CN209591990U - Transfer device - Google Patents

Abstract

The utility model discloses a kind of transfer devices characterized by comprising X/Y plane driving device is set on base and moves horizontally for drive transfer device in X/Y plane；First rack is fixedly arranged in the X/Y plane driving device；Universal load-supporting platform is set to the first bottom of the frame, is used to support semiconductor crystal bar lower end surface；Pressing device is set to above universal load-supporting platform, is acted synergistically with the universal load-supporting platform and vertical clamping semiconductor crystal bar and the semiconductor crystal bar is driven to rotate.The utility model is realized by universal load-supporting platform has adaptive fitting of the semiconductor crystal bar of inclined end face in vertical clamp to both ends, ensure that the stability when rotation of semiconductor crystal bar；Meanwhile being movably arranged in X/Y plane reduces and positions repeatedly needed for transport process, improve processing efficiency so that the utility model has transport function.

Description

Transfer device

Technical field

The utility model relates to field of semiconductor processing, especially a transfer device.

Background technique

Semiconductor crystal bar is round as a ball, fluting is very important step procedure of processing in semiconductor fabrication processes.And half-and-half Before the processing of conductor crystal bar, semiconductor crystal bar can precise positioning by strong influence to subsequent round as a ball semiconductor crystal bar in the process Utilization rate height.The existing round as a ball groover of semiconductor is by the way of horizontal processing, and this kind of processing method is in precise positioning The X-axis and Y Spindle Status of calibration semiconductor crystal bar are generally required when semiconductor crystal bar, this kind of accurate mode is cumbersome, low efficiency Under.

Utility model content

To solve the above problems, the utility model provides one kind for assisting semiconductor crystal bar vertically to position and can realize Transport the transfer device with a variety of works energy of semiconductor crystal bar.

In order to achieve the above objects and other related objects, a kind of transfer device, comprising:

X/Y plane driving device is set on base and moves horizontally for drive transfer device in X/Y plane；

First rack is fixedly arranged in the X/Y plane driving device；

Universal load-supporting platform is set to the first bottom of the frame, is used to support semiconductor crystal bar lower end surface；

Pressing device is set to above universal load-supporting platform, with the vertical clamping semiconductor of universal load-supporting platform synergistic effect Crystal bar simultaneously drives the semiconductor crystal bar to rotate.

The utility model is realized by universal load-supporting platform there is the semiconductor crystal bar of inclined end face vertically to press from both sides both ends Adaptive fitting when tight ensure that the stability when rotation of semiconductor crystal bar；Meanwhile being movably arranged in X/Y plane so that The utility model has transport function, reduces and positions repeatedly needed for transport process, improves processing efficiency.

The utility model transfer device further improvement lies in that, pass through tune between the universal load-supporting platform and the first rack Save platform connection；The adjusting platform includes: can be along Y axis mobile connection between Y-axis regulating platform, with the first rack；X-axis is adjusted Platform can be moved along the x-axis between Y-axis regulating platform and be connect；The Y-axis adjusts platform, X-axis adjusts platform by being arranged in the first machine Frame bottom and the adjusting screw for being located at adjusting four side of platform, which are adjusted, to be positioned.

The utility model transfer device further improvement lies in that, the pressing device, comprising:

Compression plate is set to above universal load-supporting platform and coaxial with universal load-supporting platform；

Hold-down mechanism is set to the compression plate vertical lifting for driving and being attached thereto in the first rack；

Rotation driving is set in the first rack and the compression plate being attached thereto rotation is driven to be clamped in universal hold to drive Semiconductor crystal bar rotation between microscope carrier and pressing device.

The utility model transfer device further improvement lies in that, the hold-down mechanism is screw structure, including is installed in The driving mechanism for compressing of first frame top；With the screw rod of the output axis connection of the driving mechanism for compressing；It can be in the silk of rotation The lower clamping arm beam for realizing lifting of bar driving.

The utility model transfer device further improvement lies in that, the compression plate has the function of universal adjustment.

Detailed description of the invention

Fig. 1 is the schematic perspective view with shield of the utility model；

Fig. 2 is the schematic perspective view after the utility model removal shield；

Fig. 3 is the structural schematic diagram at another visual angle after the utility model removal shield；

Fig. 4 is the front view of this utility model；

Fig. 5 is the left view of the utility model；

Fig. 6 is the top view of the utility model；

Fig. 7 is the structural schematic diagram of vertical fixed device；

Fig. 8 is the structural schematic diagram at vertical fixed another visual angle of device；

Fig. 9 is status diagram of semiconductor crystal bar clamping when on vertical fixed device；

Figure 10 is top view of semiconductor crystal bar clamping when on vertical fixed device；

Figure 11 is the structural schematic diagram of clamping jaw regulating device；

Figure 12 is the rearview of clamping jaw regulating device；

Figure 13 is status diagram of semiconductor crystal bar clamping when on transfer device；

Figure 14 is the status diagram at another visual angle of semiconductor crystal bar clamping when on transfer device；

Figure 15 is the structural schematic diagram of combinated grinding wheel；

Figure 16 is the sectional view of combinated grinding wheel；

When Figure 17 a~17c is the diagrammatic cross-section of combinated grinding wheel and acts on semiconductor crystal bar with semiconductor crystal bar Between relative position schematic diagram.

Appended drawing reference: 1000. base, 2000. material loading platform, 2100. turnover mechanism, 2110. bracket, 2200. rotating wheel Fixed 2310. compressor arm of device, 2320. rotary cylinder, 3000. vertical location apparatus, 3100. second rack of group 2300. 3110. longitudinal slide rails 3200. vertically fix 3211. first knife rest 3211a. longitudinal chute of clamping device on device 3210. 3212 clamping jaw 3212a.V connected in star 3212b. horizontal concrete chute of 3211b. horizontal slide rail, 3213. clamping jaw driving device 3213a. First 3214. compact heap of driving unit 3213b. driving rack 3213c. transmission gear, 3215. opposite type sensor 3216. 3220. 3221. second knife rest of lower fixture, 3300. clamping jaw regulating device of external diameter measuring device, 3310. lifting device 3311. 3312. first speed reducer of driving motor, 3313. driving chain, 3320. locking system 3321. locks sprocket wheel 3322. Anti-detachment 4000. crystal orientation of the mechanism positioning of 3323. locking cylinder of lockable mechanism, 3324. locking part, 3325. maintaining part 3326. The fine grinding of 5200. emery wheel motor of instrument 5000. grinding attachment, 5100. devil's lifting device, 5300. combinated grinding wheel 5310. 5311. first positioning step of grinding wheel ontology, 5320. rough grinding wheel ontology, 5321. second positioning step 5330. suits grinding wheel The huge magic sand circle 5350. of 5331. first locating ring of ontology, 5332. second locating ring 5340. roughly grinds sand circle 5360. and cuts sand Enclose 5370. chip space, 6000. discharging platform, 7000. transfer device 7100.XY plane driving device 7110.X axis slide unit The rotation of 7400. pressing device of 7120.Y axis slide unit 7200. first rack, 7300. universal load-supporting platform, 7410. compression plate 7420. Turn driving 7430. driving mechanism for compressing, 7431. 7432. second speed reducer of servo motor, 7433. screw rod, 7434. clamping arm 8000. safety guard 7500. of beam adjusts platform 7510.Y axis regulating platform 7520.X axis regulating platform 7530. and adjusts screw 9000. semiconductor crystal bar

Specific embodiment

The embodiments of the present invention is described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein Same or similar label indicates same or similar element or element with the same or similar functions from beginning to end.Lead to below It crosses the embodiment being described with reference to the drawings to be exemplary, is only used for explaining the utility model, and should not be understood as practical to this Novel limitation.

In the description of the present invention, it should be understood that term " center ", " longitudinal direction ", " transverse direction ", " length ", " width Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside", The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise " be based on the orientation or positional relationship shown in the drawings, be only for Convenient for description the utility model and simplify description, rather than the device or element of indication or suggestion meaning must have specifically Orientation is constructed and operated in a specific orientation, therefore should not be understood as limiting the present invention.In addition, term " first ", " second " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or implicitly indicates indicated technology The quantity of feature.Define " first " as a result, the feature of " second " can explicitly or implicitly include it is one or more The feature.The meaning of " plurality " is two or more in the description of the present invention, unless otherwise clearly specific It limits.

In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally Connection；It can be mechanical connection, be also possible to be electrically connected or can mutually communicate；It can be directly connected, it can also be in Between medium be indirectly connected, can be the connection inside two elements or the interaction relationship of two elements.For this field For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.

In the present invention unless specifically defined or limited otherwise, fisrt feature the "upper" of second feature or it "lower" may include that the first and second features directly contact, and also may include that the first and second features are not direct contacts but lead to Cross the other characterisation contact between them.Moreover, fisrt feature includes above the second feature " above ", " above " and " above " One feature is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.First is special Sign includes fisrt feature right above second feature and oblique upper under the second feature " below ", " below " and " below ", or only Indicate that first feature horizontal height is less than second feature.

Following disclosure provides many different embodiments or example is used to realize the different structure of the utility model. In order to simplify the disclosure of the utility model, hereinafter the component of specific examples and setting are described.Certainly, they are only Example, and purpose does not lie in limitation the utility model.In addition, the utility model can in different examples repeat reference numerals And/or reference letter, this repetition are for purposes of simplicity and clarity, itself not indicate discussed various embodiments And/or the relationship between setting.In addition, the example of various specific techniques and material that the utility model provides, but this Field those of ordinary skill can be appreciated that the application of other techniques and/or the use of other materials.

Referring to FIG. 1 to 6, the vertical round as a ball groover of a kind of semiconductor crystal bar of the utility model, including base 1000, on base then along the x axis sequentially be provided with material loading platform 2000, vertical location apparatus 3000, crystal orientation position indicator 4000, grinding attachment 5000, discharging platform 6000 and semiconductor crystal bar is transported in each workspace and drives semiconductor The transfer device 7000 that crystal bar rotates when round as a ball.

Refering to shown in Fig. 2, Fig. 3, material loading platform includes a turnover mechanism 2100, and the turnover mechanism and base are hingedly and in liquid 90 ° of overturnings are realized under the driving of cylinder pressure (not shown).Meanwhile two rows of X-directions are provided on the turnover mechanism 2100 The rotating wheel group 2200 of extension is in order to semiconductor crystal bar 9000 to be directed into material loading platform.It is arranged by the side of turnover mechanism There are two fixed devices 2300, which includes that a compressor arm 2310 and one are fixed on turnover mechanism 2100 Rotary cylinder 2320 forms, and rotary cylinder driving compressor arm turns to 2100 top of turnover mechanism when feeding, and drives compressor arm Retraction rotate in place after compressor arm to being pressed on semiconductor crystal bar to be fixed on material loading platform on semiconductor crystal bar 9000, Bracket 2110 is additionally provided with below turnover mechanism simultaneously, the semiconductor crystal bar being straightened for support prevent its from It is fallen below material platform 2000, and limits the minimum lower limit of semiconductor crystal bar its lower end surface after being straightened, preferably , a semi-circular indentation is provided on the bracket, transfer device 7000 is to 9000 lower end surface of semiconductor crystal bar when in order to transport Support.

After semiconductor crystal bar overturns 90 °, transfer device 7000 is acted, and is moved at material loading platform and is clamped positioned at semiconductor Crystal bar both ends, simultaneously, the fixation device 2300 in material loading platform 2000 return back to initial position to unclamp semiconductor crystal bar. Then semiconductor crystal bar 9000 is brought away from material loading platform；Material loading platform overturns 90 ° and returns back to initial position.

Refering to shown in figure Fig. 2, Fig. 3, Figure 13 and Figure 14；Transfer device 7000 includes that can implement X/Y plane on base The X/Y plane driving device 7100 inside moved horizontally, the X/Y plane driving device are slidably connected with base 1000 by one and can be The X-axis slide unit 7110 that moves along the x axis on base and the Y-axis slide unit that can be moved on X-axis slide unit and along the y axis is set 7120 compositions.First rack 7200 is fixed on Y-axis slide unit, is adjusted it by X/Y plane driving device 7100 and is located at X/Y plane Interior accurate coordinates.Universal load-supporting platform 7300 is spindle rotationally arranged in the bottom of the first rack 7100.Meanwhile in the present embodiment In, there are biggish damping (i.e. universal adjustment parts between the universal adjustment part and its ontology in above-mentioned universal load-supporting platform The deflection of adaptation semiconductor die plane rod end angle must can just occur under semiconductor crystal bar weight, and turn with semiconductor crystal bar It then will not relative rotation between semiconductor crystal bar and the universal load-supporting playscript with stage directions body when dynamic).

The top of universal load-supporting platform is provided with a pressing device 7400, is used for dropping place in universal load-supporting platform 7200 Semiconductor crystal bar 9000 clamp.The detailed construction of the pressing device are as follows: one being arranged in above universal load-supporting platform and same The universal load-supporting platform coaxial line of compression plate 7410 with end face universal adjustment function, compression plate and lower section, and be connected thereto Rotation driving 7420 driving under drive semiconductor into side rotate.The driving of the rotation simultaneously, which is fixed on, axially to be gone up and down along Z axis Hold-down mechanism 7430 on, to realize being fixedly clamped to semiconductor crystal bar 9000.In a specific embodiment, rotation driving can Think servo motor, stepper motor etc..

Detailed, which includes that specific structure includes, and the compression for being fixed at 7200 top of the first rack is driven Motivation structure 7430, the driving mechanism for compressing are made of a servo motor 7431 and one second speed reducer 7432, in second deceleration A screw rod 7433 rotated with output shaft is then fixedly connected on the output shaft of machine, the screw rod is longitudinally disposed.Simultaneously in the first machine Also horizontal on frame 7200 to be provided with a clamping arm beam 7434, one end is spirally connected with screw rod, and can be under the driving of the screw rod of rotation Realization accurately moves up and down, and the fixed upper surface in one end is fixedly installed with rotation driving 7420, and drives and drive with rotation 7420 7410 synchronization liftings of compression plate being fixedly connected.In the present embodiment, it is preferred that in order to guarantee clamping arm beam by silk Bar itself will not rotate during driving, and pass through sliding slot and sliding rail form between clamping arm beam and the first rack.

In actual use, universal load-supporting platform and compression plate inevitably will appear the inadequate feelings of concentricity during the installation process Condition, and in order to improve this kind of situation allow it to that universal load-supporting platform 7300 and compression plate can be kept at any time when in use 7410 co-rotations are provided with an adjusting platform 7500 in the bottom of universal load-supporting platform.The adjusting platform includes: Y-axis regulating platform 7510, the Y-axis regulating platform connect with the basal sliding of the first rack by T shape sliding slot realization is slidably connected, for adjust its with Relative position between first rack in the Y-axis direction；And one be slidably mounted on X-axis regulating platform on Y-axis regulating platform 7510 7520, it is equally slidably connected by T-slot between the X-axis regulating platform and Y-axis regulating platform and X-axis slide unit can be on Y-axis slide unit Carry out the adjusting of X-direction position.The bottom of the first rack is provided at least four adjusting screws 7530 simultaneously, sets up separately and is adjusting The surrounding for saving platform is twisted the change for adjusting screw realization length of shaft by rotating, and then is played sliding to X-axis slide unit and Y-axis Platform positioning is adjusted.

It is known that because of technique and processing method problem when semiconductor crystal bar is truncated, necessarily will appear the end face at its both ends with The central axis upright degree of itself is inadequate, so that transfer device certainly exists Z-direction in clamping semiconductor crystal bar Deflection.Therefore the utilization rate that semiconductor crystal bar is promoted before round as a ball semiconductor crystal bar, must carry out Z-direction to it It is accurately positioned.

It is as described above, it is flat by adjusting XY after semiconductor crystal bar 9000, which is transported device 7000, takes away material loading platform Semiconductor crystal bar is fed through in vertical location apparatus by the position of face driving device 7100, vertical location apparatus immediately to this half Conductor crystal bar 9000 is positioned.

In conjunction with shown in Fig. 2, Fig. 3, Fig. 7~Figure 10, vertical location apparatus 3000 includes: the second rack 3100, vertically fixes Device 3200 and clamping jaw regulating device 3300.Wherein, the second rack is fixed on base 1000, vertically fixes device Then include can clamping jaw regulating device driving under respectively independent-lifting upper clamping device 3210 and lower fixture 3220.

Detailed, upper clamping device includes the first knife rest 3211 being slidably connected with the second rack 3100.First knife rest In concave character type, opening facilitates the entrance of semiconductor crystal bar towards transfer device.On the cantilever of the first knife rest recess two sides The installation faced there are two for positioning and the clamping jaw 3212 of clamping semiconductor crystal bar, and two face be used for Measure the opposite type sensor 3215 of semiconductor crystal bar upper end position.Wherein, for more quasi- full positioning semiconductor crystal bar, Enable higher with the shaft concentricity of universal load-supporting platform and compression plate in transfer device 7000 after positioning, two folders Pawl thinks to be provided with one on opposite for guiding semiconductor crystal bar to tend to the v-depression 3212a at two clamping jaw centers.Preferably, Two bevel edges of v-depression 3212a are arranged symmetrically, and the angular range between the slot bottom of v-depression 120 °~ 150°.And the optimal selection of the angle is then 135 °, the angle between two bevel edges is 90 degree at this time, then can guarantee semiconductor die It can be uniformly by four 90 degree of balanced radial thrusts each other, to promote the positioning of semiconductor crystal bar on the border of stick Precision.That also fixes on the first knife rest simultaneously is equipped with a clamping jaw driving device 3213, which can drive Two clamping jaws being attached thereto make synchronous relative motion, that is, synchronize to open or synchronize and close up.In the present embodiment, to penetrate pass Whether measurement and detection semiconductor crystal bar of the sensor for Subsequent semiconductor crystal bar height enter in vertical location apparatus；

And lower fixture 3220 then includes one and second the second knife rest 3221 that is slidably connected of rack 3100, second knife Frame is located at below the first knife rest and is horizontally disposed with, while second cutter frame structure is equally in opening towards transfer device 7000 Concave.There are two for positioning and clamping half for the installation equally faced on the cantilever of two stretchings of the second knife rest The clamping jaw 3212 of conductor crystal bar, and two opposite type sensors for being used to measure semiconductor crystal bar upper end position faced 3215.And clamping jaw driving device 3213 is similarly installed on the second knife rest, the opening for driving two clamping jaws synchronous Or close up.In the present embodiment, opposite type sensor is for detecting whether semiconductor crystal bar enters in vertical location apparatus.

In the present embodiment, after semiconductor crystal bar, which is transported device, to be sent into place, upper clamping device rises, and by pair The upper end coordinate values that sensor measures semiconductor crystal bar are penetrated, and semiconductor boule length is gone out with true by measured data reduction Clip position when fixed clamped position positioning upper in next step and fixed semiconductor crystal bar.

After the length of semiconductor crystal bar measures, and the clip position of upper and lower clamping device determines, upper clamping device 3210, lower fixture 3220 works, and two clamping jaws 3212 of the two are synchronous to be closed up.When closing up to certain position, upper folder A clamping jaw in a clamping jaw and lower fixture in tight device is inevitable leading with the inclined surface of semiconductor crystal bar side It contacts and a lasting radial thrust simultaneously is applied to contact position, as set of jaws is persistently closed up in upper and lower clamping device, partly lead Body crystal bar is slowly corrected, until the set of jaws in upper and lower clamping device closes up rear (i.e. four inclined-planes in two clamping jaws in place All it is clamped on the side elevation of semiconductor crystal bar), the Z axis of semiconductor crystal bar center line axis, which is accurately positioned, at this time completes.

On the basis of the present embodiment, damages when set of jaws 3212 is closed up during positioning calibration in order to prevent and partly lead Body crystal bar, is respectively designed with one piece of compact heap 3214 on two inclined-planes of clamping jaw 3212a, and the material of the compact heap is polyurethane Material.(polyurethane has biggish rigidity, and biggish deformation will not occur under the extruding of set of jaws and semiconductor crystal bar, from And the positioning calibration accuracy of semiconductor crystal bar is influenced, and can produce biggish frictional force between polyurethane and semiconductor crystal bar, make Vertical fixed device can preferably fix semiconductor crystal bar.Phenomena such as preventing it from sliding.

In conjunction with shown in Fig. 7 and Figure 12, in the present embodiment, clamping jaw driving device 3213 includes: the first driving unit 3213a (in specific embodiment, which can be filled for telescopic cylinder, hydraulic cylinder etc. with the driving of axial stretching function It sets).By taking telescopic cylinder as an example, the end of the telescopic rod of telescopic cylinder is fixedly connected with one of them in two clamping jaws 3212, And using the clamping jaw as active clamping jaw, and the cylinder body of telescopic cylinder is then separately fixed at corresponding first knife rest 3211, the second knife On frame 3221.It is horizontal on two clamping jaws simultaneously to be provided with a driving rack 3213b, between this two driving racks then It is provided with the transmission gear 3213c being meshed respectively with this two driving racks.When need to clamp group close up when, telescopic cylinder Telescopic rod stretches out, and mutually another clamping jaw of the clamping jaw being attached thereto is driven to draw close, and passes through two driving cogs as the clamping jaw of active at this time The transmission of item and transmission gear drives another driven clamping jaw 3212 to draw close to active clamping jaw to realize that the synchronous of set of jaws is closed Hold together.And when two clamping jaws need to open, reverse operating is only needed, i.e. the telescopic rod of retraction telescopic cylinder can be completed.In this reality It applies in example, it is preferred that in order to guarantee the stability being driven and driving rack 3213b and transmission gear using helical teeth structure.

On the basis of the above embodiments, it is preferred that in order to guarantee that upper clamping device 3210 and lower fixture 3220 exist Stability when lifting in the second rack 3100, longitudinal longitudinal slide rail for being provided at least one in the second rack 3110, and compatible longitudinal chute 3211a therewith is then respectively arranged on the first knife rest 3211 and the second knife rest 3221；

Further, it in order to guarantee stabilization of the clamping jaw 3212 on the first knife rest, the second knife rest, prevents by half Clamping jaw deforms caused by conductor crystal bar is overweight, horizontal respectively on the first knife rest 3211, the second knife rest 3221 to be provided at least One horizontal slide rail 3211b, and the compatible horizontal concrete chute of the horizontal slide rail being adapted to therewith is then provided on clamping jaw 3212 3212b。

Required 3210 liters of upper clamping device for the linear measure longimetry of semiconductor crystal bar in above-mentioned semiconductor crystal bar position fixing process Drop, 3220 elevating function of lower fixture pass through the realization of clamping jaw regulating device 3300.

In conjunction with shown in Figure 11, Figure 12, clamping jaw regulating device 3300 includes: lifting device 3310, locking system 3320.

Wherein, the detailed construction of lifting device is, a driving motor 3311 for being mounted on 3100 top of the second rack, The first speed reducer 3312 being connect with driving motor；One longitudinally disposed driving chain 3313, the driving chain are wound around On two sprocket wheels of lower distribution.The sprocket wheel being located above in above-mentioned two sprocket wheel is fixed on the shaft end of the first speed reducer output shaft On, and the sprocket wheel of lower section is then rotatably fixed on the bottom of the second rack 3100.In specific embodiment, driving motor 3311 stepper motor, the servo motors etc. that can be accurately driven for implementation.

And locking system 3320 then includes locking sprocket wheel 3321 and lockable mechanism 3322, wherein locking sprocket wheel is rotatably pacified On the second knife rest 3221, and it is meshed with driving chain.Lockable mechanism be then equally fixed on the second knife rest and by with It locks the combination between sprocket wheel, be detached to control relative status (the i.e. sway chain wheel locking between locking sprocket wheel and driving chain On driving chain or locking sprocket wheel can be rotated relative to driving chain).

In specific embodiment, the detailed construction of lockable mechanism 3322 are as follows: be fixedly mounted on the second knife rest including one On locking cylinder 3323, the telescopic rod of the locking cylinder can be along the radial expansion of locking sprocket wheel, while stretching in locking cylinder A locking part 3324 is fixed on the end of contracting bar, which is rectangular block architecture, in the locking part close to lock Determine sprocket wheel side and be provided with a bolt, when locking part be locked cylinder drive protrude into locking sprocket wheel when, lock the stuck locking of sprocket wheel Sprocket wheel is allowed to no longer produce relative rotation between driving chain.At this point, the lifting that lower fixture is synchronous with driving chain.

Meanwhile in the specific implementation process, because locking part 3324 enter lock sprocket wheel after, suffered by from locking The active force of sprocket wheel is larger, and the telescopic rod of locking cylinder is easy to cause to generate deformation in prolonged loading process, influences to lock The service life of tight cylinder.In order to solve this problem, that also fixes on the second knife rest 3221 is provided with a maintaining part 3325, should Maintaining part is made of two pressure plates, is set up separately in the two sides of locking part, and is formed one between the second knife rest and be parallel to lock-up cylinder The sliding channel of telescopic direction, locking part are slidably disposed in the sliding channel.When locking part is by from locking sprocket wheel Relatively noticeable effort and when changing the telescopic rod form of locking cylinder, maintaining part is compressed on above locking part, play one it is steady It is set for using.

Can be in realization mode at other, which can also be one along the setting of locking part motion profile direction Pane is provided with a sliding slot in the pane, and locking part is slidably arranged in the sliding slot, and along sway chain wheel radial Movement.

Further, it was known that in some cases, driving chain is in transmission process it is possible that jitter conditions, lead It causes to be disengaged between driving chain and locking sprocket wheel, so that being disconnected between lower fixture and driving chain.For Eliminate the possibility that this kind of situation occurs.An anti-detachment mechanism 3326 is also provided in lockable mechanism, which is U Type structure, two parallel sides are fixed on the second knife rest 3221 so that anti-detachment mechanism can be synchronous with lower fixture Lifting, and be located at bottom anti-detachment mechanism 3326 slot bottom then with driving chain mutually close to.When driving chain shake will When being disengaged from locking sprocket wheel, the slot bottom of anti-detachment mechanism then necessarily applies one towards sway chain wheel radial to driving chain Active force, thus stop keep off driving chain from locking sprocket wheel on be detached from.

It can be seen from the above, when semiconductor crystal bar is clamped by upper clamping device 3210, lower fixture 3220 and positions completion Afterwards, the pressing device 7400 in transfer device 7000 rises disengages with the upper surface of semiconductor crystal bar, then semiconductor die First whole be raised to leaves 7300 table top certain distance of universal load-supporting platform to stick under the action of vertical location apparatus, then exists again It hurtles down under vertical vertical location apparatus driving onto universal load-supporting platform, thus to the universal adjustment part in universal load-supporting platform A biggish impact force is generated, so that the universal adjustment part be forced to occur to adapt to semiconductor crystal bar lower end surface sharping degree Angular transition, the compression plate in last pressing device is under the suppressing for compressing driving device effect, the universal adjustment of compression plate Part also occurs to adapt to the angular transition of semiconductor crystal bar upper end sharping degree.Transfer device clamping semiconductor crystal bar at this time 9000 complete, and can carry out the semiconductor grinding operation of next step.

In conjunction with shown in Fig. 3, Figure 15, grinding attachment 5000 includes: the devil's lifting device being fixed on base 1000 5100, it is fixed on devil's lifting device and realizes under the driving of devil's lifting device the emery wheel motor of elevating function 5200, and the combinated grinding wheel 5300 for being fixedly mounted on the output end of emery wheel motor and being gone up and down jointly with it.In this reality It applies in example, combinated grinding wheel has corase grinding, fine grinding, slotting function；When needing to roughly grind in real time to semiconductor crystal bar, refine operation, The relative position between semiconductor crystal bar and combinated grinding wheel 5300 is adjusted by transfer device 7000, so that the semiconductor die of rotation Corase grinding workspace and refining work area in combinated grinding wheel of the stick with rotation and in moving up and down are in contact, to reach combinated grinding wheel The lateral wall of 5300 pairs of semiconductor crystal bars 9000 generates grinding operation.

And when needing to cut slot, then it needs that the semiconductor crystal bar that corase grinding and fine grinding finish first is transported to radial positioning instrument 4000 Place carries out the measurement of internal crystal phase structure, and rotates semiconductor crystal bar after measurement and cut groove location to required, then passes through rotation Combinated grinding wheel carry out longitudinal cutting slot operation.

Specifically, in conjunction with shown in Figure 17 a~17c, to make combinated grinding wheel have the function of above-mentioned corase grinding, refining, cut slot, such as Shown in Figure 15, Figure 16, combinated grinding wheel 5300 successively includes finishing wheel ontology 5310, the rough grinding wheel ontology that diameter sequentially increases 5320, abrasive cut-off wheel ontology 5330.Wherein, finishing wheel ontology and finishing wheel ontology are all mounted on abrasive cut-off wheel ontology, And finishing wheel ontology axially protrudes from rough grinding wheel ontology, the stepped arrangement of three.And abrasive cut-off wheel ontology then with grinding wheel The output end of driving motor is fixedly connected.At the same time, it refines in the one side of sand and rough grinding wheel towards semiconductor crystal bar respectively It is provided with corresponding fine grinding sand circle 5340, corase grinding sand circle 5350；And cutting is then provided on the wheel rim of abrasive cut-off wheel ontology Sand circle 5360.

In actual use, because 9000 hardness of semiconductor crystal bar is higher, it be easy to cause the middle fine grinding of combinated grinding wheel Between grinding wheel ontology 5310 and abrasive cut-off wheel ontology 5330, between rough grinding wheel ontology 5320 and abrasive cut-off wheel ontology 5330, It is detachably connected by bolt realization.To facilitate worker to make replacement to the part of serious wear in use process.On simultaneously State being mounted on the output end of emery wheel motor 5200 for combinated grinding wheel Whole-dismountable.

On the basis of the above embodiments, in order to guaranteeing the finishing wheel ontology in combinated grinding wheel, rough grinding wheel sheet The concentricity of body, abrasive cut-off wheel ontology after being assembled together, in abrasive cut-off wheel ontology and finishing wheel ontology and rough grinding wheel In the one side of ontology joint, it is respectively arranged with the first locating ring 5331 and the second locating ring 5332.The two locating rings are recessed If being arranged concentrically with suiting on grinding wheel ontology, and with abrasive cut-off wheel ontology.Simultaneously in finishing wheel ontology towards abrasive cut-off wheel sheet The side of body be then provided with body concentric first positioning step 5311 of finishing wheel sheet, when installation, the first positioning step is nested In the first locating ring, to guarantee the concentricity between finishing wheel ontology and abrasive cut-off wheel ontology.And rough grinding wheel this dignity To the side of abrasive cut-off wheel ontology be then provided with body concentric second positioning step 5321 of rough grinding wheel sheet, when installation, this Two positioning steps are nested in the second locating ring, to guarantee the concentricity of rough grinding wheel ontology Yu abrasive cut-off wheel ontology.On simultaneously State structure be also beneficial to work replacement component be quickly find accurately.In the present embodiment, the first locating ring, the first positioning step；The Two locating rings, the second positioning step profile be circle, but the profile of said combination is not limited only to circle, can also be with It is the polygon etc. of rule.

It on the basis of the above embodiments, is in being equipped with for spoke-like on fine grinding sand circle 5340, corase grinding sand circle 5350 Several chip spaces 5370, with for combinated grinding wheel grinded semiconductor crystal bar be rubbed the waste material removed can be quickly from the chip removal It is discharged in slot, preventing waste material can not quickly be discharged and be trapped between semiconductor crystal bar and combinated grinding wheel and reduce grinding essence Degree.Preferably, chip space is U-shaped groove.

On the basis of the above embodiments, refine sand circle 5340, corase grinding sand circle 5350, cutting sand circle 5360 in for pair The effective component that semiconductor crystal bar 9000 generates grinding is diamond dust.

In actual grinding process, occurs semiconductor crystal bar surface in order to prevent and male and female face occur (combinated grinding wheel is being ground Cutting semiconductor crystal bar is to have multiple while being ground generation on semiconductor crystal bar surface), combinated grinding wheel 5300 and semiconductor crystal bar There are certain angles between axis.

Further, at grinded semiconductor crystal bar outer surface, in order to promote the precision of grinding, semiconductor crystal bar is promoted Whole utilization rate.It is vertical fixed after vertical location apparatus completes positioning to semiconductor crystal bar and transfer device completes clamping Position device can also measure the outer diameter of semiconductor crystal bar.

And measurement movement then can be by the outer diameter that is separately mounted on upper clamping device 3210 and lower fixture 3220 Measuring device 3216 is completed.The external diameter measuring device is arranged radially along semiconductor crystal bar, when needing to measure semiconductor crystal bar, is turned Shipping unit rotates semiconductor crystal bar, and external diameter measuring device 3216 calculates its outer diameter numerical value by contacting semiconductor crystal bar border, And numerical value is sent to PLC control unit, PLC control unit then goes out according to measured semiconductor into crystal bar outer diameter data reduction The required depth of cut.

After the completion of semiconductor die rod milling is cut and cut, semiconductor is transported at discharging platform by transfer device, and discharging is flat Platform 6000 receives semiconductor crystal bar 9000, then by being offloaded on material conveying trolley.

Wherein, the structure of above-mentioned discharging platform is identical as material loading platform, and discharge process returns existing operation for feeding process.

Meanwhile it is additionally provided with outside the utility model to use the whole closed safety guard 8000 of the utility model In protection outworker, and multiple observation doors to be opened/closed are then provided on safety guard.

Claims (5)

1. a kind of transfer device characterized by comprising X/Y plane driving device is set on base for driving transhipment dress Set moving horizontally in X/Y plane；

First rack is fixedly arranged in the X/Y plane driving device；

Universal load-supporting platform is set to the first bottom of the frame, is used to support semiconductor crystal bar lower end surface；

Pressing device is set to above universal load-supporting platform, with the vertical clamping semiconductor crystal bar of universal load-supporting platform synergistic effect And the semiconductor crystal bar is driven to rotate.

2. a kind of transfer device as described in claim 1, it is characterised in that: lead between the universal load-supporting platform and the first rack Overregulate platform connection；The adjusting platform includes: can be along Y-axis mobile connection between Y-axis regulating platform, with the first rack；X-axis tune Platform is saved, can move along the x-axis and connect between Y-axis regulating platform；The Y-axis adjusts platform, X-axis adjusts platform by being arranged first Bottom of the frame and the adjusting screw for being located at adjusting four side of platform, which are adjusted, to be positioned.

3. a kind of transfer device as described in claim 1, it is characterised in that: compression plate is set to above universal load-supporting platform simultaneously It is coaxial with universal load-supporting platform；

Hold-down mechanism is set to the compression plate vertical lifting for driving and being attached thereto in the first rack；

Rotation driving is set in the first rack and the compression plate being attached thereto rotation is driven to be clamped in universal load-supporting platform to drive Semiconductor crystal bar rotation between pressing device.

4. a kind of transfer device as claimed in claim 3, it is characterised in that: the hold-down mechanism is screw structure, including solid It is located at the driving mechanism for compressing of the first frame top；With the screw rod of the output axis connection of the driving mechanism for compressing；It can rotate The lower clamping arm beam for realizing lifting of screw rod driving.

5. a kind of transfer device as claimed in claim 3, it is characterised in that: the compression plate has the function of universal adjustment.