CN209702829U - A kind of hi-temp hi-effective alloy reaction purification furnace - Google Patents
A kind of hi-temp hi-effective alloy reaction purification furnace Download PDFInfo
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- CN209702829U CN209702829U CN201920314632.3U CN201920314632U CN209702829U CN 209702829 U CN209702829 U CN 209702829U CN 201920314632 U CN201920314632 U CN 201920314632U CN 209702829 U CN209702829 U CN 209702829U
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Abstract
The utility model discloses a kind of hi-temp hi-effective alloys to react purification furnace, the furnace body of reaction cavity is set as including inner hollow, crucible is equipped in the reaction cavity, the crucible is connected with transmission system, the transmission system includes the pulling apparatus that can be protruded into crucible and the transmission device that is connected to outside crucible, the reaction cavity is connected with vacuum system, so being equipped with heating system in reaction cavity, the furnace body is connected with cooling system, it further include control cabinet and power-supply system, the transmission system, heating system, cooling system and vacuum system are connected with control cabinet and power-supply system respectively;Instead of small-scale test metal synthesizer, can be mass produced;It is versatile, it is combined using several big function systems, is applicable in a variety of semiconducting alloy metals, is not limited to the alloy of the metals such as gallium, magnesium, cadmium, tellurium.
Description
Technical field
The utility model relates to high-temperature heater and field of new materials more particularly to a kind of reaction purifications of hi-temp hi-effective alloy
Furnace.
Background technique
With LED new material, solar battery of new generation (including gallium arsenide solar cell and amorphous silicon thin-film solar
Battery), the emergence of phase transition storage, semiconductor laser, the fields such as rfic chip, by the periodic table of elements III-
V race, II-VI race's Element generation compound (such as gallium nitride GaN, AlGaInP InGaAlP, Aluminum gallium arsenide AlGaAs),
Because it is high with electron mobility, forbidden bandwidth is big, photoelectric characteristic is good etc., excellent characteristic, industrialized development are in urgent need.
High pure metal organic source (MO) and high-purity synthesis metal as prepare compound semiconductor material are compounds half
The critical support raw material of conductor material.
Metal alloy has that hardness is high, wear-resisting, intensity, toughness is preferable, a series of excellent performances such as heat-resisting, corrosion-resistant, spy
Be not its high rigidity and wearability, even if 500 DEG C at a temperature of be held essentially constant.So preparation high purity alloys are general
The middle synthesis for carrying out simple substance under the vacuum of high temperature, while being heated, melting, solid solution, heat preservation, purification, formation has
The metal alloy ingot of processing characteristics.
Currently, the production technology of preparation high purity alloys mainly uses two kinds of high pure metals generally using the device of experiment
Powder mixing is placed in graphite or quartz boat, is placed into the quartz ampoule of synthetic furnace after air is discharged, heating synthesis.It is this small-sized
Preparation process influenced to be unable to large-scale continuous production by graphite, quartz tube device.Particularly, due to the metal for semiconductor
Tellurium, magnesium, gallium, cadmium etc. are all more active metals, and reaction acutely, or even will cause splash, cause to waste, product yield
It is low.Meanwhile active metal is oxidized easily at high temperature, traditional vacuum synthesis method by vacuum degree due to being limited easily by oxygen
Change, it is volatile, cause various metal component ratios in alloy product to change, product yield is not high.
Utility model content
In order to solve large-scale production, the product yield, production of above-mentioned conventional alloys synthesis reactor and synthesis technology production
Product yield issues, the utility model proposes a kind of hi-temp hi-effective alloys to react purification furnace.
In order to achieve the above objectives, the embodiments of the present invention adopt the following technical scheme that
A kind of hi-temp hi-effective alloy reaction purification furnace, the hi-temp hi-effective alloy reaction purification furnace includes that inner hollow is set as
The furnace body of reaction cavity, the reaction cavity is interior to be equipped with crucible, and the crucible is connected with transmission system, and the transmission system includes
The pulling apparatus that can be protruded into crucible and the transmission device being connected to outside crucible, the reaction cavity are connected with vacuum system, institute
To be equipped with heating system in reaction cavity, it further includes control cabinet and power-supply system, the biography that the furnace body, which is connected with cooling system,
Dynamic system, heating system, cooling system and vacuum system are connected with control cabinet and power-supply system respectively.
According to the one aspect of the utility model, the upper end and/or lower end of the furnace body are equipped with the bell of retractable disassembly,
The upper end of the crucible bell is fed or is discharged from upper end when opening or the crucible is beaten by transmission device in lower end bell
Furnace body is left to be fed or be discharged from lower end when opening.
According to the one aspect of the utility model, the furnace body wall is equipped with the fire door of retractable disassembly, and the crucible is logical
It crosses transmission device and leaves furnace body from stove gate in oven door opening to be fed or be discharged.
According to the one aspect of the utility model, the pulling apparatus includes lifting shaft and agitating device, the stirring dress
It sets to sink under the drive of lifting shaft and enters Stirring in crucible or be lifted off crucible under the drive of lifting shaft.
According to the one aspect of the utility model, the agitating device and lifting shaft are equipped with the cooling seed crystal of material metal.
According to the one aspect of the utility model, the furnace body is arranged on grate.
According to the one aspect of the utility model, the cooling system include furnace body collet water cooling, furnace body chassis water cooling and
Heat electrode water cooling.
According to the one aspect of the utility model, the vacuum system includes vacuum pump, filter and specific gas air inlet
Device, the vacuum pump are connect by pipeline with the furnace body after filter again by pipeline, the filter and the furnace
Specific gas inlet duct is connected in the connecting pipe of body.
According to the one aspect of the utility model, the control cabinet by PLC control software control furnace body heating temperature,
Vacuum degree, the rotation speed of material, pull rate, vacuum degree and the air inlet control for carrying out specific gas of furnace chamber.
According to the one aspect of the utility model, the specific gas is reducing gas.
The advantages of the utility model is implemented: hi-temp hi-effective alloy described in the utility model reacts purification furnace, including inside
The hollow furnace body for being set as reaction cavity, the reaction cavity is interior to be equipped with crucible, and the crucible is connected with transmission system, the transmission
System includes the pulling apparatus that can be protruded into crucible and the transmission device that is connected to outside crucible, and the reaction cavity is connected with vacuum
System, so being equipped with heating system in reaction cavity, it further includes control cabinet and power supply system that the furnace body, which is connected with cooling system,
System, the transmission system, heating system, cooling system and vacuum system are connected with control cabinet and power-supply system respectively;Instead of small
Type tests metal synthesizer, can be mass produced;It is versatile, it is combined using several big function systems, is applicable in and a variety of partly leads
Body alloying metal is not limited to the alloy of the metals such as gallium, magnesium, cadmium, tellurium;Equipped with controllable heating system, material places oneself in the midst of closed earthenware
In crucible, crucible can be achived up and down by transmission system and itself rotation, is heated evenly material;Equipped with vacuum system,
To pass through effective control of air inlet instrument valve in vacuum environment, the inside cavity toward furnace body is filled with inert gas, and matches
The multiple alternate run of vacuum system is closed, foreign gas is sufficiently displaced from out, guarantees that internal system environment is pure;Again toward system before production
Inert gas or other specific reducing gas are inside passed through, internal system in production process is made to keep positive pressure inert atmosphere;Further
, general specific gas is reducibility gas, therefore metal will not volatilize high temperature in reducibility gas environment, also avoid
The generation of oxidative phenomena, obtained product alloying component meet technique requirement, and product yield greatly improves.
Detailed description of the invention
In order to illustrate more clearly of the technical scheme in the embodiment of the utility model, will make below to required in embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are merely some embodiments of the present invention,
For those of ordinary skill in the art, without creative efforts, it can also be obtained according to these attached drawings
Other attached drawings.
Fig. 1 is a kind of hi-temp hi-effective alloy reaction purification furnace structural schematic diagram described in the utility model embodiment one;
Fig. 2 is a kind of hi-temp hi-effective alloy reaction purification furnace structural schematic diagram described in the utility model embodiment two;
Fig. 3 is a kind of hi-temp hi-effective alloy reaction purification furnace structural schematic diagram described in the utility model embodiment three.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Embodiment one
As shown in Figure 1, a kind of hi-temp hi-effective alloy reacts purification furnace, the hi-temp hi-effective alloy reaction purification furnace includes interior
The hollow furnace body 1 for being set as reaction cavity in portion, the reaction cavity is interior to be equipped with crucible 2, and the crucible is connected with transmission system 3, institute
Stating transmission system includes the pulling apparatus 31 that can be protruded into crucible and the transmission device 32 being connected to outside crucible, the reaction cavity
It is connected with vacuum system 4, so being equipped with heating system in reaction cavity, the furnace body is connected with cooling system 5, further includes control
Cabinet 6 and power-supply system 7, the transmission system, heating system, cooling system and vacuum system respectively with control cabinet and power-supply system
It is connected;The upper end of the furnace body be equipped with retractable disassembly upper bell 11, the upper bell open when from upper end carry out charging or
Discharging.
In practical applications, the pulling apparatus includes lifting shaft 33 and agitating device 34, and the agitating device is being gone up and down
Sink under the drive of axis and enters Stirring in crucible or be lifted off crucible under the drive of lifting shaft.
In practical applications, the agitating device and lifting shaft are equipped with the cooling seed crystal of material metal, and the rotation of alloy is stirred
It mixes using the cooling seed crystal of own metal, guaranteed quality.
In practical applications, the furnace body is arranged on grate 8, and the operating platform of steel construction is each for fixing furnace body
Component provides physical support, and provides job platform for operator.
In practical applications, the cooling system includes furnace body collet water cooling, furnace body chassis water cooling and heating electrode water cooling.
In practical applications, the vacuum system includes vacuum pump 41, filter 42 and specific gas inlet duct 43, institute
It states vacuum pump and is connect again by pipeline with the furnace body after filter by pipeline, the connection of the filter and the furnace body
Specific gas inlet duct is connected on pipeline.
In practical applications, the control cabinet controls heating temperature, the vacuum of furnace chamber of software control furnace body by PLC
Degree, the rotation speed of material, pull rate, vacuum degree and the air inlet control for carrying out specific gas.
In practical applications, the specific gas is reducing gas.
The workflow of the present embodiment includes:
1, top-feed: bell in opening promotes crucible, raw material is put into crucible in proportion, and it is lighter to be applicable in inventory
Operating condition;
2, it raw material: normally due to the melting point metal for semiconducting alloy raw material is lower, is used first in alloy molten
High purity alloys powder after a certain proportion of smashing is added in the crucible in furnace body;
3, pressure maintaining is replaced: alloy preparation carries out under vacuum, and vacuum pump vacuumizes furnace body by pneumatic filter, generally
The blowing pressure < 0.1MPa, low vacuum (black furnace final vacuum)≤3P pressure surface in 10 minutes is unchanged, then
Be filled with inert gas into furnace and carry out displacement protection, pressure maintaining is replaced 3 times, then from specific gas inlet duct be passed through specific reduction its
Body is replaced, and determines final pressure;
4, heating melting: setting heating temperature and heating time by technique requirement, until solid all melts and without steaming
When vapour, Stirring;
5, Stirring: decline after metal melting and immersed in melt under lifting shaft driving rotating device, by certain speed
Rotation reaches after technique wants seeking time, stops rotating and promoting lifting shaft axis makes rotating device be detached from melt, stop heating;
6, cooling and demolding discharges, top discharge: bell in opening takes out alloy.
Embodiment two
As shown in Fig. 2, a kind of hi-temp hi-effective alloy reacts purification furnace, the hi-temp hi-effective alloy reaction purification furnace includes interior
The hollow furnace body 1 for being set as reaction cavity in portion, the reaction cavity is interior to be equipped with crucible 2, and the crucible is connected with transmission system 3, institute
Stating transmission system includes the pulling apparatus 31 that can be protruded into crucible and the transmission device 32 being connected to outside crucible, the reaction cavity
It is connected with vacuum system 4, so being equipped with heating system in reaction cavity, the furnace body is connected with cooling system 5, further includes control
Cabinet 6 and power-supply system 7, the transmission system, heating system, cooling system and vacuum system respectively with control cabinet and power-supply system
It is connected;The lower end of the furnace body is equipped with the lower bell 12 of retractable disassembly, and the crucible is opened by transmission device in lower bell
When from lower end leave furnace body to be fed or be discharged.
In practical applications, the pulling apparatus includes lifting shaft 33 and agitating device 34, and the agitating device is being gone up and down
Sink under the drive of axis and enters Stirring in crucible or be lifted off crucible under the drive of lifting shaft.
In practical applications, the agitating device and lifting shaft are equipped with the cooling seed crystal of material metal, and the rotation of alloy is stirred
It mixes using the cooling seed crystal of own metal, guaranteed quality.
In practical applications, the furnace body is arranged on grate 8, and the operating platform of steel construction is each for fixing furnace body
Component provides physical support, and provides job platform for operator.
In practical applications, the cooling system includes furnace body collet water cooling, furnace body chassis water cooling and heating electrode water cooling.
In practical applications, the vacuum system includes vacuum pump 41, filter 42 and specific gas inlet duct 43, institute
It states vacuum pump and is connect again by pipeline with the furnace body after filter by pipeline, the connection of the filter and the furnace body
Specific gas inlet duct is connected on pipeline.
In practical applications, the control cabinet controls heating temperature, the vacuum of furnace chamber of software control furnace body by PLC
Degree, the rotation speed of material, pull rate, vacuum degree and the air inlet control for carrying out specific gas.
In practical applications, the specific gas is reducing gas.
The workflow of the present embodiment includes:
1, bottom feed: under fall bell, crucible is taken out by transmission device, material is proportionally added into crucible, on
Crucible is risen, lower bell is closed;
2, it raw material: normally due to the melting point metal for semiconducting alloy raw material is lower, is used first in alloy molten
High purity alloys powder after a certain proportion of smashing is added in the crucible in furnace body;
3, pressure maintaining is replaced: alloy preparation carries out under vacuum, and vacuum pump vacuumizes furnace body by pneumatic filter, generally
The blowing pressure < 0.1MPa, low vacuum (black furnace final vacuum)≤3P pressure surface in 10 minutes is unchanged, then
Be filled with inert gas into furnace and carry out displacement protection, pressure maintaining is replaced 3 times, then from specific gas inlet duct be passed through specific reduction its
Body is replaced, and determines final pressure;
4, heating melting: setting heating temperature and heating time by technique requirement, until solid all melts and without steaming
When vapour, Stirring;
5, Stirring: decline after metal melting and immersed in melt under lifting shaft driving rotating device, by certain speed
Rotation reaches after technique wants seeking time, stops rotating and promoting lifting shaft axis makes rotating device be detached from melt, stop heating;
6, cooling and demolding discharges, bottom discharge: opening lower bell, declines crucible by transmission device, take out alloy.
Embodiment three
As shown in figure 3, a kind of hi-temp hi-effective alloy reacts purification furnace, the hi-temp hi-effective alloy reaction purification furnace includes interior
The hollow furnace body 1 for being set as reaction cavity in portion, the reaction cavity is interior to be equipped with crucible 2, and the crucible is connected with transmission system 3, institute
Stating transmission system includes the pulling apparatus 31 that can be protruded into crucible and the transmission device 32 being connected to outside crucible, the reaction cavity
It is connected with vacuum system 4, so being equipped with heating system in reaction cavity, the furnace body is connected with cooling system 5, further includes control
Cabinet 6 and power-supply system 7, the transmission system, heating system, cooling system and vacuum system respectively with control cabinet and power-supply system
It is connected;The furnace body wall is equipped with the fire door 13 of retractable disassembly, and the crucible is by transmission device in oven door opening Shi Conglu
Furnace body is left to be fed or be discharged in doorway.
In practical applications, the pulling apparatus includes lifting shaft 33 and agitating device 34, and the agitating device is being gone up and down
Sink under the drive of axis and enters Stirring in crucible or be lifted off crucible under the drive of lifting shaft.
In practical applications, the agitating device and lifting shaft are equipped with the cooling seed crystal of material metal, and the rotation of alloy is stirred
It mixes using the cooling seed crystal of own metal, guaranteed quality.
In practical applications, the furnace body is arranged on grate 8, and the operating platform of steel construction is each for fixing furnace body
Component provides physical support, and provides job platform for operator.
In practical applications, the cooling system includes furnace body collet water cooling, furnace body chassis water cooling and heating electrode water cooling.
In practical applications, the vacuum system includes vacuum pump 41, filter 42 and specific gas inlet duct 43, institute
It states vacuum pump and is connect again by pipeline with the furnace body after filter by pipeline, the connection of the filter and the furnace body
Specific gas inlet duct is connected on pipeline.
In practical applications, the control cabinet controls heating temperature, the vacuum of furnace chamber of software control furnace body by PLC
Degree, the rotation speed of material, pull rate, vacuum degree and the air inlet control for carrying out specific gas.
In practical applications, the specific gas is reducing gas.
The workflow of the present embodiment includes:
1, it feeding: opening fire door, taken out crucible by transmission device, material is proportionally added into crucible, crucible is withdrawn,
Close fire door;
2, it raw material: normally due to the melting point metal for semiconducting alloy raw material is lower, is used first in alloy molten
High purity alloys powder after a certain proportion of smashing is added in the crucible in furnace body;
3, pressure maintaining is replaced: alloy preparation carries out under vacuum, and vacuum pump vacuumizes furnace body by pneumatic filter, generally
The blowing pressure < 0.1MPa, low vacuum (black furnace final vacuum)≤3P pressure surface in 10 minutes is unchanged, then
Be filled with inert gas into furnace and carry out displacement protection, pressure maintaining is replaced 3 times, then from specific gas inlet duct be passed through specific reduction its
Body is replaced, and determines final pressure;
4, heating melting: setting heating temperature and heating time by technique requirement, until solid all melts and without steaming
When vapour, Stirring;
5, Stirring: decline after metal melting and immersed in melt under lifting shaft driving rotating device, by certain speed
Rotation reaches after technique wants seeking time, stops rotating and promoting lifting shaft axis makes rotating device be detached from melt, stop heating;
6, cooling and demolding discharges, discharging: opening fire door, is removed crucible by transmission device, takes out alloy.
The advantages of the utility model is implemented: hi-temp hi-effective alloy described in the utility model reacts purification furnace, including inside
The hollow furnace body for being set as reaction cavity, the reaction cavity is interior to be equipped with crucible, and the crucible is connected with transmission system, the transmission
System includes the pulling apparatus that can be protruded into crucible and the transmission device that is connected to outside crucible, and the reaction cavity is connected with vacuum
System, so being equipped with heating system in reaction cavity, it further includes control cabinet and power supply system that the furnace body, which is connected with cooling system,
System, the transmission system, heating system, cooling system and vacuum system are connected with control cabinet and power-supply system respectively;Instead of small
Type tests metal synthesizer, can be mass produced;It is versatile, it is combined using several big function systems, is applicable in and a variety of partly leads
Body alloying metal is not limited to the alloy of the metals such as gallium, magnesium, cadmium, tellurium;Equipped with controllable heating system, material places oneself in the midst of closed earthenware
In crucible, crucible can be achived up and down by transmission system and itself rotation, is heated evenly material;Equipped with vacuum system,
To pass through effective control of air inlet instrument valve in vacuum environment, the inside cavity toward furnace body is filled with inert gas, and matches
The multiple alternate run of vacuum system is closed, foreign gas is sufficiently displaced from out, guarantees that internal system environment is pure;Again toward system before production
Inert gas or other specific reducing gas are inside passed through, internal system in production process is made to keep positive pressure inert atmosphere;Further
, general specific gas is reducibility gas, therefore metal will not volatilize high temperature in reducibility gas environment, also avoid
The generation of oxidative phenomena, obtained product alloying component meet technique requirement, and product yield greatly improves.
Above description is only a specific implementation of the present invention, but the protection scope of the utility model is not limited to
In this, any those skilled in the art is in technical scope disclosed by the utility model, the change that can readily occur in
Change or replace, should be covered within the scope of the utility model.Therefore, the protection scope of the utility model should be with described
Subject to scope of protection of the claims.
Claims (10)
1. a kind of hi-temp hi-effective alloy reacts purification furnace, which is characterized in that the hi-temp hi-effective alloy reaction purification furnace includes interior
The hollow furnace body for being set as reaction cavity in portion, the reaction cavity is interior to be equipped with crucible, and the crucible is connected with transmission system, the biography
Dynamic system includes the pulling apparatus that can be protruded into crucible and the transmission device that is connected to outside crucible, and the reaction cavity is connected with very
Empty set system, so being equipped with heating system in reaction cavity, it further includes control cabinet and power supply system that the furnace body, which is connected with cooling system,
System, the transmission system, heating system, cooling system and vacuum system are connected with control cabinet and power-supply system respectively.
2. hi-temp hi-effective alloy according to claim 1 reacts purification furnace, which is characterized in that the upper end of the furnace body and/
Or lower end is equipped with the bell of retractable disassembly, the upper end of the crucible bell is fed or is discharged from upper end or described when opening
Crucible leaves furnace body from lower end when lower end bell is opened by transmission device to be fed or be discharged.
3. hi-temp hi-effective alloy according to claim 1 reacts purification furnace, which is characterized in that the furnace body wall is equipped with can
The fire door of disassembly is opened and closed, the crucible leaves furnace body from stove gate in oven door opening to be fed or be gone out by transmission device
Material.
4. hi-temp hi-effective alloy according to claim 1 reacts purification furnace, which is characterized in that the pulling apparatus includes rising
Axis and agitating device drop, and the agitating device sinks under the drive of lifting shaft into Stirring in crucible or in lifting shaft
Crucible is lifted off under drive.
5. hi-temp hi-effective alloy according to claim 4 reacts purification furnace, which is characterized in that the agitating device and lifting
Axis is equipped with the cooling seed crystal of material metal.
6. hi-temp hi-effective alloy according to claim 1 reacts purification furnace, which is characterized in that the furnace body is arranged in grate
On.
7. hi-temp hi-effective alloy according to claim 1 reacts purification furnace, which is characterized in that the cooling system includes furnace
Body collet water cooling, furnace body chassis water cooling and heating electrode water cooling.
8. hi-temp hi-effective alloy according to any one of claims 1 to 7 reacts purification furnace, which is characterized in that the vacuum
System includes vacuum pump, filter and specific gas inlet duct, and the vacuum pump passes through pipe by pipeline again after filter
Road is connect with the furnace body, and specific gas inlet duct is connected in the connecting pipe of the filter and the furnace body.
9. hi-temp hi-effective alloy according to claim 8 reacts purification furnace, which is characterized in that the control cabinet passes through PLC
Control the heating temperature of software control furnace body, the vacuum degree of furnace chamber, the rotation speed of material, pull rate, vacuum degree and into
The air inlet of row specific gas controls.
10. hi-temp hi-effective alloy according to claim 9 reacts purification furnace, which is characterized in that the specific gas is also
Raw-gas.
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111690833A (en) * | 2019-03-12 | 2020-09-22 | 上海韵申新能源科技有限公司 | High-temperature efficient alloy reaction purification furnace and alloy reaction process |
CN111701506A (en) * | 2020-06-10 | 2020-09-25 | 合肥百思新材料研究院有限公司 | High vacuum stirring equipment for organic material synthesis and rapid heat dissipation |
CN113579206A (en) * | 2021-08-06 | 2021-11-02 | 江苏隆达超合金航材有限公司 | Low-expansion oxidation-resistant high-temperature alloy production device |
-
2019
- 2019-03-12 CN CN201920314632.3U patent/CN209702829U/en active Active
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111690833A (en) * | 2019-03-12 | 2020-09-22 | 上海韵申新能源科技有限公司 | High-temperature efficient alloy reaction purification furnace and alloy reaction process |
CN111701506A (en) * | 2020-06-10 | 2020-09-25 | 合肥百思新材料研究院有限公司 | High vacuum stirring equipment for organic material synthesis and rapid heat dissipation |
CN113579206A (en) * | 2021-08-06 | 2021-11-02 | 江苏隆达超合金航材有限公司 | Low-expansion oxidation-resistant high-temperature alloy production device |
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