CN202922473U - Vacuum adsorption platform with two-dimensional angle adjustment function - Google Patents

Vacuum adsorption platform with two-dimensional angle adjustment function Download PDF

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Publication number
CN202922473U
CN202922473U CN 201220584241 CN201220584241U CN202922473U CN 202922473 U CN202922473 U CN 202922473U CN 201220584241 CN201220584241 CN 201220584241 CN 201220584241 U CN201220584241 U CN 201220584241U CN 202922473 U CN202922473 U CN 202922473U
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China
Prior art keywords
layer
dimension angular
vacuum
adjusting seat
adjustment layer
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Withdrawn - After Issue
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CN 201220584241
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Chinese (zh)
Inventor
夏发平
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Kunshan Yunco Precision Co Ltd
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Kunshan Yunco Precision Co Ltd
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Abstract

The utility model belongs to the technical field of automatic equipment and particularly relates to a vacuum adsorption platform with a two-dimensional angle adjustment function. The vacuum adsorption platform comprises a base, a fixed base, a vacuum chuck, a two-dimensional angle adjustment seat and an air suction pipe; an external device of the vacuum adsorption platform is a vacuum pump; in the vacuum adsorption platform, the base is of a structure with an upper step section and a lower step section; an adsorption cavity is formed in the center of the vacuum chuck; an adsorption air groove is formed in the outer end surface of the vacuum chuck; the two-dimensional angle adjustment seat comprises a first adjustment layer, a second adjustment layer, a third adjustment layer, a vertical flexible hinge and a horizontal flexible hinge; the vertical flexible hinge is arranged between the second adjustment layer and the third adjustment layer; and the horizontal flexible hinge is arranged between the first adjustment layer and the second adjustment layer. The vacuum adsorption platform can be horizontally or vertically mounted according to the user needs, is convenient to mount, can be flexibly applied to the automatic equipment, and provides a better loading tool fixture for optical elements, wafers, precision machined parts and the like in the field of automation.

Description

A kind of vacuum absorbing platform with the two dimension angular regulatory function
Technical field
The utility model belongs to technical field of automation equipment, is specifically related to a kind of vacuum absorbing platform with the two dimension angular regulatory function.
Background technology
In the automation equipment field, for the production technology that satisfies various products also finally produces up-to-standard product, at first need to solve produce and the Quality Detection process to the clamping problem of product, therefore all kinds of loading fixtures arise at the historic moment, for optical element, wafer, Precision Machining part etc. to manufacturing process and the strict precision element of quality requirements, clamping in manufacturing, Quality Detection and handling process requires higher, in case because of the loading fixture problem, very easily cause product finally undesirable.
Tradition is applied to the loading fixture in this field, generally the datum plane with precision element is placed on the loading platform with very high flatness, the recycling fixture is fixed, so that it keeps stable in manufacturing, quality measurement and handling process, be convenient to improve the reliability in processing and certainty of measurement and handling process.But this mode can cause following problem:
1) directly be placed on the loading platform with high flatness, can cause placement unstable.Because the datum level flatness of precision element is not necessarily also very high, finally contacting with loading platform can only be also a contact, finally causes being difficult for setting level;
2) precision element is owing to being directly to be placed on loading platform, need external stability, and reserve enough manufacturings, Quality Detection state space after fixing, can only be all generally to be fixed by these elements edges, cause like this these elements edges local pressure, cause stress to concentrate, local deformation occurs in element self, and zone line will inevitably finally affect the precision of precision element manufacturing and Quality Detection again without effectively fixing.
3) general these precision elements, as optical element, the surface is not suitable for pressurized, because the easy so cracked or surface abrasion of optical element that causes.And wafer is frangible from as fragile material, in case bed knife is inhomogeneous, will cause cracked scrapping.The Precision Machining part also easily causes wearing and tearing, distortion etc. in bearing.
Solve tradition and be applied to automatic field for the following problem that exists in manufacturing, Quality Detection, the handling processes such as optical element, wafer, Precision Machining part:
1) directly be placed on the loading platform with high flatness, can cause placement unstable.Because the datum level flatness of precision element is not necessarily also very high, finally contacting with loading platform can only be also a contact, finally causes being difficult for setting level;
2) precision element is owing to being directly to be placed on loading platform, need external stability, and reserve enough manufacturings, Quality Detection state space after fixing, can only be all generally to be fixed by these elements edges, cause like this these elements edges local pressure, cause stress to concentrate, local deformation occurs in element self, and zone line will inevitably finally affect the precision of precision element manufacturing and Quality Detection again without effectively fixing.
3) general these precision elements, as optical element, the surface is not suitable for pressurized, because the easy so cracked or surface abrasion of optical element that causes.And wafer is frangible from as fragile material, in case bed knife is inhomogeneous, will cause cracked scrapping.The Precision Machining part also easily causes wearing and tearing, distortion etc. in bearing.
This patent proposes a kind of vacuum absorbing platform with the two dimension angular regulatory function, as shown in Figure 1 and Figure 2.This platform is made of base, firm banking, two dimension angular adjusting seat, exhaust tube, exhaust tube joint, vacuum cup etc. as a kind of loading fixture (frock) of precision.Wherein, vacuum cup is fixed on the two dimension angular adjusting seat, its afterbody is equipped with the gas-tpe fitting of bleeding, connect vavuum pump, can vacuumize absorption air drain and absorption air cavity after carrier member is placed on loading platform, thereby by vacuum mode, the precision elements such as optical element, wafer, Precision Machining part be adsorbed, the large I of absorption affinity is reconciled size according to the material behavior that is adsorbed element, guarantee when reliably sucking element, do not cause any harm to being adsorbed element.In addition, because absorption air drain and absorption air cavity are evenly arranged, after precision element is placed on platform surface, is adsorbed the element surface surrounding and can be subjected to even absorption affinity effect, can not cause local pressure inhomogeneous and produce stress, thereby avoid product to cause distortion because of clamping to being adsorbed element.
The utility model content
Based on the problems referred to above, the utility model proposes a kind of vacuum absorbing platform with the two dimension angular regulatory function, this platform addresses the above problem well for can be used as accurate loading fixture, and addressing the above problem on the basis, increased the two dimension angular regulatory function of mutual decoupling zero, so that can conveniently adapt to the action direction of machining tool or gauge head at institute's loading member in manufacturing and Quality Detection process, help to improve crudy and certainty of measurement.
To achieve these goals, the technical solution of the utility model is a kind of vacuum absorbing platform with the two dimension angular regulatory function of design, comprises base, firm banking, vacuum cup, two dimension angular adjusting seat and exhaust tube; Its external device (ED) is vavuum pump;
Wherein, described base is up and down two step segment structures;
Have the absorption air cavity in described vacuum cup center, have the absorption air drain in the outer face of described vacuum cup;
Described two dimension angular adjusting seat is adjusted layer, the second adjustment layer, the 3rd adjustment layer, vertical flexible hinge and horizontal flexibility hinge by first and is formed; Described vertical flexible hinge is located at second and adjusts layer and the 3rd and adjust between layer, and described horizontal flexibility hinge is located at first and adjusts layer and second and adjust between layer;
Its annexation is: described firm banking was fixedly mounted on the stage of appearing on the stage of described base, described two dimension angular adjusting seat adjusts by first the upper end that layer is fixedly mounted on described firm banking, described vacuum cup is fixedly mounted on the 3rd of described two dimension angular adjusting seat and adjusts a layer outside, and the absorption air cavity of described exhaust tube one end and vacuum cup and absorption air drain connect also and external seal; The other end of described exhaust tube is connected with vavuum pump.
Described base is fixed with screw by stage perforate of leaving office at it.
Absorption air drain and absorption air cavity at described vacuum cup are to connect by having absorption pore and exhaust tube.
Vertical flexible hinge between described two dimension angular adjusting seat the second adjustment layer and the 3rd adjustment layer is four of uniform setting.
Horizontal flexibility hinge between described two dimension angular adjusting seat the first adjustment layer and the second adjustment layer is four of uniform setting.
On outer circumference surface, plug is being housed on described vacuum cup.
Be provided with horizontal nutation and reconcile screw and vertical deflection conciliation screw on the end face of described two dimension angular adjusting seat.
Advantage of the present utility model and beneficial effect are: platform is except having absorption fixedly precision element, also has the conciliation of mutual decoupling zero around the function of the angle free degree of horizontal direction and vertical direction, so that in manufacturing and the quality measurement process of precision element, the optimum positional relationship that keeps relative machining tool and gauge head helps to improve machining accuracy and certainty of measurement.This platform is according to user's needs, but level install, but also at right angle setting is easy for installation, can be on automation equipment flexible Application.This platform is fixed on vacuum cup on the two dimension angular adjusting seat, its afterbody is equipped with the gas-tpe fitting of bleeding, connect vavuum pump, can after being placed on loading platform, carrier member vacuumize absorption air drain and absorption air cavity, thereby by vacuum mode, the precision elements such as optical element, wafer, Precision Machining part are adsorbed, the large I of absorption affinity is reconciled size according to the material behavior that is adsorbed element, guarantees when reliably sucking element, does not cause any harm to being adsorbed element.In addition, because absorption air drain and absorption air cavity are evenly arranged, after precision element is placed on platform surface, is adsorbed the element surface surrounding and can be subjected to even absorption affinity effect, can not cause local pressure inhomogeneous and produce stress, thereby avoid product to cause distortion because of clamping to being adsorbed element.Platform is except having absorption fixedly precision element, also has the conciliation of mutual decoupling zero around the function of the angle free degree of horizontal direction and vertical direction, so that in manufacturing and the quality measurement process of precision element, the optimum positional relationship that keeps relative machining tool and gauge head helps to improve machining accuracy and certainty of measurement.This platform is according to user's needs, but level install, but also at right angle setting is easy for installation, can be on automation equipment flexible Application, for automatic field provides better loading tool fixture for optical element, wafer, Precision Machining part etc.
Description of drawings
Fig. 1 is structural representation of the present utility model;
Fig. 2 is structural representation of the present utility model;
Fig. 3 is main TV structure schematic diagram of the present utility model;
Fig. 4 is backsight structural representation of the present utility model;
Fig. 5 is left TV structure schematic diagram of the present utility model.
Wherein, 1-screw; The 2-base; The 3-firm banking; The 4-vacuum cup; 5-two dimension angular adjusting seat; The 6-exhaust tube; 7-adsorbs air drain; 8-adsorbs air cavity; The 9-horizontal nutation is reconciled screw; The 10-plug; The 11-vertical deflection is reconciled screw; 12-adsorbs pore; The vertical flexible hinge of 13-; 14-horizontal flexibility hinge.
The specific embodiment
Below in conjunction with drawings and Examples, the specific embodiment of the present utility model is further described, following examples only are used for the technical solution of the utility model more clearly is described, and can not limit protection domain of the present utility model with this.
As shown in Figures 1 to 4, the concrete technical scheme of implementing of the utility model is: a kind of vacuum absorbing platform with the two dimension angular regulatory function comprises base 2, firm banking 3, vacuum cup 4, two dimension angular adjusting seat 5 and exhaust tube 6; Its external device (ED) is vavuum pump;
Wherein, described base 2 is up and down two step segment structures;
Have absorption air cavity 8 in described vacuum cup 4 centers, have absorption air drain 7 in the outer face of described vacuum cup 4;
Described two dimension angular adjusting seat 5 is adjusted layer, the second adjustment layer, the 3rd adjustment layer, vertical flexible hinge 13 and horizontal flexibility hinge 14 by first and is formed; Described vertical flexible hinge 13 is located at second and adjusts layer and the 3rd and adjust between layer, and described horizontal flexibility hinge 14 is located at first and adjusts layer and second and adjust between layer;
Its annexation is: described firm banking 3 was fixedly mounted on the stage of appearing on the stage of described base 2, described two dimension angular adjusting seat 5 adjusts by first the upper end that layer is fixedly mounted on described firm banking 3, described vacuum cup 4 is fixedly mounted on the 3rd of described two dimension angular adjusting seat 5 and adjusts a layer outside, and the absorption air cavity 8 of described exhaust tube 6 one ends and vacuum cup 4 and absorption air drain 7 connect also and external seal; The other end of described exhaust tube 6 is connected with vavuum pump.
Described base 2 is fixed with screw 1 by stage perforate of leaving office at it.
Absorption air drain 7 and absorption air cavity 8 at described vacuum cup 4 are to connect with exhaust tube 6 by having absorption pore 12.
Vertical flexible hinge 13 between described two dimension angular adjusting seat 5 second adjustment layers and the 3rd adjustment layer is four of uniform setting.
Horizontal flexibility hinge 14 between described two dimension angular adjusting seat 5 first adjustment layers and the second adjustment layer is four of uniform setting.
On outer circumference surface, plug 10 is being housed on described vacuum cup 4.
Be provided with horizontal nutation and reconcile screw 9 and vertical deflection conciliation screw 11 on the end face of described two dimension angular adjusting seat 5.
Vacuum cup 4 is fixed on two dimension angular adjusting seat 5, its afterbody is equipped with exhaust tube 6 joints, connect vavuum pump, can after being placed on loading platform, carrier member vacuumize absorption air drain 7 and absorption air cavity 8, thereby by vacuum mode, the precision elements such as optical element, wafer, Precision Machining part are adsorbed, the large I of absorption affinity is reconciled size according to the material behavior that is adsorbed element, guarantees when reliably sucking element, does not cause any harm to being adsorbed element.
In addition, because absorption air drain 7 and absorption air cavity 8 are evenly arranged, after precision element is placed on platform surface, is adsorbed the element surface surrounding and can be subjected to even absorption affinity effect, can not cause local pressure inhomogeneous and produce stress, thereby avoid product to cause distortion because of clamping to being adsorbed element.
Platform is except having absorption fixedly precision element, also has the conciliation of mutual decoupling zero around the function of the angle free degree of horizontal direction and vertical direction, so that in manufacturing and the quality measurement process of precision element, the optimum positional relationship that keeps relative machining tool and gauge head helps to improve machining accuracy and certainty of measurement.
Two dimension angular adjusting seat 5 is to assemble by three layers of part and two pairs of flexible hinges, in the adjacent spaces of three layers of part, connect by the orthogonal two pairs of flexible hinges, and a pair ofly arbitrarily be installed on unidirectional flexible hinge, its both sides all are equipped with two beat adjustment screw, and the flexible hinge in the direction of these two screws is symmetrical to be installed, center line with this to mutually vertical, during conciliation, loose screw, tight another screw, but the angle swinging of time pitching is regulated.And when the angle beat of reconciling around horizontal direction, do not affect the regulating effect around vertical direction angle beat fully, thereby accomplished two independent decoupling zeros that angle is reconciled.
This platform is according to user's needs, but level install, but also at right angle setting is easy for installation, can be on automation equipment flexible Application.
The above is only preferential embodiment of the present utility model; should be understood that; for those skilled in the art; under the prerequisite that does not break away from the utility model know-why; can also make some improvements and modifications, these improvements and modifications also should be considered as protection domain of the present utility model.

Claims (7)

1. the vacuum absorbing platform with the two dimension angular regulatory function, is characterized in that: comprise base (2), firm banking (3), vacuum cup (4), two dimension angular adjusting seat (5) and exhaust tube (6); Its external device (ED) is vavuum pump;
Wherein, described base (2) is up and down two step segment structures;
Have absorption air cavity (8) in described vacuum cup (4) center, have absorption air drain (7) in the outer face of described vacuum cup (4);
Described two dimension angular adjusting seat (5) is adjusted layer, the second adjustment layer, the 3rd adjustment layer, vertical flexible hinge (13) and horizontal flexibility hinge (14) by first and is formed; Described vertical flexible hinge (13) is located at second and adjusts layer and the 3rd and adjust between layer, and described horizontal flexibility hinge (14) is located at first and adjusts layer and second and adjust between layer;
Its annexation is: described firm banking (3) was fixedly mounted on the stage of appearing on the stage of described base (2), described two dimension angular adjusting seat (5) adjusts by first the upper end that layer is fixedly mounted on described firm banking (3), described vacuum cup (4) is fixedly mounted on outside the 3rd adjustment layer of described two dimension angular adjusting seat (5), and the absorption air cavity (8) of described exhaust tube (6) one ends and vacuum cup (4) and absorption air drain (7) connect also and external seal; The other end of described exhaust tube (6) is connected with vavuum pump.
2. a kind of vacuum absorbing platform with the two dimension angular regulatory function according to claim 1 is characterized in that: described base (2) is fixed with screw (1) by stage perforate of leaving office at it.
3. a kind of vacuum absorbing platform with the two dimension angular regulatory function according to claim 1 and 2 is characterized in that: absorption air drain (7) and absorption air cavity (8) at described vacuum cup (4) are to connect with exhaust tube (6) by having absorption pore (12).
4. a kind of vacuum absorbing platform with the two dimension angular regulatory function according to claim 1 and 2 is characterized in that: adjust in described two dimension angular adjusting seat (5) second the vertical flexible hinge (13) that layer and the 3rd adjusts between layer and be four of uniform setting.
5. a kind of vacuum absorbing platform with the two dimension angular regulatory function according to claim 1 and 2 is characterized in that: adjust in described two dimension angular adjusting seat (5) first the horizontal flexibility hinge (14) that layer and second adjusts between layer and be four of uniform setting.
6. a kind of vacuum absorbing platform with the two dimension angular regulatory function according to claim 1 and 2, is characterized in that: on the upper outer circumference surface of described vacuum cup (4), plug (10) is housed.
7. a kind of vacuum absorbing platform with the two dimension angular regulatory function according to claim 1 and 2, is characterized in that: be provided with horizontal nutation and reconcile screw (9) and vertical deflection conciliation screw (11) on the end face of described two dimension angular adjusting seat (5).
CN 201220584241 2012-11-08 2012-11-08 Vacuum adsorption platform with two-dimensional angle adjustment function Withdrawn - After Issue CN202922473U (en)

Priority Applications (1)

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CN 201220584241 CN202922473U (en) 2012-11-08 2012-11-08 Vacuum adsorption platform with two-dimensional angle adjustment function

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Application Number Priority Date Filing Date Title
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CN202922473U true CN202922473U (en) 2013-05-08

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102941546A (en) * 2012-11-08 2013-02-27 昆山允可精密工业技术有限公司 Vacuum absorption platform with two-dimension angle adjustment function
CN105328746A (en) * 2015-11-10 2016-02-17 东莞市南兴家具装备制造股份有限公司 Independently moving type vacuum sucker provided with airlock and board suction device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102941546A (en) * 2012-11-08 2013-02-27 昆山允可精密工业技术有限公司 Vacuum absorption platform with two-dimension angle adjustment function
CN102941546B (en) * 2012-11-08 2015-05-13 昆山允可精密工业技术有限公司 Vacuum absorption platform with two-dimension angle adjustment function
CN105328746A (en) * 2015-11-10 2016-02-17 东莞市南兴家具装备制造股份有限公司 Independently moving type vacuum sucker provided with airlock and board suction device

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GR01 Patent grant
AV01 Patent right actively abandoned

Granted publication date: 20130508

Effective date of abandoning: 20150513

RGAV Abandon patent right to avoid regrant