CN207507890U - A kind of silicon material piece rinse bath - Google Patents
A kind of silicon material piece rinse bath Download PDFInfo
- Publication number
- CN207507890U CN207507890U CN201721422157.9U CN201721422157U CN207507890U CN 207507890 U CN207507890 U CN 207507890U CN 201721422157 U CN201721422157 U CN 201721422157U CN 207507890 U CN207507890 U CN 207507890U
- Authority
- CN
- China
- Prior art keywords
- groove body
- silicon material
- end side
- material piece
- rinse bath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002210 silicon-based material Substances 0.000 title claims abstract description 32
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 238000002955 isolation Methods 0.000 claims abstract description 13
- 239000011324 bead Substances 0.000 claims 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 15
- 229910052710 silicon Inorganic materials 0.000 abstract description 15
- 239000010703 silicon Substances 0.000 abstract description 15
- 238000004140 cleaning Methods 0.000 abstract description 13
- 238000005554 pickling Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 230000003647 oxidation Effects 0.000 abstract description 2
- 238000007254 oxidation reaction Methods 0.000 abstract description 2
- 239000002253 acid Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000010327 methods by industry Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
A kind of silicon material piece rinse bath, groove body are set along the longitudinal direction, and centre position laterally sets isolation board to separate groove body successively and is independent rinsing bowl and descaling bath along the longitudinal direction；Groove body front end side sets water filling port；Groove body rear end side sets discharge outlet.Advantageous effect is：Reduce the pickling temperature of descaling bath, silicon material or silicon chip are shortened from descaling bath to the rinsing bowl time, on the one hand solving the problems, such as that descaling bath temperature is excessively high influences normal work, improve production efficiency, on the other hand the oxidation consumption of silicon material or silicon chip in cleaning process is reduced, improves the cleaning quality of silicon material or silicon chip.
Description
Technical field：
The utility model is specifically related to a kind of silicon material piece cleaning device.
Background technology：
It in silicon materials process engineering, needs to clean silicon material or silicon chip, carries out pickling polishing first, then make again
It is cleaned with clear water to neutrality.Silicon material or silicon chip can boil in acid cleaning process, and temperature is higher silicon material to be caused to aoxidize, and cause silicon material
Or Wafer Cleaning is not clean, and it is serious when excessively high be only of temperature stop pickling operation, seriously affect working efficiency.In tradition
Cleaning process in, descaling bath is provided separately with service sink, longer with air contact time from descaling bath to rinsing bowl,
It is easier to make silicon material or silicon chip.
Invention content：
The purpose of this utility model is right exactly in order to solve silicon material or silicon chip rate height during silicon material or Wafer Cleaning
The problem of silicon material or big silicon chip damage, provides a kind of silicon material piece rinse bath for reducing cleaning process silicon material or silicon chip phenomenon.
To achieve these goals, technical solution is to be set as being connected in by pickling tube and rinsing bowl used by the utility model
Combined type cleaning slot together；On the one hand setting water filling outer flowing water setting arranged again from rinsing bowl to descaling bath, so as to reduce pickling
On the other hand bath temperature degree is cooled down using rinsing bowl for descaling bath；In addition to this, silicon material or silicon chip can be fast after descaling bath pickling
Speed is put into rinsing bowl washing, shortens transfer time.
The utility model silicon material piece rinse bath, groove body are set along the longitudinal direction, and centre position is laterally set along the longitudinal direction
Isolation board separates groove body successively is independent rinsing bowl and descaling bath；Groove body front end side sets water filling port；The slot
Body rear end side sets discharge outlet.
The groove body bottom angled setting, groove body front bottom end are fixedly installed support feet.
The isolation board height is less than groove body along open height.
The water filling port is nozzle, is set by groove body front end side bottom.
The discharge outlet is notch, is arranged on the upper edge hole of groove body rear end side, is less than isolation board height along open height.
The beneficial effects of the utility model are：The pickling temperature of descaling bath is reduced, shortens silicon material or silicon chip from acid
To the rinsing bowl time, on the one hand solving the problems, such as that descaling bath temperature is excessively high influences normal work, improves production efficiency for washing trough,
On the other hand the oxidation consumption of silicon material or silicon chip in cleaning process is reduced, improves the cleaning quality of silicon material or silicon chip.
Description of the drawings：
Attached drawing 1 is the structure diagram of the utility model.
In figure：Groove body 1, isolation board 11, water filling port 12, discharge outlet 13, support feet 14, rinsing bowl 2, descaling bath 3.
Specific embodiment：
It, below will be to the technology of the utility model to make the purpose of this utility model, technical solution and advantage clearer
Scheme is described in detail.
As shown in Figure 1, the utility model silicon material piece rinse bath, groove body 1 are set along the longitudinal direction, interposition along the longitudinal direction
Laterally setting isolation board 11 is put to separate groove body 1 successively and be independent rinsing bowl 2 and descaling bath 3；The 1 front end side of groove body is set
Put water filling port 12；The 1 rear end side of groove body sets discharge outlet 13.
1 bottom angled of the groove body setting, 1 front bottom end of groove body are fixedly installed support feet 14.
11 height of isolation board is less than groove body 1 along open height.
12 mouthfuls of the water filling is nozzle, by 1 front end side bottom setting of groove body.
The discharge outlet 13 is notch, is arranged on the upper edge hole of 1 rear end side of groove body, is less than isolation board 11 along open height
Height.
The utility model silicon material piece rinse bath is during cleaning silicon material or silicon chip, from 1 front end side bottom of groove body
In water filling port 12 sustained water injection to rinsing bowl 2, overflowed in descaling bath 3 from the upper edge of isolation board 11 after 2 water of rinsing bowl is full, pickling
After slot 3 fills, overflowed from the discharge outlet 13 at the upper edge hole of 1 rear end side of groove body；1 front bottom end of groove body is padded by support feet 14
It rises, makes the shallow decline from front to back of groove body 1, the natural spilling water of rinsing bowl 2 to descaling bath 3.In cleaning process, rinsing bowl 2 passes through
Isolation board 11 cools down descaling bath 3, and reduces by 3 temperature of descaling bath by difference of height overflow pure water.Silicon material or silicon chip are through descaling bath 3
After pickling polishing treatment, it can propose rapidly to put into rinsing bowl 2 and rinse to neutrality.
Claims (5)
1. a kind of silicon material piece rinse bath, it is characterised in that：Groove body is set along the longitudinal direction, and centre position is laterally set along the longitudinal direction
It puts isolation board and separates groove body successively and be independent rinsing bowl and descaling bath；Groove body front end side sets water filling port；It is described
Groove body rear end side sets discharge outlet.
2. silicon material piece rinse bath as described in claim 1, it is characterised in that：The groove body bottom angled is set, before groove body
End bottom is fixedly installed support feet.
3. silicon material piece rinse bath as described in claim 1, it is characterised in that：The isolation board height is less than the bead of groove body
Highly.
4. silicon material piece rinse bath as described in claim 1, it is characterised in that：The water filling port is nozzle, by groove body front end
Side bottom is set.
5. silicon material piece rinse bath as described in claim 1, it is characterised in that：The discharge outlet is notch, is arranged on groove body
The upper edge hole of rear end side is less than isolation board height along open height.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721422157.9U CN207507890U (en) | 2017-10-30 | 2017-10-30 | A kind of silicon material piece rinse bath |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721422157.9U CN207507890U (en) | 2017-10-30 | 2017-10-30 | A kind of silicon material piece rinse bath |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207507890U true CN207507890U (en) | 2018-06-19 |
Family
ID=62535482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721422157.9U Expired - Fee Related CN207507890U (en) | 2017-10-30 | 2017-10-30 | A kind of silicon material piece rinse bath |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207507890U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110396713A (en) * | 2019-07-09 | 2019-11-01 | 东莞市逸轩环保科技有限公司 | Gold coated article cleaning method and its rinse bath |
-
2017
- 2017-10-30 CN CN201721422157.9U patent/CN207507890U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110396713A (en) * | 2019-07-09 | 2019-11-01 | 东莞市逸轩环保科技有限公司 | Gold coated article cleaning method and its rinse bath |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN203851757U (en) | Hanging basket type dual-purpose vegetable washing machine | |
| CN105133039A (en) | Single-crystal and poly-crystal flocking equipment | |
| CN207507890U (en) | A kind of silicon material piece rinse bath | |
| CN207103242U (en) | A kind of silicon chip cleaning device and chain type board | |
| CN205024353U (en) | Single polycrystal making herbs into wool equipment | |
| CN209808135U (en) | Massage bathtub with anti-overflow water function | |
| CN210253222U (en) | A device for zongzi leaf washs and uses | |
| CN207250463U (en) | Wafer fast draining wash tank | |
| CN202179513U (en) | Simple and rapid bowl washing machine | |
| CN209584379U (en) | A kind of circulation clear water reserviors of cable conductor pickling machine | |
| CN213529936U (en) | Cleaning machine is used in diode production | |
| CN100385629C (en) | Method and device for cleaning semiconductor crystal wafer | |
| CN208728277U (en) | A kind of novel vacuum glass automatic rinser | |
| CN106510598A (en) | Filtration-type chopstick box of dish-washing machine for washing spoons and chopsticks | |
| CN207707254U (en) | A kind of mulberry fruit automatic rinser | |
| CN207136164U (en) | Walnut cleaning equipment | |
| CN208346311U (en) | A kind of wool rinse bath | |
| CN205889595U (en) | Diamond cutting line heart yearn belt cleaning device | |
| CN210614504U (en) | Diamond wire-electrode cutting silicon chip reduces dirty piece risk device | |
| CN205797947U (en) | A kind of small-sized Bottle & Can flusher | |
| CN205831020U (en) | A kind of Bulbus Lilii bubble washer | |
| CN206102603U (en) | Cascaded cycling use of water structure of dish washer | |
| CN205570940U (en) | Semi -automatic bottle cleaning machine | |
| CN219297380U (en) | High-efficient cooling circulation device of glass numerical control processing | |
| CN208661904U (en) | A kind of cynomorium songaricum cleaning machine of the secondary cleaning of water-saving type |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180619 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |