CN209493323U - Cell quartz conduit and quartz conduit group - Google Patents
Cell quartz conduit and quartz conduit group Download PDFInfo
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- CN209493323U CN209493323U CN201822149988.4U CN201822149988U CN209493323U CN 209493323 U CN209493323 U CN 209493323U CN 201822149988 U CN201822149988 U CN 201822149988U CN 209493323 U CN209493323 U CN 209493323U
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- Prior art keywords
- pipeline section
- air guide
- quartz conduit
- hole
- guide pipeline
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Abstract
The utility model belongs to quartz conduit technical field, is related to a kind of cell quartz conduit and quartz conduit group.The cell quartz conduit includes air guide pipeline section and the connection pipeline section that is connected to air guide pipeline section one end and is connected to the air guide pipeline section, multiple through-holes are provided on the side wall of the air guide pipeline section, the direction that the inner opening of multiple through-holes communicates the external opening of multiple through-holes with the inner hole of the air guide pipeline section is consistent；The connection pipeline section with the air guide pipeline section of the other cell quartz conduit for connecting.The adjustable gas for being passed through reaction chamber of the cell quartz conduit reaches the angle of bottom silicon chip surface, also the flow velocity of gas can be lowered into a certain degree, to reduce the generation of flow-disturbing in reaction chamber.
Description
Technical field
The utility model belongs to quartz conduit technical field, more particularly to a kind of cell quartz conduit and quartz conduit
Group.
Background technique
The process gas that polysilicon original position doping techniques use in semicon industry at present is SiH4 and 1%PH3/He, institute
The use of type is mostly vertical furnace tube, film thickness uniformity between adjusting silicon wafer is cooperated with cassette rotation, 5 sections of warm areas and single hole quartz conduit
With doping concentration consistency, there are three the settings of single hole quartz conduit, and bottom single hole quartz conduit is that main 1%PH3/He is passed through
Conduit, the quartz conduit at upper both ends is supplemented for 1%PH3/He gas in remaining, guarantees reaction chamber inlet end and pumping end gas
Bulk concentration distribution equilibrium.
But there are certain defects for above-mentioned single hole quartz conduit structure, that is, 1%PH3/He gas concentration is led from single hole quartz
It is successively reduced upwards at ejection at pipe nozzle, gas Quick uniform can not be made to be distributed, in addition, the pipe of three single hole quartz conduits
Occurs concentration acute variation situation near mouthful, specially concentration is high above the pore of single hole quartz conduit, the pore top position
Deposition seriously inhibited, impurity incorporation is enhanced, and the pore of single hole quartz conduit below concentration it is low, orientation under the pore
The deposition set is enhanced, and impurity incorporation is lowered, so that consistency of thickness between hole quartz conduit hardware configuration limitation silicon wafer
And doping consistency, it is unable to get progressive promotion.
Utility model content
The technical problem to be solved by the utility model is to for thickness one between existing single hole quartz conduit limitation silicon wafer
Cause property and the technical issues of doping consistency provides a kind of cell quartz conduit and quartz conduit group.
In order to solve the above technical problems, on the one hand, the utility model embodiment provides a kind of cell quartz conduit, including
Air guide pipeline section and the connection pipeline section for being connected to air guide pipeline section one end and being connected to the air guide pipeline section, the air guide pipeline section
Side wall on be provided with multiple through-holes, the inner opening of multiple through-holes is communicated with the inner hole of the air guide pipeline section, Duo Gesuo
The direction for stating the external opening of through-hole is consistent；
The connection pipeline section with the air guide pipeline section of the other cell quartz conduit for connecting.
According to the cell quartz conduit of the utility model embodiment, the adjustable gas for being passed through reaction chamber reaches bottom silicon wafer
The angle on surface, to reduce the generation of flow-disturbing in reaction chamber.In addition, porous structure makes the gas entered within the unit time
Body is not concentrated in single area, and is lowered into the flow velocity of gas to a certain degree, to reduce flow-disturbing in reaction chamber
It generates.
Optionally, the shape of multiple through-holes is identical, and the geometric center of multiple through-holes is located at and the gas-guide tube
On the parallel straight line of the axis of section.
Optionally, the distance between two adjacent described through-holes are equal.
Optionally, the through-hole is provided with 8~11, and the distance between two adjacent described through-holes are 40-51mm.
Optionally, the through-hole is provided with 9~11, and the distance between two adjacent described through-holes are 40-51mm.
Optionally, the through-hole is provided with 13~20, and the distance between two adjacent described through-holes are 15-20mm.
Optionally, the length D in the aperture section on the air guide pipeline section1=(N-1) × d1,
Wherein, N is the number of the through-hole, d1For adjacent the distance between two through-holes.
Optionally, the air guide pipeline section with connect that pipeline section is vertical, the axis of the axis of the through-hole and the connection pipeline section
Between angle be 45 °.
Optionally, the diameter of the through-hole is 0.45~0.55mm；
The internal diameter of the air guide pipeline section is 3.8~4.2mm, and the outer diameter of the air guide pipeline section is 7.8~8.2mm；
The outer diameter of the connection pipeline section is 9.32~9.72mm.
On the other hand, the utility model embodiment provides a kind of quartz conduit group comprising at least two is above-mentioned more
Hole quartz conduit, in the cell quartz conduit of adjacent two, the air guide pipeline section of one of them cell quartz conduit is inserted
It connects in the inner hole of the connection pipeline section of another cell quartz conduit, and the inner hole phase of two cell quartz conduits
It is logical.
Detailed description of the invention
Fig. 1 is the schematic diagram for the cell quartz conduit that an embodiment of the present invention provides；
Fig. 2 is the sectional view in Fig. 1 at A-A；
Fig. 3 is the enlarged drawing in Fig. 2 at A；
Fig. 4 is the incorporation impurity content experimental data figure of existing single hole quartz conduit structure；
Fig. 5 is the incorporation impurity content experimental data signal for the cell quartz conduit that an embodiment of the present invention provides
Figure；
Fig. 6 is the heights Experiment datagram of existing single hole quartz conduit structure；
Fig. 7 is the heights Experiment schematic diagram data for the cell quartz conduit that an embodiment of the present invention provides.
Appended drawing reference in specification is as follows:
1, air guide pipeline section；11, through-hole；12, the inner hole of air guide pipeline section；2, pipeline section is connected.
Specific embodiment
The technical issues of in order to keep the utility model solved, technical solution and beneficial effect are more clearly understood, below
In conjunction with accompanying drawings and embodiments, the utility model is described in further detail.It should be appreciated that specific reality described herein
It applies example to be only used to explain the utility model, is not used to limit the utility model.
As shown in Figure 1 to Figure 3, cell quartz conduit provided by the embodiment of the utility model, including air guide pipeline section 1 and company
It connects and is set on described 1 one end of air guide pipeline section and the connection pipeline section 2 that is connected to the air guide pipeline section 1, the side wall of the air guide pipeline section 1
Multiple through-holes 11 are equipped with, the inner opening of multiple through-holes 11 is communicated with the inner hole 12 of the air guide pipeline section 1, multiple described logical
The direction of the external opening in hole 11 is consistent.The connection pipeline section 2 is for the air guide pipeline section 1 with the other cell quartz conduit
Connection.
Cell quartz conduit provided by the embodiment of the utility model, the adjustable gas for being passed through reaction chamber reach bottom silicon wafer
The angle on surface, to reduce the generation of flow-disturbing in reaction chamber.In addition, porous structure makes the gas entered within the unit time
Body is not concentrated in single area, and is lowered into the flow velocity of gas to a certain degree, to reduce flow-disturbing in reaction chamber
It generates.
In one embodiment, the shape of multiple through-holes 11 is identical, the geometric centers of multiple through-holes 11 be located at
On the parallel straight line of the axis of the air guide pipeline section 1, to guarantee the whole uniformity in silicon wafer.
In one embodiment, as shown in Figure 1, the distance between two adjacent described through-holes 11 are equal, to guarantee silicon wafer
Interior whole uniformity.
In one embodiment, as shown in Figure 1, the through-hole 11 is provided with 8~11, the through-hole 11 of adjacent two it
Between distance d1For 40-51mm.
The distance between above-mentioned 11 numbers of through-hole and adjacent two through-holes 11 d1Suitable for sedimentary condition are as follows: chamber
Room deposition pressure is 400mtorr；Reactive gas species and flow are that 1%PH3/He is 50SCCM, SiH4 500SCCM；Reaction
Temperature is 570 DEG C of condition.
Verified repeatedly by experiment, obtain the above-mentioned through-hole 11 of cell quartz conduit number and it is adjacent two it is described logical
The distance between hole 11 d1, allow gas gently to uniformly enter reaction chamber, so that the reaction gas shortest time is maximum
It is uniformly distributed in degree.
In actual application, the described logical of cell quartz conduit can also be adjusted according to specific board, reaction condition
The distance between the number in hole and two adjacent through-holes.Such as, the through-hole is provided with 9~11, adjacent two
The distance between described through-hole is 40-51mm.Alternatively, the through-hole is provided with 13~20, two adjacent through-holes it
Between distance be 15-20mm.
In actual application, the aperture that cell quartz conduit can be adjusted according to specific board, reaction condition is big
Small, density, angle, aperture interval range.
In one embodiment, as shown in Figure 1, the length D in the aperture section on the air guide pipeline section 11=(N-1) × d1,
In, N is the number of the through-hole 11, d1For adjacent the distance between two through-holes 11.
The length of the length D2 of the air guide pipeline section 1 should be greater than the length D in the aperture section on the air guide pipeline section 11, with
Guarantee the normal use of the cell quartz conduit.
Preferably, the aperture section will be covered with entire flat-temperature zone.
In actual application, the aperture of cell quartz conduit can also be adjusted according to specific board and reaction condition
Section.
In one embodiment, the air guide pipeline section 1 is far from the side end face for connecting pipeline section 2 and apart from the connecting tube
The distance between 2 farthest through-holes 11 of section are 10mm.The length be used to guarantee to work as the air guide pipeline section 1 be plugged on it is other described
It, can be more stable when in the connection pipeline section 2 of cell quartz conduit.
In one embodiment, as shown in Figure 1, the air guide pipeline section 1 with connect that pipeline section 2 is vertical, the axis of the through-hole 11
Angle α between the axis of the connection pipeline section 2 is 45 °.
The angle α can directly affect the whole uniformity in silicon wafer, and uniformity is presented single in the angle α and silicon wafer
One linear relationship.
In actual application, the described logical of cell quartz conduit can be adjusted according to specific board and reaction condition
Angle between the axis in hole and the axis of the connection pipeline section.
In one embodiment, as shown in Figures 2 and 3, the diameter d of the through-hole 115For 0.45~0.55mm.The air guide
The internal diameter d of pipeline section 14For 3.8~4.2mm, the outside diameter d of the air guide pipeline section 13For 7.8~8.2mm.Outside the connection pipeline section 2
Diameter d6For 9.32~9.72mm.
The diameter d of the through-hole 115Size tries not to adjust, because of the diameter d of the through-hole 115It is too small to make
With resulting in blockage in the process, and the diameter d of the through-hole 115It is excessive then constantly to add up with thicknesses of layers in use
So that cell quartz conduit bears insufficient excessive stress and is broken, if having to increase the diameter d of the through-hole 115Then may be used
To cooperate the inner wall thickness ((d for increasing cell quartz air induction conduit3-d4)/2) Lai Tigao stress tolerance.
In actual application, the through-hole of cell quartz conduit can be adjusted according to specific board, reaction condition
Diameter.
For the effect for verifying cell quartz guide-tube structure provided by the embodiment of the utility model, to deposit the doping of 7000A
For polysilicon, SIH4/PH3 concentration ratio is 50/4/1/1 in reaction chamber, and depositing temperature is 560 DEG C -570 DEG C, deposition pressure
For 350mtorr, by three quartz conduits, (three existing single hole quartz conduits or three the utility model embodiments mention PH3
The cell quartz conduit of confession) enter reaction chamber.
Fig. 4 show the incorporation impurity content experimental data of existing single hole quartz conduit structure, and Fig. 5 show practical
The incorporation impurity content experimental data for the cell quartz guide-tube structure that new embodiment provides；Fig. 6 show existing single hole quartz
The heights Experiment data of guide-tube structure, Fig. 7 show the thickness of cell quartz guide-tube structure provided by the embodiment of the utility model
Experimental data.
If experimental data is shown, after cell quartz conduit provided by the embodiment of the utility model, monitoring piece thickness one
Cause property is promoted to 0.25% or so from 1.9 or so, and impurity content consistency is lifted at 0.25% left side from 2.2% or so
The right side, it is significant for promoting effect.
Quartz conduit group provided by the embodiment of the utility model, including at least two above-mentioned cell quartz conduits, if phase
Two adjacent cell quartz conduits are respectively cell quartz conduit a and cell quartz conduit b, then adjacent two it is described more
In the quartz conduit of hole, the air guide pipeline section a1 of one of them cell quartz conduit a is plugged on another described cell quartz
In the inner hole of the connection pipeline section b2 of conduit b, and inner hole (the inner hole a1 of cell quartz conduit a of two cell quartz conduits
It is communicated with the inner hole b1 of cell quartz conduit b), so that gas can be flow to cell quartz conduit b by cell quartz conduit a.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (10)
1. a kind of cell quartz conduit, which is characterized in that including air guide pipeline section and be connected to air guide pipeline section one end and with
The connection pipeline section of air guide pipeline section connection is provided with multiple through-holes on the side wall of the air guide pipeline section, multiple through-holes
Inner opening is communicated with the inner hole of the air guide pipeline section, and the direction of the external opening of multiple through-holes is consistent；
The connection pipeline section with the air guide pipeline section of the other cell quartz conduit for connecting.
2. cell quartz conduit according to claim 1, which is characterized in that the shape of multiple through-holes is identical, multiple
The geometric center of the through-hole is located on a straight line parallel with the axis of the air guide pipeline section.
3. cell quartz conduit according to claim 1, which is characterized in that the distance between two adjacent described through-holes
It is equal.
4. cell quartz conduit according to claim 3, which is characterized in that the through-hole is provided with 8~11, adjacent
The distance between two described through-holes are 40-51mm.
5. cell quartz conduit according to claim 3, which is characterized in that the through-hole is provided with 9~11, adjacent
The distance between two described through-holes are 40-51mm.
6. cell quartz conduit according to claim 3, which is characterized in that the through-hole is provided with 13~20, adjacent
The distance between two through-holes be 15-20mm.
7. according to cell quartz conduit described in claim 4-6 any one, which is characterized in that opening on the air guide pipeline section
The length D in hole section1=(N-1) × d1,
Wherein, N is the number of the through-hole, d1For adjacent the distance between two through-holes.
8. cell quartz conduit according to claim 1, which is characterized in that the air guide pipeline section with to connect pipeline section vertical,
Angle between the axis of the through-hole and the axis of the connection pipeline section is 45 °.
9. cell quartz conduit according to claim 1, which is characterized in that the diameter of the through-hole be 0.45~
0.55mm；
The internal diameter of the air guide pipeline section is 3.8~4.2mm, and the outer diameter of the air guide pipeline section is 7.8~8.2mm；
The outer diameter of the connection pipeline section is 9.32~9.72mm.
10. a kind of quartz conduit group, which is characterized in that as described in any one of claims 1-9 porous including at least two
Quartz conduit, in the cell quartz conduit of adjacent two, the air guide pipeline section grafting of one of them cell quartz conduit
In the inner hole of the connection pipeline section of another cell quartz conduit, and the inner hole phase of two cell quartz conduits
It is logical.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822149988.4U CN209493323U (en) | 2018-12-20 | 2018-12-20 | Cell quartz conduit and quartz conduit group |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822149988.4U CN209493323U (en) | 2018-12-20 | 2018-12-20 | Cell quartz conduit and quartz conduit group |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209493323U true CN209493323U (en) | 2019-10-15 |
Family
ID=68153386
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822149988.4U Active CN209493323U (en) | 2018-12-20 | 2018-12-20 | Cell quartz conduit and quartz conduit group |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209493323U (en) |
-
2018
- 2018-12-20 CN CN201822149988.4U patent/CN209493323U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210220 Address after: 518119 No.1 Yan'an Road, Kuiyong street, Dapeng New District, Shenzhen City, Guangdong Province Patentee after: BYD Semiconductor Co.,Ltd. Patentee after: NINGBO BYD SEMICONDUCTOR Co.,Ltd. Address before: 315800 No. 155 West Mount Lu Road, Ningbo Free Trade Zone, Zhejiang Patentee before: NINGBO BYD SEMICONDUCTOR Co.,Ltd. |