CN209571401U - A kind of installation tool - Google Patents
A kind of installation tool Download PDFInfo
- Publication number
- CN209571401U CN209571401U CN201920652370.1U CN201920652370U CN209571401U CN 209571401 U CN209571401 U CN 209571401U CN 201920652370 U CN201920652370 U CN 201920652370U CN 209571401 U CN209571401 U CN 209571401U
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- toroidal frame
- installation tool
- hook
- tool according
- horizontal part
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Abstract
The utility model relates to technical field of manufacturing semiconductors more particularly to a kind of installation tools, and for the installation of electrostatic chuck, installation tool includes: a toroidal frame, and toroidal frame is equipped with multiple mounting holes, and multiple mounting holes are uniformly arranged along the circumferential direction of toroidal frame；Multiple hooks, are distributed in the outer circumferential of toroidal frame, and hook includes hook portion, the same face of the hook portions of multiple hooks towards toroidal frame；One annular flange is set to the outer of toroidal frame Yu hook portion one side in the same direction.The beneficial effect of technical solutions of the utility model is: providing a kind of installation tool of electrostatic chuck, keeps distance between top electrode and air distribution disk uniform, avoids polymer aggregational in gap and the yield of influence etching processing procedure.
Description
Technical field
The utility model relates to technical field of manufacturing semiconductors more particularly to a kind of for installing the erector of electrostatic chuck
Tool.
Background technique
With the development of semiconductor fabrication process, plasma-treating technology is widely used in the system of semiconductor components and devices
Cheng Zhong, above-mentioned processing procedure, such as deposition, etching technics are usually to carry out in plasma processing apparatus.Electrostatic chuck
(Electrostatic chuck, abbreviation ESC) be it is a kind of suitable for atmosphere or the ultra-clean wafer carrier body of vacuum environment, grab
Take the general name of haulage equipment, used Electrostatic Absorption technology is a kind of substitution tradition machinery clamping, vacuum suction mode
Advantage technology, the extensive application in the fields such as semiconductor, Display panel, optics.
A kind of existing ESC includes top electrode (up ground ring) and air distribution disk (shower head), is powered on extremely round
Annular, air distribution disk are disc.Since the internal diameter of top electrode is slightly larger than the diameter of air distribution disk, top electrode and air distribution disk it
Between have the gap, if gap unevenly if will lead to the polymer (polymer) that generates in etching processing procedure be gathered in top electrode with point
Between gas disk, if polymer is fallen on the wafer etched, it is be easy to cause defect during etching wafer, influences crystalline substance
Round yield.Therefore, a kind of ESC installation tool is now needed, makes top electrode and air distribution disk distance uniformly, avoids cavity (chamber)
Interior etching processing procedure failure.
Summary of the invention
For the above-mentioned problems in the prior art, a kind of installation tool is now provided.
Specific technical solution is as follows:
The utility model includes a kind of installation tool, and for the installation of electrostatic chuck, the installation tool includes:
One toroidal frame, the toroidal frame are equipped with multiple mounting holes, circumferential direction of multiple mounting holes along the toroidal frame
It is uniformly arranged；
Multiple hooks are distributed in the outer circumferential of the toroidal frame, and the hook includes hook portion, the multiple hook
The same face of the hook portion towards the toroidal frame；
One annular flange is set to the outer of the one side in the same direction with the hook portion of the toroidal frame.
Preferably, the hook includes protruding portion, and described protruding portion one end is radially stretched from the outer circumferential of the toroidal frame
Out, the other end connects the hook portion.
Preferably, the hook portion includes vertical component effect and horizontal part；
One end of the vertical component effect connects the protruding portion, and the other end connects the horizontal part；
Described horizontal part one end connects the one end of the vertical component effect far from the protruding portion, and prolongs to the toroidal frame direction
It stretches.
Preferably, the length of the horizontal part is identical as the tab length.
Preferably, the horizontal part towards one end of the toroidal frame have the first cambered surface, first cambered surface with it is described
The cylinder adaptation that toroidal frame outer peripheral surface extends to form；
The horizontal part has the second cambered surface backwards to one end of the toroidal frame.
Preferably, the horizontal part is provided with the arcuate socket circumferentially concentric with the toroidal frame.
Preferably, the installation tool is used to the electrostatic chuck being installed to a cavity, the position of the arcuate socket and
Size and the intracorporal alignment pin position of the chamber and size fit.
Preferably, there are three the hook settings.
Preferably, the electrostatic chuck includes air distribution disk, and the internal diameter of the annular flange is adapted to the air distribution disk.
Preferably, the electrostatic chuck includes the top electrode of circular ring shape, the outer diameter of the annular flange and the top electrode
Internal diameter adaptation.
The beneficial effect of technical solutions of the utility model is: providing a kind of installation tool of electrostatic chuck, makes top electrode
Distance is uniform between air distribution disk, and then improves the yield of etching processing procedure.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of electrostatic chuck in the utility model embodiment；
Fig. 2 is the forward structure schematic diagram of installation tool in the utility model embodiment；
Fig. 3 is the structural schematic diagram backwards of installation tool in the utility model embodiment；
Fig. 4 is the assembling schematic diagram of installation tool in the utility model embodiment.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are in the premise for not making creative work
Under every other embodiment obtained, fall within the protection scope of the utility model.
It should be noted that in the absence of conflict, the feature in the embodiments of the present invention and embodiment can
To be combined with each other.
The utility model is described in further detail in the following with reference to the drawings and specific embodiments, but not as the utility model
It limits.
The utility model includes a kind of installation tool of electrostatic chuck, for the installation of electrostatic chuck, such as Fig. 2 and Fig. 3 institute
Show, installation tool includes:
One toroidal frame 1, toroidal frame are equipped with multiple mounting holes 10, and multiple mounting holes 10 are uniformly set along the circumferential direction of toroidal frame 1
It sets；
Multiple hooks 2, are distributed in the outer circumferential of toroidal frame 1, and hook includes hook portion, the hook portion direction of multiple hooks
The same face of toroidal frame 1；
One annular flange 3 is set to the outer of the one side in the same direction with hook portion of toroidal frame 1；
Hook includes protruding portion 20, and the outer circumferential of protruding portion 20 one end from toroidal frame 1 extends radially out, other end connecting hook
Extension portion；
Hook portion includes vertical component effect 21 and horizontal part 22；
One end of vertical component effect 21 connects protruding portion 20, and the other end connects horizontal part 22；
22 one end of horizontal part connects the one end of vertical component effect 21 far from protruding portion 20, and extends to 1 direction of toroidal frame；
Horizontal part 22 is provided with and the circumferential concentric arcuate socket 220 of toroidal frame 1；
Installation tool is used to electrostatic chuck being installed on a cavity, the position of arcuate socket 220 and size and chamber is intracorporal fixed
Position pins position, which is set, and size fit is so that positioning pin can slide in arcuate socket 220 so that installation tool is rotated.
Specifically, due to being set in cavity (chamber) there are three positioning pin, three positioning pins are respectively arranged at the four of cavity
O'clock direction, direction eight and twelve-hour direction, therefore, three hooks 2 are evenly arranged in the sides of toroidal frame 1, with
Three positioning pins convenient for being arranged in three hooks 2 and cavity correspond.When installing top electrode (up ground ring),
Top electrode 40 is caught in the vertical component effect 21 in wherein any one hook 2 and top electrode 40 being made to abut the hook 2 first, then will be upper
Electrode 40 is caught in other two hook 2, and the inside of top electrode 40 is directed at annular flange 3, so that top electrode 40 is sticked in
The outside of annular flange.The one sides that three hooks 2 are equipped with arcuate socket 220 are directed at three positioning pins again, three arcuate sockets 220 with
Three positioning pins correspond, and hang on three positioning pins installation tool by three arcuate sockets 220, then rotate erector
Tool, makes the screw hole radially aligned of the multiple mounting holes 10 and top electrode 40 in installation tool, is pushed into erector to inside cavity
Screw, the screw hole of top electrode is locked referring to mounting hole 10, is overlapped top electrode 40 with the center of circle of installation tool by tool.
Specifically, as shown in Fig. 2 and Fig. 4, when installing air distribution disk 41, air distribution disk 41 is sticked in annular flange 3 first
Inside, then by three hook 2 be equipped with arcuate socket 220 one sides be aligned three positioning pins, three arcuate sockets 220 with three position
Pin corresponds, and is hung over installation tool on three positioning pins by three arcuate sockets 220, then rotary installation tool, makes to pacify
Multiple mounting holes 10 on holding tool are aligned with the screw hole of air distribution disk 41, are pushed into installation tool to inside cavity, are passed through installation
Screw is locked the screw hole of air distribution disk 41 by hole 10, is overlapped air distribution disk 41 with the center of circle of installation tool.
Specifically, toroidal frame 1 is circumferentially with multiple mounting holes 10, and the quantity of mounting hole 10 should be with the screw of air distribution disk 41
The quantity in hole is adapted to, and the aperture of mounting hole 10 should be greater than the screw hole of air distribution disk 41, in order to which screw enters across mounting hole 10
The screw hole of air distribution disk 41.
Further, as shown in Figure 1, air distribution disk 41 is overlapped with the center of circle of top electrode 40, make air distribution disk 41 and top electrode 40
The distance between uniformly, avoid between air distribution disk 41 and top electrode 40 that gap is excessive to lead to polymer aggregational (Fig. 1 institute in gap
Gap of the dash area shown between air distribution disk 41 and top electrode 40), it is not easy to clear up, polymer is further avoided to carve
It is fallen during erosion on the wafer for receiving etching and leads to wafer etching failure, further increase the good of wafer
Rate.
In a kind of preferably embodiment, as shown in Fig. 2, the length of horizontal part 22 is identical as the length of protruding portion 20；
Horizontal part 22 has the first cambered surface towards one end of toroidal frame 1, and the first cambered surface is extended to form with 1 outer peripheral surface of toroidal frame
Cylinder adaptation.
Specifically, as shown in Fig. 2, horizontal part 22 has the second cambered surface, and the ruler of the second cambered surface backwards to one end of toroidal frame 1
It is very little to be greater than the first cambered surface.Both top electrode 40 is in circular ring shape, since the internal diameter of top electrode 40 is greater than the diameter of air distribution disk 41, usually
Difference in 0.2mm between 0.3mm, if the distance between top electrode 40 and air distribution disk 41 certainly will unevenly will lead to the two
Between certain side gap it is excessive, and then cause polymer aggregational in gap, if polymer is fallen in crystalline substance during etching
It on circle, then will lead to wafer defect, further influence the yield of wafer.
Specifically, as shown in figure 3, during electrostatic chuck is installed, the inside of top electrode 40 is sticked in convex annular
The outside of edge 3, meanwhile, top electrode 40 is supported by the protruding portion 20 of three hooks 2, so that top electrode 40 is sticked in installation tool
It is interior.Further, it can make top electrode 40 and air distribution disk 41 during the installation process on the same center of circle using installation tool, into
And the distance between top electrode 40 and air distribution disk 41 is made uniformly to prevent polymer poly from combining in gap, further increase wafer
Yield.
In a kind of preferably embodiment, the internal diameter of annular flange 3 is adapted to the air distribution disk 41 of electrostatic chuck；
The outer diameter of annular flange 3 is adapted to the internal diameter of the top electrode 40 of electrostatic chuck.
Specifically, as shown in figure 4, during the installation process, since air distribution disk 41 is sticked in the inside of annular flange 3,
The internal diameter of annular flange 3 is adapted to the diameter of air distribution disk 41；And top electrode 40 should be sticked in the outside of annular flange 3, and therefore, ring
The outer diameter of shape flange 3 is adapted to the internal diameter of top electrode 40.
The beneficial effect of technical solutions of the utility model is: providing a kind of installation tool of electrostatic chuck, makes top electrode
Distance is uniform between air distribution disk, avoids polymer aggregational in gap and the yield of influence etching processing procedure.
The foregoing is merely the utility model preferred embodiment, be not intended to limit the embodiments of the present invention and
Protection scope should can appreciate that all in the utility model specification and diagram to those skilled in the art
Hold made equivalent replacement and obviously change obtained scheme, the protection model of the utility model should all be included in
In enclosing.
Claims (10)
1. a kind of installation tool, the installation for electrostatic chuck, which is characterized in that the installation tool includes:
One toroidal frame, the toroidal frame are equipped with multiple mounting holes, circumferential direction setting of multiple mounting holes along the toroidal frame；
Multiple hooks, are distributed in the outer circumferential of the toroidal frame, and the hook includes hook portion, the multiple hook it is described
The same face of the hook portion towards the toroidal frame；
One annular flange is set to the outer of the one side in the same direction with the hook portion of the toroidal frame.
2. installation tool according to claim 1, which is characterized in that the hook includes protruding portion, the protruding portion one
End is extended radially out from the outer circumferential of the toroidal frame, and the other end connects the hook portion.
3. installation tool according to claim 2, which is characterized in that the hook portion includes vertical component effect and horizontal part；
One end of the vertical component effect connects the protruding portion, and the other end connects the horizontal part；
Described horizontal part one end connects the one end of the vertical component effect far from the protruding portion, and extends to the toroidal frame direction.
4. installation tool according to claim 3, which is characterized in that the length of the horizontal part and the tab length
It is identical.
5. installation tool according to claim 4, which is characterized in that the horizontal part has towards one end of the toroidal frame
There is the first cambered surface, first cambered surface is adapted to the cylinder that the toroidal frame outer peripheral surface extends to form；
The horizontal part has the second cambered surface backwards to one end of the toroidal frame.
6. installation tool according to any one of claim 3 to 5, which is characterized in that the horizontal part is provided with and institute
State the circumferentially concentric arcuate socket of toroidal frame.
7. installation tool according to claim 6, which is characterized in that the installation tool is for pacifying the electrostatic chuck
It is attached to a cavity, the position of the arcuate socket and size and the intracorporal alignment pin position of the chamber and size fit.
8. installation tool according to claim 3, which is characterized in that there are three the hook settings.
9. installation tool according to claim 1, which is characterized in that the electrostatic chuck includes air distribution disk, the annular
The internal diameter of flange is adapted to the air distribution disk.
10. installation tool according to claim 5, which is characterized in that the electrostatic chuck includes the top electrode of circular ring shape,
The outer diameter of the annular flange is adapted to the internal diameter of the top electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920652370.1U CN209571401U (en) | 2019-05-08 | 2019-05-08 | A kind of installation tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920652370.1U CN209571401U (en) | 2019-05-08 | 2019-05-08 | A kind of installation tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209571401U true CN209571401U (en) | 2019-11-01 |
Family
ID=68336313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920652370.1U Active CN209571401U (en) | 2019-05-08 | 2019-05-08 | A kind of installation tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209571401U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113042991A (en) * | 2021-03-17 | 2021-06-29 | 泉芯集成电路制造(济南)有限公司 | Dismounting device of electrostatic chuck of semiconductor etching board |
| WO2023284033A1 (en) * | 2021-07-16 | 2023-01-19 | 长鑫存储技术有限公司 | Installation apparatus and installation method |
-
2019
- 2019-05-08 CN CN201920652370.1U patent/CN209571401U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113042991A (en) * | 2021-03-17 | 2021-06-29 | 泉芯集成电路制造(济南)有限公司 | Dismounting device of electrostatic chuck of semiconductor etching board |
| WO2023284033A1 (en) * | 2021-07-16 | 2023-01-19 | 长鑫存储技术有限公司 | Installation apparatus and installation method |
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