CN209534157U - A kind of outer posting ring patch counterdie device - Google Patents
A kind of outer posting ring patch counterdie device Download PDFInfo
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- CN209534157U CN209534157U CN201920038244.7U CN201920038244U CN209534157U CN 209534157 U CN209534157 U CN 209534157U CN 201920038244 U CN201920038244 U CN 201920038244U CN 209534157 U CN209534157 U CN 209534157U
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- ring
- counterdie
- locating platform
- seat
- rotating
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Abstract
The utility model discloses a kind of outer posting rings in field of semiconductor processing to paste counterdie device, including casing body, front and rear sides corresponding with locating platform are equipped with rotation roller group, it is longitudinally equipped between two rotation roller groups and has sticking transmission counterdie, moveable suction ring is correspondingly provided with above locating platform, the internal diameter of outer posting ring is less than the outer diameter of locating platform, and the outer diameter of outer posting ring is greater than the outer diameter of locating platform, offers annular cutting groove on the downside of outer posting ring；Rotating disk is coaxially arranged with below the locating platform, rotating disk periphery is evenly spaced on equipped with several rotating arms, rotating arm end is equipped with rotating seat, pinch roller has been rotatably coupled on rotating seat, pinch roller upside and locating platform flush, arcuate cutting blade is also fixedly connected on rotating seat, the upside blade of cutter, which can correspond to, to be protruded into cutting groove.Counterdie can be automatically cut into circle by the utility model, and outer posting ring is fixed on to the edge of counterdie upper surface.
Description
Technical field
The utility model belongs to field of semiconductor processing, in particular to a kind of outer posting ring pastes counterdie device.
Background technique
In the prior art, wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle,
Therefore referred to as wafer；It can be processed on silicon and is fabricated to various circuit component structures, and becoming has the integrated of specific electrical functionality
Circuit product.Wafer fabrication melts these polysilicons, then is planted in liquid melting into seed crystal, then slowly pulls out it, with shape
At columned monocrystalline silicon crystal bar, due to silicon crystal bar be the seed crystal that is determined by a high preferred orientation in the silicon raw material of molten state by
Gradually generate.Silicon crystal bar polishes, laser incising using dissection, barreling, slice, chamfering, after packaging, becomes IC works
Base stock-silicon wafer, here it is " wafers ".
It can integrate on wafer and several IC be installed, and the manufacturing process of chip can be divided into wafer-process process, wafer
Survey several steps such as process, structure dress process, test step.Wherein wafer-process process and wafer probing process are front-end-of-line,
And structure dress process, test step are back segment process.Wafer in process, need to wafer carry out film, exposure, development,
Several processes such as etching, ion implantation, metal sputtering and cutting, generally use and wafer are attached on counterdie, cover in crystal column surface
Lid is provided with one layer of protection glue film, fixes an outer posting ring at the edge of counterdie upper surface, outer posting ring and wafer
Axis coincides, supporter of the outer posting ring as wafer, and convenient for processing to wafer, positioning is convenient, prevents wafer
It destroys, lacks the equipment that counterdie is fitted into outer posting ring currently on the market, cannot achieve outer posting ring and bottom automatically
Film is mutually fixed.
Utility model content
The purpose of the utility model is to provide a kind of outer posting rings to paste counterdie device, counterdie can be automatically cut into circle
Shape, and outer posting ring is fixed on to the edge of counterdie upper surface, it realizes and counterdie is fitted on the downside of outer posting ring, automation
Degree is high, and positioning is convenient.
Purpose of the utility model is realized as follows: a kind of outer posting ring pastes counterdie device, including casing body, it is described
Round locating platform is equipped in casing body, front and rear sides corresponding with locating platform are equipped with rotation roller group, two rotation roller groups
Between be longitudinally equipped with and have sticking transmission counterdie, the width for being driven counterdie is greater than the diameter of locating platform, above locating platform
It is correspondingly provided with moveable suction ring, outer posting ring is adsorbed below ring, and outer posting ring is mutually be overlapped with the axis of locating platform
When conjunction, the internal diameter of outer posting ring is less than the outer diameter of locating platform, and the outer diameter of outer posting ring is greater than the outer diameter of locating platform, outside
Annular cutting groove is offered on the downside of posting ring；It is coaxially arranged with rotating disk below the locating platform, rotating disk periphery is uniform
It is spaced apart and is equipped with several rotating arms, rotating arm end is equipped with rotating seat, and turning seat, can on rotating seat on the outside of locating platform
It is rotationally connected with pinch roller, pinch roller axis is arranged radially along locating platform, pinch roller upside and locating platform flush, on rotating seat
It is also fixedly connected with arcuate cutting blade, the upside blade of cutter, which can correspond to, to be protruded into cutting groove, and the both ends of the surface of pinch roller are in axis
Direction is located at the left and right sides of cutter.
When utility model works, the rotation roller group of front and rear sides drives transmission counterdie mobile, inhales ring for outer posting ring
It is sucked, inhales the outer posting ring of general who has surrendered under ring and be pressed on locating platform, outer posting ring inner ring is supported on locating platform, outer positioning
Frame ring outer ring is supported on the upside of pinch roller, cutter setting corresponding with cutting groove, and rotating disk rotation is driven by rotating arm to rotate
Seat rotation, arcuate cutting blade protrude into cutting groove and transmission counterdie are cut into circle, and pinch roller will have sticking reception and registration counterdie
Edge is pressed on the downside of outer posting ring, and outer posting ring realizes that closing frame fixes with counterdie, after then suction ring will stick counterdie
Wafer removes casing body.Compared with prior art, the utility model has the beneficial effects that: circle can be automatically cut into counterdie
Shape, and outer posting ring is fixed on to the edge of counterdie upper surface, it realizes and counterdie is fitted on the downside of outer posting ring, then may be used
Wafer and counterdie to be fitted, with regard to more convenient when being processed to wafer, high degree of automation.
The rotation roller group includes the rotation of several longitudinally spaced distributions as a further improvement of the utility model,
Roller, rotation roll axis are laterally arranged, and the left and right ends of rotating roller are rotatably supported at respectively in corresponding roller support, each rotating roller
It is in contact on the upside of upside flush, transmission counterdie lower surface and rotating roller.The roll shaft and rotary drive mechanism of each rotating roller are driven
Connection, rotary drive mechanism drive each rotating roller to rotate synchronously, and rotating roller drives transmission counterdie mobile by frictional force.
The transmission counterdie includes source rotation section and translation portion as a further improvement of the utility model, is driven bottom
Film source rotation section ecto-entad is wound into several circles, and the inner ring of transmission counterdie source rotation section is sleeved on dispensing shaft, blowing
The left and right ends of axis are rotatably supported in corresponding roller support, are driven the outer ring avris and translation portion phase of counterdie source rotation section
It connects.Rotating roller drives transmission counterdie translation portion mobile, and translation portion pulls transmission counterdie source rotation section to rotate around dispensing shaft, passes
Dynamic counterdie source rotation section is by the constantly outside blowing of rotation, when a roll transmission counterdie is finished, the transmission bottom that can more renew
Film.
It is circumferentially evenly spaced on the upside of the suction ring equipped with several threeways as a further improvement of the utility model,
Connector, bypass is equipped at left and right sides of three-way connection, and the downside of three-way connection is equipped with underpass, the side of adjacent three-way connection
It is connected between access by connecting tube, the bypass positioned at the three-way connection of avris is connected with vacuum evacuation device, inhales corresponding on ring
The underpass of each three-way connection offers several ventholes, and venthole is connected with the underpass of corresponding three-way connection, the suction
The avris of ring is equipped with mobile bar vertically, and mobile bar upper end is connected with driving mechanism transmission.Each three-way connection interconnects, and takes out true
Empty device vacuumizes the underpass of three-way connection, and outer posting ring is sucked by vacuum for venthole；Driving mechanism, which drives, inhales
Ring moves freely.
The driving mechanism includes two fixed lateral beams disposed in parallel as a further improvement of the utility model,
Fixed lateral beam is located at the top for inhaling ring, and fixed lateral beam is equipped with cross slide way and horizontal tooth bar, between two fixed lateral beams
Equipped with transversely-moving rack, the both ends of transversely-moving rack are respectively equipped with traversing seat, and traversing seat is slidably connected by sliding block with corresponding cross slide way, horizontal
It moves and is equipped with traversing motor on seat vertically, the output end of traversing motor is equipped with the gear being meshed with corresponding horizontal tooth bar；The cross
It moves on frame and vertical shift seat is slidably connected by longitudinal rail, vertical shift seat is equipped with vertical shift motor, is axially arranged with vertical shift on transversely-moving rack
Rack gear, the output end of vertical shift motor are equipped with the gear being meshed with vertical shift rack gear, are connected with crane on the vertical shift seat,
Mobile bar upper end is connected with crane.Traversing motor driven gear is rotated along horizontal tooth bar, and transversely-moving rack realizes transverse shifting, is indulged
Motor driven gear is moved along vertical shift racks turn, vertical shift seat is longitudinally movable, and crane drives mobile bar oscilaltion.
The vertical groove for running through vertical shift seat is offered in the middle part of the vertical shift seat as a further improvement of the utility model,
Recess sidewall is equipped with several riser guides, and crane is inserted vertically into groove and is slidably connected by sliding block and each riser guide,
Rotatable lead screw is equipped on crane vertically, one end of lead screw and lifting motor are sequentially connected, solid on the upside of the groove of vertical shift seat
Surely it is equipped with nut seat, is fixed with feed screw nut on nut seat, feed screw nut and lead screw match setting.Lifting motor drives silk
Thick stick rotation, feed screw nut be it is fixed, lead screw can be moved axially along feed screw nut, lead screw drive crane on move down
It is dynamic.
The shaft of the rotating disk connects through retarder and rotating electric machine transmission as a further improvement of the utility model,
It connects.Rotating electric machine drives rotating disk to rotate after retarder slows down.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model.
Fig. 2 is the top view of rotating disk.
Fig. 3 is the sectional view along AA in Fig. 1.
Fig. 4 is the partial enlarged view of Fig. 3.
Fig. 5 is the B direction view of Fig. 2.
Fig. 6 is the structural schematic diagram for inhaling the driving mechanism of ring.
Fig. 7 is the top view for inhaling ring.
Fig. 8 is the side view for inhaling ring.
Fig. 9 is the schematic perspective view for inhaling the driving mechanism of ring.
Figure 10 is the enlarged drawing in Fig. 9 at C.
Figure 11 is the schematic perspective view of vertical shift seat.
Figure 12 is the partial enlarged view of Figure 11.
Figure 13 is the top view of wafer, counterdie and outer posting ring.
Wherein, 1 casing body, 2 locating platforms, 3 rotation roller groups, 3a rotating roller, 4 transmission counterdies, the source 4a rotation section, 4b are flat
Dynamic portion, 5 inhale ring, 5a venthole, 6 outer posting rings, 7 cutting grooves, 8 rotating disks, 8a shaft, 9 rotating arms, 10 rotating seats, 11 pressures
Wheel, 12 cutter, 13 roller supports, 14 dispensing shafts, 15 three-way connections, 16 connecting tubes, 17 mobile bars, 18 fixed lateral beams, 19 is horizontal
Direction guiding rail, 20 horizontal tooth bars, 21 transversely-moving racks, the traversing seat of 21a, 22 traversing motors, 23 longitudinal rails, 24 vertical shift seats, 25 vertical shifts electricity
Machine, 26 vertical shift rack gears, 27 cranes, 28 riser guides, 29 lead screws, 30 lifting motors, 31 nut seats, 31a feed screw nut, 32 subtract
Fast device, 33 rotating electric machines, 34 wafers.
Specific embodiment
Such as Fig. 1-13, counterdie device, including casing body 1 are pasted for a kind of outer posting ring, round positioning is equipped in casing body 1
Platform 2, front and rear sides corresponding with locating platform 2 are equipped with rotation roller group 3, and being longitudinally equipped between two rotation roller groups 3 has
The transmission counterdie 4 of viscosity, the width of transmission counterdie 4 are greater than the diameter of locating platform 2, are correspondingly provided with above locating platform 2 removable
Dynamic suction ring 5, outer posting ring 6 are adsorbed on 5 lower section of ring, when the axis of outer posting ring 6 and locating platform 2 coincides, outside
The internal diameter of posting ring 6 is less than the outer diameter of locating platform 2, and the outer diameter of outer posting ring 6 is greater than the outer diameter of locating platform 2, outer fixed
Annular cutting groove 7 is offered on the downside of position frame ring 6；Rotating disk 8 is coaxially arranged with below locating platform 2, between 8 periphery of rotating disk is uniform
Every being distributed with several rotating arms 9,9 end of rotating arm is equipped with rotating seat 10, and rotating seat 10 is located at 2 outside of locating platform, rotation
It is rotatably coupled pinch roller 11 on seat 10,11 axis of pinch roller is arranged radially along locating platform 2,11 upside of pinch roller and locating platform
2 flushes are also fixedly connected with arcuate cutting blade 12 on rotating seat 10, and the upside blade of cutter 12, which can correspond to, protrudes into cutting groove
In 7, the both ends of the surface of pinch roller 11 are located at the left and right sides of cutter 12 in axis direction.Rotating roller group 3 includes several along vertical
To the rotating roller 3a being spaced apart, rotating roller 3a axis is laterally arranged, and the left and right ends of rotating roller 3a rotatably support respectively
In corresponding roller support 13, flush on the upside of each rotating roller 3a, transmission 4 lower surface of counterdie and the upside rotating roller 3a are in contact.It passes
Dynamic counterdie 4 includes source rotation section 4a and translation portion 4b, and transmission 4 source rotation section 4a ecto-entad of counterdie is wound into several circles,
The inner ring of transmission 4 source rotation section 4a of counterdie is sleeved on dispensing shaft 14, and the left and right ends of dispensing shaft 14 are rotatably supported at
In corresponding roller support 13, the outer ring avris of transmission 4 source rotation section 4a of counterdie connects with translation portion 4b.Inhale 5 upside of ring circumferentially
It is evenly spaced on and is equipped with several three-way connections 15, the left and right sides of three-way connection 15 is equipped with bypass, three-way connection 15
Downside is equipped with underpass, is connected between the bypass of adjacent three-way connection 15 by connecting tube 16, positioned at the three-way connection of avris
15 bypass is connected with vacuum evacuation device, and the underpass that each three-way connection 15 is corresponded on suction ring 5 offers several venthole 5a,
Venthole 5a is connected with the underpass of corresponding three-way connection 15, and the avris for inhaling ring 5 is equipped with mobile bar 17, mobile bar 17 vertically
Upper end is connected with driving mechanism transmission.The driving mechanism includes two fixed lateral beams 18 disposed in parallel, fixed lateral beam
18 are located at the top for inhaling ring 5, and fixed lateral beam 18 is equipped with cross slide way 19 and horizontal tooth bar 20, between two fixed lateral beams 18
Equipped with transversely-moving rack 21, the both ends of transversely-moving rack 21 are respectively equipped with traversing seat 21a, and traversing seat 21a passes through sliding block and corresponding cross slide way
19 are slidably connected, and are equipped with traversing motor 22 on traversing seat 21a vertically, and the output end of traversing motor 22 is equipped with and corresponding horizontal tooth bar
20 gears being meshed；Vertical shift seat 24 is slidably connected by longitudinal rail 23 on transversely-moving rack 21, vertical shift seat 24 is equipped with vertical shift
Motor 25 is axially arranged with vertical shift rack gear 26 on transversely-moving rack 21, and the output end of vertical shift motor 25 is equipped with to be meshed with vertical shift rack gear 26
Gear, be connected with crane 27 on vertical shift seat 24,17 upper end of mobile bar is connected with crane 27.It is opened in the middle part of vertical shift seat 24
Equipped with the vertical groove for running through vertical shift seat 24, recess sidewall is equipped with several riser guides 28, and crane 27 is inserted vertically into groove
And be slidably connected with each riser guide 28 by sliding block, vertically equipped with rotatable lead screw 29 on crane 27, the one of lead screw 29
End is sequentially connected with lifting motor 30, is fixed with nut seat 31 on the upside of the groove of vertical shift seat 24, is fixed on nut seat 31
Feed screw nut 31a, feed screw nut 31a and lead screw 29 match setting.The shaft 8a of rotating disk 8 is through retarder 32 and rotating electric machine
33 transmission connections.
When the present apparatus works, the rotation roller groups 3 of front and rear sides drives transmission counterdie 4 mobile, and traversing motor 22 is with moving gear
It being rotated along horizontal tooth bar 20, transversely-moving rack 21 realizes that transverse shifting, vertical shift motor 25 are rotated with moving gear along vertical shift rack gear 26,
Vertical shift seat 24 is longitudinally movable, lifting motor 30 drive lead screw 29 rotate, feed screw nut 31a be it is fixed, lead screw 29 can
To move axially along feed screw nut 31a, lead screw 29 drives crane 27 to move up and down；It inhales ring 5 outer posting ring 6 is sucked,
It inhales the lower outer posting ring 6 of general who has surrendered of ring 5 to be pressed on locating platform 2, outer 6 inner ring of posting ring is supported on locating platform 2, outer positioning
6 outer ring of frame ring is supported on 11 upside of pinch roller, the setting corresponding with cutting groove 7 of cutter 12, and the rotation of rotating disk 8 passes through rotating arm 9
Rotating seat 10 is driven to rotate, arcuate cutting blade 12 protrudes into cutting groove 7 and transmission counterdie 4 is cut into circle, and pinch roller 11 will have
Sticking reception and registration counterdie edge is pressed on outer 6 downside of posting ring, and outer posting ring 6 realizes that closing frame fixes with counterdie, then
Wafer 34 after suction ring 5 will stick counterdie removes casing body 1.The advantages of present apparatus, is: counterdie can be automatically cut into circle
Shape, and outer posting ring 6 is fixed on to the edge of counterdie upper surface, it realizes and counterdie is fitted in outer 6 downside of posting ring, then
Wafer 34 can be fitted with counterdie, with regard to more convenient when being processed to wafer 34, high degree of automation.
The utility model is not limited to above-described embodiment, on the basis of technical solution disclosed by the utility model, this
For the technical staff in field according to disclosed technology contents, not needing creative labor can be special to some of which technology
Sign makes some replacements and deformation, these replacements and deformation are within the protection scope of the present utility model.
Claims (7)
1. a kind of outer posting ring pastes counterdie device, which is characterized in that be equipped with round positioning including casing body, in the casing body
Platform, front and rear sides corresponding with locating platform are equipped with rotation roller group, and being longitudinally equipped between two rotation roller groups has viscosity
Transmission counterdie, the width for being driven counterdie is greater than the diameter of locating platform, be correspondingly provided with above locating platform it is moveable inhale ring,
Outer posting ring is adsorbed below ring, when the axis of outer posting ring and locating platform coincides, the internal diameter of outer posting ring
Less than the outer diameter of locating platform, the outer diameter of outer posting ring is greater than the outer diameter of locating platform, offers ring on the downside of outer posting ring
Shape cutting groove；It is coaxially arranged with rotating disk below the locating platform, rotating disk periphery is evenly spaced on equipped with several rotations
Arm, rotating arm end are equipped with rotating seat, and turning seat has been rotatably coupled pinch roller on rotating seat on the outside of locating platform, press
Wheel axis is arranged radially along locating platform, pinch roller upside and locating platform flush, is also fixedly connected with arc on rotating seat and is cut
Cutter, the upside blade of cutter, which can correspond to, to be protruded into cutting groove, and the both ends of the surface of pinch roller are located at cutter in axis direction
The left and right sides.
2. a kind of outer posting ring according to claim 1 pastes counterdie device, which is characterized in that the rotation roller group includes
The rotating roller of several longitudinally spaced distributions, rotation roll axis are laterally arranged, and the left and right ends of rotating roller can be rotated twelve Earthly Branches respectively
Support is in corresponding roller support, flush on the upside of each rotating roller, is in contact on the upside of transmission counterdie lower surface and rotating roller.
3. a kind of outer posting ring according to claim 2 pastes counterdie device, which is characterized in that the transmission counterdie includes
Source rotation section and translation portion, transmission counterdie source rotation section ecto-entad are wound into several circles, are driven counterdie source rotation section
Inner ring be sleeved on dispensing shaft, the left and right ends of dispensing shaft are rotatably supported in corresponding roller support, be driven counterdie source
The outer ring avris of rotation section connects with translation portion.
4. a kind of outer posting ring according to claim 1-3 pastes counterdie device, which is characterized in that the suction ring
Upside is circumferentially evenly spaced on equipped with several three-way connections, is equipped with bypass at left and right sides of three-way connection, three connect
The downside of head is equipped with underpass, is connected between the bypass of adjacent three-way connection by connecting tube, positioned at the three-way connection of avris
Bypass be connected with vacuum evacuation device, inhale and correspond to the underpass of each three-way connection on ring and offer several ventholes, venthole
It is connected with the underpass of corresponding three-way connection, the avris for inhaling ring is equipped with mobile bar, mobile bar upper end and driving machine vertically
Structure transmission is connected.
5. a kind of outer posting ring according to claim 4 pastes counterdie device, which is characterized in that the driving mechanism includes
Two fixed lateral beams disposed in parallel, fixed lateral beam be located at inhale ring top, fixed lateral beam be equipped with cross slide way and
Horizontal tooth bar is equipped with transversely-moving rack between two fixed lateral beams, and the both ends of transversely-moving rack are respectively equipped with traversing seat, and traversing seat passes through sliding block
It is slidably connected with corresponding cross slide way, is equipped with traversing motor on traversing seat vertically, the output end of traversing motor is equipped with and corresponding cross
The gear being meshed to rack gear；Vertical shift seat is slidably connected by longitudinal rail on the transversely-moving rack, vertical shift seat is equipped with vertical shift
Motor is axially arranged with vertical shift rack gear on transversely-moving rack, and the output end of vertical shift motor is equipped with the gear being meshed with vertical shift rack gear, described
Crane is connected on vertical shift seat, mobile bar upper end is connected with crane.
6. a kind of outer posting ring according to claim 5 pastes counterdie device, which is characterized in that opened in the middle part of the vertical shift seat
Equipped with the vertical groove for running through vertical shift seat, recess sidewall is equipped with several riser guides, and crane is inserted vertically into groove and passes through
Sliding block is slidably connected with each riser guide, is equipped with rotatable lead screw on crane vertically, and one end of lead screw and lifting motor pass
The groove upside of dynamic connection, vertical shift seat is fixed with nut seat, and feed screw nut, feed screw nut and lead screw are fixed on nut seat
Match setting.
7. a kind of outer posting ring according to claim 1-3 pastes counterdie device, which is characterized in that the rotation
The shaft of disk is sequentially connected through retarder and rotating electric machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920038244.7U CN209534157U (en) | 2019-01-10 | 2019-01-10 | A kind of outer posting ring patch counterdie device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920038244.7U CN209534157U (en) | 2019-01-10 | 2019-01-10 | A kind of outer posting ring patch counterdie device |
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| Publication Number | Publication Date |
|---|---|
| CN209534157U true CN209534157U (en) | 2019-10-25 |
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ID=68269030
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920038244.7U Active CN209534157U (en) | 2019-01-10 | 2019-01-10 | A kind of outer posting ring patch counterdie device |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109591282A (en) * | 2019-01-10 | 2019-04-09 | 江苏汇成光电有限公司 | A kind of outer posting ring patch counterdie device |
| CN115397229A (en) * | 2022-08-23 | 2022-11-25 | 西安甘鑫电子科技有限公司 | Electromagnetic compatibility processing device of high-power supply |
-
2019
- 2019-01-10 CN CN201920038244.7U patent/CN209534157U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109591282A (en) * | 2019-01-10 | 2019-04-09 | 江苏汇成光电有限公司 | A kind of outer posting ring patch counterdie device |
| CN115397229A (en) * | 2022-08-23 | 2022-11-25 | 西安甘鑫电子科技有限公司 | Electromagnetic compatibility processing device of high-power supply |
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