CN109591282A - A kind of outer posting ring patch counterdie device - Google Patents
A kind of outer posting ring patch counterdie device Download PDFInfo
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- CN109591282A CN109591282A CN201910022224.5A CN201910022224A CN109591282A CN 109591282 A CN109591282 A CN 109591282A CN 201910022224 A CN201910022224 A CN 201910022224A CN 109591282 A CN109591282 A CN 109591282A
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- ring
- counterdie
- locating platform
- seat
- rotating
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- 230000005540 biological transmission Effects 0.000 claims abstract description 31
- 238000005520 cutting process Methods 0.000 claims abstract description 19
- 230000007246 mechanism Effects 0.000 claims description 10
- 238000013519 translation Methods 0.000 claims description 8
- 238000009826 distribution Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 235000012431 wafers Nutrition 0.000 description 23
- 238000000034 method Methods 0.000 description 12
- 230000008569 process Effects 0.000 description 9
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 239000013078 crystal Substances 0.000 description 6
- 230000006872 improvement Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002224 dissection Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000001727 in vivo Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/02—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor using sheet or web-like material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C63/00—Lining or sheathing, i.e. applying preformed layers or sheathings of plastics; Apparatus therefor
- B29C63/0004—Component parts, details or accessories; Auxiliary operations
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a kind of outer posting rings in field of semiconductor processing to paste counterdie device, including casing body, front and rear sides corresponding with locating platform are equipped with rotation roller group, it is longitudinally equipped between two rotation roller groups and has sticking transmission counterdie, moveable suction ring is correspondingly provided with above locating platform, the internal diameter of outer posting ring is less than the outer diameter of locating platform, and the outer diameter of outer posting ring is greater than the outer diameter of locating platform, offers annular cutting groove on the downside of outer posting ring；Rotating disk is coaxially arranged with below the locating platform, rotating disk periphery is evenly spaced on equipped with several rotating arms, rotating arm end is equipped with rotating seat, pinch roller has been rotatably coupled on rotating seat, pinch roller upside and locating platform flush, arcuate cutting blade is also fixedly connected on rotating seat, the upside blade of cutter, which can correspond to, to be protruded into cutting groove.Counterdie can be automatically cut into circle by the present invention, and outer posting ring is fixed on to the edge of counterdie upper surface.
Description
Technical field
The invention belongs to field of semiconductor processing, in particular to a kind of outer posting ring pastes counterdie device.
Background technique
In the prior art, wafer refers to silicon wafer used in silicon semiconductor production of integrated circuits, since its shape is circle,
Therefore referred to as wafer；It can be processed on silicon and is fabricated to various circuit component structures, and becoming has the integrated of specific electrical functionality
Circuit product.Wafer fabrication melts these polysilicons, then is planted in liquid melting into seed crystal, then slowly pulls out it, with shape
At columned monocrystalline silicon crystal bar, due to silicon crystal bar be the seed crystal that is determined by a high preferred orientation in the silicon raw material of molten state by
Gradually generate.Silicon crystal bar polishes, laser incising using dissection, barreling, slice, chamfering, after packaging, becomes IC works
Base stock-silicon wafer, here it is " wafers ".
It can integrate on wafer and several IC be installed, and the manufacturing process of chip can be divided into wafer-process process, wafer
Survey several steps such as process, structure dress process, test step.Wherein wafer-process process and wafer probing process are front-end-of-line,
And structure dress process, test step are back segment process.Wafer in process, need to wafer carry out film, exposure, development,
Several processes such as etching, ion implantation, metal sputtering and cutting, generally use and wafer are attached on counterdie, cover in crystal column surface
Lid is provided with one layer of protection glue film, fixes an outer posting ring at the edge of counterdie upper surface, outer posting ring and wafer
Axis coincides, supporter of the outer posting ring as wafer, and convenient for processing to wafer, positioning is convenient, prevents wafer
It destroys, lacks the equipment that counterdie is fitted into outer posting ring currently on the market, cannot achieve outer posting ring and bottom automatically
Film is mutually fixed.
Summary of the invention
The object of the present invention is to provide a kind of outer posting rings to paste counterdie device, counterdie can be automatically cut into circle,
And outer posting ring is fixed on to the edge of counterdie upper surface, it realizes and counterdie is fitted on the downside of outer posting ring, automate journey
Degree is high, and positioning is convenient.
The object of the present invention is achieved like this: a kind of outer posting ring patch counterdie device, including casing body, the casing
It is equipped with round locating platform in vivo, front and rear sides corresponding with locating platform are equipped with rotation roller group, and two rotate between roller groups
Longitudinal be equipped with has sticking transmission counterdie, and the width for being driven counterdie is greater than the diameter of locating platform, and locating platform top is corresponding
Ring is inhaled equipped with moveable, outer posting ring is adsorbed below ring, when the axis of outer posting ring and locating platform coincides,
The internal diameter of outer posting ring is less than the outer diameter of locating platform, and the outer diameter of outer posting ring is greater than the outer diameter of locating platform, outer positioning
Annular cutting groove is offered on the downside of frame ring；Rotating disk, rotating disk periphery uniform intervals are coaxially arranged with below the locating platform
Several rotating arms are distributed with, rotating arm end is equipped with rotating seat, and turning seat can be rotated on rotating seat on the outside of locating platform
Ground is connected with pinch roller, and pinch roller axis is arranged radially along locating platform, pinch roller upside and locating platform flush, also solid on rotating seat
Surely it is connected with arcuate cutting blade, the upside blade of cutter, which can correspond to, to be protruded into cutting groove, and the both ends of the surface of pinch roller are in axis direction
It is located at the left and right sides of cutter.
When the invention works, the rotation roller group of front and rear sides drives transmission counterdie mobile, inhales ring and outer posting ring is sucked,
It inhales the outer posting ring of general who has surrendered under ring to be pressed on locating platform, outer posting ring inner ring is supported on locating platform, outer posting ring
Outer ring is supported on the upside of pinch roller, cutter setting corresponding with cutting groove, and rotating disk rotation drives rotating seat to turn by rotating arm
Dynamic, arcuate cutting blade protrudes into cutting groove and transmission counterdie is cut into circle, and pinch roller will have sticking reception and registration counterdie edge
It is pressed on the downside of outer posting ring, outer posting ring realizes that closing frame fixes, and then inhales ring for the wafer after sticking counterdie with counterdie
Remove casing body.Compared with prior art, the beneficial effects of the present invention are: counterdie can be automatically cut into circle, and will
Outer posting ring is fixed on the edge of counterdie upper surface, realizes and counterdie is fitted on the downside of outer posting ring, then can will be brilliant
Circle fits with counterdie, with regard to more convenient when being processed to wafer, high degree of automation.
As a further improvement of the present invention, the rotation roller group includes the rotating roller of several longitudinally spaced distributions, is turned
Action roller shaft line is laterally arranged, and the left and right ends of rotating roller are rotatably supported at respectively in corresponding roller support, on the upside of each rotating roller
It is in contact on the upside of flush, transmission counterdie lower surface and rotating roller.The roll shaft and rotary drive mechanism of each rotating roller are sequentially connected,
Rotary drive mechanism drives each rotating roller to rotate synchronously, and rotating roller drives transmission counterdie mobile by frictional force.
As a further improvement of the present invention, the transmission counterdie includes source rotation section and translation portion, is driven counterdie source
Head rotation section ecto-entad is wound into several circles, and the inner ring of transmission counterdie source rotation section is sleeved on dispensing shaft, dispensing shaft
Left and right ends are rotatably supported in corresponding roller support, and the outer ring avris of transmission counterdie source rotation section connects with translation portion.
Rotating roller drives transmission counterdie translation portion mobile, and translation portion pulls transmission counterdie source rotation section to rotate around dispensing shaft, transmission
Counterdie source rotation section is by the constantly outside blowing of rotation, when a roll transmission counterdie is finished, the transmission counterdie that can more renew.
As a further improvement of the present invention, it is circumferentially evenly spaced on the upside of the suction ring and is connected equipped with several three
Head, bypass is equipped at left and right sides of three-way connection, and the downside of three-way connection is equipped with underpass, the bypass of adjacent three-way connection
It is connected between road by connecting tube, the bypass positioned at the three-way connection of avris is connected with vacuum evacuation device, inhales corresponding each on ring
The underpass of three-way connection offers several ventholes, and venthole is connected with the underpass of corresponding three-way connection, the suction ring
Avris be equipped with mobile bar vertically, mobile bar upper end is connected with driving mechanism transmission.Each three-way connection interconnects, and vacuumizes
Device vacuumizes the underpass of three-way connection, and outer posting ring is sucked by vacuum for venthole；Driving mechanism, which drives, inhales ring
It moves freely.
As a further improvement of the present invention, the driving mechanism includes two fixed lateral beams disposed in parallel, fixed
Transverse beam is located at the top for inhaling ring, and fixed lateral beam is equipped with cross slide way and horizontal tooth bar, is equipped between two fixed lateral beams
Transversely-moving rack, the both ends of transversely-moving rack are respectively equipped with traversing seat, and traversing seat is slidably connected by sliding block with corresponding cross slide way, traversing seat
On be equipped with traversing motor vertically, the output end of traversing motor is equipped with the gear being meshed with corresponding horizontal tooth bar；The transversely-moving rack
Upper to slidably connect vertical shift seat by longitudinal rail, vertical shift seat is equipped with vertical shift motor, is axially arranged with vertical shift rack gear on transversely-moving rack,
The output end of vertical shift motor is equipped with the gear being meshed with vertical shift rack gear, is connected with crane on the vertical shift seat, mobile
Bar upper end is connected with crane.Traversing motor driven gear is rotated along horizontal tooth bar, and transversely-moving rack realizes transverse shifting, vertical shift electricity
Machine band moving gear is along vertical shift racks turn, and vertical shift seat is longitudinally movable, and crane drives mobile bar oscilaltion.
As a further improvement of the present invention, the vertical groove for running through vertical shift seat, groove are offered in the middle part of the vertical shift seat
Side wall is equipped with several riser guides, and crane is inserted vertically into groove and is slidably connected by sliding block and each riser guide, gone up and down
Rotatable lead screw is equipped on frame vertically, one end of lead screw and lifting motor are sequentially connected, and fixation is set on the upside of the groove of vertical shift seat
There is nut seat, be fixed with feed screw nut on nut seat, feed screw nut and lead screw match setting.Lifting motor drives lead screw to turn
It is dynamic, feed screw nut be it is fixed, lead screw can be moved axially along feed screw nut, and lead screw drives crane to move up and down.
As a further improvement of the present invention, the shaft of the rotating disk is sequentially connected through retarder and rotating electric machine.Rotation
Rotating motor drives rotating disk to rotate after retarder slows down.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the top view of rotating disk.
Fig. 3 is the sectional view along AA in Fig. 1.
Fig. 4 is the partial enlarged view of Fig. 3.
Fig. 5 is the B direction view of Fig. 2.
Fig. 6 is the structural schematic diagram for inhaling the driving mechanism of ring.
Fig. 7 is the top view for inhaling ring.
Fig. 8 is the side view for inhaling ring.
Fig. 9 is the schematic perspective view for inhaling the driving mechanism of ring.
Figure 10 is the enlarged drawing in Fig. 9 at C.
Figure 11 is the schematic perspective view of vertical shift seat.
Figure 12 is the partial enlarged view of Figure 11.
Figure 13 is the top view of wafer, counterdie and outer posting ring.
Wherein, 1 casing body, 2 locating platforms, 3 rotation roller groups, 3a rotating roller, 4 transmission counterdies, the source 4a rotation section, 4b are flat
Dynamic portion, 5 inhale ring, 5a venthole, 6 outer posting rings, 7 cutting grooves, 8 rotating disks, 8a shaft, 9 rotating arms, 10 rotating seats, 11 pressures
Wheel, 12 cutter, 13 roller supports, 14 dispensing shafts, 15 three-way connections, 16 connecting tubes, 17 mobile bars, 18 fixed lateral beams, 19 is horizontal
Direction guiding rail, 20 horizontal tooth bars, 21 transversely-moving racks, the traversing seat of 21a, 22 traversing motors, 23 longitudinal rails, 24 vertical shift seats, 25 vertical shifts electricity
Machine, 26 vertical shift rack gears, 27 cranes, 28 riser guides, 29 lead screws, 30 lifting motors, 31 nut seats, 31a feed screw nut, 32 subtract
Fast device, 33 rotating electric machines, 34 wafers.
Specific embodiment
Such as Fig. 1-13, counterdie device, including casing body 1 are pasted for a kind of outer posting ring, round positioning is equipped in casing body 1
Platform 2, front and rear sides corresponding with locating platform 2 are equipped with rotation roller group 3, and being longitudinally equipped between two rotation roller groups 3 has
The transmission counterdie 4 of viscosity, the width of transmission counterdie 4 are greater than the diameter of locating platform 2, are correspondingly provided with above locating platform 2 removable
Dynamic suction ring 5, outer posting ring 6 are adsorbed on 5 lower section of ring, when the axis of outer posting ring 6 and locating platform 2 coincides, outside
The internal diameter of posting ring 6 is less than the outer diameter of locating platform 2, and the outer diameter of outer posting ring 6 is greater than the outer diameter of locating platform 2, outer fixed
Annular cutting groove 7 is offered on the downside of position frame ring 6；Rotating disk 8 is coaxially arranged with below locating platform 2, between 8 periphery of rotating disk is uniform
Every being distributed with several rotating arms 9,9 end of rotating arm is equipped with rotating seat 10, and rotating seat 10 is located at 2 outside of locating platform, rotation
It is rotatably coupled pinch roller 11 on seat 10,11 axis of pinch roller is arranged radially along locating platform 2,11 upside of pinch roller and locating platform
2 flushes are also fixedly connected with arcuate cutting blade 12 on rotating seat 10, and the upside blade of cutter 12, which can correspond to, protrudes into cutting groove
In 7, the both ends of the surface of pinch roller 11 are located at the left and right sides of cutter 12 in axis direction.Rotating roller group 3 includes several along vertical
To the rotating roller 3a being spaced apart, rotating roller 3a axis is laterally arranged, and the left and right ends of rotating roller 3a rotatably support respectively
In corresponding roller support 13, flush on the upside of each rotating roller 3a, transmission 4 lower surface of counterdie and the upside rotating roller 3a are in contact.It passes
Dynamic counterdie 4 includes source rotation section 4a and translation portion 4b, and transmission 4 source rotation section 4a ecto-entad of counterdie is wound into several circles,
The inner ring of transmission 4 source rotation section 4a of counterdie is sleeved on dispensing shaft 14, and the left and right ends of dispensing shaft 14 are rotatably supported at
In corresponding roller support 13, the outer ring avris of transmission 4 source rotation section 4a of counterdie connects with translation portion 4b.Inhale 5 upside of ring circumferentially
It is evenly spaced on and is equipped with several three-way connections 15, the left and right sides of three-way connection 15 is equipped with bypass, three-way connection 15
Downside is equipped with underpass, is connected between the bypass of adjacent three-way connection 15 by connecting tube 16, positioned at the three-way connection of avris
15 bypass is connected with vacuum evacuation device, and the underpass that each three-way connection 15 is corresponded on suction ring 5 offers several venthole 5a,
Venthole 5a is connected with the underpass of corresponding three-way connection 15, and the avris for inhaling ring 5 is equipped with mobile bar 17, mobile bar 17 vertically
Upper end is connected with driving mechanism transmission.The driving mechanism includes two fixed lateral beams 18 disposed in parallel, fixed lateral beam
18 are located at the top for inhaling ring 5, and fixed lateral beam 18 is equipped with cross slide way 19 and horizontal tooth bar 20, between two fixed lateral beams 18
Equipped with transversely-moving rack 21, the both ends of transversely-moving rack 21 are respectively equipped with traversing seat 21a, and traversing seat 21a passes through sliding block and corresponding cross slide way
19 are slidably connected, and are equipped with traversing motor 22 on traversing seat 21a vertically, and the output end of traversing motor 22 is equipped with and corresponding horizontal tooth bar
20 gears being meshed；Vertical shift seat 24 is slidably connected by longitudinal rail 23 on transversely-moving rack 21, vertical shift seat 24 is equipped with vertical shift
Motor 25 is axially arranged with vertical shift rack gear 26 on transversely-moving rack 21, and the output end of vertical shift motor 25 is equipped with to be meshed with vertical shift rack gear 26
Gear, be connected with crane 27 on vertical shift seat 24,17 upper end of mobile bar is connected with crane 27.It is opened in the middle part of vertical shift seat 24
Equipped with the vertical groove for running through vertical shift seat 24, recess sidewall is equipped with several riser guides 28, and crane 27 is inserted vertically into groove
And be slidably connected with each riser guide 28 by sliding block, vertically equipped with rotatable lead screw 29 on crane 27, the one of lead screw 29
End is sequentially connected with lifting motor 30, is fixed with nut seat 31 on the upside of the groove of vertical shift seat 24, is fixed on nut seat 31
Feed screw nut 31a, feed screw nut 31a and lead screw 29 match setting.The shaft 8a of rotating disk 8 is through retarder 32 and rotating electric machine
33 transmission connections.
When the present apparatus works, the rotation roller groups 3 of front and rear sides drives transmission counterdie 4 mobile, and traversing motor 22 is with moving gear
It being rotated along horizontal tooth bar 20, transversely-moving rack 21 realizes that transverse shifting, vertical shift motor 25 are rotated with moving gear along vertical shift rack gear 26,
Vertical shift seat 24 is longitudinally movable, lifting motor 30 drive lead screw 29 rotate, feed screw nut 31a be it is fixed, lead screw 29 can
To move axially along feed screw nut 31a, lead screw 29 drives crane 27 to move up and down；It inhales ring 5 outer posting ring 6 is sucked,
It inhales the lower outer posting ring 6 of general who has surrendered of ring 5 to be pressed on locating platform 2, outer 6 inner ring of posting ring is supported on locating platform 2, outer positioning
6 outer ring of frame ring is supported on 11 upside of pinch roller, the setting corresponding with cutting groove 7 of cutter 12, and the rotation of rotating disk 8 passes through rotating arm 9
Rotating seat 10 is driven to rotate, arcuate cutting blade 12 protrudes into cutting groove 7 and transmission counterdie 4 is cut into circle, and pinch roller 11 will have
Sticking reception and registration counterdie edge is pressed on outer 6 downside of posting ring, and outer posting ring 6 realizes that closing frame fixes with counterdie, then
Wafer 34 after suction ring 5 will stick counterdie removes casing body 1.The advantages of present apparatus, is: counterdie can be automatically cut into circle
Shape, and outer posting ring 6 is fixed on to the edge of counterdie upper surface, it realizes and counterdie is fitted in outer 6 downside of posting ring, then
Wafer 34 can be fitted with counterdie, with regard to more convenient when being processed to wafer 34, high degree of automation.
The present invention is not limited to the above embodiments, on the basis of technical solution disclosed by the invention, the skill of this field
For art personnel according to disclosed technology contents, one can be made to some of which technical characteristic by not needing creative labor
A little replacements and deformation, these replacements and deformation are within the scope of the invention.
Claims (7)
1. a kind of outer posting ring pastes counterdie device, which is characterized in that be equipped with round positioning including casing body, in the casing body
Platform, front and rear sides corresponding with locating platform are equipped with rotation roller group, and being longitudinally equipped between two rotation roller groups has viscosity
Transmission counterdie, the width for being driven counterdie is greater than the diameter of locating platform, be correspondingly provided with above locating platform it is moveable inhale ring,
Outer posting ring is adsorbed below ring, when the axis of outer posting ring and locating platform coincides, the internal diameter of outer posting ring
Less than the outer diameter of locating platform, the outer diameter of outer posting ring is greater than the outer diameter of locating platform, offers ring on the downside of outer posting ring
Shape cutting groove；It is coaxially arranged with rotating disk below the locating platform, rotating disk periphery is evenly spaced on equipped with several rotations
Arm, rotating arm end are equipped with rotating seat, and turning seat has been rotatably coupled pinch roller on rotating seat on the outside of locating platform, press
Wheel axis is arranged radially along locating platform, pinch roller upside and locating platform flush, is also fixedly connected with arc on rotating seat and is cut
Cutter, the upside blade of cutter, which can correspond to, to be protruded into cutting groove, and the both ends of the surface of pinch roller are located at cutter in axis direction
The left and right sides.
2. a kind of outer posting ring according to claim 1 pastes counterdie device, which is characterized in that the rotation roller group includes
The rotating roller of several longitudinally spaced distributions, rotation roll axis are laterally arranged, and the left and right ends of rotating roller can be rotated twelve Earthly Branches respectively
Support is in corresponding roller support, flush on the upside of each rotating roller, is in contact on the upside of transmission counterdie lower surface and rotating roller.
3. a kind of outer posting ring according to claim 2 pastes counterdie device, which is characterized in that the transmission counterdie includes
Source rotation section and translation portion, transmission counterdie source rotation section ecto-entad are wound into several circles, are driven counterdie source rotation section
Inner ring be sleeved on dispensing shaft, the left and right ends of dispensing shaft are rotatably supported in corresponding roller support, be driven counterdie source
The outer ring avris of rotation section connects with translation portion.
4. a kind of outer posting ring according to claim 1-3 pastes counterdie device, which is characterized in that the suction ring
Upside is circumferentially evenly spaced on equipped with several three-way connections, is equipped with bypass at left and right sides of three-way connection, three connect
The downside of head is equipped with underpass, is connected between the bypass of adjacent three-way connection by connecting tube, positioned at the three-way connection of avris
Bypass be connected with vacuum evacuation device, inhale and correspond to the underpass of each three-way connection on ring and offer several ventholes, venthole
It is connected with the underpass of corresponding three-way connection, the avris for inhaling ring is equipped with mobile bar, mobile bar upper end and driving machine vertically
Structure transmission is connected.
5. a kind of outer posting ring according to claim 4 pastes counterdie device, which is characterized in that the driving mechanism includes
Two fixed lateral beams disposed in parallel, fixed lateral beam be located at inhale ring top, fixed lateral beam be equipped with cross slide way and
Horizontal tooth bar is equipped with transversely-moving rack between two fixed lateral beams, and the both ends of transversely-moving rack are respectively equipped with traversing seat, and traversing seat passes through sliding block
It is slidably connected with corresponding cross slide way, is equipped with traversing motor on traversing seat vertically, the output end of traversing motor is equipped with and corresponding cross
The gear being meshed to rack gear；Vertical shift seat is slidably connected by longitudinal rail on the transversely-moving rack, vertical shift seat is equipped with vertical shift
Motor is axially arranged with vertical shift rack gear on transversely-moving rack, and the output end of vertical shift motor is equipped with the gear being meshed with vertical shift rack gear, described
Crane is connected on vertical shift seat, mobile bar upper end is connected with crane.
6. a kind of outer posting ring according to claim 5 pastes counterdie device, which is characterized in that opened in the middle part of the vertical shift seat
Equipped with the vertical groove for running through vertical shift seat, recess sidewall is equipped with several riser guides, and crane is inserted vertically into groove and passes through
Sliding block is slidably connected with each riser guide, is equipped with rotatable lead screw on crane vertically, and one end of lead screw and lifting motor pass
The groove upside of dynamic connection, vertical shift seat is fixed with nut seat, and feed screw nut, feed screw nut and lead screw are fixed on nut seat
Match setting.
7. a kind of outer posting ring according to claim 1-3 pastes counterdie device, which is characterized in that the rotation
The shaft of disk is sequentially connected through retarder and rotating electric machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910022224.5A CN109591282A (en) | 2019-01-10 | 2019-01-10 | A kind of outer posting ring patch counterdie device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910022224.5A CN109591282A (en) | 2019-01-10 | 2019-01-10 | A kind of outer posting ring patch counterdie device |
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| Publication Number | Publication Date |
|---|---|
| CN109591282A true CN109591282A (en) | 2019-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910022224.5A Pending CN109591282A (en) | 2019-01-10 | 2019-01-10 | A kind of outer posting ring patch counterdie device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110126020A (en) * | 2019-05-09 | 2019-08-16 | 邓十匀 | Facial mask cutting means |
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| CN110126020A (en) * | 2019-05-09 | 2019-08-16 | 邓十匀 | Facial mask cutting means |
| CN110126020B (en) * | 2019-05-09 | 2024-02-13 | 邓十匀 | Mask cutting device |
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