CN209766367U - Heater and heat treatment system - Google Patents
Heater and heat treatment system Download PDFInfo
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- CN209766367U CN209766367U CN201821819310.6U CN201821819310U CN209766367U CN 209766367 U CN209766367 U CN 209766367U CN 201821819310 U CN201821819310 U CN 201821819310U CN 209766367 U CN209766367 U CN 209766367U
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- heater
- heat
- heat generating
- housing
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 396
- 238000003780 insertion Methods 0.000 claims abstract description 58
- 230000037431 insertion Effects 0.000 claims abstract description 58
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 238000012423 maintenance Methods 0.000 claims description 43
- 238000012545 processing Methods 0.000 claims description 28
- 230000020169 heat generation Effects 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 23
- 239000007769 metal material Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 description 12
- 239000010453 quartz Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 230000008878 coupling Effects 0.000 description 9
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 238000004804 winding Methods 0.000 description 5
- 230000008439 repair process Effects 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000011295 pitch Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 238000009833 condensation Methods 0.000 description 2
- 230000005494 condensation Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000011796 hollow space material Substances 0.000 description 2
- 229910000953 kanthal Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
The utility model discloses a heater and heat treatment system. The utility model relates to a heat treatment system is used for carrying out heat treatment to base plate (5), include: a heat treatment apparatus (110) including a chamber (105) that provides a heat treatment space for the substrate (5); and a heater (200) which is inserted in a sliding manner through an insertion opening (121) formed on one surface of the heat treatment device (110).
Description
Technical Field
The utility model relates to a heater and heat treatment system. More particularly, the present invention relates to a heater and a thermal processing system, which can improve space efficiency and productivity by inserting a heater from one side of a chamber and performing maintenance on one surface of the chamber.
Background
An annealing (annealing) apparatus is an apparatus that is responsible for a necessary heat treatment step in order to perform processes such as crystallization, phase transition, and the like on a prescribed thin film deposited on a substrate such as a silicon wafer or glass.
3 fig. 31 3 is 3a 3 perspective 3 view 3 showing 3a 3 conventional 3 batch 3 type 3 heat 3 treatment 3 apparatus 31 3, 3 fig. 3 2 3a 3 and 3 2 3b 3 are 3 enlarged 3 sectional 3 side 3 views 3 taken 3 along 3 line 3a 3- 3a 3' 3 in 3 fig. 31 3, 3 and 3 fig. 3 2 3a 3 is 3a 3 shape 3 in 3 which 3a 3 heater 3 20 3 is 3 provided 3 in 3 the 3 heat 3 treatment 3 apparatus 31 3. 3 Fig. 2b shows a rod-shaped heater 20. Fig. 3a and 3b show a conventional heat treatment system, fig. 3a shows the arrangement of the heaters 20 and 30 in the heat treatment apparatus 1, and fig. 3b shows the space necessary for manufacturing, maintenance, and repair of the heat treatment system.
Referring to fig. 1, a conventional batch-type heat treatment apparatus 1 includes: a body 10 including a chamber 15 space; a door 11 for opening and closing the entrance of the body 10; a main heater 20; and a side heater 30. A plurality of substrates may be disposed inside the chamber 15. The plurality of substrates are arranged at predetermined pitches, supported by a substrate holder (not shown) or mounted on a boat (not shown), and arranged inside the chamber 15.
The main heater 20 is generally a rod-shaped heater, the heating element 22 is inserted into the quartz tube 21, and the non-heating element 25 receives an external power source through terminals provided at both ends and transmits the power to the heating element 22 to generate heat. Both ends of the main heater 20 may be coupled to the connectors 26, and the heater 20 may be installed and fixed on the wall surface of the body 10 while the power is cut off.
the sub-heater 30 is constructed in the same manner as the main heater 20. However, in consideration of heat release from the heat treatment apparatus 1 to the outside, the auxiliary heater 30 is further disposed so that all regions in the chamber 15 are uniformly heated, and the auxiliary heater 30 is also disposed. The auxiliary heater 30 is disposed in parallel with both side surfaces of the body 10 along a direction perpendicular to the forming direction of the main heater 20.
Referring to fig. 3a, the main heater 20 mainly heats the heating zone Z2 occupied by the substrate 5, and the sub-heater 30 heats the outer side of the substrate 5, that is, the peripheral portion of the chamber 15 which is the heating zones Z1 and Z3 not occupied by the substrate 5. In order to prevent heat loss to the outside, the auxiliary heater 30 and the main heater 20 are further arranged vertically so that the heating temperatures of the heating zones Z1, Z3 are higher than the heating zone Z2.
However, the conventional batch heat treatment apparatus 1 is unnecessarily large in volume. Referring to fig. 3b, at least left and right maintenance spaces M1', M2' of the body 10 are required to secure maintenance paths P1', P2' for maintenance/management of the main heater 20 provided to the body 10. Also, at least the front and rear side spaces M3', M4' of the body 10 are required to secure the maintenance paths P3', P4' for maintenance/management of the auxiliary heater 30 provided to the body 10. Like this, it is necessary to secure maintenance spaces M1', M2', M3', M4' around all the surface outer sides of the body 10, and therefore, the size of the entire apparatus for maintenance/management will be unnecessarily increased, and the productivity per unit area is lowered.
on the other hand, in the conventional batch type heat treatment apparatus 1 in which a large number of heaters 20 and 30 are provided depending on the number of substrates and connectors 26 are respectively coupled to both ends of each of the heaters 20 and 30, the manufacturing time of the apparatus increases. Further, when the heaters 20 and 30 are repaired or replaced, the maintenance and management time increases during the process of detaching the connector 26. In the heat treatment process, when some of the heaters 20 and 30 are out of order, the delay in repair and replacement time may cause a large number of process failures.
SUMMERY OF THE UTILITY MODEL
technical problem
the utility model discloses a solve above-mentioned prior art various problem point and propose. It is an object to provide a heater and a heat treatment system in which the heater is installed in a main body and a space for maintenance/management is greatly reduced to increase space utilization.
Another object of the present invention is to provide a heater and a heat treatment system that can improve the productivity per unit area by increasing the space utilization rate.
another object of the present invention is to provide a heater and a heat treatment system, which can significantly reduce the manufacturing time and maintenance/management time, reduce the number of working processes, and reduce the size of the entire apparatus by installing, repairing, replacing, etc. the heater on one surface of the main body.
means for solving the problems
the above object of the present invention is achieved by a heat treatment system for heat-treating a substrate, comprising: a thermal processing apparatus including a chamber providing a thermal processing space for the substrate; and a heater slidably inserted through an insertion opening formed in one surface of the heat treatment apparatus.
the heat treatment apparatus includes: a body comprising the chamber; and a plurality of insertion tubes arranged to penetrate at least one side of the chamber, the plurality of insertion tubes being arranged in parallel with each other at a predetermined interval.
a maintenance (maintenance) path is formed in an outer direction of one side surface of the heat treatment apparatus.
A second insertion opening is further formed on the other side surface opposite to the one side surface of the heat treatment apparatus.
a maintenance path is formed in an outer direction of one side surface and an outer direction of the other side surface of the heat treatment apparatus.
The heater includes a heater wire including a heat generating portion and a non-heat generating portion, terminals of the heat generating portion and the non-heat generating portion being disposed on the same side surface.
the heater includes: a housing; and a heating pipe disposed inside the housing, the heating portion being disposed on an outer peripheral surface of the heating pipe, the non-heating portion being connected to the heating portion and disposed in an inner space of the heating pipe.
The heater includes a plurality of heater wires including a heat generating portion and a non-heat generating portion, terminals of the heat generating portion and the non-heat generating portion are arranged on the same side surface, and positions of the heat generating portion and the non-heat generating portion of each of the heater wires are different from each other.
the heater includes: a housing; and a plurality of heating pipes corresponding to the plurality of heating wires, respectively, the heat generating portions being disposed on outer peripheral surfaces of the corresponding heating pipes, and the non-heat generating portions being disposed in inner spaces of the corresponding heating pipes.
the heater includes: a housing; a plurality of heating pipes respectively corresponding to the plurality of heating wires; and a heat generation heating pipe that disposes the plurality of heating pipes in an internal space, the heat generation portion being disposed on an inner peripheral surface of the heat generation heating pipe.
A through-hole is formed on an outer circumferential surface of the heat-generating heating pipe.
One end of the housing is formed to be closed or opened, and the other end of the housing is formed to be opened.
The heating portion and the non-heating portion are made of different kinds of metal materials.
The plurality of heating tubes are configured to be coaxial or occupy separate spaces within the housing.
The heating portions of some of the plurality of heater wires are located in a central region of the heater, and the heating portions of the remaining heater wires are located in side regions of the heater.
The heating temperature of the central region is lower than the heating temperature of the side regions.
The above object of the present invention is achieved by a heater applicable to a heat treatment apparatus for heat-treating a substrate, the heater including a heater wire including a heating portion and a non-heating portion, and terminals of the heating portion and the non-heating portion being disposed on the same side surface.
The heater includes: a housing; and a heating pipe disposed inside the housing, the heating portion being disposed on an outer peripheral surface of the heating pipe, the non-heating portion being connected to the heating portion and disposed in an inner space of the heating pipe.
The heater includes a plurality of heater wires including a heating portion and a non-heating portion, terminals of the heating portion and the non-heating portion are disposed on the same side surface, and positions of the heating portion and the non-heating portion of the heater wires are different from each other.
The heater includes: a housing; and a plurality of heating pipes corresponding to the plurality of heating wires, respectively, the heat generating portions being disposed on outer peripheral surfaces of the corresponding heating pipes, and the non-heat generating portions being disposed in inner spaces of the corresponding heating pipes.
the heater includes: a housing; a plurality of heating pipes respectively corresponding to the plurality of heating wires; and a heat generation heating pipe that disposes the plurality of heating pipes in an internal space, the heat generation portion being disposed on an outer peripheral surface of the heat generation heating pipe.
the outer peripheral surface of the heating pipe is formed with a through hole.
One end of the housing is formed to be closed or opened, and the other end of the housing is formed to be opened.
The heating portion and the non-heating portion are made of different kinds of metal materials.
the plurality of heating tubes are configured to be coaxial or occupy separate spaces within the housing.
effect of the utility model
According to the present invention configured as described above, the heater is provided in the body and the space for maintenance/management is reduced to a large extent, so that the space utilization rate is increased.
In addition, according to the present invention, the productivity per unit area is improved by increasing the space utilization rate.
Additionally, according to the utility model discloses, on the surface of body, set up, repair, change etc. the heater, reduce manufacturing time, maintenance/management time by a wide margin, save the operating hour, bin out the size of whole equipment.
drawings
Fig. 1 is a perspective view showing a conventional batch type heat treatment apparatus.
3 fig. 3 2 3a 3 and 3 2 3b 3 are 3 enlarged 3 sectional 3 side 3 views 3 taken 3 along 3 line 3a 3- 3a 3' 3 of 3 fig. 31 3, 3 and 3 fig. 3 2 3a 3 is 3a 3 shape 3 of 3a 3 heat 3 treatment 3 apparatus 3 in 3 which 3a 3 heater 3 is 3 provided 3. 3 Fig. 2b is a diagram showing a rod-shaped heater.
Fig. 3a and 3b show a conventional heat treatment system, fig. 3a shows the arrangement of heaters in a heat treatment apparatus, and fig. 3b shows a space necessary for manufacturing, maintaining, and repairing the heat treatment system.
Fig. 4 is a perspective view showing a heat treatment apparatus according to an embodiment of the present invention.
Fig. 5a to 5c show a heat treatment system according to an embodiment of the present invention, fig. 5a shows an arrangement shape of a heater in a heat treatment apparatus, and fig. 5b and 5c show a necessary space for manufacturing, maintaining, and repairing the heat treatment system.
Fig. 6 is a diagram of a heater according to an embodiment of the present invention.
Fig. 7, 8a, 8b, 8c, 9 are diagrams illustrating modified embodiments of the heater of fig. 6.
Fig. 10a to 10c are enlarged side sectional views taken along line B-B' in fig. 4, and are views showing a heat treatment apparatus to which the heater of fig. 6 is applied.
fig. 11 is a diagram showing a heater according to another embodiment of the present invention.
Fig. 12a to 12b are a horizontal cross section (a) and a vertical cross section (b) in the longitudinal direction of the heater, and show one shape for embodying the heater of fig. 11.
Fig. 13a to 13b are a horizontal cross section (a) and a vertical cross section (b) in the longitudinal direction of the heater, and show a second shape for embodying the heater of fig. 11.
Fig. 14a to 14b are a horizontal cross section (a) and a vertical cross section (b) in the longitudinal direction of the heater, and show a third shape for embodying the heater of fig. 11.
Fig. 15a to 15b are a horizontal cross section (a) and a vertical cross section (b) in the longitudinal direction of the heater, and show a fourth shape for embodying the heater of fig. 11.
Fig. 16a to 16c are enlarged side sectional views taken along line B-B' in fig. 4, and are diagrams showing a heat treatment apparatus to which the heater of fig. 15a and 15B is applied.
reference numerals
100: heat treatment apparatus
105: chamber
110: body
120: insertion tube
121: insertion opening
130: door with a door panel
200. 200a to 200 f: heating device
205: closing cap (connector)
210: outer casing
220. 230, 240: heating wire
221. 231, 241: heating part
225. 235, 245: non-heating part
226. 227, 236, 237, 246, 247: (input/output) terminal
250: heating pipe
260. 270, 280: heating tube
265: auxiliary heating pipe
M1, M2: maintenance space of heat treatment system
p1, P2: maintenance (maintenance) path for thermal processing system
Z1-Z3: heating zone
Detailed Description
The following detailed description of the invention refers to the accompanying drawings, which illustrate specific embodiments by way of example, in which the invention can be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It is to be understood that the various embodiments of the invention, although different from one another, are not necessarily mutually exclusive. For example, with respect to one embodiment, certain features, structures and characteristics described herein may be implemented with respect to another embodiment without departing from the spirit and scope of the invention. In addition, it is to be understood that the location or arrangement of individual components within each disclosed embodiment may be modified without departing from the spirit and scope of the invention. The following detailed description is not to be taken in a limiting sense, and the scope of the present invention is defined only by the appended claims and the full scope of equivalents to which such claims are entitled. In the drawings, like reference numerals refer to the same or similar functions in various aspects, and the length, area, thickness, etc. and the shape thereof may be exaggerated for convenience.
Hereinafter, a heater and a heating system according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings.
Fig. 4 is a perspective view showing the heat treatment apparatus 100 according to the embodiment of the present invention.
Referring to fig. 4, the heat treatment apparatus 100 of the present invention includes: a body 110 comprising a chamber 105 volume; an insertion tube 120; a door 130 for opening and closing the entrance of the body 110; and a heater 200.
The heat treatment apparatus 100 includes a body 110 formed in a substantially rectangular parallelepiped shape to form an external appearance, and a chamber 105 may be formed inside the body 110, the chamber 105 being a space for processing the substrate 50. The body 110 may be formed in various shapes according to the shape of the substrate 5, in addition to the rectangular parallelepiped shape, and the chamber 105 may be formed as a closed space.
One or more substrates may be disposed within the chamber 105. The plurality of substrates are arranged at a predetermined pitch, supported by a substrate holder (not shown), or mounted on a boat (not shown), and may be arranged inside the chamber 105.
The insertion tube 120 is formed to penetrate the left and right sides of the cavity 105 of the body 110, and at least one end of the insertion tube 120 penetrates the wall of the body 110 to form an insertion port 121. That is, the insertion port 121 may be formed on one side (left or right side) of the body 110, or may be formed as the first and second insertion ports 121 on both sides (left and right sides). The insertion tube 120 may be in the shape of a tube, a pillar, etc., having a hollow inside.
The insertion tube 120 is slidably inserted with a heater 200 described later. Heater 200 is inserted into insertion tube 120 through insertion port 121, and can supply heat to the inside of chamber 105. The insertion tube 120 preferably has an inner diameter equal to or greater than an outer diameter of the heater 200 to allow the heater 200 to slide, and is preferably formed of the same material as the body 110 or the outer case of the heater 200, such as quartz (quartz).
The plurality of heaters 200 may be arranged at a predetermined pitch in a direction perpendicular to a direction in which the substrate 5 is loaded along the entrance and exit of the front surface of the main body 110. The insertion tube 120 may be arranged in the heat treatment apparatus 100 in the same shape as the arrangement shape of the heater 200.
Fig. 5a to 5c show a heat treatment system according to an embodiment of the present invention, fig. 5a shows the arrangement shape of the heater 200 in the heat treatment apparatus 100, and fig. 5b and 5c show the necessary space for manufacturing, maintaining, and repairing the heat treatment system.
Referring to fig. 5a, a plurality of heaters 200 may be inserted into the body 110 and heat the chamber 105 space. At this time, the inside of the chamber 105 may be divided into a heating region Z2 occupied by the substrate 5 and heating regions Z1, Z3 not occupied by the substrate 5.
referring to fig. 5b, the heat treatment system may further include a peripheral space for maintaining/managing the heat treatment apparatus 100 in addition to the heat treatment apparatus 100 and the heater 200. Unlike the conventional intermittent heat treatment apparatus 1 shown in fig. 1 to 3b, the heat treatment apparatus 100 of the present invention is not configured such that the heater 200 is fixedly installed in the body 110, but is configured such that it is slidably inserted into the insertion tube 120 through the insertion port 121 or is pulled out from the insertion tube 120. Therefore, only the maintenance space M1 on the body 110 side is sufficient to secure the maintenance (maintenance) path P1 for installing the heater 200 in the body 110 and maintaining/managing.
Specifically, the configuration of the heater 200 may be completed only by inserting the heater 200 in a sliding manner through the insertion port 121 formed on one side surface (left side surface or right side surface) of the body 110. The user can perform maintenance/management such as repair, replacement, etc. of the heater 200 by simply approaching the maintenance path P1 of the maintenance space M1 on one side of the body 110 and slidingly drawing out the heater 200.
In order to further increase the operation speed, the heater 200 may be disposed through the insertion opening 121 formed on both side surfaces (left and right side surfaces) of the main body 110, and the heater 200 may be maintained and managed by sliding the heater 200 while approaching the maintenance paths P1 and P2 of the maintenance spaces M1 and M2 on both sides of the main body 110.
as described above, the heat treatment system of the present invention can significantly reduce the space for maintenance and management to any one of the left and right maintenance spaces M1 or both of the left and right maintenance spaces M1 and M2, as compared with the conventional heat treatment system (see fig. 3b) which inevitably requires the front, rear, left and right maintenance spaces M1', M2', M3', and M4' of the main body 10. Therefore, the space utilization rate can be significantly increased, and the productivity per unit area can be improved by increasing the space utilization rate. Further, the heater 200 can be manufactured by being inserted into the insertion port 121 of the main body 110 in a sliding manner, and maintenance and management can be easily performed by inserting and extracting the heater 20, thereby reducing the number of working processes.
hereinafter, an embodiment of the heater 200 insertable into the insertion tube 120 will be described.
Fig. 6 is a diagram of a heater 200(200a) according to an embodiment of the present invention.
Referring to fig. 6, the heater 200(200a) may include a housing 210, a heater wire 220.
The case 210 forms an external appearance of the heater 200, covers internal elements, and can radiate heat generated from the inside to the outside. The housing 210 may use quartz or the like and be formed to extend in one direction. For example, it may be formed in a rod shape as a whole.
One end (left end of fig. 6) of the case 210 may be formed to be closed to separate the internal environment of the case 210 from the outside. The other end (right end of fig. 6) may be formed to be opened, and a coupling unit such as a coupling groove may be further formed at an inner/outer circumferential surface of the case 210 to couple the closing cap 205, so that the inside of the heater 200a may be closed from the external environment. The cap 205 may function as a connector for fixing the heater 200 inserted into the tube 200 (see fig. 10a to 10c) while the power is cut off. The shape of the one end of the housing 210 is not limited as long as it is easily inserted into the insertion tube 120 (see fig. 10a to 10c), such as a hemispherical shape or a dome (dome) shape. The other end formed in an open manner can provide a passage through which the terminals 226, 227 of the heater wire 220 are connected to the outside.
The heating wire 220 may include a heat generating portion 221 and a non-heat generating portion 225.
The heat generating portion 221 may have a coiled (winding) wire shape in order to secure cushioning properties due to high heat generation and thermal expansion. The heat generating member 221 may be made of a material having high temperature durability, such as dam alloy (Kanthal), super dam alloy (super Kanthal), or nichrome (nichrome), but is not limited thereto, and a known heat generating material may be used.
The non-heat-generating portion 225 may have a wire shape 225a or a straight shape 225b, at least a portion of which is wound, in order to ensure cushioning based on thermal expansion. However, when the entire non-heat-generating portion 225 is formed in a wound shape, there is a possibility that the current flow decreases due to heat accumulation and condensation, and therefore, it is preferable that only at least a part of the non-heat-generating portion is formed in a wound shape. It is to be understood that the non-heat generating portion 225 does not generate heat at all, but the amount of heat generation, the heat generating surface area, and the like are significantly smaller than the heat generating portion 221, with almost no influence on the heat treatment.
The heat-generating portion 221 and the non-heat-generating portion 225 are formed of different metal materials from each other. The heat generating portion 221 should have high heat generation, and the non-heat generating portion 225 should have low resistance and low heat generation so that current flows smoothly. In addition, when the thermal expansion coefficient is high, the heater 200 (or the heating wire 220) may be damaged by expansion of the heating portion 221/the non-heating portion 225 during heat generation. In view of this, the non-heat-generating portion 225 may be formed of various materials such as nickel (Ni), tungsten (W), molybdenum (Mo), and the like, which have low electric resistance, heat-generating property, and thermal expansion coefficient.
On the other hand, the heat-generating portion 221 and the non-heat-generating portion 225 are different in terms of the difference in heat generation amount, and may be formed of the same material, but are not necessarily different metal materials. In this case, the winding/linear shape, the thickness of the steel wire, the resistance, and the like are adjusted so that a significant difference occurs in the amount of heat generation, and the heat-generating portion 221 and the non-heat-generating portion 225 can be distinguished. In addition, the heat-generating portion 221 and the non-heat-generating portion 225 can be continuously connected to the heating wire 220.
the heating tube 260 may be disposed inside the housing 210. Preferably, the housing 210 and the heating tube 260 are formed coaxially so as to uniformly dissipate heat. The heating duct 260 may serve to support the heat generating part 221 and separate a space occupied by the heat generating part 221 and the non-heat generating part 225 within the heater 200 a. The heating tube 260 may be made of quartz or the like as in the case 210, and may be formed in a rod shape as a whole. One end (left end in fig. 6) and the other end (right end in fig. 6) of the heating duct 260 may be formed to be open, and the other end may further form a coupling unit such as a coupling groove at an inner/outer circumferential surface of the heating duct 260 so as to couple the closing cap 205.
the heat generating part 221 may be disposed on an outer circumferential surface of the heating duct 260, and the non-heat generating part 225 may be disposed in an inner space of the heating duct 260.
Since the conventional heater 20 (see fig. 2a and 2b) has terminals on both sides, only the heating element 22 exists inside the quartz tube 21, and the non-heating element 25 is interposed between the heating element 22 and the terminals on both sides of the heater 20. That is, for example, the left terminal-non-heating element 25-heating element 22-non-heating element 25-right terminal may be arranged in one direction.
Unlike this, the heater 200 of the present application has the terminals 226, 227 only on the same side surface, and thus is not arranged in one direction, and it is necessary to arrange the terminals 226-the heat generating portion 221-the non-heat generating portion 226-the terminals 267 in this order. Therefore, the heat generating portion 221 may be disposed on the outer circumferential surface of the heat pipe 260 in the direction from the terminal 226 to one end (left end) of the heat pipe 260, and the left end of the heat generating body 221 and the left end of the non-heat generating portion are integrally connected. The non-heat-generating portion 225 may be disposed in the space inside the heating tube 260 in the direction from the left end to the tip 227. The heating tube 260 may separate the spaces occupied by the heat generating part 221 and the non-heat generating part 225, respectively, to prevent the heat generating part 221 and the non-heat generating part 225 from being short-circuited.
In other words, the heat generating portion 221 and the non-heat generating portion 225 may be connected to one end of the housing 210, and the terminals 226 and 227 of the heat generating portion 221 and the non-heat generating portion 225 may be disposed at the other end of the housing 210. Therefore, it is possible to supply current from one side of the heater 200 and perform maintenance management of the heater 200 on one side.
Fig. 7 to 9 are views showing modified examples of the heater 200(200a) of fig. 6. Only the differences from the heater 200(200a) of fig. 6 will be described below, and the description of the same configuration will be omitted.
Referring to fig. 7, in the heater 200(200a-2), the non-heat generating part 225 may have a linear shape 225b and be disposed in the inner space of the heating tube 260. The non-heat-generating portion 225 may be formed of a wire, a plate material, or the like that satisfies the straight shape 225b as a whole. When the non-heat generating portion 225 has a winding shape, the non-heat generating portion 225 may be formed in a straight shape 225b as a whole to prevent a decrease in the flow of current due to heat storage and condensation.
On the other hand, as the non-heat generating portion 25 has the linear shape 225b, there is a possibility that the cushioning property due to thermal expansion is reduced. In other words, when the non-heat generating portion 225 is stretched/contracted in the horizontal direction by heat, the connection portion with the heat generating portion 221 may be damaged or even the heating tube 260 may be damaged by excessive stretching.
referring to fig. 8a, to prevent this, the heater 200(200a-3) may further form a buffer portion B at the closed end (left end) of the case 210. The buffer portion B is a space for buffering the heat-generating portion 221 and the non-heat-generating portion 225 from being stretched/contracted by heat. Referring to fig. 8B and 8c, even if the heat-generating portion 221 and the non-heat-generating portion are stretched by heat, the heat-generating portion 221 'and the non-heat-generating portion 225' do not contact the inner wall of the case 210 due to the space of the buffer portion B, and the buffer portion B, which is a spare space, can be stretched/contracted. Therefore, the heater 200 can be prevented from being damaged by thermal expansion.
Referring to fig. 9, the heater 200(200a-4) may be further provided with an auxiliary heating pipe 265 inside the heating pipe 260. The auxiliary heating pipe 265 may be made of quartz or the like as in the case of the outer shell 210, and may be formed in a rod shape as a whole. The auxiliary heating pipe 265 may be inserted and fixed to an insertion hole 266 formed at the closing cap 205. A Thermocouple (TC) may be inserted into the auxiliary heating pipe 265 from the outside through the insertion hole 266. Therefore, the temperature can be measured by moving the Thermocouple (TC) into and out of the heater 200 without damaging the Thermocouple (TC).
fig. 10a to 10c are enlarged side sectional views taken along line B-B' in fig. 4, and show a heat treatment apparatus to which the heater 200(200a) of fig. 6 is applied.
Referring to fig. 10a, one end 125 and the other end 126 of the insertion tube 120 are respectively formed as an insertion port 121 in an open state. The insertion tube 120 is hollow inside, and the heating tube 200a can be inserted into the hollow space inside the insertion tube 120.
referring to fig. 1, there are 50 heaters 20 provided only at the side surface of the body 10. In this case, the conventional heat treatment system has 50 heaters penetrating the body 10, and the connectors 26 are coupled to both ends of each heater 20 and the heater 20 is installed, but each heater 200 of the present invention can be slidably inserted into the insertion tube 120, and the closing cap 205 is coupled to only one side and the heater 200 is installed, and thus, the assembly time of the heater 200 is almost reduced by half. This is also the same in terms of maintenance management.
Referring to fig. 10b, one end 125' of insertion tube 120 is closed, and insertion opening 121 is formed so that only the other end 126 is open. That is, one end 125' may be a shape enclosed by the wall of the body 110. The heater 200a can only be inserted through the other end 126 of the insertion tube 120 for maintenance management access to the heater 200a, and can only be performed through the other end 126. And, the heater 200a is aligned and disposed in the body 110 by a process of inserting the heater 200a into the one end 125' inside the insertion tube 120 and coupling the closing cap 205.
Referring to fig. 10c, the insertion tube 120 has the same shape as that of fig. 10b, one end 125' is closed, and only the other end 126 is inserted into and opened from the insertion opening 121. In one aspect, a heater 200a 'in which one end and the other end of the case 210' are formed in an open manner may be used. Even if one end of the housing 210' is opened, the one end 125' of the insertion tube 120 is closed, and thus, the heater 200a ' can be covered with the inside thereof. As shown in fig. 10c, when the one end 125 'of the insertion tube 120 has a closed shape, even though the heater 200a' is inserted into the one end of the case 210 'to be formed in an open manner, heat can be preserved similarly to the one end of the case 210' being closed. In particular, by forming at least one end of the housing 210' to be open, the manufacturing process of the housing 210' and the arrangement of the heating pipe 260, the heat generating portion 221, the non-heat generating portion 225, and the like inside the housing 210' can be simplified, which can contribute to saving of manufacturing time and cost.
fig. 11 is a diagram showing a heater 200(200b) according to another embodiment of the present invention. The same components as those of the heater 200(200a) described in fig. 6 will not be described, and only the differences will be described.
Referring to fig. 11, a heater 200(200b) according to an embodiment of the present invention may include a housing 210 and a plurality of heater wires 220, 230, and 240. The plurality of heating wires 220, 230, 240 may include heat generating portions 221, 231, 241 and non-heat generating portions 225, 235, 245, respectively.
The heater 200(200b) is characterized in that the heating wires 220, 230, 240 respectively generate heat in other regions. In this sense, the number of heating lines 220, 230, 240 can correspond to the number of heating zones Z1, Z2, Z3 of which the heater 200b can constitute different temperatures. The heater wires 220, 230, 240 may generate heat at different temperatures. Thus, the heater 200b may be used as a multi-zone (multi-zone) heater.
The positions of the heat generating portions 221, 231, 241 and the non-heat generating portions 225, 235, 245 in the respective heater wires 220, 230, 240 may be different in order to individually control the temperature of each of the heating zones Z1, Z2, Z3. In addition, the heat generating portions 221, 231, 241 and the non-heat generating portions 225, 235, 245 may be configured differently in shape, size, thickness, resistance, material, heat generation amount, and the like, within a target range in which the temperature of each region can be individually controlled.
Referring again to FIG. 5a, the heating zones Z1, Z3 and heating zone Z2 may be heated at different temperatures. That is, since the heating zones Z1 and Z3 are corner portions of the chamber 105 and heat loss to the outside may occur, more heat needs to be supplied in order to adjust the temperature uniformly with the heating zone Z2. Therefore, in the heater 200b, the side regions corresponding to the heating regions Z1, Z3 are heated at a higher temperature than the center region corresponding to the heating region Z2.
The heat generating portions 221 and 241 of the heater wires 220 and 240 that supply heat to the heating zones Z1 and Z3 may be disposed at positions corresponding to the heating zones Z1 and Z3. The heat generating portion 231 of the heating wire 230 that supplies heat to the heating zone Z2 may be disposed at a position corresponding to the heating zone Z2. As such, the positions of the heat-generating portions 221, 231, 241 and the non-heat-generating portions 225, 235, 245 may be differently formed so that the respective heating wires 220, 230, 240 correspond to the heating areas Z1, Z2, Z3. Fig. 11 illustrates three heating zones Z1, Z2, and Z3 as an example, but the temperature can be individually controlled for different numbers of zones by one heater 200 according to the configuration of the heating lines 220, 230, and 240. As described above, the heat treatment system of the present invention can control the temperatures of a plurality of zones by using one heater 200b, and thus, it is not necessary to dispose the auxiliary heater 30 perpendicular to the main heater 20 as in the related art (see fig. 1, 3a, and 3 b). Therefore, by inserting only one type of heater 200b from one side of the body 110, the entire area of the substrate 5 can be uniformly heat-treated by applying different temperatures to the respective heating zones Z1, Z2, and Z3 in the chamber 105.
Since the conventional heater 20 (see fig. 2a and 2b) has terminals on both sides, only the heating element 22 exists inside the quartz tube 21, and the non-heating element 25 is interposed between the heating element 22 and the terminals on both sides of the heater 20. That is, for example, the left terminal-non-heating element 25-heating element 22-non-heating element 25-right terminal may be arranged in one direction.
Unlike this, the heater 200b of the present application is configured with the terminals 226, 227, 236, 237, 246, 247 only on the same side surface. The heating wires 220, 230, 240 may be arranged in the order of the terminals 226, 236, 246-non-heat generating portions 225, 235, 245-heat generating portions 221, 231, 241-non-heat generating portions 225, 235, 245-terminals 227, 237, 247. Therefore, it is possible to supply current from one side of the heater 200b, and perform maintenance management of the heater 200 on one side.
Preferably, the respective heating wires 220, 230, 240 do not contact each other, so as not to be short-circuited. In the embodiments of the heater 200b described later in fig. 12a to 15b, the heater wires 220, 230, and 240 do not contact each other and occupy different spaces.
Fig. 12a to 15b are a horizontal cross section (a) and a vertical cross section (b) in the longitudinal direction of the heater, and these heaters show various shapes for embodying the heater 200b of fig. 11.
Referring to fig. 12a, 12b, the heater 200(200c) may include a plurality of heating tubes 260, 270, 280 corresponding to the plurality of heating wires 220, 230, 240. The heating pipes 260, 270, 280 serve to support the heating wires 220, 230, 240 and to separate spaces to prevent the heating wires 220, 230, 240 from contacting each other. Further, the space having the heat generating portions 221, 231, 241 and the non-heat generating portions 225, 235, 245 may be separated. Although the expression of the heating tube is used, it may be a compartment shape (refer to fig. 13a, 13b) instead of a tube shape as long as it is used to support the respective heating wires 220, 230, 240 and separate the spaces.
the heating pipes 260, 270, and 280 may be made of quartz or the like, as in the case 210, and may be formed in a rod shape as a whole. One end (left end in fig. 12 a) and the other end (right end in fig. 12 a) of the heating pipes 260, 270, 280 may be formed to be open. The other end may be further formed with a coupling unit such as a coupling groove to couple the closing cap 205.
the respective heat generating parts 221, 231, 241 may be disposed on the outer circumferential surfaces of the heating pipes 260, 270, 280. Also, the respective non-heat generating portions 225, 235, 245 may be disposed on the inner space or the outer circumferential surface of the heating pipes 260, 270, 280.
Taking the heating wire 220 as an example, the non-heat-generating portion 225 and the heat-generating portion 221 may be arranged on the outer circumferential surface of the heating tube 260 from the terminal 226 in the direction of one end (left end) of the housing 210, and the left end of the heat-generating portion 221 and the left end of the non-heat-generating portion 225 may be integrally connected. The non-heat generating portion 225 may be disposed in the space inside the heating tube 260 from the left end in the direction of the terminal 227. That is, the heating wire 220 is constituted by the terminal 226, the non-heat generating portion 225 on the outer peripheral surface of the heating tube 260, the heat generating portion 221 on the outer peripheral surface of the heating tube 260, the non-heat generating portion 225 in the space inside the heating tube 260, and the terminal 227. The heating tube 260 may separate the spaces occupied by the heat-generating portion 221 on the outer circumferential surface and the non-heat-generating portion 225 of the inner space, respectively, to prevent the heat-generating portion 221 and the non-heat-generating portion 225 from being short-circuited.
In addition, a through-hole may be formed in the heating tube 260 so that all the non-heat-generating portions 225 are disposed only in the inner space. That is, the heating wire 220 may also be constituted by the terminal 226, the non-heat generating portion 225 of the space inside the heat pipe 260, the heat generating portion 221 on the outer peripheral surface of the heat pipe 260 (connected to the outer peripheral surface through the through-hole), the non-heat generating portion 225 of the space inside the heat pipe 260, and the terminal 227.
The heat pipes 260, 270, 280 may be formed coaxially so as to occupy at least the same space within the housing 210. That is, the heating pipe 260 may be formed to have the largest diameter, and the heating pipe 280 may have the smallest diameter. The heating pipes 270 and 280 may be disposed in the space inside the heating pipe 260, and the heating pipe 280 may be disposed in the space inside the heating pipe 270.
The heat generating portion 221 of the heating wire 220 may have a wire shape wound on the outer circumferential surface of the heating duct 260 at a position corresponding to the heating zone Z1. Therefore, the heat can be generated by being heated in the heating zone Z1. Also, the heat generating portion 231 of the heating wire 230 is wound on the outer circumferential surface of the heating pipe 270 at a position corresponding to the heating zone Z2, thereby generating heat at the heating zone Z2. A heat generating portion 241 of the heating wire 240 may be wound on the outer circumferential surface of the heating pipe 280 at a position corresponding to the heating zone Z3, thereby generating heat at the heating zone Z3.
On the one hand, as a voltage is applied between the terminals 226, 236, 246 and the terminals 227, 237, 247, heat can be generated in the heater wires 220, 230, 240, the terminals 227, 237, 247 can be used as output terminals, and 3 terminals can be connected by one wire and grounded (grounding).
referring to fig. 13a, 13b, the heater 200(200d) may include a plurality of heating tubes 260, 270, 280 corresponding to the plurality of heating wires 220, 230, 240. The heater 200d has a quadrangular plate, quadrangular prism shape extending in the longitudinal direction, instead of a rod shape. The heating pipes 260, 270, 280 may be formed in a compartment shape for separating the inner space of the case 210. The heating pipes 260, 270, 280 serve to support the heating wires 220, 230, 240 and to separate spaces to prevent contact between the heating wires 220, 230, 240. Further, the space having the heat generating portions 221, 231, 241 and the non-heat generating portions 225, 235, 245 may be separated.
The heating duct 260, 270, 280 of the heater 200d may be formed in a pair of compartment shapes such that the spaces within the quadrangular-plate, quadrangular-prism-shaped housing 210 are separated in a chamber shape along the horizontal direction. As shown in fig. 13b, when the space is divided into six spaces along the side cross-sectional direction, the heater wire 220 may be disposed in the first and sixth spaces, the heater wire 230 may be disposed in the second and fifth spaces, and the heater wire 240 may be disposed in the third and fourth spaces.
The heat generating portion 221 of the heating wire 220 may have a wire shape wound at a position corresponding to the heating zone Z1. Therefore, the heat can be generated by being heated in the heating zone Z1. Also, the heat generating portion 231 of the heating wire 230 may be wound at a position corresponding to the heating zone Z2, thereby generating heat at the heating zone Z2. The heat generating portion 241 of the heating wire 240 may be wound at a position corresponding to the heating zone Z3 to generate heat at the heating zone Z3.
The heater 200d forms the heating pipes 260, 270, 280 in the compartment shape within the case 210 without additionally inserting the heating pipes 260, 270, 280 into the case 210, thereby reducing the manufacturing cost and making the spatial separation between the heating wires 220, 230, 240 clear.
referring to fig. 14a, 14b, the heater 200(200e) may include a plurality of heating tubes 260, 270, 280 corresponding to the plurality of heating wires 220, 230, 240. The heating pipes 260, 270, 280 serve to support the heating wires 220, 230, 240 and to separate spaces to prevent the heating wires 220, 230, 240 from contacting each other. Further, the space having the heat generating portions 221, 231, 241 and the non-heat generating portions 225, 235, 245 may be separated.
The heater tubes 260, 270, 280 of the heater 200e may be configured to occupy separate spaces within the housing 210. That is, the inside spaces of the heating pipes 260, 270, 280 do not overlap each other. The diameters of the heating tubes 260, 270, 280 may be the same or different.
The heat generating portion 221 of the heating wire 220 may have a wire shape wound around the outer circumferential surface of the heating tube 260 at a position corresponding to the heating zone Z1. Therefore, the heat can be generated by being heated in the heating zone Z1. Also, the heat generating portion 231 of the heating wire 230 may be wound on the outer circumferential surface of the heating pipe 270 at a position corresponding to the heating zone Z2, generating heat at the heating zone Z2. The heat generating portion 241 of the heating wire 240 may be wound on the outer circumferential surface of the heating pipe 280 at a position corresponding to the heating zone Z3, generating heat at the heating zone Z3.
The heater 200e is simple to manufacture because the heating pipes 260, 270, 280 occupy separate spaces within the housing 210, and the spatial separation between the heating wires 220, 230, 240 is made clear.
Referring to fig. 15a and 15b, the heater 200f may be provided with a heat generating heating pipe 250 inside the housing 210. Also, a plurality of heating pipes 260, 270, 280 corresponding to the plurality of heating wires 220, 230, 240 may be disposed inside the heat generating heating pipe 250.
The heat generation heating pipe 250 may be made of quartz or the like as in the case 210 and the heating pipes 260, 270, and 280, and may be formed in a rod shape as a whole. One end (left end in fig. 15 a) and the other end (right end in fig. 15 a) of the heat-generating heating pipe 250 may be formed in a stomach-open type. The other end may be further formed with a coupling unit such as a coupling groove to couple the closing cap 205.
The respective heat generation parts 221, 231, 241 may be disposed on the outer circumferential surface of the heat generation heating pipe 250. The respective heat generation portions 221, 231, 241 may be disposed on the respective heating zones Z1, Z2, Z3 of the outer peripheral surface of the heat generation heating pipe 250. The non-heat generating portions 225, 235, 245 may be disposed in the spaces inside the heat pipes 260, 270, 280 or the spaces inside the heat generating heat pipe 250.
The heat-generating heating pipe 250 may have predetermined through holes 251, 253, 254, 255, 256 formed therein. The respective heating wires 220, 230, 240 may be connected from the outer circumferential surface of the heat generation heating pipe 250 to the inside space and from the inside space to the outer circumferential surface through the through-holes 251, 253, 254, 255, 256.
Taking the heating wire 220 as an example, the non-heat generating portion 225 is disposed on the inner space of the heating tube 261 from the terminal 226 along the direction of one end (left end) of the housing 210, and is connected to the outer circumferential surface of the heat generating heating tube 250 through the through-hole 251 from the left end of the heating tube 260. The heat generating portion 221 is disposed in a winding manner in a heating zone Z1 on the outer peripheral surface of the heat generating heating pipe 250, and the left end of the heat generating portion 221 and the left end of the non-heat generating portion 225 are integrally connected. The non-heat generating portion 225 may be disposed in the space inside the heat generating heating tube 250 or the heating tube 260 from the left end in the direction of the terminal 227. That is, the heating wire 220 may be composed of the terminal 226, the non-heat generating portion 225 in the space inside the heating tube 260, the heat generating portion 221 on the outer circumferential surface of the heat generating heating tube 250 after passing through the through-hole 251, the heat generating heating tube 250, and the non-heat generating portion 225 in the space inside the heating tube 260, and the terminal 227.
Taking the heating wire 230 as an example, the non-heat generating portion 235 is disposed on the inner space of the heating tube 270 from the terminal 223 along the one end (left end) direction of the housing 210, and may be connected to the outer circumferential surface of the heat generating heating tube 250 from the left end of the heating tube 270 through the through-hole 253. The heat generating member 231 may be disposed in a winding manner on the heating zone Z2 on the outer peripheral surface of the heat generating heating pipe 250, and the left end of the heat generating member 231 and the left end of the non-heat generating member 235 may be integrally connected. The non-heat generating part 235 may be connected to the space inside the heat generating pipe 250 through the through-hole 254 from the left end of the heat generating part 231, and may be disposed in the space inside the heat generating pipe 250 or the heat pipe 270 along the direction of the terminal 237 from the left end. That is, the heating wire 230 may be composed of the terminal 236, the non-heat generating portion 235 in the space inside the heating pipe 270, the heat generating portion 231 on the outer peripheral surface of the post-heat generating heating pipe 250 passing through the through-hole 253, the post-heat generating heating pipe 250 passing through the through-hole 254, and the non-heat generating portion 235 in the space inside the heating pipe 270, and the terminal 237.
The non-heat generating portions 225, 235, 245 connected to the terminals 227, 237, 247 may be constituted by different lines, respectively, but the terminals 227, 237, 247 may be used as output terminals, and three terminals may be connected by one line and grounded (grounding). Fig. 11 is a view showing a shape of grounding by one line.
The heating pipes 260, 270, and 280 may separate the spaces occupied by the heating wires 220, 230, and 240, respectively, so as not to short-circuit the heating wires 220, 230, and 240, and an insulating film (not shown) for insulation may be further formed on the boundaries of the heating areas of the heat-generating heating pipe 250 (the boundaries of Z1 and Z2, and the boundaries of Z2 and Z3).
The heating pipes 260, 270, and 280 may occupy independent spaces in the heating pipe 250, but may be arranged coaxially (coaxial) within a range that avoids short-circuiting of the heating wires 220, 230, and 240.
The heat-generating portion 221 of the heating wire 220 may have a shape of a wire rod wound on the outer circumferential surface of the heat-generating heating pipe 250 at a position corresponding to the heating zone Z1. Therefore, the heat can be generated by being heated in the heating zone Z1. Also, the heat generating portion 231 of the heating wire 230 may be wound on the outer circumferential surface of the heat generating heating pipe 250 at a position corresponding to the heating zone Z2, generating heat at the heating zone Z2. The heat generating portion 241 of the heating wire 240 may be wound on the outer circumferential surface of the heat generating heating pipe 250 at a position corresponding to the heating zone Z3, generating heat at the heating zone Z3.
Fig. 16a to 16c are enlarged side sectional views taken along line B-B' in fig. 4, and show a heat treatment apparatus to which the heater 200(200f) of fig. 15a and 15B is applied. The heaters 200b to 200e of fig. 11 to 14b may be applied instead of the heater 200f of fig. 15a and 15 b.
Referring to fig. 16a, one end 125 and the other end 126 of the insertion tube 120 are respectively formed as an insertion port 121 in an open state. The insertion tube 120 may be hollow inside, and the heater 200f is inserted into the hollow space inside the insertion tube 120.
Referring to fig. 16b, one end 125' of the insertion tube 120 has a closed shape, and only the other end 126 has an insertion opening 121 formed therethrough in an open state. That is, one end 125' may be a shape enclosed by the wall of the body 110. The heater 200f can only be inserted through the other end 126 of the insertion tube 120 for maintenance access to the heater 200f, and can only be accessed through the other end 126. And, the heater 200f is aligned and disposed in the body 110 by a process of inserting the heater 200f into the one end 125' inside the insertion tube 120 and combining the closing cap 205.
Referring to fig. 16c, the insertion tube 120 has the same shape as that of fig. 16b, one end 125' is closed, and only the other end 126 is formed with the insertion port 121 in a state of being opened. In one aspect, one end and the other end of the housing 210 'may use a heating tube 200f' formed in an open manner. Even if one end of the housing 210' is open, the one end 125' of the insertion tube 120 is closed, and thus, the heater 200f ' can be covered with the inside thereof.
As described above, the present invention provides the heater 200 to the body 110, and has the maintenance spaces M1 and M2 for maintenance and management that are greatly reduced, thereby increasing space utilization. Further, according to the present invention, the productivity per unit area can be improved by increasing the space utilization rate.
In addition, the present invention can greatly reduce the manufacturing time, maintenance/management time, and reduce the working hours by setting, repairing, replacing, etc. the heater 200 on one surface of the body 110.
As described above, the present invention has been illustrated and described with reference to the preferred embodiments, but the present invention is not limited to the above embodiments, and those skilled in the art can make various changes and modifications without departing from the spirit of the present invention. Such modifications and variations are considered to be within the scope of the present invention and the appended claims.
Claims (28)
1. A thermal processing system for thermally processing a substrate, comprising:
A thermal processing apparatus including a chamber providing a thermal processing space for the substrate; and
A heater slidably inserted through an insertion opening formed in one side surface of the heat treatment apparatus;
Wherein the heater comprises a heating wire, the heating wire comprises a heating part and a non-heating part,
The terminals of the heat generating portion and the non-heat generating portion are disposed on the same side surface.
2. The thermal processing system of claim 1,
The heat treatment apparatus includes:
A body containing the chamber; and
A plurality of insertion tubes configured to penetrate at least one side of the chamber,
The plurality of insertion tubes are arranged in parallel at a predetermined interval.
3. the thermal processing system of claim 1,
A maintenance path is formed in an outer direction of one side surface of the heat treatment apparatus.
4. the thermal processing system of claim 1,
A second insertion opening is further formed on the other side surface opposite to the one side surface of the heat treatment apparatus.
5. The thermal processing system of claim 4,
a maintenance path is formed in an outer direction of one side surface and an outer direction of the other side surface of the heat treatment apparatus.
6. The thermal processing system of claim 1,
The heater includes:
A housing; and
A heating tube disposed inside the housing,
the heat generating portion is disposed on an outer peripheral surface of the heating pipe, and the non-heat generating portion is connected to the heat generating portion and disposed in an inner space of the heating pipe.
7. the thermal processing system of claim 6,
One end of the housing is formed to be closed or opened,
The other end of the housing is formed to be open.
8. The thermal processing system of claim 1,
the heating portion and the non-heating portion are made of different kinds of metal materials.
9. A thermal processing system for thermally processing a substrate, comprising:
a thermal processing apparatus including a chamber providing a thermal processing space for the substrate; and
A heater slidably inserted through an insertion opening formed in one side surface of the heat treatment apparatus;
wherein the heater comprises a plurality of heating wires, the heating wires comprise a heating part and a non-heating part,
the terminals of the heat generating portion and the non-heat generating portion are arranged on the same side surface,
The heating portions and the non-heating portions of the heating wires are different in position.
10. The thermal processing system of claim 9,
the heater includes:
A housing; and
A plurality of heating pipes respectively corresponding to the plurality of heating wires,
The heat generating portions are disposed on the outer peripheral surfaces of the corresponding heating tubes, and the non-heat generating portions are disposed in the inner spaces of the corresponding heating tubes.
11. The thermal processing system of claim 9,
the heater includes:
A housing;
A plurality of heating pipes respectively corresponding to the plurality of heating wires; and
A heat generation heating pipe in which the plurality of heating pipes are arranged in the internal space,
The heat generating portion is disposed on an outer peripheral surface of the heat generating heating pipe.
12. The thermal processing system of claim 11,
a through-hole is formed on an outer circumferential surface of the heat-generating heating pipe.
13. The thermal processing system of claim 10 or 11,
One end of the housing is formed to be closed or opened,
The other end of the housing is formed to be open.
14. The thermal processing system of claim 9,
The heating portion and the non-heating portion are made of different kinds of metal materials.
15. The thermal processing system of claim 10,
The plurality of heating tubes are configured to be coaxial or occupy separate spaces within the housing.
16. the thermal processing system of claim 9,
The heating portions of some of the plurality of heater wires are located in a central region of the heater, and the heating portions of the remaining heater wires are located in side regions of the heater.
17. The thermal processing system of claim 16,
the heating temperature of the central region is lower than the heating temperature of the side regions.
18. A heater applicable to a heat treatment apparatus for heat-treating a substrate,
The heater comprises a heating wire, the heating wire comprises a heating part and a non-heating part,
The terminals of the heat generating portion and the non-heat generating portion are disposed on the same side surface.
19. the heater of claim 18,
the heater includes:
A housing; and
A heating tube disposed inside the housing,
The heat generating portion is disposed on an outer peripheral surface of the heating pipe, and the non-heat generating portion is connected to the heat generating portion and disposed in an inner space of the heating pipe.
20. the heater of claim 19,
One end of the housing is formed to be closed or opened,
The other end of the housing is formed to be open.
21. The heater of claim 18,
The heating portion and the non-heating portion are made of different kinds of metal materials.
22. A heater applicable to a heat treatment apparatus for heat-treating a substrate,
The heater comprises a plurality of heating wires, each heating wire comprises a heating part and a non-heating part,
The terminals of the heat generating portion and the non-heat generating portion are arranged on the same side surface,
The heating portions and the non-heating portions of the heating wires are different in position.
23. The heater of claim 22,
The heater includes:
A housing; and
A plurality of heating pipes respectively corresponding to the plurality of heating wires,
The heat generating portions are disposed on the outer peripheral surfaces of the corresponding heating tubes, and the non-heat generating portions are disposed in the inner spaces of the corresponding heating tubes.
24. the heater of claim 22,
the heater includes:
A housing;
A plurality of heating pipes respectively corresponding to the plurality of heating wires; and
A heat generation heating pipe that disposes the plurality of heating pipes in an internal space, the heat generation portion being disposed on an outer peripheral surface of the heat generation heating pipe.
25. The heater of claim 24,
A through-hole is formed on an outer circumferential surface of the heat-generating heating pipe.
26. the heater of claim 23 or 24,
One end of the housing is formed to be closed or opened,
The other end of the housing is formed to be open.
27. the heater of claim 22,
The heating portion and the non-heating portion are made of different kinds of metal materials.
28. the heater of claim 23,
The plurality of heating tubes are configured to be coaxial or occupy separate spaces within the housing.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020170147600A KR102243269B1 (en) | 2017-11-07 | 2017-11-07 | Heating process system |
| KR10-2017-0147600 | 2017-11-07 |
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| CN209766367U true CN209766367U (en) | 2019-12-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201821819310.6U Active CN209766367U (en) | 2017-11-07 | 2018-11-06 | Heater and heat treatment system |
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| JP4766500B2 (en) * | 2009-08-26 | 2011-09-07 | シャープ株式会社 | Vacuum processing equipment and vacuum processing factory |
| KR101232770B1 (en) * | 2012-07-24 | 2013-02-15 | 남원식 | Apparatus for processing substrate |
| KR20160007282A (en) * | 2014-07-11 | 2016-01-20 | 주식회사 제우스 | Heater for heat treatment of substrate and substrate heat tretment apparatus using it |
| KR101680747B1 (en) * | 2015-10-28 | 2016-11-29 | 주식회사 뉴핫맥스 | Heater having heating part and non-heating part |
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2017
- 2017-11-07 KR KR1020170147600A patent/KR102243269B1/en active IP Right Grant
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2018
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| KR20190051692A (en) | 2019-05-15 |
| KR102243269B1 (en) | 2021-04-22 |
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