type X-ray microscope (2) is plated with metal Ir or a metal Pt film by a magnetron sputtering method, the thickness of the film layer is 100nm and ~ mu m, the surface roughness is less than 0.3nm, and the X-ray reflectivity of the two grazing incidence reflection type X-ray microscope (2) in the energy region range of 0.1 ~ keV is 80% and ~%.
Preferably, the X-ray emitted by the light source (1) to be measured enters the two X-ray microscopes (2) at the grazing incidence angle of 1 ~ 10 degrees.
The composite filter (7) positioned in front of the cathode of the X-ray streak camera (9) is preferably a 20nm thick Au filter supported by an Au screen with the thickness of 1 ~ 5 mu m and the opening area ratio of more than 70%, the screen hole diameter is 2 ~ 15 mu m, and the Au filter is in a honeycomb shape and is uniformly distributed.
Preferably, the cathode used by the X-ray stripe camera (9) is an Au thin film which is supported by an Au screen with the thickness of 360nm and the opening area ratio of 12.5%, the thickness of the Au thin film is 40nm, and the Au thin film is combined with the front composite filter, so that the non-flatness of the response of the stripe camera to the X-ray spectrum in the energy region of 0.1 ~ 5keV is less than 10%, the time resolution is 5 ~ 50ps, and the space resolution is 25 ~ 100 mu m.
the scheme is preferably that the X-ray diode detector (8) adopts an Au cathode, an Au foil which is supported by an Au screen with the thickness of 360nm and the opening area ratio of 12.5% is arranged in front, the thickness of the Au foil is 60nm, the non-flatness of the spectral response of the composite filter (7) and the X-ray diode detector (8) to the X-ray in the energy region of 0.1 ~ 5keV is less than 10%, and the time resolution is better than 100 ps.
Preferably, the slotted or perforated scintillator (5) is a GAGG Ce, CsI Tl or ZnO scintillator with the thickness of 50 ~ 100 μm, and the rear surface is plated with a metal Al, Cr, Au or Ag film with the thickness of 0.1 ~ 10 μm by adopting a thermal evaporation or magnetron sputtering method.
The spectral response range of the CMOS camera (4) is preferably 300nm ~ 700 nm.
preferably, the neutral attenuation sheet (6) is an Au film with the thickness of 1 ~ 5 microns, honeycomb-shaped array small holes are uniformly prepared on the Au film by a photoetching method or a laser processing method, the diameter of each small hole is 5 ~ 20 microns of through holes, and the opening area ratio is adjustable between 10% and ~ 50% of 3950%.
The scheme is preferably as follows: the on-line aiming component (3) is an optical vision system with a large visual field and a small visual field, the optical vision system with the two visual fields observes a target by two optical CCD cameras with a microscope lens, image display and image processing are completed by a remote control computer connected with an Ethernet, the optical vision system adopts a sight intersection method to position the target, the large visual field vision system is responsible for searching the target in a large range, the small visual field vision system is responsible for accurately positioning the target, and the small visual field vision system and the X-ray microscope share the visual field.
The beneficial effect of this scheme can be known according to the statement to above-mentioned scheme, because the utility model discloses a grazing incidence reflection formula X ray microscope images X ray, increased the clear aperture, reduced the influence of diffraction, can make system space resolution ability reach 3 ~ 5 mu m, still can make the light receiving solid angle improve more than one magnitude simultaneously, diagnostic system's sensitivity has been increased, the X ray diode detector that has quantitative measurement ability combines with the X ray stripe camera that has high time resolution, and spectral response is flat, carry out the area normalization to the signal waveform of two kinds of detectors measurement, then the radiation flow intensity that is measured by X ray diode carries out the assignment to the area normalization time waveform of stripe camera measurement, make the stripe camera have quantitative measurement ability to X ray radiation flow, can make radiation flow measurement time resolution reach 10ps, reduced the uncertainty of intensity measurement, adopt the scintillation body to replace the imaging plate to show to X ray, CMOS camera shoots the target image that the body shows, realized on-line measurement, improved experimental efficiency, the stripe camera responds to increase the light-supported Au, 20nm, the accurate screen mesh of screen mesh is carried out the accuracy and the target measurement accuracy.
Therefore, compared with the prior art, the utility model has the substantive characteristics and the progress, and the beneficial effects of the implementation are also obvious.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
In the figure, 1 is a light source to be measured, 2 is a grazing incidence reflection type X-ray microscope, 3 is an online aiming assembly, 4 is a CMOS camera, 5 is a slotted or perforated scintillator, 6 is a neutral attenuation sheet, 7 is a composite filter, 8 is an X-ray diode detector, and 9 is an X-ray stripe camera.
Detailed Description
Example 1:
As can be seen from the figure 1, the scheme comprises two grazing incidence reflection type X-ray microscopes (2), an online aiming assembly (3), a CMOS camera (4), a slotted or perforated scintillator (5), a neutral attenuation sheet (6), a composite filter sheet (7), an X-ray diode detector (8) and an X-ray stripe camera (9); the method comprises the following steps that a light source (1) to be detected is arranged in front of a grazing incidence reflection type X-ray microscope (2), X rays radiated by the light source (1) to be detected enter the grazing incidence reflection type X-ray microscope (2) in a grazing incidence mode in two paths, are reflected by a mirror surface and then sequentially pass through a slotted or perforated scintillator (5), a neutral attenuation sheet (6) and a composite filter sheet (7), and then are respectively imaged on cathodes of an X-ray stripe camera (9) and an X-ray diode detector (8) to generate photoelectrons which are detected; the grazing incidence reflection type X-ray microscope (2) carries out high-spatial resolution imaging on the X-ray emitted by the detected light source; the composite filter disc (7) is used for modifying the X-ray spectral response of the X-ray diode detector (8) and the X-ray fringe camera (9), so that the spectral response of the two detectors to the X-ray is flat, and the two detectors are suitable for measuring the X-ray radiant energy flow in a wide spectral range; the neutral attenuation sheet (6) is used for adjusting the intensity of X-ray radiation flow entering the X-ray stripe camera (9) and the X-ray diode detector (8) and preventing inaccurate measuring results caused by saturation of output signals of the detector; the slit or open scintillator (5) is used for displaying a light source image formed by the X-ray microscope (2) to the X-ray emitted by the light source (1) to be detected; the CMOS camera (4) is positioned in front of the slit or open-hole scintillator (5), and is used for shooting an X-ray light source image displayed by the slit or open-hole scintillator (5) and determining the areas observed by the X-ray stripe camera (9) and the X-ray diode detector (8); the X-ray stripe camera (9) and the X-ray diode detector (8) are used for contrast measurement, so that the X-ray stripe camera (9) has the capability of quantitatively measuring the X-ray radiation flow, and the time resolution of the radiation flow measurement is improved; the online aiming component (3) is positioned at the front end of the measuring system and shares the view field with the dual-channel grazing incidence reflection type X-ray microscope (2), so that the high-precision aiming of the measuring system to the measured light source (1) is realized; the two grazing incidence reflection type X-ray microscopes (2) have a common view field.
The two grazing incidence reflection type X-ray microscopes (2) are of a Wolter type, a KB type or a KBA type, two channels are of the same type or a combination of the two types, the surface of the grazing incidence reflection type X-ray microscope (2) is plated with a metal Ir or metal Pt film by a magnetron sputtering method, the film thickness is 100nm, ~ 2 mu m, and the surface roughness is less than 0.3nm, and the X-ray reflectivity of the two grazing incidence reflection type X-ray microscopes (2) in the energy region range of 0.1 ~ 5keV is 80 percent ~ 95 percent.
The X-ray emitted by the tested light source (1) enters the two X-ray microscopes (2) at the grazing incidence angle of 1 ~ 10 degrees.
The composite filter disc (7) positioned in front of the cathode of the X-ray streak camera (9) is a 20nm thick Au filter disc supported by an Au screen with the thickness of 1 ~ 5 mu m and the opening area ratio of more than 70 percent, the diameter of the screen hole is 2 ~ 15 mu m, and the Au filter disc is in a honeycomb shape and is uniformly distributed.
The cathode used by the X-ray streak camera (9) is an Au thin film with the thickness of 360nm and the thickness of 40nm supported by an Au screen with the opening area ratio of 12.5 percent, and is combined with a front composite filter, so that the non-flatness of the spectral response of the streak camera to the X-ray in the energy region of 0.1 ~ 5keV is less than 10 percent, the time resolution is 5 ~ 50ps, and the space resolution is 25 ~ 100 mu m.
The X-ray diode detector (8) adopts an Au cathode, an Au foil which is arranged in front and is 360nm thick and supported by an Au screen with the opening area ratio of 12.5% is adopted, and the thickness of the Au foil is 60nm, so that the non-flatness of the spectral response of the composite filter (7) and the X-ray diode detector (8) to the X-ray in the energy region range of 0.1 ~ 5keV is less than 10%, and the time resolution is better than 100 ps.
The slotted or perforated scintillator (5) is a GAGG Ce, CsI Tl or ZnO scintillator with the thickness of 50 ~ 100 μm, and the rear surface is plated with a metal Al, Cr, Au or Ag film with the thickness of 0.1 ~ 10 μm by a thermal evaporation or magnetron sputtering method.
The spectral response range of the CMOS camera (4) is 300nm ~ 700 nm.
The neutral attenuation sheet (6) is an Au film with the thickness of 1 ~ 5 microns, honeycomb array pores are uniformly prepared on the Au film by a photoetching method or a laser processing method, the diameter of each pore is 5 ~ 20 microns of through holes, and the opening area ratio is adjustable between 10% and ~ 50% of 3950%.
The on-line aiming component (3) is an optical vision system with a large visual field and a small visual field, the optical vision system with the two visual fields observes a target by two optical CCD cameras with a microscope lens, image display and image processing are completed by a remote control computer connected with an Ethernet, the optical vision system adopts a sight intersection method to position the target, the large visual field vision system is responsible for searching the target in a large range, the small visual field vision system is responsible for accurately positioning the target, and the small visual field vision system and the X-ray microscope share the visual field.
In this embodiment, the X-ray fringe camera 9 is of an air chamber type, and the grazing incidence reflection type X-ray microscope 2, the on-line aiming component 3, the CMOS camera 4, the slotted or perforated scintillator 5, the neutral attenuation sheet 6, the composite filter 7 and the X-ray diode detector 8 are combined into a front end of the measurement system by using a support adjusting mechanism, and are installed in front of the air chamber type X-ray fringe camera, so as to form the high-space-time resolution soft X-ray radiation flow quantitative measurement system (referred to as a diagnostic package for short).
In this embodiment, the high-spatial-temporal-resolution soft X-ray radiation flow quantitative measurement system is applied to an inertial confinement nuclear fusion physical experiment driven by high-power laser, the experimental device is provided with a universal diagnosis carrying platform (DIM) carrying a diagnosis package, the carrying platform can send the diagnosis package into a vacuum target chamber under the drive of a motor, the direction of an observation sight line of the diagnosis package and the distance from an observation target can be adjusted, and the diagnosis package can accurately aim at the measured target under the guide of an on-line aiming component 3 arranged on the diagnosis package.
In the embodiment, during off-line aiming, a target (Ni net) is illuminated by adopting X rays emitted by a focusing electron beam irradiation target material, a two-grazing incidence reflection type microscope 2 is placed on a translation table capable of carrying out three-dimensional translation and two-dimensional rotation adjustment, an X-ray CCD camera is placed at an image surface position, and the direction and the position of the microscope 2 are adjusted until a clear image of the Ni net is obtained at the image surface; then, illuminating the target by using visible light, adjusting the online aiming component 3 integrated with the microscope 2 to enable the target to be imaged at the central position of the target surface of the CCD camera with large and small visual fields of the online aiming component 3 through a microscope lens, and recording the position; finally, a small semiconductor laser is mounted on the supporting structure of the X-ray microscope 2, and the center position of the target image imaged by the X-ray microscope 2 is indicated by using a double-beam convergence method.
When the online aiming is performed, the system is carried on a DIM (digital image model) equipped in a physical experiment device and sent into a vacuum target chamber, visible light appropriately illuminates a target to be measured positioned in the center of the target chamber, a large-field visual system and a small-field visual system of the online aiming assembly 3 observe the target, and the DIM adjusts the pointing direction of the system and the distance from the target under the guidance of the system, so that the target to be measured is clearly imaged in the centers of two small fields of view of the online aiming assembly 3 after passing through a microscope lens, and the online aiming is completed.
In the online measurement of the embodiment, the X-ray radiated by the detected light source 1 enters the X-ray microscope 2 in a grazing incidence mode, passes through the slit or open-pore scintillator 5 after being reflected by the mirror surface, and respectively images on the cathodes of the X-ray stripe camera 9 and the X-ray diode detector 8 through the neutral attenuation sheet 6 and the composite filter 7 to generate photoelectrons which are detected; the intensity of the X-ray radiation flow is given by an X-ray diode detector 8, and a time waveform of the space-time resolved X-ray radiation flow is obtained by a flat response X-ray stripe camera 9.
Example 2
The present embodiment differs from embodiment 1 in that: the two grazing incidence reflective X-ray microscopes 2 are of the KB type with an object distance of 250mm, an image distance of 1250mm and a magnification of 5.
All of the features disclosed in this specification, or all of the steps in any method or process so disclosed, may be combined in any combination, except combinations of features and/or steps that are mutually exclusive.
Any feature disclosed in this specification (including any accompanying claims, abstract and drawings), may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
The present invention is not limited to the foregoing embodiments. The invention extends to any novel feature or any novel combination of features disclosed in this specification, and to any novel method or process steps or any novel combination of features disclosed.
It will be appreciated by those of ordinary skill in the art that the embodiments described herein are intended to assist the reader in understanding the principles of the invention, and it is to be understood that the scope of the invention is not limited to such specific statements and embodiments.
Those skilled in the art can make various other specific modifications and combinations based on the teachings of the present invention without departing from the spirit of the invention, and such modifications and combinations are still within the scope of the invention.
Claims (10)
1. A high-space-time resolution soft X-ray radiation flow quantitative measurement system is characterized in that: the X-ray scanning system comprises two grazing incidence reflection type X-ray microscopes (2), an online aiming assembly (3), a CMOS camera (4), a slotted or perforated scintillator (5), a neutral attenuation sheet (6), a composite filter (7), an X-ray diode detector (8) and an X-ray stripe camera (9); the method comprises the following steps that a light source (1) to be detected is arranged in front of a grazing incidence reflection type X-ray microscope (2), X rays radiated by the light source (1) to be detected enter the grazing incidence reflection type X-ray microscope (2) in a grazing incidence mode in two paths, are reflected by a mirror surface and then sequentially pass through a slotted or perforated scintillator (5), a neutral attenuation sheet (6) and a composite filter sheet (7), and then are respectively imaged on cathodes of an X-ray stripe camera (9) and an X-ray diode detector (8) to generate photoelectrons which are detected; the grazing incidence reflection type X-ray microscope (2) performs high-spatial resolution imaging on the X-ray emitted by the detected light source; the composite filter disc (7) is used for modifying the X-ray spectral response of an X-ray diode detector (8) and an X-ray fringe camera (9), so that the spectral response of the two detectors to X-rays is flat, and the two detectors are suitable for measuring the X-ray radiant energy flow in a wide spectral range; the neutral attenuation sheet (6) is used for adjusting the intensity of X-ray radiation flow entering the X-ray stripe camera (9) and the X-ray diode detector (8) and preventing inaccurate measuring results caused by saturation of output signals of the detector; the slotted or perforated scintillator (5) is used for displaying a light source image formed by the X-ray microscope (2) to the X-ray emitted by the light source (1) to be detected; the CMOS camera (4) is positioned in front of the slotted or perforated scintillator (5), and is used for shooting an X-ray light source image displayed by the slotted or perforated scintillator (5) and determining an area observed by the X-ray stripe camera (9) and the X-ray diode detector (8); the X-ray stripe camera (9) and the X-ray diode detector (8) are used for contrast measurement, so that the X-ray stripe camera (9) has the capability of quantitatively measuring the X-ray radiation flow, and the time resolution of the radiation flow measurement is improved; the online aiming component (3) is positioned at the front end of the measuring system and shares a view field with the dual-channel grazing incidence reflection type X-ray microscope (2), so that the high-precision aiming of the measuring system to the measured light source (1) is realized; the two grazing incidence reflection type X-ray microscopes (2) have a common view field.
2. The high-space-time-resolution soft X-ray radiation flow quantitative measurement system as claimed in claim 1, wherein the two grazing incidence reflection type X-ray microscopes (2) are of a Wolter type, a KB type or a KBA type, the two channels are of the same type or a combination of the two types, the surface of the grazing incidence reflection type X-ray microscope (2) is plated with a metal Ir or a metal Pt film by a magnetron sputtering method, the thickness of the film layer is 100nm ~ 2 μm, the surface roughness is less than 0.3nm, and the X-ray reflectivity of the two grazing incidence reflection type X-ray microscopes (2) in the energy region range of 0.1 ~ 5keV is 80% ~ 95%.
3. The high-spatial-resolution soft quantitative X-ray radiation flow measuring system as claimed in claim 1, wherein the X-ray emitted from the light source (1) to be measured enters the two X-ray microscopes (2) at a grazing incidence of 1 ~ 10 °.
4. The system for quantitative measurement of high-spatial-resolution soft X-ray radiation flux as claimed in claim 1, wherein the composite filter (7) located in front of the cathode of the X-ray streak camera (9) is a 20nm thick Au filter supported by an Au mesh with a thickness of 1 ~ 5 μm and an opening area ratio of more than 70%, and the mesh diameter is 2 ~ 15 μm, and the Au filter is in a honeycomb shape and is uniformly distributed.
5. The system of claim 1, wherein the cathode of the X-ray streak camera (9) is a Au thin film with a thickness of 40nm supported by a Au mesh with a thickness of 360nm and an open area ratio of 12.5%, combined with the pre-composite filter, such that the streak camera has a spectral response flatness of less than 10% for X-rays in the 0.1 ~ 5keV energy range, a temporal resolution of 5 ~ 50ps, and a spatial resolution of 25 ~ 100 μm.
6. The system of claim 1, wherein the X-ray diode detector (8) is an Au cathode, and is preceded by an Au foil supported by an Au mesh with a thickness of 360nm and an opening area ratio of 12.5%, and the thickness of the Au foil is 60nm, so that the non-flatness of the spectral response of the composite filter (7) to X-rays in the energy range of 0.1 ~ 5keV is less than 10% after the combination with the X-ray diode detector (8), and the time resolution is better than 100 ps.
7. The high space-time resolution soft X-ray radiation flux quantitative measurement system according to claim 1, wherein the slotted or open-cell scintillator (5) is a GAGG Ce, CsI Tl or ZnO scintillator with a thickness of 50 ~ 100 μm, and the rear surface is plated with a 0.1 ~ 10 μm thick metal Al, Cr, Au or Ag film by thermal evaporation or magnetron sputtering.
8. The system for quantitative measurement of high-spatial-resolution soft X-ray radiation flux as claimed in claim 1, wherein the spectral response range of the CMOS camera (4) is 300nm ~ 700 nm.
9. The high-space-time-resolution soft X-ray radiation flow quantitative measurement system as claimed in claim 1, wherein the neutral attenuation sheet (6) is an Au film with a thickness of 1 ~ 5 μm, honeycomb-shaped array pores are uniformly prepared on the Au film by a photoetching method or a laser processing method, the diameter of each pore is 5 ~ 20-20 μm through holes, and the ratio of the open area is adjustable between 10% and ~ 50%.
10. The system according to claim 1, wherein the system comprises: the online aiming component (3) is an optical vision system with a large visual field and a small visual field, the observation of the optical vision system with the two visual fields on a target is completed by two optical CCD cameras with a microscope lens, the image display and the image processing are completed by a remote control computer connected with an Ethernet, the optical vision system adopts a sight intersection method to position the target, the large visual field vision system is responsible for searching the target in a large range, the small visual field vision system is responsible for accurately positioning the target, and the small visual field vision system and the X-ray microscope share the visual field.
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| CN109975859A (en) * | 2019-05-06 | 2019-07-05 | 中国工程物理研究院激光聚变研究中心 | A kind of high time-space resolution soft x-ray radiation stream quantitative measurement system |
| CN111190217A (en) * | 2020-01-23 | 2020-05-22 | 中国工程物理研究院激光聚变研究中心 | Transmission band-pass type radiation flow detector |
| CN111443376A (en) * | 2020-04-09 | 2020-07-24 | 中国工程物理研究院激光聚变研究中心 | Data extraction method of spatial resolution radiation flow detection technology |
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|---|---|---|---|---|
| CN109975859A (en) * | 2019-05-06 | 2019-07-05 | 中国工程物理研究院激光聚变研究中心 | A kind of high time-space resolution soft x-ray radiation stream quantitative measurement system |
| CN109975859B (en) * | 2019-05-06 | 2023-10-31 | 中国工程物理研究院激光聚变研究中心 | High space-time resolution soft X-ray radiation flow quantitative measurement system |
| CN111190217A (en) * | 2020-01-23 | 2020-05-22 | 中国工程物理研究院激光聚变研究中心 | Transmission band-pass type radiation flow detector |
| CN111443376A (en) * | 2020-04-09 | 2020-07-24 | 中国工程物理研究院激光聚变研究中心 | Data extraction method of spatial resolution radiation flow detection technology |
| CN111443376B (en) * | 2020-04-09 | 2022-03-29 | 中国工程物理研究院激光聚变研究中心 | Data extraction method of spatial resolution radiation flow detection technology |
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