CN209513661U - A kind of double-station high speed and precision vision detection system - Google Patents
A kind of double-station high speed and precision vision detection system Download PDFInfo
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- CN209513661U CN209513661U CN201821975785.4U CN201821975785U CN209513661U CN 209513661 U CN209513661 U CN 209513661U CN 201821975785 U CN201821975785 U CN 201821975785U CN 209513661 U CN209513661 U CN 209513661U
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- guide rail
- axis guide
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- detection platform
- precision
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Abstract
The utility model discloses a kind of double-station high speed and precision vision detection systems, including XYZ axis precision movement platform, microscope detection platform and zoom mirror detection platform, the microscope detection platform and zoom mirror detection platform are arranged in XYZ axis precision movement platform, it further include for controlling the mobile industrial personal computer of XYZ axis precision surface plate, the industrial personal computer is connect with microscope detection platform and zoom mirror detection platform respectively, the XYZ axis precision surface plate includes X-axis guide rail, Y-axis guide rail, Z axis guide rail, first sliding block, second sliding block, third sliding block and for driving X, Y, the mobile motor of Z axis guide rail, X-axis guide rail is fixed on the base, Y-axis guide rail connects X-axis guide rail by the first sliding block, the Z axis guide rail is connect by the second sliding block with Y-axis guide rail.The automatic switchover of microscope Yu zoom mirror may be implemented using XYZ axis precision surface plate for the utility model.
Description
Technical field
The utility model belongs to industrial nondestructive testing, and in particular to a kind of double-station high speed and precision vision detection system.
Background technique
Flexible integration circuit package substrate (Flexible Printed IntegratedCircuit Substrates, letter
Claim FPS), it is a kind of printed circuit substrate for being corroded on polyimide flex baseplate material surface using copper foil and forming route.Mesh
Before, FPS wire sizes have reached micron level, and as the technological progress of IC processing procedure develops to nanoscale direction.With FPS's
Route is more and more finer, and the defect generated in manufacturing process also becomes increasingly complex, and quality and defects controlling are also got over by producer
Come stringenter, detection difficulty greatly increases.Currently, factory mostly uses greatly machine vision initial survey to determine defective locations, then use people
The method of work examining carries out Quality Detection to FPS, and the amount of labour is big.Traditional AOI detection and Manual Visual Inspection mode can not fit
The detection demand of production scene is answered, is badly in need of developing a high speed and precision visual detection equipment and system.Using image smoothing, image
The advanced algorithms such as splicing, point set topology, Differential Geometry carry out preliminary judgement, auxiliary to FPS main physical parameters and defect mode
Artificial detection has great meaning to product yield is improved.
Utility model content
In order to overcome shortcoming and deficiency of the existing technology, the utility model provides a kind of double-station high speed and precision vision
Detection system.
The utility model adopts the following technical solution:
A kind of double-station high speed and precision vision detection system, including XYZ axis precision movement platform, microscope detection platform and
Zoom mirror detection platform, the microscope detection platform and zoom mirror detection platform are arranged in XYZ axis precision movement platform, also wrap
It includes for controlling the mobile industrial personal computer for realizing microscope detection platform and the switching of zoom mirror detection platform of XYZ axis precision surface plate, institute
It states industrial personal computer to connect with microscope detection platform and zoom mirror detection platform respectively, the XYZ axis precision surface plate includes that X-axis is led
Rail, Y-axis guide rail, Z axis guide rail, the first sliding block, the second sliding block, third sliding block and the motor for driving X, Y, Z axis guide rail mobile,
X-axis guide rail is fixed on the base, and Y-axis guide rail connects X-axis guide rail by the first sliding block, and the Z axis guide rail passes through the second sliding block and Y
Axis rail connection.
The microscope detection platform includes metallographic microscope, halogen light source and CCD industrial camera, the CCD industry
Camera is arranged in Z axis guide rail.
The zoom mirror detection platform includes CCD industrial camera, zoom is adjustable zoom lens and LED axis light light supply apparatus,
The CCD industrial camera is arranged in Z axis guide rail.
Band brake apparatus is arranged in the Z axis guide rail.
The pixel of the CCD industrial camera is 5,000,000 pixels.
The utility model has the beneficial effects that
(1) critical processes such as drilling, pattern transfer, etching, the printing of the utility model towards high density FPS manufacturing process
And finished product carries out fully-automatic intelligent fault detection analysis, is conducive to improve production efficiency and product yield；
(2) originally practical to use XYZ three-axis moving structure, image capturing system is more flexible, and working range is bigger, has and answers
With the wide feature of range, effective detection can be carried out for accurate plane object.
(3) this useful application range includes wafer, CCD, IC package wire bonding, IC package substrate, flexible print circuit
The surface defects detection of the multipair elephant such as plate has extensive industrial nondestructive testing application value.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the present embodiment；
Fig. 2 is the structural schematic diagram of XYZ axis precision surface plate of the present invention.
Specific embodiment
Below with reference to examples and drawings, the utility model is described in further detail, but the reality of the utility model
It is without being limited thereto to apply mode.
Embodiment
As shown in Figures 1 and 2, a kind of double-station high speed and precision vision detection system is suitable for high density FPS manufacturing process
The critical processes such as drilling, pattern transfer, etching, printing and finished product carry out fully-automatic intelligent fault detection analysis, including XYZ axis
Precision movement platform, industrial personal computer, microscope detection platform and zoom mirror detection platform.
The industrial personal computer, for controlling being precisely controlled for XYZ axis precision movement platform, realizing microscope detection platform and becoming
The automatic switchover of times mirror detection platform.
The XYZ axis precision movement platform 8 includes X-axis guide rail 14, Y-axis guide rail 12, Z axis guide rail 13, the first sliding block 9, the
Two sliding blocks 10, third sliding block 11 and the motor for driving X, Y, Z axis guide rail mobile, X-axis guide rail are fixed on the base, and Y-axis is led
Rail connects X-axis guide rail by the first sliding block, and the Z axis guide rail is connect by the second sliding block with Y-axis guide rail, and image capture device is logical
Third sliding block is crossed to connect with Z axis guide rail, the first sliding block by X-axis Serve Motor Control, the second sliding block by Y-axis Serve Motor Control,
Third sliding block is by Z axis Serve Motor Control.
The microscope detection platform includes metallographic microscope 2, halogen light source 1 and CCD industrial camera 7, described micro-
Mirror detection platform is entirely provided in Z axis guide rail, and halogen light source provides light source for metallographic microscope and is connected, described
CCD industrial camera is arranged in Z axis guide rail.The present embodiment has the scalability of 2.5X-50X using five mesh metallographic microscopes,
Image analysis system can be connected by standard C-MOUNT interface.Halogen light source uses coaxial light source structure, multi-color filter
It is adjustable.CCD industrial camera selects 5,000,000 pixels, and the frame per second of camera can achieve 17FPS.
The zoom mirror detection platform is arranged in Z axis guide rail, including the adjustable zoom lens 4 of CCD industrial camera 7, zoom and
Coaxial 3 device of radiant of LED, the coaxial radiant of LED provides light source for the adjustable zoom lens of zoom, and is located at the adjustable zoom lens of zoom
Lower section.The CCD industrial camera is arranged in Z axis guide rail.Zoom mirror detection platform mainly for precision in 10um or more, or
The field depth of epiphragma realizes Rough Inspection in the flexible circuit panel products of 0.1-1.7mm.Zoom is adjustable, and zoom lens are taken using combined type
With design, multiplying power covers 0.09-180 times of optical amplifier, high-resolution, high-contrast image.
In the present embodiment, zoom mirror CCD selects 1,250,000 pixel color camera of Daheng's image, MER-125-30UC, resolution ratio
For 1292x 964, camera frame per second is 30fps, and CCD progressively scans Exposure mode having a size of 1/3 inch, and lens interface connects for C
Mouthful.
It can control the double CCD cameras for being mounted on Z axis in table plane by the mobile motor of control XYZ axis rail
It carries out three-dimensional mobile.
The utility model by control the first, second and third slide block movement, can make Image Acquisition on X/Y plane from
By moving, the object to be detected being aligned on XY platform.Its working range is the motion range of XY axis, than movement objective table work model
Enclose expansion.
By controlling the movement of Z axis guide rail, change the operating distance of image capturing system, to reach image capturing system
Focal length alignment, the free switching of microscope Yu common zoom mirror system may be implemented.
Z axis guide rail carries CCD industrial camera, and volume weight is big, places by long-time, has different degrees of sinking,
And mechanical oscillation can have a certain impact to the position of Z axis, therefore every time after the completion of collecting work, image capturing system Aligning control
When, it can all carry out a Z axis calibration.
Since Z axis load capacity is big, when Z axis is during slow rise, gravitional force is gradually increased, and is risen to certain
Height when, have certain downslide, therefore band brake apparatus is set Z axis guide rail to locked, stablize Z axis guide rail high in setting
Degree.
Further include article carrying platform in the present embodiment, is mainly made of marble objective table 5 and vacuum chuck 6.
The working process of this embodiment is as follows:
Zoom mirror detection platform carries out image using Z-shaped path optimizing under the control of XYZ axis precision movement platform and adopts
Collection carries out images match with standard form image and stitching image, and the discrepant region of two images is those suspected defects region,
The position of defect is recorded, Rough Inspection process is completed.
Under the control of XYZ axis precision movement platform, switch microscope detection platform, by CCD alignment Rough Inspection process detection
The position of the defect arrived records the position of defect.
System detects demand towards the multiple dimensioned ultraprecise appearance of general plane object, for 3 microns or more precision objects
Micro-imaging is used with zoom mirror ccd imaging, 3 microns or less precision objects, realizes different detections by double CCD combining forms
The application demand of scale requirement.Above-described embodiment is the preferable embodiment of the utility model, but the embodiment party of the utility model
Formula is simultaneously not restricted by the embodiments, made under other any spiritual essence and principles without departing from the utility model to change
Become, modification, substitution, combination, simplify, should be equivalent substitute mode, be included within the protection scope of the utility model.
Claims (5)
1. a kind of double-station high speed and precision vision detection system, which is characterized in that including XYZ axis precision movement platform, microscope
Detection platform and zoom mirror detection platform, the microscope detection platform and the setting of zoom mirror detection platform are transported in XYZ axis precision
It further include that XYZ axis precision surface plate is mobile to realize that microscope detection platform and zoom mirror detection platform are cut for controlling on moving platform
The industrial personal computer changed, the industrial personal computer are connect with microscope detection platform and zoom mirror detection platform respectively, and the XYZ axis precision is flat
Platform includes X-axis guide rail, Y-axis guide rail, Z axis guide rail, the first sliding block, the second sliding block, third sliding block and for driving X, Y, Z axis guide rail
Mobile motor, X-axis guide rail are fixed on the base, and Y-axis guide rail connects X-axis guide rail by the first sliding block, and the Z axis guide rail passes through
Second sliding block is connect with Y-axis guide rail.
2. a kind of double-station high speed and precision vision detection system according to claim 1, which is characterized in that the microscope
Detection platform includes metallographic microscope, halogen light source and CCD industrial camera, and the CCD industrial camera is arranged in Z axis guide rail
On.
3. a kind of double-station high speed and precision vision detection system according to claim 1, which is characterized in that the zoom mirror
Detection platform includes CCD industrial camera, zoom is adjustable zoom lens and LED axis light light supply apparatus, the CCD industrial camera setting
In Z axis guide rail.
4. a kind of double-station high speed and precision vision detection system according to claim 1, which is characterized in that the Z axis is led
Band brake apparatus is arranged in rail.
5. a kind of double-station high speed and precision vision detection system according to claim 2 or 3, which is characterized in that the CCD
The pixel of industrial camera is 5,000,000 pixels.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821975785.4U CN209513661U (en) | 2018-11-28 | 2018-11-28 | A kind of double-station high speed and precision vision detection system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821975785.4U CN209513661U (en) | 2018-11-28 | 2018-11-28 | A kind of double-station high speed and precision vision detection system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209513661U true CN209513661U (en) | 2019-10-18 |
Family
ID=68191158
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821975785.4U Expired - Fee Related CN209513661U (en) | 2018-11-28 | 2018-11-28 | A kind of double-station high speed and precision vision detection system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209513661U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111048405A (en) * | 2020-01-07 | 2020-04-21 | 厦门英惟达智能科技有限公司 | Product cleaning process for digitally cleaning chip wafer |
| CN113049601A (en) * | 2019-12-27 | 2021-06-29 | 昆山世纪三友测量技术有限公司 | New forms of energy battery case measuring equipment |
-
2018
- 2018-11-28 CN CN201821975785.4U patent/CN209513661U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113049601A (en) * | 2019-12-27 | 2021-06-29 | 昆山世纪三友测量技术有限公司 | New forms of energy battery case measuring equipment |
| CN111048405A (en) * | 2020-01-07 | 2020-04-21 | 厦门英惟达智能科技有限公司 | Product cleaning process for digitally cleaning chip wafer |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191018 Termination date: 20211128 |
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| CF01 | Termination of patent right due to non-payment of annual fee |