CN209565972U - A kind of grinding combined counterbalance block - Google Patents

Abstract

The utility model discloses a kind of grinding combined counterbalance blocks, are related to technical field of semiconductors.Including glass slide, the left and right two sides of the glass slide symmetrically offers U-shaped groove, the upper surface of the glass slide is movably installed with the first round briquetting, the left and right sides of described first round briquetting lower surface is symmetrically fixedly installed with U-shaped convex block, in the U-shaped U-shaped groove of convex block movable buckle, the upper surface of described first round briquetting is fixedly installed with the first T-type handle, the upper surface of described first round briquetting is movably installed with the second round briquetting, the lower surface of described second round briquetting offers T-type groove, the T-type groove movable buckle is in outside the first T-type handle, the upper surface of described second round briquetting is fixedly installed with the second T-type handle.The advantages that the utility model is structurally reasonable, can meet kinds of processes demand, is not necessarily to mechanical pump, therefore noise is small, and mechanism is simple, at low cost, easy to maintain.

Description

A kind of grinding combined counterbalance block

Technical field

The utility model relates to technical field of semiconductors, specially a kind of grinding combined counterbalance block.

Background technique

The grinding machine that grinder grinds workpiece surface with the lap tool for coating or being embedded in abrasive material.It is mainly used for grinding work-piece In high precision plane, inside and outside cylindrical surface, circular conical surface, spherical surface, flank and its alloytype face, the main Types of grinder have disk Formula grinder, rotary shaft grinder and various special grinders grind machine control system using PLC as control core, and text is shown Device is the control mode of man-machine dialog interface.

Currently, grinder is in use, because of process requirements, need constantly to change in chemically mechanical polishing pressure, Shenyang The included milling apparatus grinding head of section's 1502 grinders of crystalline substance adjusts spring and pressure in grinding head using vacuum suction glass slide The disadvantages of position of block adjusts pressure and has noise big, at high cost, not convenient for safeguarding, it is difficult to meet grinding demand.For this purpose, mentioning A kind of grinding combined counterbalance block is out to solve the above problems.

Utility model content

(1) the technical issues of solving

In view of the deficiencies of the prior art, the utility model provides a kind of grinding combined counterbalance block, has and meets a variety of works The advantages that skill demand is not necessarily to mechanical pump, and noise is small, at low cost, easy to maintain solves and adjusts spring and briquetting in grinding head The disadvantages of position adjusts pressure and has noise big, at high cost, not convenient for safeguarding, it is difficult to the problem of meeting grinding demand.

(2) technical solution

Meeting kinds of processes demand for realization is above-mentioned, is not necessarily to mechanical pump, noise is small, purpose at low cost, easy to maintain, this Utility model provides the following technical solutions: a kind of grinding combined counterbalance block, including glass slide, the left and right two of the glass slide Face symmetrically offers U-shaped groove, and the upper surface of the glass slide is movably installed with the first round briquetting, the described first round pressure The left and right sides of block lower surface is symmetrically fixedly installed with U-shaped convex block, in the U-shaped U-shaped groove of convex block movable buckle, described first The upper surface of round briquetting is fixedly installed with the first T-type handle, and the upper surface of the described first round briquetting is movably installed with second The lower surface of round briquetting, the described second round briquetting offers T-type groove, and the T-type groove movable buckle is mentioned in the first T-type Outside hand, the upper surface of the described second round briquetting is fixedly installed with the second T-type handle, the glass slide, the first round briquetting It is fixed with the second round briquetting outer surface and is fitted with constraint ring, the lower surface of the constraint ring is uniformly provided with gap slot.

The technical program is advanced optimized, the diameter of the glass slide, the first round briquetting and the second round briquetting is equal It is equal.

The technical program is advanced optimized, the U-shaped convex block is identical as the shape of U-shaped groove, and fits closely, and described One T-type handle, T-type groove and the second T-type handle shape are all the same, and fit closely.

The technical program is advanced optimized, the described second round briquetting is provided with 1-6.

Advanced optimize the technical program, the weight of the described first round briquetting and the second circle briquetting is 500 grams.

Advanced optimize the technical program, the constraint ring includes upper annulus, lower annulus and connecting column, the upper annulus It is fixedly connected between lower surface and the upper surface of lower annulus by connecting column.

The technical program is advanced optimized, the height of the constraint ring is 8 centimetres, and fetters the internal diameter and glass load of ring Piece, the first round briquetting and the second round briquetting match.

(3) beneficial effect

Compared with prior art, the utility model provides a kind of grinding combined counterbalance block, have it is following the utility model has the advantages that

1, the grinding combined counterbalance block is 500 grams by the first round briquetting and the second round ballast weight of setting, Mountable the second several round briquetting according to demand, makes 500 grams to 3500 grams of pressure applied, can meet kinds of processes need It asks, whether abrasive disk is cast iron plate, and sheet glass, copper dish, what material of polishing pad can meet demand.

2, the grinding combined counterbalance block is snapped in U-shaped groove by the U-shaped convex block of the first round briquetting lower surface of setting It is interior, make glass slide fixation, then be snapped in outside the first U-shaped handle by T-type groove by the second round briquetting, makes second Be fixedly connected between round briquetting and the first round briquetting, by constraint ring by the first round briquetting and the second round briquetting into The advantages that row constraint is fixed, and is not necessarily to mechanical pump, therefore noise is small, and mechanism is simple, at low cost, easy to maintain.

Detailed description of the invention

Fig. 1 is the glass slide structural schematic diagram of the utility model；

Fig. 2 is the first round briquette structure schematic diagram of the utility model；

Fig. 3 is the second round briquette structure schematic diagram of the utility model；

Fig. 4 is the constraint ring structure schematic diagram of the utility model.

In figure: 1, glass slide；2, U-shaped groove；3, the first round briquetting；4, U-shaped convex block；5, the first T-type handle；6, Two round briquettings；7, T-type groove；8, the second T-type handle；9, ring is fettered；901, upper annulus；902, lower annulus；903, connecting column； 10, gap slot.

Specific embodiment

The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work Every other embodiment obtained, fall within the protection scope of the utility model.

Fig. 1-4 is please referred to, the utility model discloses a kind of grinding combined counterbalance block, including glass slide 1, glass slides 1 left and right two sides symmetrically offers U-shaped groove 2, and the upper surface of glass slide 1 is movably installed with the first round briquetting 3, the first circle The left and right sides of 3 lower surface of shape briquetting is symmetrically fixedly installed with U-shaped convex block 4, in the U-shaped U-shaped groove 2 of 4 movable buckle of convex block, first The upper surface of round briquetting 3 is fixedly installed with the first T-type handle 5, and the upper surface of the first round briquetting 3 is movably installed with the second circle Shape briquetting 6, the lower surface of the second round briquetting 6 offer T-type groove 7,7 movable buckle of T-type groove in outside the first T-type handle 5, The upper surface of second round briquetting 6 is fixedly installed with the second T-type handle 8, and the round briquetting 3 and second of glass slide 1, first is round 6 outer surface of briquetting is fixed to be fitted with constraint ring 9, and the lower surface of constraint ring 9 is uniformly provided with gap slot 10.

Specifically, the diameter of the round briquetting 3 of glass slide 1, first and the second round briquetting 6 is equal, enable to fetter ring 9 It is enough preferably that the round briquetting 3 of glass slide 1, first and the second round briquetting 6 is fixed.

Specifically, U-shaped convex block 4 is identical as the shape of U-shaped groove 2, and fit closely, the first T-type handle 5, T-type groove 7 It is all the same with 8 shape of the second T-type handle, and fit closely, so that U-shaped convex block 4 is buckled even closer, the first T-type with U-shaped groove 2 Handle 5, T-type groove 7 are identical with 8 shape of the second T-type handle, more convenient to use, are convenient for buckle installation.

Specifically, the second round briquetting 6 is provided with 1-6, one meets the needs of different configuration weight.

Specifically, the weight of the first round briquetting 3 and the second round briquetting 6 is 500 grams, convenient for right according to the technological requirements Apply pressure to be adjusted.

Specifically, constraint ring 9 include upper annulus 901, lower annulus 902 and connecting column 903, the lower surface of upper annulus 901 with It is fixedly connected between the upper surface of lower annulus 902 by connecting column 903, constraint ring 9 is convenient for the round briquetting 3 and second of observation first The rotation situation of round briquetting 6.

Specifically, the height of constraint ring 9 is 8 centimetres, and fetter the internal diameter and the round briquetting 3 of glass slide 1, first of ring 9 Match with the second round briquetting 6, constraint ring 9 makes the round briquetting 3 of glass slide 1, first and the second 6 rotation of round briquetting more Stablize, is not easy to topple over, use is safer.

When in use, the lower surface that the epitaxial wafer polished will be needed to be attached to glass slide 1, glass slide 1 pass through U-shaped groove 2 is fixed by U-shaped convex block 4, is to make the first round 3 fixed card buckle of briquetting and 1 upper surface of glass slide, then mention by the first T-type Hand 5 is snapped in T-type groove 7, makes the second round 6 fixed card buckle of briquetting in the upper surface of the first round briquetting 3, according to polishing Process equipment chooses whether to increase ballast weight, increases and adds the several second round briquettings 6, and 9 sets of constraint ring are carried in glass On the round briquetting 3 of piece 1, first and the second round briquetting 6, prevent the first round briquetting 3 and the second round briquetting 6 from tilting, it can be with Guarantee flatness well, lapping liquid is added dropwise by the gap slot 10, starts grinder, the manipulator " grabbing " on grinder lives beam Ring 9 is tied up, constraint ring rotation together with briquetting will drive by the linear differential that grinder generates, carry out polishing operation.

In conclusion the grinding combined counterbalance block, can meet kinds of processes demand, it is not necessarily to mechanical pump, therefore noise is small, machine The advantages that structure is simple, at low cost, easy to maintain.

It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that There is also other identical elements in process, method, article or equipment including the element.

While there has been shown and described that the embodiments of the present invention, for the ordinary skill in the art, It is understood that these embodiments can be carried out with a variety of variations in the case where not departing from the principles of the present invention and spirit, repaired Change, replacement and variant, the scope of the utility model is defined by the appended claims and the equivalents thereof.

Claims (7)

1. a kind of grinding combined counterbalance block, including glass slide (1), it is characterised in that: the left and right two sides of the glass slide (1) It symmetrically offering U-shaped groove (2), the upper surface of the glass slide (1) is movably installed with the first round briquetting (3), and described the The left and right sides of one round briquetting (3) lower surface is symmetrically fixedly installed with U-shaped convex block (4), U-shaped convex block (4) the movable buckle U In type groove (2), the upper surface of the described first round briquetting (3) is fixedly installed with the first T-type handle (5), and described first is round The upper surface of briquetting (3) is movably installed with the second round briquetting (6), and the lower surface of the described second round briquetting (6) offers T-type Groove (7), T-type groove (7) movable buckle in the first T-type handle (5) outside, the upper surface of the second round briquetting (6) It is fixedly installed with the second T-type handle (8), the glass slide (1), the first round briquetting (3) and second round briquetting (6) appearance Face is fixed to be fitted with constraint ring (9), and the lower surface of constraint ring (9) is uniformly provided with gap slot (10).

2. a kind of grinding combined counterbalance block according to claim 1, it is characterised in that: the glass slide (1), the first circle Shape briquetting (3) and the diameter of the second round briquetting (6) are equal.

3. a kind of grinding combined counterbalance block according to claim 1, it is characterised in that: the U-shaped convex block (4) with it is U-shaped recessed The shape of slot (2) is identical, and fits closely, the first T-type handle (5), T-type groove (7) and second T-type handle (8) shape It is all the same, and fit closely.

4. a kind of grinding combined counterbalance block according to claim 1, it is characterised in that: the described second round briquetting (6) sets It is equipped with 1-6.

5. a kind of grinding combined counterbalance block according to claim 1, it is characterised in that: the first round briquetting (3) with The weight of second round briquetting (6) is 500 grams.

6. a kind of grinding combined counterbalance block according to claim 1, it is characterised in that: the constraint ring (9) includes upper circle Ring (901), lower annulus (902) and connecting column (903), the lower surface of the upper annulus (901) and the upper surface of lower annulus (902) Between be fixedly connected by connecting column (903).

7. a kind of grinding combined counterbalance block according to claim 1, it is characterised in that: the height of constraint ring (9) is 8 Centimetre, and the internal diameter and glass slide (1), the first circle briquetting (3) and the second round briquetting (6) that fetter ring (9) match.