CN209715877U - A kind of full-automatic inserted sheet cleaning all-in-one machine - Google Patents
A kind of full-automatic inserted sheet cleaning all-in-one machine Download PDFInfo
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- CN209715877U CN209715877U CN201920270569.8U CN201920270569U CN209715877U CN 209715877 U CN209715877 U CN 209715877U CN 201920270569 U CN201920270569 U CN 201920270569U CN 209715877 U CN209715877 U CN 209715877U
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Abstract
The utility model relates to a kind of full-automatic inserted sheets to clean all-in-one machine, including plug-in sheet machine and cleaning device, the plug-in sheet machine is arranged in the cleaning device front end, and silicon wafer is sent to cleaning device by conveyer belt, the cleaning device includes cleaning case, transmitting device and rinse bath group, the transmitting device includes annular carriage, conveyer belt, driving motor, movable stand, electric expansion sunpender and the cleaning gaily decorated basket, the annular carriage is fixed on the inner wall of the cleaning case upper end, the driving motor setting is in the annular carriage side, and the conveyer belt is installed in the annular carriage, multiple movable stands are uniformly provided on the conveyer belt, the electric expansion sunpender is respectively equipped at the movable stand both ends, the electric expansion sunpender is equipped with hook by bottom and connect with the Cleaning container, it is described to hang The rinse bath group is correspondingly arranged below basket；The utility model can reduce water consumption and its is stable, work efficiency is high.
Description
Technical field
A kind of the utility model silicon wafer processing equipment field, and in particular to full-automatic inserted sheet cleaning all-in-one machine.
Background technique
In the production process of silicon wafer, in order to guarantee the cleannes of silicon wafer, need the silicon wafer that will be sliced by Wafer Cleaning
Machine processing is clean, and traditional silicon wafer cleaner is fed by one, and other end discharging has certain demand to place length, and produce
The waste of certain transportation range is given birth to, streamlined operation is not smooth enough, therefore, it is low to also result in working efficiency.
Utility model content
In view of the problems of the existing technology, the utility model proposes a kind of full-automatic inserted sheets to clean all-in-one machine, can subtract
Lack water consumption and its is stable, work efficiency is high.
The utility model solves the technical solution of the above technical problem: providing a kind of full-automatic inserted sheet cleaning all-in-one machine, packet
Include plug-in sheet machine and cleaning device, the plug-in sheet machine is arranged in the cleaning device front end, and by conveyer belt by silicon wafer send to
In cleaning device, the cleaning device includes cleaning case, transmitting device and rinse bath group, and the transmitting device includes that annular is defeated
Frame, conveyer belt, driving motor, movable stand, electric expansion sunpender and the cleaning gaily decorated basket are sent, the annular carriage is fixed on described clear
On the inner wall of tank-washer body upper end, the driving motor is arranged in the annular carriage side, and in the annular carriage
The conveyer belt is installed, multiple movable stands are uniformly provided on the conveyer belt, is respectively equipped with institute at the movable stand both ends
Electric expansion sunpender is stated, the electric expansion sunpender is equipped with hook by bottom and connect with the Cleaning container, under the hanging basket
Side is correspondingly arranged on the rinse bath group.
The technical solution that the utility model further limits are as follows:
The outlet side of cleaning case above-mentioned is equipped with the drying portion dried to the silicon wafer cleaned.
Rinse bath group above-mentioned includes prewash tank, alkaline bath, potcher and the slow kerve of rinsing, and is successively set on cleaning
In cabinet, while supersonic generator is mounted in prewash tank, alkaline bath and rinsing trench bottom.
It is above-mentioned to be equipped with heating sheet in alkaline bath, potcher and the slow kerve of rinsing.
Alkaline bath above-mentioned includes three slot of one slot of alkali cleaning, two slot of alkali cleaning and alkali cleaning, and is successively set on prewash tank rear end,
The potcher includes one slot of rinsing, four slots of two slots of rinsing, three slots of rinsing and rinsing.
Two slots of rinsing above-mentioned, the groove body height for rinsing three slots, four slots of rinsing and the slow kerve of rinsing are incremented by successively, and float
Wash slow kerve side connection water inlet pipe.
Above-mentioned further includes water tank, and water tank is connect by overflow pipe with two slots of rinsing, and the water tank is by overflowing
Flow tube connects the sink in prewash tank and plug-in sheet machine, and flow control valve is arranged on overflow pipe.
It is above-mentioned to be provided with dioxygen sink between two slots of one slot of rinsing and rinsing.
It is above-mentioned to be provided with PH monitoring alarm in three slot of one slot of alkali cleaning, two slot of alkali cleaning and alkali cleaning.
The utility model has the beneficial effects that the utility model structure is simple, cooperated by electric expansion sunpender and conveyer belt,
Continuous work can be recycled, work efficiency is high for raising, and PH monitoring is provided in three slot of one slot of alkali cleaning, two slot of alkali cleaning and alkali cleaning
Warning device can facilitate worker to replace or add in time cleaning agent；
The utility model is by prewashing, multiple alkali cleaning and repeatedly rinsing, and at the same time in prewash tank, alkaline bath and rinsing
Trench bottom is mounted on supersonic generator, effectively removes the metal impurities of silicon powder and silicon chip surface attachment in this way, greatly mentions
High cleaning quality；It is equipped with heating sheet in alkaline bath, potcher and the slow kerve of rinsing, heat effect is played, so that internal water
In warm water state, such silicon wafer is more readily separated, and effectively improves cleaning quality；It is set between two slots of a slot and rinsing rinsing
It is equipped with dioxygen sink, can be improved the cleanliness of silicon chip surface in this way, monocrystalline is avoided to be also easy to produce hickie in subsequent flocking；
The groove body height that two slots, three slots of rinsing, four slots of rinsing and the slow kerve of rinsing are rinsed in the utility model is incremented by successively,
Overflow is carried out by liquid level difference, the water inside two slots of rinsing, three slots of rinsing, four slots of rinsing and slow lifting slot can be allowed ceaselessly to follow
Ring guarantees that the cleanliness of water reduces silicon powder and medicine stain content in groove body, guarantees that Wafer Cleaning is clean, while rinsing four slots by overflowing
Water is stored into the sink supplied in prewash tank and plug-in sheet machine in water tank by flow tube, improves the clear of silicon wafer while saving water resource
Wash quality.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model.
Specific embodiment
Embodiment 1
The present embodiment provides a kind of full-automatic inserted sheets to clean all-in-one machine, and structure is as shown in Figure 1, include plug-in sheet machine 1 and cleaning
Device, plug-in sheet machine are arranged in cleaning device front end, and cleaning device includes cleaning case 2, transmitting device and rinse bath group, is being cleaned
The outlet side of cabinet is equipped with the drying portion 20 dried to silicon wafer clean, and transmitting device includes annular carriage 3, defeated
Band 25, driving motor 17, movable stand 24, electric expansion sunpender 4 and the cleaning gaily decorated basket 5, annular carriage is sent to be fixed on cleaning case
On the inner wall of upper end, driving motor, which is arranged, is equipped with conveyer belt in annular carriage side upper end, and in annular carriage 3
25, it is uniformly provided with 20 movable stands 24 on the conveyor belt, is respectively equipped with electric expansion sunpender 4 at each movable stand both ends, it is electronic
Telescopic suspension rod is equipped with hook by bottom and connect with Cleaning container 5, is correspondingly arranged on rinse bath group, rinse bath group packet below hanging basket
Prewash tank 6, alkaline bath, potcher, the slow kerve 15 of rinsing and water tank 21 are included, and is successively set in cleaning case, in prewashing
Slot, alkaline bath and rinsing trench bottom are mounted on supersonic generator 16, are all provided in alkaline bath, potcher and the slow kerve of rinsing
There is heating sheet 18, alkaline bath includes three slot 9 of one slot 7 of alkali cleaning, two slot 8 of alkali cleaning and alkali cleaning, and is successively set on prewash tank rear end,
PH monitoring alarm 19 is provided in three slot 9 of one slot 7 of alkali cleaning, two slot 8 of alkali cleaning and alkali cleaning, potcher includes one slot of rinsing
10, four slots 14 of two slots 12, three slots 13 of rinsing and rinsing are rinsed, are provided with hydrogen peroxide between two slots 12 of a slot 10 and rinsing rinsing
Slot 11, two slots 12 of rinsing, the groove body height for rinsing three slots 13, four slots 14 of rinsing and the slow kerve 15 of rinsing are incremented by successively, and float
Slow kerve side connection water inlet pipe 26 is washed, water tank 21 is connect by overflow pipe 22 with two slots of rinsing, and the water tank 21 is logical
The sink in overflow pipe connection prewash tank 6 and plug-in sheet machine is crossed, and flow control valve 23 is set on overflow pipe.
The present embodiment structure is simple, is cooperated by electric expansion sunpender and conveyer belt, can recycle continuous work, improves work
Make high-efficient, be provided with PH monitoring alarm in three slot of one slot of alkali cleaning, two slot of alkali cleaning and alkali cleaning, can facilitate worker and
Shi Genghuan or addition cleaning agent；
The present embodiment is by prewashing, multiple alkali cleaning and repeatedly rinsing, and at the same time in prewash tank, alkaline bath and potcher
Bottom is mounted on supersonic generator, effectively removes the metal impurities of silicon powder and silicon chip surface attachment in this way, greatly improves
Cleaning quality；It is equipped with heating sheet in alkaline bath, potcher and the slow kerve of rinsing, heat effect is played, so that at internal water
In warm water state, such silicon wafer is more readily separated, and effectively improves cleaning quality；It is arranged between two slots of a slot and rinsing rinsing
There is dioxygen sink, can be improved the cleanliness of silicon chip surface in this way, monocrystalline is avoided to be also easy to produce hickie in subsequent flocking；
The groove body height that two slots, three slots of rinsing, four slots of rinsing and the slow kerve of rinsing are rinsed in the present embodiment is incremented by successively, leads to
It crosses liquid level difference and carries out overflow, the water inside two slots of rinsing, three slots of rinsing, four slots of rinsing and slow lifting slot can be allowed ceaselessly to follow
Ring guarantees that the cleanliness of water reduces silicon powder and medicine stain content in groove body, guarantees that Wafer Cleaning is clean, while rinsing four slots by overflowing
Water is stored into the sink supplied in prewash tank and plug-in sheet machine in water tank by flow tube, improves the clear of silicon wafer while saving water resource
Wash quality.
In addition to the implementation, the utility model can also have other embodiments, all to use equivalent replacement or equivalent change
The technical solution to be formed is changed, the protection scope of the requires of the utility model is all fallen within.
Claims (9)
1. a kind of full-automatic inserted sheet cleans all-in-one machine, including plug-in sheet machine and cleaning device, the plug-in sheet machine is arranged in the cleaning
Device front end, and given silicon wafer to cleaning device by conveyer belt, it is characterised in that: the cleaning device includes cleaning case
Body, transmitting device and rinse bath group, the transmitting device includes annular carriage, conveyer belt, driving motor, movable stand, electronic
Telescopic suspension rod and the cleaning gaily decorated basket, the annular carriage are fixed on the inner wall of the cleaning case upper end, and the driving motor is set
It sets in the annular carriage side, and the conveyer belt is installed in the annular carriage, on the conveyer belt
Multiple movable stands are uniformly provided with, are respectively equipped with the electric expansion sunpender, the electric expansion sunpender at the movable stand both ends
Hook is equipped with by bottom to connect with the Cleaning container, is correspondingly arranged on the rinse bath group below the hanging basket.
2. full-automatic inserted sheet according to claim 1 cleans all-in-one machine, it is characterised in that: the outlet one of the cleaning case
Side is equipped with the drying portion dried to the silicon wafer cleaned.
3. full-automatic inserted sheet according to claim 1 cleans all-in-one machine, it is characterised in that: the rinse bath group includes prewashing
Slot, alkaline bath, potcher and the slow kerve of rinsing, and be successively set in cleaning case, while in the prewash tank, alkali cleaning
Slot, dioxygen sink and rinsing trench bottom are mounted on supersonic generator.
4. full-automatic inserted sheet according to claim 3 cleans all-in-one machine, it is characterised in that: in the alkaline bath, potcher
Heating sheet is equipped with rinsing in slow kerve.
5. full-automatic inserted sheet according to claim 4 cleans all-in-one machine, it is characterised in that: the alkaline bath includes alkali cleaning one
Three slot of slot, two slot of alkali cleaning and alkali cleaning, and it is successively set on prewash tank rear end, the potcher includes one slot of rinsing, rinsing two
Four slots of slot, three slots of rinsing and rinsing.
6. full-automatic inserted sheet according to claim 5 cleans all-in-one machine, it is characterised in that: two slots of the rinsing, rinsing three
The groove body height of slot, four slots of rinsing and the slow kerve of rinsing is incremented by successively, and the slow kerve side of rinsing connects water inlet pipe.
7. full-automatic inserted sheet according to claim 6 cleans all-in-one machine, it is characterised in that: it further include water tank, the storage
Water tank is connect by overflow pipe with two slots of rinsing, and the water tank connects the water in prewash tank and plug-in sheet machine by overflow pipe
Slot, and flow control valve is set on overflow pipe.
8. full-automatic inserted sheet according to claim 5 cleans all-in-one machine, it is characterised in that: in one slot of the rinsing and rinsing
Dioxygen sink is provided between two slots.
9. full-automatic inserted sheet according to claim 5 cleans all-in-one machine, it is characterised in that: in one slot of alkali cleaning, alkali cleaning
PH monitoring alarm is provided in three slot of two slots and alkali cleaning.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920270569.8U CN209715877U (en) | 2019-03-04 | 2019-03-04 | A kind of full-automatic inserted sheet cleaning all-in-one machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920270569.8U CN209715877U (en) | 2019-03-04 | 2019-03-04 | A kind of full-automatic inserted sheet cleaning all-in-one machine |
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| Publication Number | Publication Date |
|---|---|
| CN209715877U true CN209715877U (en) | 2019-12-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920270569.8U Active CN209715877U (en) | 2019-03-04 | 2019-03-04 | A kind of full-automatic inserted sheet cleaning all-in-one machine |
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| CN (1) | CN209715877U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114308846A (en) * | 2021-12-31 | 2022-04-12 | 惠州城市职业学院(惠州商贸旅游高级职业技术学校) | High-efficient belt cleaning device of circuit board |
-
2019
- 2019-03-04 CN CN201920270569.8U patent/CN209715877U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114308846A (en) * | 2021-12-31 | 2022-04-12 | 惠州城市职业学院(惠州商贸旅游高级职业技术学校) | High-efficient belt cleaning device of circuit board |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201228 Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: No.968, GANGLONG Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province, 212200 Patentee before: JIANGSU MEIKE SILICON ENERGY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee after: Jiangsu Meike Solar Energy Technology Co.,Ltd. Address before: No.198 Guangming Road, Yangzhong Economic Development Zone, Zhenjiang City, Jiangsu Province Patentee before: Jiangsu Meike Solar Energy Technology Co.,Ltd. |