CN209702855U - A kind of nano vacuum plated film macromolecule detaches device - Google Patents
A kind of nano vacuum plated film macromolecule detaches device Download PDFInfo
- Publication number
- CN209702855U CN209702855U CN201920505384.0U CN201920505384U CN209702855U CN 209702855 U CN209702855 U CN 209702855U CN 201920505384 U CN201920505384 U CN 201920505384U CN 209702855 U CN209702855 U CN 209702855U
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- fixedly connected
- vacuum
- collecting box
- plated film
- communicated
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Abstract
The utility model discloses a kind of nano vacuum plated film macromolecules to detach device, including cabinet, cabinet wall is fixedly connected with partition between opposite two sides, spray head is fixedly connected at the top of cabinet wall, the inner wall of cabinet and be located at partition above be fixedly connected with feeding plate, placement plate is fixedly connected at the top of feeding plate, the bottom of cabinet wall is fixedly connected sequentially and has collecting box and vacuum pump, the bottom of feeding plate is communicated with material blanking tube, the bottom end of material blanking tube extends in collecting box, the surface of material blanking tube is provided with blanking valve, the side of vacuum pump is communicated with air intake duct, the surface of air intake duct is communicated with vacuum tube by three-way connection, the bottom end of collecting box is communicated with discharge nozzle, the utility model relates to plated film processing technique fields.This kind of nano vacuum plated film macromolecule detaches device, and the problem of material recycles, processing cost is caused to increase can not be plated to these macromolecules by solving existing vacuum coater.
Description
Technical field
The utility model relates to plated film processing technique field, specially a kind of nano vacuum plated film macromolecule detaches device.
Background technique
Vacuum coating refers to heats metal or nonmetallic materials under conditions of high vacuum, evaporates it and is condensed in plating piece
(metal, semiconductor or insulator) surface and a kind of method for forming film.Vacuum coating technology is generally divided into two major classes, i.e. object
Physical vapor deposition (PVD) technology and chemical vapor deposition (CVD) technology, physical gas phase deposition technology refer under vacuum conditions,
Using various physical methods, plating material is gasificated into atom, molecule or makes its ionization ion, is deposited directly on matrix surface
Method.It prepares hard reaction film and is made mostly with physical gas-phase deposite method, it utilizes certain physical process, as the heat of substance is steamed
Hair, or when by ion bombardment phenomena such as the sputtering of material surface atom, realize that material atom is controllable from source substance to film
Transfer process.Good, film even compact, film thickness controllability are good with film/base junction resultant force for physical gas phase deposition technology, apply
Target extensively, sputtering range it is wide, can deposit thick film, can produce stable components alloy film and it is reproducible the advantages that.
In nano vacuum coating process, plating material is largely gasificated into ion, but still some is also in molecular state,
Existing vacuum coater can not plate material to these macromolecules and recycle, and increase processing cost.
Utility model content
(1) the technical issues of solving
In view of the deficiencies of the prior art, the utility model provides a kind of nano vacuum plated film macromolecule and detaches device, solves
Existing vacuum coater of having determined can not plate the problem of material recycles, processing cost is caused to increase to these macromolecules.
(2) technical solution
In order to achieve the above object, the utility model is achieved by the following technical programs: a kind of nano vacuum plated film is high
Molecule detaches device, including cabinet, and partition is fixedly connected between the opposite two sides of the cabinet wall, the cabinet wall
Top is fixedly connected with spray head, the inner wall of the cabinet and is located above partition and is fixedly connected with feeding plate, the feeding plate
Top be fixedly connected with placement plate, the bottom of the cabinet wall, which is fixedly connected sequentially, collecting box and vacuum pump, described to fall
The bottom of flitch is communicated with material blanking tube, and the bottom end of the material blanking tube extends in collecting box, and the surface of the material blanking tube is provided with
Blanking valve, the side of the vacuum pump are communicated with air intake duct, and the surface of the air intake duct is communicated with vacuum by three-way connection
Pipe, one end of the vacuum tube are connected to the top of collecting box, and the bottom end of the collecting box is communicated with discharge nozzle；
The blanking valve includes fixed cylinder, and the inner wall of the fixed cylinder, which is fixedly connected sequentially, pedestal, sliding support, institute
The center for stating sliding support slidably connects slide bar, and the bottom end of the slide bar is fixedly connected with seal head, the sliding support with
Spring is fixedly connected between top end of sliding rod and positioned at the surface of slide bar.
Preferably, one end of the discharge nozzle is provided with the first solenoid valve, and the inner wall of the collecting box is fixedly connected with leakage
Bucket, one end of the funnel is connected to one end of discharge nozzle.
Preferably, the surface of the air intake duct and air entry side is provided with second solenoid valve, the vacuum tube
Surface is provided with third solenoid valve.
Preferably, the feeding plate is funnel-shaped, and the surface of the feeding plate is set as shiny surface.
Preferably, the surface of the pedestal and seal head is provided with silica gel.
(3) beneficial effect
The utility model provides a kind of nano vacuum plated film macromolecule and detaches device.Have it is following the utility model has the advantages that
This kind of nano vacuum plated film macromolecule detaches device, and being fixedly connected sequentially by the bottom of cabinet wall has collecting box
And vacuum pump, the bottom of feeding plate are communicated with material blanking tube, the surface of material blanking tube is provided with blanking valve, the side connection of vacuum pump
There is air intake duct, the surface of air intake duct is communicated with vacuum tube by three-way connection, and one end of vacuum tube is connected to the top of collecting box,
The bottom end of collecting box is communicated with discharge nozzle, is connected to by collecting box and cabinet top, then by negative pressure state in collecting box, realizes
Macromolecule plating material is recycled, the utilization again of plating material is realized, while ensure that vacuum is indoor clean and tidy, avoids waste material
Accumulation.
Detailed description of the invention
FIG. 1 is a schematic structural view of the utility model；
Fig. 2 is the utility model blanking valve mechanism schematic diagram.
In figure: 1- cabinet, 2- partition, 3- spray head, 4- feeding plate, 5- placement plate, 6- collecting box, 7- material blanking tube, 8- blanking
Valve, 81- fixed cylinder, 82- pedestal, 83- sliding support, 84- slide bar, 85- seal head, 86- spring, 9- vacuum pump, 10- air-breathing
Pipe, 11- three-way connection, 12- vacuum tube, 13- discharge nozzle, the first solenoid valve of 14-, 15- funnel, bis- solenoid valve of 16-, 17- third
Solenoid valve.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
The utility model provides a kind of technical solution referring to FIG. 1-2: a kind of nano vacuum plated film macromolecule detaches dress
It sets, including cabinet 1, partition 2 is fixedly connected between the opposite two sides of 1 inner wall of cabinet, is fixedly connected at the top of 1 inner wall of cabinet
Spray head 3, the inner wall of cabinet 1 and the top for being located at partition 2 are fixedly connected with feeding plate 4, and the top of feeding plate 4, which is fixedly connected with, sets
Plate 5 is put, for placing object to be processed, the bottom of 1 inner wall of cabinet is fixedly connected sequentially and has collecting box 6 and vacuum pump placement plate 5
9, the bottom of feeding plate 4 is communicated with material blanking tube 7, and the bottom end of material blanking tube 7 extends in collecting box 6, and the surface of material blanking tube 7 is provided with
Blanking valve 8, the side of vacuum pump 9 are communicated with air intake duct 10, are in vacuum environment in auxiliary vacuum chamber；The surface of air intake duct 10
It is communicated with vacuum tube 12 by three-way connection 11, one end of vacuum tube 12 is connected to the top of collecting box 6, is realized at collecting box 6
In vacuum environment, convenient for the collection of high molecular material, the bottom end of collecting box 6 is communicated with discharge nozzle 13, and discharge nozzle 13 facilitates high score
Son plating material discharge recycles；
Blanking valve 8 includes fixed cylinder 81, and the inner wall of fixed cylinder 81, which is fixedly connected sequentially, pedestal 82, sliding support 83,
The center of sliding support 83 slidably connects slide bar 84, and the bottom end of slide bar 84 is fixedly connected with seal head 85, sliding support 83 with
It is fixedly connected with spring 86 between 84 top of slide bar and positioned at the surface of slide bar 84, by being in vacuum environment, In in collecting box 6
It can push seal head 85 mobile under gas pressure, realize automatic blanking, ensure that vacuum environment when normal plated film.
One end of discharge nozzle 13 is provided with the first solenoid valve 14, and the inner wall of collecting box 6 is fixedly connected with funnel 15, funnel 15
One end be connected to one end of discharge nozzle 13, guarantee collect high molecular material can be smoothly discharged.
The surface of air intake duct 10 and air entry side is provided with second solenoid valve 16, the surface of vacuum tube 12 is provided with
Third solenoid valve 17.
Feeding plate 4 is funnel-shaped, and the surface of feeding plate 4 is set as shiny surface, slides convenient for material.
The surface of pedestal 82 and seal head 85 is provided with silica gel, improves leakproofness.
When detaching macromolecule, it is in non-vacuum above partition 2, starts vacuum pump 9, opens third solenoid valve 17, receives
Vacuum state is gradually in header 6, seal head 85 moves under gas pressure at this time, so that seal head 85 divides with pedestal 82
It opens, the high molecular material in feeding plate 4 drops down onto collecting box 6 along material blanking tube 7, and after the completion of collection, vacuum pump 9 is closed, seal head
85 contact with pedestal 82 under the action of the spring, realize the sealing of vacuum chamber.
It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to
Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those
Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment
Intrinsic element.In the absence of more restrictions.By sentence " element limited including one ..., it is not excluded that
There is also other identical elements in the process, method, article or apparatus that includes the element ".
While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art,
It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired
Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.
Claims (5)
1. a kind of nano vacuum plated film macromolecule detaches device, including cabinet (1), it is characterised in that: cabinet (1) the inner wall phase
Pair two sides between be fixedly connected with partition (2), be fixedly connected with spray head (3), the cabinet at the top of cabinet (1) inner wall
(1) inner wall and being located above partition (2) is fixedly connected with feeding plate (4), is fixedly connected at the top of the feeding plate (4)
Placement plate (5), the bottom of cabinet (1) inner wall are fixedly connected sequentially and have collecting box (6) and vacuum pump (9), the feeding plate
(4) bottom is communicated with material blanking tube (7), and the bottom end of the material blanking tube (7) extends in collecting box (6), the material blanking tube (7)
Surface is provided with blanking valve (8), and the side of the vacuum pump (9) is communicated with air intake duct (10), the table of the air intake duct (10)
Face is communicated with vacuum tube (12) by three-way connection (11), and one end of the vacuum tube (12) is connected to the top of collecting box (6),
The bottom end of the collecting box (6) is communicated with discharge nozzle (13)；
The blanking valve (8) includes fixed cylinder (81), the inner wall of the fixed cylinder (81) be fixedly connected sequentially have pedestal (82),
The center of sliding support (83), the sliding support (83) slidably connects slide bar (84), and the bottom end of the slide bar (84) is fixed
It is connected with seal head (85), the surface between the sliding support (83) and slide bar (84) top and positioned at slide bar (84) is fixed to be connected
It is connected to spring (86).
2. a kind of nano vacuum plated film macromolecule according to claim 1 detaches device, it is characterised in that: the discharge nozzle
(13) one end is provided with the first solenoid valve (14), and the inner wall of the collecting box (6) is fixedly connected with funnel (15), the funnel
(15) one end is connected to the one end of discharge nozzle (13).
3. a kind of nano vacuum plated film macromolecule according to claim 1 detaches device, it is characterised in that: the air intake duct
(10) surface and close air entry side is provided with second solenoid valve (16), and the surface of the vacuum tube (12) is provided with third
Solenoid valve (17).
4. a kind of nano vacuum plated film macromolecule according to claim 1 detaches device, it is characterised in that: the feeding plate
(4) funnel-shaped, the surface of the feeding plate (4) is set as shiny surface.
5. a kind of nano vacuum plated film macromolecule according to claim 1 detaches device, it is characterised in that: the pedestal
(82) surface of seal head (85) is provided with silica gel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920505384.0U CN209702855U (en) | 2019-04-15 | 2019-04-15 | A kind of nano vacuum plated film macromolecule detaches device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920505384.0U CN209702855U (en) | 2019-04-15 | 2019-04-15 | A kind of nano vacuum plated film macromolecule detaches device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209702855U true CN209702855U (en) | 2019-11-29 |
Family
ID=68647889
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920505384.0U Expired - Fee Related CN209702855U (en) | 2019-04-15 | 2019-04-15 | A kind of nano vacuum plated film macromolecule detaches device |
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| Country | Link |
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| CN (1) | CN209702855U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114892131A (en) * | 2022-05-17 | 2022-08-12 | 吴梦伟 | Double-sided multi-station winding type vacuum coating machine |
-
2019
- 2019-04-15 CN CN201920505384.0U patent/CN209702855U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114892131A (en) * | 2022-05-17 | 2022-08-12 | 吴梦伟 | Double-sided multi-station winding type vacuum coating machine |
| CN114892131B (en) * | 2022-05-17 | 2024-03-22 | 浦江县晶阳博工贸有限公司 | Double-sided multi-station winding type vacuum coating machine |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191129 Termination date: 20210415 |
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| CF01 | Termination of patent right due to non-payment of annual fee |