CN209503528U - Precision stage and corresponding piezoelectric actuator based on two degrees of freedom piezoelectric actuator - Google Patents
Precision stage and corresponding piezoelectric actuator based on two degrees of freedom piezoelectric actuator Download PDFInfo
- Publication number
- CN209503528U CN209503528U CN201821356441.5U CN201821356441U CN209503528U CN 209503528 U CN209503528 U CN 209503528U CN 201821356441 U CN201821356441 U CN 201821356441U CN 209503528 U CN209503528 U CN 209503528U
- Authority
- CN
- China
- Prior art keywords
- degrees
- oscillator
- piezoelectric actuator
- pressure sensor
- freedom
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
A kind of precision stage based on two degrees of freedom piezoelectric actuator, respectively there are a side plate in the two sides of the application work top, respectively there is a roller sliding rail below the side plate of the work top two sides, roller is placed in the slot of roller sliding rail, roller sliding rail both ends bending part is connected with side plate outer wall, fixes sleeve is fixed on work top bottom, there is pressure sensor in fixes sleeve, tension adjusting screw passes through work top and resists pressure sensor rear end, there is fixing axle at the top of oscillator, fixing axle was mounted in the jack of fixes sleeve bottom by key, there is corresponding driving foot below four bending ends of oscillator, housing screw passes through on the inclined-plane for the bending end that pairs of piezoelectric ceramic piece is fixedly mounted on corresponding oscillator by gland.The application workbench, which is based on two degrees of freedom piezoelectric actuator, single piezoelectric actuator, that is, exportable two degrees of freedom driving force, and mobile station, only needs one, simple and compact for structure, has extraordinary application prospect.
Description
Technical field
The utility model relates to processing work platform fields, more particularly to the accurate work based on two degrees of freedom piezoelectric actuator
Make platform and corresponding piezoelectric actuator.
Background technique
With the raising of productivity, product of today increasingly develops toward miniaturization, intelligent, integrated direction, and this
And a difficult problem to be machined into.And be machined in it is essential be exactly part positioning, due to traditional electricity
Magneto must can be applicable on positioning table plus retarder side, and which greatly limits the reductions of positioning table cost.In recent years,
The characteristics of piezoelectric actuator is applied in terms of precision positioning, is cut off self-lock due to it and the reachable small step of nanoscale
Away from so that piezoelectric actuator can be applied directly on positioning table without retarder.Although piezoelectric actuator step pitch is minimum,
The positioning table of existing piezoelectric actuator ultra-precision driving needs each freedom degree to be all equipped with a piezoelectric actuator and a mobile station, this
Undoubtedly increase the volume weight and cost of positioning table.
Utility model content
To solve the above problems, the utility model provides the fine-limit work based on two degrees of freedom piezoelectric actuator
Platform and corresponding piezoelectric actuator, the workbench are based on two degrees of freedom piezoelectric actuator, can be very good to solve problem above, single
A piezoelectric actuator, that is, exportable two degrees of freedom driving force, and mobile station only needs one, and simple and compact for structure, it is very good to have
Application prospect, for this purpose, the utility model provide precision stage and correspondence based on two degrees of freedom piezoelectric actuator
Piezoelectric actuator, including work top, roller sliding rail fixing screws, roller sliding rail and two degrees of freedom piezoelectric actuator, described two
Freedom degree piezoelectric actuator include oscillator, driving foot, gland, fixes sleeve, piezoelectric ceramic piece, housing screw, fixing axle, key,
Respectively there are a side plate, the work in sleeve fixing screws, pressure sensor and tension adjusting screw, the two sides of the work top
Respectively there is a roller sliding rail below the side plate of table top two sides, roller, the roller sliding rail two are placed in the slot of the roller sliding rail
End bending part is connected by roller sliding rail fixing screws with side plate outer wall, and the fixes sleeve is fixed on by sleeve fixing screws
Work top bottom, there is pressure sensor in the fixes sleeve, and the tension adjusting screw passes through work top and resists pressure
Fixing axle is arranged at sensor rear end, the oscillator top, and the fixing axle is led to key and was mounted in the jack of fixes sleeve bottom, institute
Stating oscillator is cross, and the end of the oscillator is bent, and has corresponding driving foot below four bending ends of the oscillator, described
Housing screw passes through on the inclined-plane for the bending end that pairs of piezoelectric ceramic piece is fixedly mounted on corresponding oscillator by gland.
Further improvement of the utility model, each roller sliding rail have at least 2 row rollers, consider actual motion stability most
The roller of two or more rows is used well.
Further improvement of the utility model, the inclined-plane of the bending end of the oscillator is 45 °, in order to reach best effects most
45 ° of inclined-planes are used well.
Further improvement of the utility model, the pressure sensor use button-shaped pressure sensor, pressure sensor
Mainly use button-shaped pressure sensor.
The two degrees of freedom piezoelectricity that the utility model provides a kind of precision stage based on two degrees of freedom piezoelectric actuator is made
Dynamic device, the two degrees of freedom piezoelectric actuator include oscillator, driving foot, gland, fixes sleeve, piezoelectric ceramic piece, housing screw,
Fixing axle, key, sleeve fixing screws, pressure sensor and tension adjusting screw, the fixes sleeve pass through sleeve fixing screws
It is fixed on work top bottom, there is pressure sensor in the fixes sleeve, the tension adjusting screw is supported across work top
Fixing axle is arranged at firmly pressure sensor rear end, the oscillator top, and the fixing axle leads to key and was mounted on inserting for fixes sleeve bottom
In hole, the oscillator is cross, and the end of the oscillator is bent, and has corresponding driving below four bending ends of the oscillator
Foot, the housing screw pass through on the inclined-plane for the bending end that pairs of piezoelectric ceramic piece is fixedly mounted on corresponding oscillator by gland.
The further improvement of the utility model piezoelectric actuator, the inclined-plane of the bending end of the oscillator is 45 °, in order to reach
Best effects are preferably with 45 ° of inclined-planes.
The further improvement of the utility model piezoelectric actuator, the pressure sensor use button-shaped pressure sensor.
Precision stage and corresponding piezoelectric actuator of the utility model based on two degrees of freedom piezoelectric actuator, use two
Freedom degree piezoelectric actuator after tension adjusting screw regulates pressure when work, leads to high frequency sinusoidal electricity to four pairs of piezoelectric ceramic pieces
Pressure, elastomer is as base stage.The direction x leads to Ux1sin(wt+A to two pairs of piezoelectric ceramic pieces respectively) and Ux1sin(wt+B) voltage, y
Direction leads to Uy1sin(wt+C respectively) and Uy1sin(wt+D) voltage.A phase lead and lag B-phase control the direction x advance and
It retreats, phase-difference control velocity magnitude, speed is maximum when in advance or lagging 90 °, and phase difference is the vibration of 0 space-time, speed 0.Y-direction
Similarly, to realize the movement of workbench, single piezoelectric actuator, that is, exportable two degrees of freedom driving force, and mobile station only needs
It is one, simple and compact for structure.
Detailed description of the invention
Fig. 1 is the utility model overall schematic；
Fig. 2 is the utility model partial structural diagram；
Fig. 3 is the utility model schematic diagram of internal structure；
Fig. 4 is utility model works schematic illustration；
Fig. 5 is the utility model elliptical orbit schematic diagram；
Fig. 6 is the utility model elliptical orbit analogous diagram one；
Fig. 7 is the utility model elliptical orbit analogous diagram two；
Fig. 8 is the utility model elliptical orbit analogous diagram three；
Fig. 9 is the utility model elliptical orbit analogous diagram four；
Figure 10 is the utility model elliptical orbit analogous diagram five；
Figure 11 is the utility model elliptical orbit analogous diagram six；
Figure 12 is the utility model elliptical orbit analogous diagram seven；
Figure 13 is the utility model elliptical orbit analogous diagram eight；
It illustrates:
1, work top 2, roller sliding rail fixing screws 3, roller sliding rail 4, oscillator 5, driving foot 6, gland 7, fixes sleeve
8, piezoelectric ceramic piece 9, housing screw 10, fixing axle 11, key 12, sleeve fixing screws 13, pressure sensor 14, pressure adjusting spiral shell
Nail.
Specific embodiment
The utility model is described in further detail with specific embodiment with reference to the accompanying drawing:
Precision stage and corresponding piezoelectric actuator of the utility model based on two degrees of freedom piezoelectric actuator, the workbench
Based on two degrees of freedom piezoelectric actuator, can be very good to solve problem above, single piezoelectric actuator, that is, exportable two are freely
Driving force is spent, and mobile station only needs one, it is simple and compact for structure, there is extraordinary application prospect.
As a kind of embodiment of utility model works platform, the utility model provides a kind of based on two degrees of freedom piezoelectric actuating
The precision stage of device, including work top 1, roller sliding rail fixing screws 2, roller sliding rail 3 and two degrees of freedom piezoelectric actuator,
The two degrees of freedom piezoelectric actuator includes oscillator 4, drives foot 5, gland 6, fixes sleeve 7, piezoelectric ceramic piece 8, housing screw
9, fixing axle 10, key 11, sleeve fixing screws 12, pressure sensor 13 and tension adjusting screw 14, the two of the work top 1
Respectively there is a side plate in side, respectively has a roller sliding rail 3, the slot of the roller sliding rail 3 below the side plate of 1 two sides of work top
It is inside placed with roller, the 3 both ends bending part of roller sliding rail is connected by roller sliding rail fixing screws 2 with side plate outer wall, described solid
Determine sleeve 7 and be fixed on 1 bottom of work top by sleeve fixing screws 12, there is pressure sensor 13, institute in the fixes sleeve 7
It states tension adjusting screw 14 and resists 13 rear end of pressure sensor across work top 1, there is fixing axle 10, institute at the top of the oscillator 4
It states fixing axle 10 and leads to key 11 and be mounted in the jack of 7 bottom of fixes sleeve, the fixing axle can be in the jack of fixes sleeve
It inside slides axially, but circumferentially fixed, the oscillator 4 is cross, and the end of the oscillator 4 is bent, four bendings of the oscillator 4
There is corresponding driving foot 5 below end, the housing screw 9 passes through gland 6 and is fixedly mounted on pairs of piezoelectric ceramic piece 8 pair
On the inclined-plane for answering the bending end of oscillator 4.
As a kind of specific embodiment of utility model works platform, the utility model provides a kind of base as shown in Figs 1-4
In the precision stage of two degrees of freedom piezoelectric actuator, including work top 1, roller sliding rail fixing screws 2,3 and of roller sliding rail
Two degrees of freedom piezoelectric actuator, the two degrees of freedom piezoelectric actuator include oscillator 4, driving foot 5, gland 6, fixes sleeve 7, pressure
Electroceramics piece 8, housing screw 9, fixing axle 10, key 11, sleeve fixing screws 12, pressure sensor 13 and tension adjusting screw
14, respectively there are a side plate in the two sides of the work top 1, respectively have a roller sliding below the side plate of 1 two sides of work top
Rail 3 is placed with roller in the slot of the roller sliding rail 3, and each roller sliding rail 3 has at least 2 row rollers, considers actual motion stability
The roller of two or more rows is preferred, the 3 both ends bending part of roller sliding rail passes through roller sliding rail fixing screws 2 and side
Plate outer wall is connected, and the fixes sleeve 7 is fixed on 1 bottom of work top by sleeve fixing screws 12, in the fixes sleeve 7
There is pressure sensor 13, the pressure sensor uses button-shaped pressure sensor, and pressure sensor mainly uses button-shaped pressure
Force snesor, the tension adjusting screw 14 pass through work top 1 and resist 13 rear end of pressure sensor, have at the top of the oscillator 4
Fixing axle 10, the fixing axle 10 are led to key 11 and were mounted in the jack of 7 bottom of fixes sleeve, and the fixing axle can be in fixation
It slides axially in the jack of sleeve, but circumferentially fixed, the oscillator 4 is cross, and the end of the oscillator 4 is bent, the oscillator 4
Four bending ends below have corresponding driving foot 5, the housing screw 9 passes through gland 6 and consolidates pairs of piezoelectric ceramic piece 8
Dingan County is mounted on the inclined-plane of the bending end of corresponding oscillator 4, and the inclined-plane of the bending end of the oscillator 4 is 45 °, is preferably imitated to reach
Fruit is preferably with 45 ° of inclined-planes.
As a kind of embodiment of the utility model piezoelectric actuator, the utility model, which provides, is based on two degrees of freedom piezoelectric actuating
The two degrees of freedom piezoelectric actuator of the precision stage of device, the two degrees of freedom piezoelectric actuator include oscillator 4, driving foot 5, pressure
Lid 6, fixes sleeve 7, piezoelectric ceramic piece 8, housing screw 9, fixing axle 10, key 11, sleeve fixing screws 12, pressure sensor 13
With tension adjusting screw 14, the fixes sleeve 7 is fixed on 1 bottom of work top, the fixation by sleeve fixing screws 12
There is pressure sensor 13 in sleeve 7, the pressure sensor uses button-shaped pressure sensor, and the tension adjusting screw 14 is worn
It crosses work top 1 and resists 13 rear end of pressure sensor, there is fixing axle 10 at the top of the oscillator 4, the fixing axle 10 passes through key 11
It was mounted in the jack of 7 bottom of fixes sleeve, the fixing axle can slide axially in the jack of fixes sleeve, but circumferential
Fixed, the oscillator 4 is cross, and the end of the oscillator 4 bends, has below four bending ends of the oscillator 4 corresponding
Driving foot 5, the housing screw 9 passes through the bending end that pairs of piezoelectric ceramic piece 8 is fixedly mounted on corresponding oscillator 4 by gland 6
Inclined-plane on, the inclined-plane of the bending end of the oscillator 4 is 45 °, in order to reach best effects preferably with 45 ° of inclined-planes.
Working principle is as follows: after tension adjusting screw regulates pressure, lead to high frequency sinusoidal voltage to four pairs of piezoelectric ceramic pieces,
Elastomer is as base stage.The direction x leads to Ux1sin(wt+A to two pairs of piezoelectric ceramic pieces respectively) and Ux1sin(wt+B) voltage, the side y
To leading to Uy1sin(wt+C respectively) and Uy1sin(wt+D) voltage.A phase lead and lag B-phase controls the direction x and advances with after
It moves back, phase difference size controls speed, and speed is maximum when in advance or lagging 90 °, and phase difference is the vibration of 0 space-time, speed 0.Y-direction is same
Reason, working trajectory as shown in figure 5, operation simulation figure as shown in figs. 6-13.
The above descriptions are merely preferred embodiments of the present invention, is not to make any other to the utility model
The limitation of form, and according to any modification or equivalent variations made by the technical essence of the utility model, it is practical new to still fall within this
Type range claimed.
Claims (7)
1. a kind of precision stage based on two degrees of freedom piezoelectric actuator, including work top (1), roller sliding rail fixing screws
(2), roller sliding rail (3) and two degrees of freedom piezoelectric actuator, it is characterised in that: the two degrees of freedom piezoelectric actuator includes oscillator
(4), foot (5), gland (6), fixes sleeve (7), piezoelectric ceramic piece (8), housing screw (9), fixing axle (10), key are driven
(11), sleeve fixing screws (12), pressure sensor (13) and tension adjusting screw (14), the two sides of the work top (1)
Respectively there is a side plate, respectively has a roller sliding rail (3), the roller sliding rail (3) below the side plate of work top (1) two sides
Slot in be placed with roller, roller sliding rail (3) the both ends bending part passes through roller sliding rail fixing screws (2) and side plate outer wall phase
Even, the fixes sleeve (7) is fixed on work top (1) bottom by sleeve fixing screws (12), and the fixes sleeve (7) is interior
Have pressure sensor (13), the tension adjusting screw (14) passes through work top (1) and resists pressure sensor (13) rear end, institute
Stating has fixing axle (10) at the top of oscillator (4), and the fixing axle (10) leads to the jack that key (11) were mounted on fixes sleeve (7) bottom
Interior, the oscillator (4) is cross, and the end of the oscillator (4) is bent, and is had below four bending ends of the oscillator (4) pair
The driving foot (5) answered, the housing screw (9) pass through gland (6) and pairs of piezoelectric ceramic piece (8) are fixedly mounted on corresponding vibration
On the inclined-plane of the bending end of sub (4).
2. a kind of precision stage based on two degrees of freedom piezoelectric actuator according to claim 1, it is characterised in that: every
A roller sliding rail (3) has at least 2 row rollers.
3. a kind of precision stage based on two degrees of freedom piezoelectric actuator according to claim 1, it is characterised in that: institute
The inclined-plane for stating the bending end of oscillator (4) is 45 °.
4. a kind of precision stage based on two degrees of freedom piezoelectric actuator according to claim 1, it is characterised in that: institute
It states pressure sensor (13) and uses button-shaped pressure sensor.
5. the two degrees of freedom piezoelectric actuator of the precision stage based on two degrees of freedom piezoelectric actuator, the two degrees of freedom piezoelectricity
Actuator includes oscillator (4), drives foot (5), gland (6), fixes sleeve (7), piezoelectric ceramic piece (8), housing screw (9), consolidates
Dead axle (10), key (11), sleeve fixing screws (12), pressure sensor (13) and tension adjusting screw (14), it is characterised in that:
The fixes sleeve (7) is fixed on work top (1) bottom by sleeve fixing screws (12), has in the fixes sleeve (7)
Pressure sensor (13), the tension adjusting screw (14) passes through work top (1) and resists pressure sensor (13) rear end, described
Have fixing axle (10) at the top of oscillator (4), the fixing axle (10) leads to the jack that key (11) were mounted on fixes sleeve (7) bottom
Interior, the oscillator (4) is cross, and the end of the oscillator (4) is bent, and is had below four bending ends of the oscillator (4) pair
The driving foot (5) answered, the housing screw (9) pass through gland (6) and pairs of piezoelectric ceramic piece (8) are fixedly mounted on corresponding vibration
On the inclined-plane of the bending end of sub (4).
6. the two degrees of freedom piezoelectric actuating of the precision stage according to claim 5 based on two degrees of freedom piezoelectric actuator
Device, it is characterised in that: the inclined-plane of the bending end of the oscillator (4) is 45 °.
7. the two degrees of freedom piezoelectric actuating of the precision stage according to claim 5 based on two degrees of freedom piezoelectric actuator
Device, it is characterised in that: the pressure sensor (13) uses button-shaped pressure sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821356441.5U CN209503528U (en) | 2018-08-22 | 2018-08-22 | Precision stage and corresponding piezoelectric actuator based on two degrees of freedom piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821356441.5U CN209503528U (en) | 2018-08-22 | 2018-08-22 | Precision stage and corresponding piezoelectric actuator based on two degrees of freedom piezoelectric actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209503528U true CN209503528U (en) | 2019-10-18 |
Family
ID=68187223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821356441.5U Active CN209503528U (en) | 2018-08-22 | 2018-08-22 | Precision stage and corresponding piezoelectric actuator based on two degrees of freedom piezoelectric actuator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209503528U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108705329A (en) * | 2018-08-22 | 2018-10-26 | 金陵科技学院 | Precision stage based on two degrees of freedom piezoelectric actuator and corresponding piezoelectric actuator |
-
2018
- 2018-08-22 CN CN201821356441.5U patent/CN209503528U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108705329A (en) * | 2018-08-22 | 2018-10-26 | 金陵科技学院 | Precision stage based on two degrees of freedom piezoelectric actuator and corresponding piezoelectric actuator |
| CN108705329B (en) * | 2018-08-22 | 2023-08-22 | 金陵科技学院 | Precision workbench based on two-degree-of-freedom piezoelectric actuator and corresponding piezoelectric actuator |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105723608B (en) | Piezoelectric ceramics planar motor and its driving method | |
| CN108233764B (en) | Piezoelectric driving type precise rotation driving device adopting special-shaped hinge transmission mechanism | |
| WO2016197554A1 (en) | Dynamic characteristic adjustable macro-micro integrated composite platform | |
| CN107947629B (en) | Double piezoelectric stack driving type precise rotation driving device | |
| CN104440345B (en) | Grand micro- integration high speed precise motion two-dimensional stage being driven the common stator of isomery motor more | |
| CN108092545A (en) | Multiple degrees of freedom piezoelectricity stick-slip micro-nano locating platform and its driving method | |
| CN104440344A (en) | Co-stator multi-drive macro and micro integration high-speed precision movement two-dimensional platform for linear motor | |
| CN111181436B (en) | Secondary excitation friction piezoelectric rotary driver | |
| CN104467526B (en) | Inertia stick-slip cross-scale motion platform capable of achieving unidirectional movement | |
| CN1018116B (en) | Converting mechanism of micro-amplitude motion | |
| CN102723893A (en) | Micro-nano simulation rotating drive device | |
| CN209503528U (en) | Precision stage and corresponding piezoelectric actuator based on two degrees of freedom piezoelectric actuator | |
| CN108023500B (en) | Piezoelectric precise linear driving device capable of outputting forward and reverse bidirectional motion | |
| CN204262872U (en) | Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether | |
| CN105897042A (en) | Asymmetrical diamond-shaped hinge quadratured driving type piezoelectric stick-slip linear motor and recombination excitation method thereof | |
| CN103618473B (en) | A kind of prefastening stick-slip up and down drives across yardstick precision movement platform | |
| CN204248537U (en) | Isomery motor is the grand micro-integration high speed precise motion two-dimensional stage of the many drivings of stator altogether | |
| CN105827144A (en) | Oblique-trapezoid orthogonal driving type piezoelectric stick-slip linear motor and compound excitation method thereof | |
| CN102355159B (en) | Resonance-type linear ultrasonic motor and control method | |
| CN104320015A (en) | Bionic multi-degree of freedom precise piezoelectric driving device | |
| CN1446394A (en) | Walking actuator | |
| CN108705329A (en) | Precision stage based on two degrees of freedom piezoelectric actuator and corresponding piezoelectric actuator | |
| CN207677650U (en) | Double driving precision rotation driving devices of piezoelectric stack | |
| CN205754055U (en) | There is the piezoelectricity stick-slip linear drive apparatus of rhombus hinge piece-picking type converter | |
| CN203645575U (en) | Cantilever beam piezoelectric motor having energy acquisition function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |